MetalEntity.cs 39 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using CyberX8_Core;
  9. using System;
  10. using MECF.Framework.Common.ToolLayout;
  11. using MECF.Framework.Common.Persistent.Reservoirs;
  12. using CyberX8_RT.Modules.Reservoir;
  13. using Aitex.Core.RT.OperationCenter;
  14. using MECF.Framework.Common.RecipeCenter;
  15. using Aitex.Core.RT.RecipeCenter;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using CyberX8_RT.Devices.Metal;
  18. using Aitex.Core.RT.Device;
  19. using CyberX8_RT.Devices.Reservoir;
  20. using MECF.Framework.Common.Routine;
  21. using MECF.Framework.Common.ProcessCell;
  22. using Aitex.Core.RT.SCCore;
  23. namespace CyberX8_RT.Modules.Metal
  24. {
  25. public class MetalEntity : Entity, IEntity, IModuleEntity
  26. {
  27. #region 常量
  28. private const string STRATUS = "Stratus";
  29. private const string AUTO = "Auto";
  30. private const string MANUAL = "Manual";
  31. private const string DISABLED= "Disabled";
  32. private const string ENGINEERING = "Engineering";
  33. private const string PRODUCTION = "Production";
  34. #endregion
  35. #region 内部变量
  36. /// <summary>
  37. /// 已经完成的Cycle次数
  38. /// </summary>
  39. private int _achievedCycle = 0;
  40. /// <summary>
  41. /// Metal项
  42. /// </summary>
  43. private MetalItem _metalItem;
  44. /// <summary>
  45. /// 持久化对象
  46. /// </summary>
  47. private MetalPersistentValue _persistentValue;
  48. /// <summary>
  49. /// c&m Initialize routine
  50. /// </summary>
  51. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  52. /// <summary>
  53. /// C&M Runrecipe routine
  54. /// </summary>
  55. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  56. /// <summary>
  57. /// S&H Initialize Routine
  58. /// </summary>
  59. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  60. /// <summary>
  61. /// S&H RunRecipe Routine
  62. /// </summary>
  63. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  64. /// <summary>
  65. /// Current short test routine
  66. /// </summary>
  67. private CurrentShortTestRoutine _currentShortTestRoutine;
  68. /// <summary>
  69. /// 当前Recipe
  70. /// </summary>
  71. private DepRecipe _currentRecipe = null;
  72. /// <summary>
  73. /// recipe时间
  74. /// </summary>
  75. private int _recipeTime;
  76. /// <summary>
  77. /// 循环次数
  78. /// </summary>
  79. private int _cycle = 0;
  80. /// <summary>
  81. /// 运行Recipe面
  82. /// </summary>
  83. private string _recipeSide = "";
  84. /// <summary>
  85. /// 当前RunRecipe Routine
  86. /// </summary>
  87. private RoutineBase _currentRunRecipeRoutine;
  88. /// <summary>
  89. /// Runrecipe已经运行的时间
  90. /// </summary>
  91. private int _runrecipeElapsedTime = 0;
  92. /// <summary>
  93. /// run recipe start time
  94. /// </summary>
  95. private DateTime _runRecipeStartTime;
  96. /// <summary>
  97. /// run recipe complete time
  98. /// </summary>
  99. private DateTime _runRecipeCompleteTime;
  100. #endregion
  101. #region 属性
  102. /// <summary>
  103. /// 模块名称
  104. /// </summary>
  105. public ModuleName Module { get; private set; }
  106. /// <summary>
  107. /// 初始化状态
  108. /// </summary>
  109. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  110. /// <summary>
  111. /// 空闲状态
  112. /// </summary>
  113. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  114. /// <summary>
  115. /// 是否发生错误
  116. /// </summary>
  117. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  118. /// <summary>
  119. /// 是否正在作业
  120. /// </summary>
  121. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  122. /// <summary>
  123. /// 是否初始化完成
  124. /// </summary>
  125. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  126. /// <summary>
  127. /// 是否禁用
  128. /// </summary>
  129. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  130. /// <summary>
  131. /// 自动模式
  132. /// </summary>
  133. public bool IsAuto { get { return _persistentValue!=null&&_persistentValue.OperatingMode == AUTO; } }
  134. /// <summary>
  135. /// 自动模式
  136. /// </summary>
  137. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  138. /// <summary>
  139. /// 是否为工程模式
  140. /// </summary>
  141. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  142. /// <summary>
  143. /// 是否为产品模式
  144. /// </summary>
  145. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  146. /// <summary>
  147. /// WaferHolder信息
  148. /// </summary>
  149. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  150. /// <summary>
