123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629 |
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.Utilities;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.RT.ModuleLibrary.LPModules;
- using System;
- using Aitex.Core.RT.SCCore;
- using CyberX8_RT.Devices;
- using CyberX8_RT.Devices.EFEM;
- using CyberX8_Core;
- using Aitex.Core.Common;
- using Aitex.Core.Util;
- namespace CyberX8_RT.Modules.LPs
- {
- /// <summary>
- /// LP entity
- /// </summary>
- sealed class LoadPortModule : LoadPortModuleBase
- {
- public event Action<string> OnEnterError;
- private enum STATE
- {
- Unknown,
- Idle, // 1
- Init,
- Error,
- Homing, // 2
- Mapping, // 4
- Loading,
- ReadingCarrierId,
- Unloading,
- Docking,
- Undocking,
- Clamping,
- Unclamping,
- WritingCarrierId,
- ReadingTagData,
- WritingTagData,
- CycleLoadUnloading
- }
- public enum MSG
- {
- Home, // 0
- Map, // 1
- ActionDone, // 2
- Abort, // 5
- Online, // 6
- Error, // 7
- Reset,
- EnterIdle,
- ReadCarrierId,
- WriteCarrierID,
- Load,
- Unload,
- Dock,
- Undock,
- Clamp,
- Unclamp,
- ToInit,
- ToIdle,
- ReadTagData,
- WriteTagData,
- CloseDoor,
- OpenDoor,
- CycleLoadUnload
- }
- public EfemBase JetEfem
- {
- get { return _efem; }
- }
- private readonly EfemBase _efem;
- private Loadport _lpDevice;
- public Loadport LPDevice
- {
- get
- {
- return _lpDevice;
- }
- }
- public override bool IsReady
- {
- get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
- }
- public override bool IsError
- {
- get { return FsmState == (int)STATE.Error; }
- }
- public override bool IsInit
- {
- get { return FsmState == (int)STATE.Init; }
- }
- public override bool IsIdle
- {
- get { return FsmState == (int)STATE.Idle; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- /// <summary>
- /// wafer尺寸
- /// </summary>
- public WaferSize WaferSize
- {
- get { return _lpDevice.WaferSize; }
- }
- public bool IsRobotIdle
- {
- get { return Singleton<RouteManager>.Instance.EFEM.RobotStatus == RState.End; }
- }
- private LoadPortHomeRoutine _home;
- private LoadPortMapRoutine _map;
- //private LoadPortCloseDoorRoutine _closeDoor;
- private LoadPortDockRoutine _dockRoutine;
- private LoadPortUnDockRoutine _undockRoutine;
- private LoadPortClampRoutine _clamp;
- private LoadPortReadCarrierIdRoutine _readCarrierId;
- private LoadPortWriteCarrierIdRoutine _writeCarrierId;
- private LoadPortReadTagDataRoutine _readTag;
- private LoadPortWriteTagDataRoutine _writeTag;
- private LoadPortUnclampRoutine _unclamp;
- //private LoadPortUndockRoutine _undock;
- private LoadPortLoadRoutine _load;
- private LoadPortUnloadRoutine _unload;
- private LoadPortCycleLoadUnloadRoutine _cycleLoadUnloadRoutine;
- //private bool _isInit;
- public LoadPortModule(ModuleName module, EfemBase efem) : base(SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
- {
- Name = module.ToString();
- Module = module.ToString();
- _efem = efem;
- InitFsmMap();
- _lpDevice = new Loadport(module,efem);
- OP.Subscribe($"{Module}.ReadCarrierId", (cmd, args) => { PostMsg(MSG.ReadCarrierId); return true; });
- OP.Subscribe($"{Module}.WriteCarrierID", (cmd, args) => { PostMsg(MSG.WriteCarrierID, args[0]); return true; });
- OP.Subscribe($"{Module}.ReadTagData", (cmd, args) => { PostMsg(MSG.ReadTagData); return true; });
- OP.Subscribe($"{Module}.WriteTagData", (cmd, args) => { PostMsg(MSG.WriteTagData, args[0]); return true; });
- OP.Subscribe($"{Module}.Load", (cmd, args) => { PostMsg(MSG.Load); return true; });
- OP.Subscribe($"{Module}.Unload", (cmd, args) => { PostMsg(MSG.Unload); return true; });
- OP.Subscribe($"{Module}.Clamp", (cmd, args) => { PostMsg(MSG.Clamp); return true; });
- OP.Subscribe($"{Module}.Unclamp", (cmd, args) => { PostMsg(MSG.Unclamp); return true; });
- OP.Subscribe($"{Module}.Dock", (cmd, args) => { PostMsg(MSG.Dock); return true; });
- OP.Subscribe($"{Module}.Undock", (cmd, args) => { PostMsg(MSG.Undock); return true; });
-
- OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
- OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
- OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
- OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
- OP.Subscribe($"{Name}.OpenDoor", (string cmd, object[] args) =>{return CheckToPostMessage((int)MSG.OpenDoor);});
