PufOnlyPlaceToLoaderRoutine.cs 11 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using MECF.Framework.Common.Equipment;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Utilities;
  7. using CyberX8_Core;
  8. using CyberX8_RT.Devices.AXIS;
  9. using CyberX8_RT.Devices.Loader;
  10. using CyberX8_RT.Devices.PUF;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.Linq;
  14. using System.Text;
  15. using System.Threading.Tasks;
  16. using Aitex.Core.Common;
  17. using Aitex.Core.RT.SCCore;
  18. using Aitex.Core.Util;
  19. using CyberX8_RT.Modules.Loader;
  20. namespace CyberX8_RT.Modules.PUF
  21. {
  22. public class PufOnlyPlaceToLoaderRoutine : RoutineBase, IRoutine
  23. {
  24. private enum PlaceStep
  25. {
  26. LipSealGotoUnlock,
  27. LipSealGotoUnlockWait,
  28. VacuumLevelCheck,
  29. SideConditionRoutine,
  30. SideConditionRoutineWait,
  31. RotationGotoLoaderPlaceDown,
  32. RotationGotoLoaderPlaceDownWait,
  33. FirstPlaceVacuumCheck,
  34. FirstPlaceVacuumCheckWait,
  35. SecondPlaceVacuumCheck,
  36. SecondPlaceVacuumCheckWait,
  37. VacuumOff,
  38. End
  39. }
  40. #region 常量
  41. private const string SideA = "SideA";
  42. private const string SideB = "SideB";
  43. private const string WAFER_ABSENT = "WaferAbsent";
  44. #endregion
  45. #region 内部变量
  46. private bool _isSecondPlaceVacuumCheck = false;
  47. private string _pufSide;
  48. private string _loaderSide;
  49. private JetAxisBase _flipAxis;
  50. private JetAxisBase _rotationAxis;
  51. private PufVacuum _vacuum;
  52. private JetAxisBase _loaderCrsAxis;
  53. private PufWaferPickSubRoutine _pufWaferPickSubRoutine;
  54. private PufPlaceVacuumCheckRoutine _pufPlaceVacuumCheckRoutine;
  55. private int _waferSize = 200;
  56. #endregion
  57. /// <summary>
  58. /// 构造函数
  59. /// </summary>
  60. /// <param name="module"></param>
  61. public PufOnlyPlaceToLoaderRoutine(string module) : base(module)
  62. {
  63. _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(module);
  64. }
  65. /// <summary>
  66. /// 中止
  67. /// </summary>
  68. public void Abort()
  69. {
  70. if (_pufWaferPickSubRoutine != null)
  71. {
  72. _pufWaferPickSubRoutine.Abort();
  73. }
  74. _flipAxis.StopPositionOperation();
  75. _rotationAxis.StopPositionOperation();
  76. Runner.Stop("Manual Abort");
  77. }
  78. /// <summary>
  79. /// 监控
  80. /// </summary>
  81. /// <returns></returns>
  82. public RState Monitor()
  83. {
  84. Runner.Run(PlaceStep.LipSealGotoUnlock, LipSealGotoUnlock, _delay_1ms)
  85. .WaitWithStopCondition(PlaceStep.LipSealGotoUnlockWait, CheckLipSealEndStatus, CheckLipSealStopStatus)
  86. .Run(PlaceStep.VacuumLevelCheck, CheckWaferPresent, _delay_1ms)
  87. .RunConditionSubRoutine(PlaceStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _pufSide })
  88. .WaitConditionSubRoutine(PlaceStep.SideConditionRoutineWait)
  89. .Run(PlaceStep.RotationGotoLoaderPlaceDown, () => _rotationAxis.PositionStation("LoaderPutDown"), _delay_1ms)
  90. .WaitWithStopCondition(PlaceStep.RotationGotoLoaderPlaceDownWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
  91. .Run(PlaceStep.FirstPlaceVacuumCheck, () => StartPlaceVacuumCheckRoutine(false, 1), _delay_1ms)
  92. .WaitWithStopCondition(PlaceStep.FirstPlaceVacuumCheckWait, CheckFirstPlaceVacuumCheckRoutineStatus, () => { return false; })
  93. .Run(PlaceStep.SecondPlaceVacuumCheck, StartSecondPlaceVacuumCheckRoutine, _delay_1ms)
  94. .WaitWithStopCondition(PlaceStep.SecondPlaceVacuumCheckWait, CheckPlaceVacuumCheckRoutineEndStatus, CheckSecondPlaceVacuumCheckRoutineStopStatus)
  95. .Run(PlaceStep.VacuumOff, VacuumOff, _delay_1ms)
  96. .End(PlaceStep.End, NullFun, _delay_1ms);
  97. return Runner.Status;
  98. }
  99. /// <summary>
  100. /// LipSeal Goto Unlock
  101. /// </summary>
  102. /// <returns></returns>
  103. private bool LipSealGotoUnlock()
  104. {
  105. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  106. {
  107. return _loaderCrsAxis.PositionStation($"Unlock{_waferSize}");
  108. }
  109. else
  110. {
  111. return true;
  112. }
  113. }
  114. /// <summary>
  115. /// 检验Lip Seal完成状态
  116. /// </summary>
  117. /// <returns></returns>
  118. private bool CheckLipSealEndStatus()
  119. {
  120. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  121. {
  122. return _loaderCrsAxis.Status == RState.End;
  123. }
  124. else
  125. {
  126. return true;
  127. }
  128. }
  129. /// <summary>
  130. /// 检验Lip Seal完成状态
  131. /// </summary>
  132. /// <returns></returns>
  133. private bool CheckLipSealStopStatus()
  134. {
  135. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  136. {
  137. bool result= _loaderCrsAxis.Status == RState.Failed;
  138. if (result)
  139. {
  140. NotifyError(eEvent.ERR_PUF, $"lipsel axis goto unlock failed", 0);
  141. }
  142. return result;