  151. /// 已完成的RunRecipeCycle次数
  152. /// </summary>
  153. public int AchievedCycle { get { return _achievedCycle; } }
  154. /// <summary>
  155. /// 当前状态机状态
  156. /// </summary>
  157. public int State { get { return fsm.State; } }
  158. /// <summary>
  159. /// 当前Metal设置的WaferSize
  160. /// </summary>
  161. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  162. /// <summary>
  163. /// recipe时长
  164. /// </summary>
  165. public int RecipeTime { get { return _recipeTime; } }
  166. /// <summary>
  167. /// 剩余时间
  168. /// </summary>
  169. public override int TimeToReady
  170. {
  171. get
  172. {
  173. if (IsIdle)
  174. {
  175. return 0;
  176. }
  177. switch(fsm.State)
  178. {
  179. case (int)MetalState.RunReciping:
  180. return Math.Max(_recipeTime - fsm.ElapsedTime/1000, 0);
  181. default:
  182. return 0 ;
  183. }
  184. }
  185. }
  186. /// <summary>
  187. /// 用量
  188. /// </summary>
  189. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  190. #endregion
  191. /// <summary>
  192. /// 构造函数
  193. /// </summary>
  194. /// <param name="moduleName"></param>
  195. public MetalEntity(ModuleName moduleName)
  196. {
  197. this.Module = moduleName;
  198. WaferManager.Instance.SubscribeLocation(Module, 2);
  199. InitialFsm();
  200. }
  201. /// <summary>
  202. /// 初始化
  203. /// </summary>
  204. /// <returns></returns>
  205. protected override bool Init()
  206. {
  207. InitializeDATA();
  208. InitializeParameter();
  209. InitializeRoutine();
  210. InitializeOperation();
  211. return true;
  212. }
  213. /// <summary>
  214. /// 初始化参数
  215. /// </summary>
  216. private void InitializeParameter()
  217. {
  218. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  219. if (_persistentValue == null)
  220. {
  221. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  222. }
  223. _metalItem=MetalItemManager.Instance.GetMetalItem(Module.ToString());
  224. }
  225. /// <summary>
  226. /// 初始化Routine
  227. /// </summary>
  228. private void InitializeRoutine()
  229. {
  230. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  231. _standardHotInitializeRoutine=new StandardHotInitializeRoutine(Module.ToString());
  232. _compactEmbranceRunRecipeRoutine=new CompactEmbranceRunRecipeRoutine(Module.ToString());
  233. _standardHotRunRecipeRoutine=new StandardHotRunRecipeRoutine(Module.ToString());
  234. _currentShortTestRoutine=new CurrentShortTestRoutine(Module.ToString());
  235. }
  236. /// <summary>
  237. /// 初始化操作
  238. /// </summary>
  239. private void InitializeOperation()
  240. {
  241. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  242. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  243. {
  244. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  245. if (recipe == null)
  246. {
  247. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  248. return false;
  249. }
  250. object[] objects = new object[args.Length];
  251. objects[0] = recipe;
  252. for(int i = 1; i < args.Length; i++)
  253. {
  254. objects[i] = args[i];
  255. }
  256. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe,objects);
  257. });
  258. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  259. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  260. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  261. }
  262. /// <summary>
  263. /// EnterInit
  264. /// </summary>
  265. public void EnterInit()
  266. {
  267. if ((MetalState)fsm.State != MetalState.Idle) return;
  268. else
  269. {
  270. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  271. }
  272. }
  273. /// 初始化状态机
  274. /// </summary>
  275. private void InitialFsm()
  276. {
  277. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  278. fsm.EnableRepeatedMsg(true);
  279. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  280. //Initialize
  281. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  282. Transition(MetalState.Initializing,FSM_MSG.TIMER,InitializeAllMonitor, MetalState.Initialized);
  283. //直接进入Idle
  284. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  285. //RunRecipe
  286. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  287. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  288. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  289. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  290. //Current Short Test
