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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Metal;
- using CyberX8_RT.Devices.Reservoir;
- using MECF.Framework.Common.Persistent.Reservoirs;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.ToolLayout;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.Metal
- {
- public class StandardHotInitializeRoutine : RoutineBase, IRoutine
- {
- private enum InitializeStep
- {
- CheckPowerSupplierConnected,
- LinmotReset,
- LinmotResetWait,
- WHUnclampOn,
- FlowValveOn,
- Delay,
- ManualFlowCheck,
- AutoFlowCheck,
- End
- }
- #region 内部变量
- /// <summary>
- /// 持久化对象
- /// </summary>
- private MetalPersistentValue _persistentValue;
- /// <summary>
- /// 设备对象
- /// </summary>
- private StandardHotMetalDevice _metalDevice;
- /// <summary>
- /// Reservoir Recipe
- /// </summary>
- private ResRecipe _resRecipe;
- /// <summary>
- /// Cell Flow Delay Time
- /// </summary>
- private int _cellFlowFaultHoldOffTime = 5000;
- /// <summary>
- /// Cell Flow Start Low Limit
- /// </summary>
- private double _cellFlowStartLowLimit = 3.0;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public StandardHotInitializeRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(InitializeStep.CheckPowerSupplierConnected, CheckPowerSupplierStatus, _delay_1ms)
- .Run(InitializeStep.LinmotReset,_metalDevice.ResetLinmot,_delay_1ms)
- .WaitWithStopCondition(InitializeStep.LinmotResetWait, _metalDevice.CheckLinmotRoutineEnd, _metalDevice.CheckLinmotRoutineError)
- .Run(InitializeStep.WHUnclampOn,WaferHolderUnclampOn,_delay_1ms)
- .Run(InitializeStep.FlowValveOn,()=>_metalDevice.SwitchToFlow("",null),_delay_1ms)
- .Delay(InitializeStep.Delay,_cellFlowFaultHoldOffTime)
- .RunIf(InitializeStep.ManualFlowCheck,_metalDevice.IsManual,ManualFlowCheck,_delay_1ms)
- .RunIf(InitializeStep.AutoFlowCheck,_metalDevice.IsAuto,AutoFlowCheck,_delay_1ms)
- .End(InitializeStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// 检验Metal A/B 面PowerSupplier通讯状况
- /// </summary>
- /// <returns></returns>
- private bool CheckPowerSupplierStatus()
- {
- if(!_metalDevice.SideAPowerSupplier.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "side A power is not connected");
- return false;
- }
- if(!_metalDevice.SideBPowerSupplier.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "side B power is not connected");
- return false;
- }
- return true;
- }
- /// <summary>
- /// WaferHolder Unclamp on
- /// </summary>
- /// <returns></returns>
- private bool WaferHolderUnclampOn()
- {
- return _metalDevice.WaferHolderClampOff("", null);
- }
- /// <summary>
- /// 手动检验Flow
- /// </summary>
- /// <returns></returns>
- private bool ManualFlowCheck()
- {
- if(_metalDevice.MetalDeviceData.CellFlow<_cellFlowStartLowLimit)
- {
- LOG.WriteLog(eEvent.ERR_METAL,Module,$"Flow {_metalDevice.MetalDeviceData.CellFlow} is less than {_cellFlowStartLowLimit}");
- _metalDevice.SwitchToBypass("", null);
- _metalDevice.PumpOff();
- return false;
- }
- return true;
- }
- /// <summary>
- /// 自动检验Flow
- /// </summary>
- /// <returns></returns>
- private bool AutoFlowCheck()
- {
- if (_metalDevice.MetalDeviceData.CellFlow < _resRecipe.CAFlowRateErrorLow)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, $"Flow {_metalDevice.MetalDeviceData.CellFlow} is less than {_resRecipe.CAFlowRateErrorLow}");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _persistentValue= (MetalPersistentValue)objs[0];
- _metalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module);
- _cellFlowFaultHoldOffTime = SC.GetValue<int>("Metal.CellFlowFaultHoldOffTime");
- _cellFlowStartLowLimit = SC.GetValue<double>("Metal.CellFlowStartLowLimit");
- string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- StandardHotReservoirDevice reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoir);
- if(reservoirDevice==null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, $"{reservoir} device is null");
- return RState.Failed;
- }
- if(reservoirDevice.Recipe==null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, $"{reservoir} current recipe is null");
- return RState.Failed;
- }
- _resRecipe = reservoirDevice.Recipe;
- return Runner.Start(Module, "Start S&H Initialize");
- }
- }
- }
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