  143. }
  144. else
  145. {
  146. return true;
  147. }
  148. }
  149. /// <summary>
  150. /// 检验是否存在Wafer
  151. /// </summary>
  152. /// <returns></returns>
  153. private bool CheckWaferPresent()
  154. {
  155. if (_pufSide == SideA)
  156. {
  157. if (!_vacuum.ChuckAWaferPresent)
  158. {
  159. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_pufSide} has no Wafer");
  160. return false;
  161. }
  162. }
  163. else
  164. {
  165. if (!_vacuum.ChuckBWaferPresent)
  166. {
  167. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_pufSide} has no Wafer");
  168. return false;
  169. }
  170. }
  171. return true;
  172. }
  173. /// <summary>
  174. /// Side条件获取SubRoutine索引
  175. /// </summary>
  176. /// <returns></returns>
  177. private int SideConditionIndex()
  178. {
  179. if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _pufSide))
  180. {
  181. return 1;
  182. }
  183. else
  184. {
  185. return 0;
  186. }
  187. }
  188. /// <summary>
  189. /// 检验Rotation移动状态
  190. /// </summary>
  191. /// <returns></returns>
  192. private bool CheckRotationPositionStatus()
  193. {
  194. return _rotationAxis.Status == RState.End;
  195. }
  196. /// <summary>
  197. /// 检验Rotation是否还在运动
  198. /// </summary>
  199. /// <returns></returns>
  200. private bool CheckRotationPositionRunStop()
  201. {
  202. return _rotationAxis.Status == RState.Failed;
  203. }
  204. /// <summary>
  205. /// 启动Place Vacuum Check routine
  206. /// </summary>
  207. /// <returns></returns>
  208. private bool StartPlaceVacuumCheckRoutine(bool showError, int times)
  209. {
  210. return _pufPlaceVacuumCheckRoutine.Start(_pufSide, showError, times) == RState.Running;
  211. }
  212. /// <summary>
  213. /// 检验第一次Place Vacuum Check routine运行情况
  214. /// </summary>
  215. /// <returns></returns>
  216. private bool CheckFirstPlaceVacuumCheckRoutineStatus()
  217. {
  218. RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
  219. if (rsState == RState.End)
  220. {
  221. return true;
  222. }
  223. if (rsState == RState.Failed || rsState == RState.Timeout)
  224. {
  225. _isSecondPlaceVacuumCheck = true;
  226. return true;
  227. }
  228. return false;
  229. }
  230. /// <summary>
  231. /// 启动Place Vacuum Check routine完成状态
  232. /// </summary>
  233. /// <returns></returns>
  234. private bool CheckPlaceVacuumCheckRoutineEndStatus()
  235. {
  236. RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
  237. return rsState == RState.End;
  238. }
  239. /// <summary>
  240. /// 启动第二次Place Vacuum Check routine
  241. /// </summary>
  242. /// <returns></returns>
  243. private bool StartSecondPlaceVacuumCheckRoutine()
  244. {
  245. if (_isSecondPlaceVacuumCheck)
  246. {
  247. return StartPlaceVacuumCheckRoutine(true, 2);
  248. }
  249. else
  250. {
  251. return true;
  252. }
  253. }
  254. /// <summary>
  255. /// 检验第二次Place Vacuum Check routine错误状态
  256. /// </summary>
  257. /// <returns></returns>
  258. private bool CheckSecondPlaceVacuumCheckRoutineStopStatus()
  259. {
  260. RState rState = _pufPlaceVacuumCheckRoutine.Monitor();
  261. if (rState == RState.Failed || rState == RState.Timeout)
  262. {
  263. return true;
  264. }
  265. return false;
  266. }
  267. /// <summary>
  268. /// 关闭Vacuum
  269. /// </summary>
  270. /// <returns></returns>
  271. private bool VacuumOff()
  272. {
  273. if (_pufSide == "SideA")
  274. {
  275. return _vacuum.VacuumAOff();
  276. }
  277. else if (_pufSide == "SideB")
  278. {
  279. return _vacuum.VacuumBOff();
  280. }
  281. return false;
  282. }
  283. /// <summary>
  284. /// 启动
  285. /// </summary>
  286. /// <param name="objs"></param>
  287. /// <returns></returns>
  288. public RState Start(params object[] objs)
  289. {
  290. _pufSide = objs[0].ToString();
  291. _loaderSide = objs[1].ToString();
  292. _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
  293. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  294. _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  295. GetCrsAxis();
  296. _isSecondPlaceVacuumCheck = false;
  297. _pufPlaceVacuumCheckRoutine = new PufPlaceVacuumCheckRoutine(Module);
  298. LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
  299. if (_loaderSide == SideA)
  300. {
  301. _waferSize = loaderEntity.SideAWaferSize;
  302. }
  303. else
  304. {
  305. _waferSize = loaderEntity.SideBWaferSize;
  306. }
  307. return Runner.Start(Module, "Start Place To Loader");
  308. }
  309. /// <summary>
  310. /// 获取lipseal Axis
  311. /// </summary>
  312. private void GetCrsAxis()
  313. {
  314. if (_loaderSide==SideA)
  315. {
  316. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");
  317. }
  318. else
  319. {
  320. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");
  321. }
  322. }
  323. }
  324. }