  291. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  292. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  293. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  294. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  295. //Enter Init
  296. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  297. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  298. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  299. }
  300. /// <summary>
  301. /// 初始化DATA
  302. /// </summary>
  303. private void InitializeDATA()
  304. {
  305. InitializeSVID();
  306. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  307. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  308. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  309. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  310. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  311. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  312. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  313. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  314. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  315. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  316. }
  317. /// <summary>
  318. /// 初始化SVID
  319. /// </summary>
  320. private void InitializeSVID()
  321. {
  322. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  323. DATA.Subscribe($"{Module}.LotID", () => (WaferHolderInfo != null ? WaferHolderInfo.LotId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  324. DATA.Subscribe($"{Module}.WSID", () => (WaferHolderInfo != null ? WaferHolderInfo.Id : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  325. DATA.Subscribe($"{Module}.LSAID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  326. DATA.Subscribe($"{Module}.LSBID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  327. DATA.Subscribe($"{Module}.ModuleRecipe", () => (_currentRecipe != null ? _currentRecipe.Ppid : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  328. DATA.Subscribe($"{Module}.SequenceRecipe", () => (WaferHolderInfo != null ? WaferHolderInfo.SequenceId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  329. DATA.Subscribe($"{Module}.WaferAID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  330. DATA.Subscribe($"{Module}.WaferBID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  331. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  332. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  333. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo != null ? WaferHolderInfo.CurrentControlJobId : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  334. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  335. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  336. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>("Metal.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  337. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>("Metal.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  338. DATA.Subscribe($"{Module}.AnodeAUsage",()=> MetalUsage!=null?MetalUsage.AnodeAUsage:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  339. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>("Metal.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  340. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>("Metal.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  341. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>("Metal.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>("Metal.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.MembranceAUsage",()=> MetalUsage != null ? MetalUsage.MembranceAUsage:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>("Metal.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>("Metal.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>("Metal.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>("Metal.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>("Metal.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>("Metal.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.AnodeAWafers",()=> MetalUsage != null ? MetalUsage.AnodeAWafers:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>("Metal.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>("Metal.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers:0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>("Metal.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>("Metal.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. }
  360. /// <summary>
  361. /// 进入错误状态
  362. /// </summary>
  363. /// <param name="args"></param>
