ManualTransfer.cs 11 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using CyberX8_Core;
  20. using CyberX8_RT.Schedulers;
  21. using CyberX8_RT.Schedulers.EfemRobot;
  22. namespace CyberX8_RT.Modules
  23. {
  24. public class ManualTransfer : IRoutine
  25. {
  26. SchedulerEfemRobot _efemRobot = (SchedulerEfemRobot)SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot);
  27. private Queue<MoveItem> _moveTaskQueue = new Queue<MoveItem>();
  28. private MoveItem _move_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  29. private MoveItem _current_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  30. private Guid _wafer_id;
  31. private R_TRIG _wafer_arrive_trig = new R_TRIG();
  32. private MovingStatus _moving_status = MovingStatus.Idle;
  33. private int _tmRobotSingleArmOption = 0;
  34. private int _efemRobotSingleArmOption = 0;
  35. public ManualTransfer()
  36. {
  37. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  38. _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
  39. }
  40. public RState Start(params object[] objs)
  41. {
  42. // RESET
  43. _moveTaskQueue.Clear();
  44. _moving_status = MovingStatus.Idle;
  45. _wafer_arrive_trig.RST = true ;
  46. _move_item.SourceModule = (ModuleName)objs[0];
  47. _move_item.SourceSlot = (int)objs[1];
  48. _move_item.DestinationModule = (ModuleName)objs[2];
  49. _move_item.DestinationSlot = (int)objs[3];
  50. _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;
  51. if (!CheckSingleArmOption(_move_item.DestinationModule, _move_item.DestinationSlot))
  52. return RState.Failed;
  53. if (!CheckSingleArmOption(_move_item.SourceModule, _move_item.SourceSlot))
  54. return RState.Failed;
  55. if(ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  56. {
  57. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.SourceSlot));
  58. }
  59. else if (ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  60. {
  61. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  62. }
  63. else
  64. {
  65. Hand hand = SelectEfemRobotFreeHand();
  66. if (hand == Hand.None)
  67. {
  68. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  69. return RState.Failed;
  70. }
  71. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  72. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  73. }
  74. _current_item = _moveTaskQueue.Dequeue();
  75. _moving_status = MovingStatus.Waiting;
  76. return RState.Running;
  77. }
  78. public RState Monitor()
  79. {
  80. return MoveWaferForward();
  81. }
  82. public void Abort()
  83. {
  84. }
  85. public void Clear()
  86. {
  87. _moveTaskQueue.Clear();
  88. SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  89. }
  90. private RState MoveWaferForward()
  91. {
  92. switch(_moving_status)
  93. {
  94. case MovingStatus.Waiting:
  95. {
  96. if(IsCurrentModuleReady())
  97. {
  98. // Post current item
  99. _efemRobot.PostMoveItems(new MoveItem[1] { _current_item });
  100. _moving_status = MovingStatus.Moving;
  101. }
  102. }
  103. break;
  104. case MovingStatus.Moving:
  105. {
  106. _wafer_arrive_trig.CLK = IsArriveCurrentTarget();
  107. if (_wafer_arrive_trig.Q)
  108. {
  109. _moving_status = MovingStatus.Idle;
  110. }
  111. }
  112. break;
  113. case MovingStatus.Idle:
  114. {
  115. if(IsCurrentModuleReady())
  116. {
  117. if(_moveTaskQueue.Count > 0)
  118. {
  119. _current_item = _moveTaskQueue.Dequeue();
  120. _moving_status = MovingStatus.Waiting;
  121. }
  122. }
  123. break;
  124. }
  125. }
  126. return TransferStatus();
  127. }
  128. private bool IsArriveCurrentTarget()
  129. {
  130. var wafer = WaferManager.Instance.GetWafer(_current_item.DestinationModule, _current_item.DestinationSlot);
  131. return !wafer.IsEmpty && wafer.InnerId == _wafer_id;
  132. }
  133. private bool IsCurrentModuleReady()
  134. {
  135. return (_efemRobot.IsAvailable) &&
  136. _isModuleReady(_current_item.SourceModule) &&
  137. _isModuleReady(_current_item.DestinationModule);