  364. /// <returns></returns>
  365. private bool EnterError(object[] args)
  366. {
  367. if (State == (int)MetalState.RunReciping)
  368. {
  369. if (_metalItem.SubType == STRATUS)
  370. {
  371. _standardHotRunRecipeRoutine.Abort();
  372. }
  373. else
  374. {
  375. _compactEmbranceRunRecipeRoutine.Abort();
  376. }
  377. }
  378. return true;
  379. }
  380. /// <summary>
  381. /// UpdateMetalUsageAction
  382. /// </summary>
  383. /// <param name="cmd"></param>
  384. /// <param name="param"></param>
  385. /// <returns></returns>
  386. private bool UpdateMetalUsageAction(string cmd, object[] args)
  387. {
  388. if (args.Length > 2)
  389. {
  390. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  391. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  392. }
  393. return true;
  394. }
  395. #region Initialize All
  396. /// <summary>
  397. /// 初始化
  398. /// </summary>
  399. /// <param name="param"></param>
  400. /// <returns></returns>
  401. private bool InitializeAll(object[] param)
  402. {
  403. if (fsm.State ==(int)MetalState.Initializing)
  404. {
  405. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  406. return false;
  407. }
  408. if(!CheckReservoirInitialized())
  409. {
  410. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  411. return false;
  412. }
  413. if ("Auto".Equals(_persistentValue.OperatingMode))
  414. {
  415. if (!CheckReservoirIsAuto())
  416. {
  417. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  418. return false;
  419. }
  420. }
  421. if (_metalItem.SubType==STRATUS)
  422. {
  423. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  424. }
  425. else
  426. {
  427. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  428. }
  429. }
  430. /// <summary>
  431. /// 检验Reservoir是否Initialized
  432. /// </summary>
  433. /// <returns></returns>
  434. private bool CheckReservoirInitialized()
  435. {
  436. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  437. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  438. if (reservoirEntity != null)
  439. {
  440. return reservoirEntity.IsInitialized;
  441. }
  442. return false;
  443. }
  444. /// <summary>
  445. /// 检验Reservoir是否Auto
  446. /// </summary>
  447. /// <returns></returns>
  448. private bool CheckReservoirIsAuto()
  449. {
  450. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  451. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  452. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  453. {
  454. return true;
  455. }
  456. return false;
  457. }
  458. /// <summary>
  459. /// 初始化监控
  460. /// </summary>
  461. /// <param name="param"></param>
  462. /// <returns></returns>
  463. private bool InitializeAllMonitor(object[] param)
  464. {
  465. RState rsstate= RState.Running;
  466. if (_metalItem.SubType == STRATUS)
  467. {
  468. rsstate = _standardHotInitializeRoutine.Monitor();
  469. }
  470. else
  471. {
  472. rsstate = _compactEmbranceInitializeRoutine.Monitor() ;
  473. }
  474. if(rsstate==RState.End)
  475. {
  476. return true;
  477. }
  478. else if(rsstate==RState.Failed||rsstate==RState.Timeout)
  479. {
  480. PostMsg(MetalMsg.Error);
  481. return false;
  482. }
  483. return false;
  484. }
  485. #endregion
  486. #region RunRecipe
  487. /// <summary>
  488. /// Run Recipe
  489. /// </summary>
  490. /// <param name="param"></param>
  491. /// <returns></returns>
  492. private bool RunRecipe(object[] param)
  493. {
  494. DepRecipe recipe = param[0] as DepRecipe;
  495. _recipeSide = param[1].ToString();
  496. _cycle = (int)param[2];
  497. _runrecipeElapsedTime = 0;
  498. bool result = false;
  499. if (_metalItem.SubType == STRATUS)
  500. {
  501. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  502. result= _standardHotRunRecipeRoutine.Start(recipe,_recipeSide) == RState.Running;
  503. }
  504. else
  505. {
  506. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  507. result= _compactEmbranceRunRecipeRoutine.Start(recipe,_recipeSide) == RState.Running;
  508. }
  509. if(result)
  510. {
  511. if (WaferHolderInfo != null)
  512. {
  513. WaferHolderInfo.MetalModuleName = Module;
  514. }
  515. _recipeTime = recipe.CalculateRecipeTotalTime();
  516. _currentRecipe = recipe;
  517. if (WaferHolderInfo != null)
  518. {
  519. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  520. }
  521. _runRecipeStartTime = DateTime.Now;
  522. if (WaferHolderInfo != null && _currentRecipe != null)
  523. {
  524. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  525. }
  526. }
  527. return result;
  528. }
  529. /// <summary>
  530. /// RunRecipe监控
  531. /// </summary>
  532. /// <param name="param"></param>
  533. /// <returns></returns>
  534. private bool RunRecipeMonitor(object[] param)
  535. {
  536. RState rsstate = RState.Running;
  537. if (_metalItem.SubType == STRATUS)
  538. {
  539. rsstate = _standardHotRunRecipeRoutine.Monitor();
  540. }
  541. else
  542. {
  543. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  544. }
  545. if (Singleton<RouteManager>.Instance.IsAutoRunning&&_runrecipeElapsedTime!=TimeToReady)
  546. {
  547. _runrecipeElapsedTime = TimeToReady;
  548. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  549. }
  550. if (rsstate == RState.End)
  551. {
  552. _recipeTime = 0;
  553. if (WaferHolderInfo != null)
  554. {
  555. double anodeAUsage = GetAnodeAUsage();
  556. double anodeBUsage = GetAnodeBUsage();
  557. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  558. //CMM Usage
  559. if(_metalItem.SubType == STRATUS)
  560. {
  561. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  562. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  563. resDevice.SetExportCMMUsage();
  564. }
  565. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  566. }
  567. _runrecipeElapsedTime = 0;
  568. //记录LotTrack
  569. _runRecipeCompleteTime = DateTime.Now;
  570. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  571. if (_metalItem.SubType == STRATUS)
  572. {
  573. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  574. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  575. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  576. }
  577. else
  578. {
  579. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  580. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  581. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  582. }
  583. if (WaferHolderInfo != null && _currentRecipe != null)
  584. {
  585. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  586. }
  587. return true;
  588. }
  589. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  590. {
  591. _recipeTime = 0;
  592. if (WaferHolderInfo != null)
  593. {
  594. double anodeAUsage = GetAnodeAUsage();
  595. double anodeBUsage = GetAnodeBUsage();
  596. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  597. //CMMUsage
  598. if (_metalItem.SubType == STRATUS)
  599. {
  600. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  601. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  602. resDevice.SetExportCMMUsage();
  603. }
  604. }
  605. _runrecipeElapsedTime = 0;
  606. if (WaferHolderInfo != null && _currentRecipe != null)
  607. {
  608. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  609. }
  610. PostMsg(MetalMsg.Error);
  611. //记录LotTrack
  612. _runRecipeCompleteTime = DateTime.Now;
  613. if (_metalItem.SubType == STRATUS)
  614. {
  615. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  616. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  617. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  618. }
  619. else
  620. {
  621. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  622. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  623. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  624. }
  625. if (WaferHolderInfo != null && _currentRecipe != null)
  626. {
  627. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  628. }
  629. return false;
  630. }
  631. return false;
  632. }
  633. /// <summary>
  634. /// 获取A面使用的电量
  635. /// </summary>
  636. /// <returns></returns>
  637. private double GetAnodeAUsage()
  638. {
  639. if(_metalItem.SubType == STRATUS)
  640. {
  641. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage,3);
  642. }
  643. else
  644. {
  645. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage,3);
  646. }
  647. }
  648. /// <summary>
  649. /// 获取B面使用的电量
  650. /// </summary>
  651. /// <returns></returns>
  652. private double GetAnodeBUsage()
  653. {
  654. if (_metalItem.SubType == STRATUS)
  655. {
  656. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  657. }
  658. else
  659. {
  660. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  661. }
  662. }
  663. /// <summary>
  664. /// Abort Recipe
  665. /// </summary>
  666. /// <param name="param"></param>
  667. /// <returns></returns>