  138. }
  139. private bool IsTransferError()
  140. {
  141. return (_efemRobot.IsError) ||
  142. _isModuleError(_current_item.SourceModule) ||
  143. _isModuleError(_current_item.DestinationModule);
  144. }
  145. private bool _isModuleReady(ModuleName module)
  146. {
  147. return SchedulerManager.Instance.GetScheduler(module).IsAvailable;
  148. }
  149. private bool _isModuleError(ModuleName module)
  150. {
  151. return SchedulerManager.Instance.GetScheduler(module).IsError;
  152. }
  153. private Hand SelectEfemRobotFreeHand()
  154. {
  155. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  156. return Hand.Blade1;
  157. else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  158. return Hand.Blade2;
  159. else
  160. return Hand.None;
  161. }
  162. private RState TransferStatus()
  163. {
  164. if (IsTransferError())
  165. return RState.Failed;
  166. if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)
  167. return RState.End;
  168. return RState.Running;
  169. }
  170. private bool CheckSingleArmOption(ModuleName robot, int slot)
  171. {
  172. if(ModuleHelper.IsEFEMRobot(robot))
  173. {
  174. if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != slot + 1)
  175. {
  176. LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"Cannot move the wafer as EFEM Robot {(Hand)slot} is disabled.");
  177. return false;
  178. }
  179. }
  180. return true;
  181. }
  182. public int GetSingleArmOption(ModuleName robot)
  183. {
  184. return _efemRobotSingleArmOption;
  185. }
  186. }
  187. public class ReturnAllWafer : IRoutine
  188. {
  189. private List<ModuleName> _moduleList = new List<ModuleName> { ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD };
  190. private ManualTransfer _manualTransfer;
  191. private Queue<MoveItem> _returnTaskQueue = new Queue<MoveItem>();
  192. private MoveItem _current_item;
  193. public ReturnAllWafer(ManualTransfer manualTransfer)
  194. {
  195. _manualTransfer = manualTransfer;
  196. }
  197. public RState Start(params object[] objs)
  198. {
  199. SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  200. foreach(var mod in _moduleList)
  201. {
  202. if (ModuleHelper.IsInstalled(mod) && SchedulerManager.Instance.GetScheduler(mod).IsAvailable)
  203. {
  204. if (ModuleHelper.IsEFEMRobot(mod))
  205. {
  206. if (_manualTransfer.GetSingleArmOption(mod) != 2)
  207. PushWaferToReturnQueqe(mod, 0);
  208. if (_manualTransfer.GetSingleArmOption(mod) != 1)
  209. PushWaferToReturnQueqe(mod, 1);
  210. }
  211. else
  212. {
  213. PushWaferToReturnQueqe(mod, 0);
  214. }
  215. }
  216. }
  217. if (_returnTaskQueue.Count == 0)
  218. return RState.Failed;
  219. _current_item = _returnTaskQueue.Dequeue();
  220. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  221. return RState.Running;
  222. }
  223. public RState Monitor()
  224. {
  225. var ret = _manualTransfer.Monitor();
  226. if (ret == RState.End)
  227. {
  228. if (_returnTaskQueue.Count > 0)
  229. {
  230. _current_item = _returnTaskQueue.Dequeue();
  231. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  232. }
  233. else
  234. return RState.End;
  235. }
  236. else if (ret == RState.Failed || ret == RState.Timeout)
  237. {
  238. LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System,"Manual Transfer", $"Return Wafer {_current_item.SourceModule}{_current_item.SourceSlot} failed");
  239. return RState.Failed;
  240. }
  241. return RState.Running;
  242. }
  243. public void Abort()
  244. {
  245. }
  246. public void Clear()
  247. {
  248. _returnTaskQueue.Clear();
  249. SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  250. }
  251. private void PushWaferToReturnQueqe(ModuleName mod, int nSlot)
  252. {
  253. var wafer = WaferManager.Instance.GetWafer(mod, nSlot);
  254. if (!wafer.IsEmpty)
  255. {
  256. _returnTaskQueue.Enqueue(new MoveItem(mod, nSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, Hand.Blade1));
  257. }
  258. }
  259. }
  260. }