  668. public bool AbortRecipe(object[] param)
  669. {
  670. _runRecipeCompleteTime = DateTime.Now;
  671. if (_metalItem.SubType == STRATUS)
  672. {
  673. _standardHotRunRecipeRoutine.Abort();
  674. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  675. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  676. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  677. }
  678. else
  679. {
  680. _compactEmbranceRunRecipeRoutine.Abort();
  681. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  682. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  683. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  684. }
  685. return true;
  686. }
  687. #endregion
  688. #region Current Short Test
  689. /// <summary>
  690. /// Current Short Test
  691. /// </summary>
  692. /// <param name="param"></param>
  693. /// <returns></returns>
  694. private bool CurrentShortTest(object[] param)
  695. {
  696. return _currentShortTestRoutine.Start() == RState.Running;
  697. }
  698. /// <summary>
  699. /// Current Short test监控
  700. /// </summary>
  701. /// <param name="param"></param>
  702. /// <returns></returns>
  703. private bool CurrentShortTestMonitor(object[] param)
  704. {
  705. RState rsstate = _currentShortTestRoutine.Monitor();
  706. if (rsstate == RState.End)
  707. {
  708. return true;
  709. }
  710. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  711. {
  712. PostMsg(MetalMsg.Error);
  713. return false;
  714. }
  715. return false;
  716. }
  717. #endregion
  718. #region Close Flow Valve
  719. /// <summary>
  720. /// 关闭Flow Valve
  721. /// </summary>
  722. /// <param name="param"></param>
  723. /// <returns></returns>
  724. private bool CloseFlowValve(object[] param)
  725. {
  726. if(_metalItem.SubType==STRATUS)
  727. {
  728. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  729. if (device!=null)
  730. {
  731. return device.SwitchToBypass("", null);
  732. }
  733. return false;
  734. }
  735. else
  736. {
  737. CompactMembranMetalDevice device=DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  738. if(device!=null)
  739. {
  740. string reservoir= ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  741. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  742. if (reservoirDevice != null)
  743. {
  744. bool result = reservoirDevice.CAByPassOn("", null);
  745. if(result)
  746. {
  747. return device.CellFlowValveOff("", null);
  748. }
  749. }
  750. }
  751. return false;
  752. }
  753. }
  754. #endregion
  755. #region Open Flow Valve
  756. /// <summary>
  757. /// 打开Flow Valve
  758. /// </summary>
  759. /// <param name="param"></param>
  760. /// <returns></returns>
  761. private bool OpenFlowValve(object[] param)
  762. {
  763. if (_metalItem.SubType == STRATUS)
  764. {
  765. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  766. if (device != null)
  767. {
  768. bool result = device.SwitchToFlow("", null);
  769. if (result)
  770. {
  771. return device.PumpOnOperation("",null);
  772. }
  773. }
  774. return false;
  775. }
  776. else
  777. {
  778. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  779. if (device != null)
  780. {
  781. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  782. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  783. if (reservoirDevice != null)
  784. {
  785. bool result = reservoirDevice.CAByPassOff("", null);
  786. if (result)
  787. {
  788. return device.CellFlowValveOn("", null);
  789. }
  790. }
  791. }
  792. return false;
  793. }
  794. }
  795. #endregion
  796. public bool Check(int msg, out string reason, params object[] args)
  797. {
  798. reason = "";
  799. return true;
  800. }
  801. public bool CheckAcked(int msg)
  802. {
  803. return true;
  804. }
  805. public int Invoke(string function, params object[] args)
  806. {
  807. switch (function)
  808. {
  809. case "HomeAll":
  810. if (IsIdle)
  811. {
  812. return (int)FSM_MSG.NONE;
  813. }
  814. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  815. {
  816. return (int)MetalMsg.Initialize;
  817. }
  818. else
  819. {
  820. return (int)FSM_MSG.NONE;
  821. }
  822. }
  823. return (int)FSM_MSG.NONE;
  824. }
  825. }
  826. public enum MetalMsg
  827. {
  828. NONE,
  829. Error,
  830. ResumeError,
  831. Initialize,
  832. Manual,
  833. Auto,
  834. CurrentShortTest,
  835. CloseFlowValve,
  836. OpenFlowValve,
  837. RunRecipe,
  838. Abort,
  839. Init
  840. }
  841. }