- OP.Subscribe($"{Name}.CloseDoor", (string cmd, object[] args) =>{return CheckToPostMessage((int)MSG.CloseDoor);});
- OP.Subscribe($"{Module}.CycleLoadUnload", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.CycleLoadUnload,args); });
- DATA.Subscribe($"{Module}.Status", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.FsmState", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)FsmPreviousState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.State", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsError", ()=>IsError, SubscriptionAttribute.FLAG.SaveDB);
- DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.SaveDB);
- DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.SaveDB);
- InitRoutine();
- }
- private void InitRoutine()
- {
- _home = new LoadPortHomeRoutine(this);
- //_closeDoor = new LoadPortCloseDoorRoutine(this);
- _clamp = new LoadPortClampRoutine(this);
- //_dock = new LoadPortDockRoutine(this);
- _map = new LoadPortMapRoutine(this,_efem);
- //_openDoor = new LoadPortOpenDoorRoutine(this);
- _readCarrierId = new LoadPortReadCarrierIdRoutine(this);
- _writeCarrierId = new LoadPortWriteCarrierIdRoutine(this);
- _readTag = new LoadPortReadTagDataRoutine(this);
- _writeTag = new LoadPortWriteTagDataRoutine(this);
- _unclamp = new LoadPortUnclampRoutine(this);
- //_undock = new LoadPortUndockRoutine(this);
- //_MapDT = new LoadPortGetMapInfoRoutine(this);
- _load = new LoadPortLoadRoutine(this);
- _unload = new LoadPortUnloadRoutine(this);
- _dockRoutine = new LoadPortDockRoutine(this);
- _undockRoutine = new LoadPortUnDockRoutine(this);
- _cycleLoadUnloadRoutine=new LoadPortCycleLoadUnloadRoutine(this);
- }
- private string GetFsmLastMessage()
- {
- int msg = FsmLastMessage;
- if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
- return ((MSG)msg).ToString();
- if (msg == (int)FSM_MSG.TIMER)
- return "Timer";
- return msg.ToString();
- }
- private void InitFsmMap()
- {
- EnableFsm(50, STATE.Idle);
- //online
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- //Error
- AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
- Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
- Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
- AnyStateTransition(MSG.EnterIdle, FsmEnterIdle, STATE.Idle);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);
- //Init
- Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
- Transition(STATE.Homing, MSG.Error, null, STATE.Init);
- Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
- //load
- Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
- Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
- //unload
- Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
- Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
- //read carrier id
- Transition(STATE.Idle, MSG.ReadCarrierId, FsmStartReadCarrierId, STATE.ReadingCarrierId);
- Transition(STATE.ReadingCarrierId, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.ReadingCarrierId, MSG.Abort, FsmAbortTask, STATE.Idle);
- //write carrier id
- Transition(STATE.Idle, MSG.WriteCarrierID, FsmStartWriteCarrierId, STATE.WritingCarrierId);
- Transition(STATE.WritingCarrierId, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.WritingCarrierId, MSG.Abort, FsmAbortTask, STATE.Idle);
- //clamp
- Transition(STATE.Idle, MSG.Clamp, FsmStartClamp, STATE.Clamping);
- Transition(STATE.Clamping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Clamping, MSG.Abort, FsmAbortTask, STATE.Idle);
- //unclamp
- Transition(STATE.Idle, MSG.Unclamp, FsmStartUnclamp, STATE.Unclamping);
- Transition(STATE.Unclamping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Unclamping, MSG.Abort, FsmAbortTask, STATE.Idle);
- //dock
- Transition(STATE.Idle, MSG.Dock, FsmStartDock, STATE.Docking);
- Transition(STATE.Docking, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Docking, MSG.Abort, FsmAbortTask, STATE.Idle);
- //undock
- Transition(STATE.Idle, MSG.Undock, FsmStartUndock, STATE.Undocking);
- Transition(STATE.Undocking, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Undocking, MSG.Abort, FsmAbortTask, STATE.Idle);
- //Map
- Transition(STATE.Idle, MSG.Map, FsmStartMap, STATE.Mapping);
- Transition(STATE.Mapping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Mapping, MSG.Abort, FsmAbortTask, STATE.Idle);
- //read tag data
- Transition(STATE.Idle, MSG.ReadTagData, FsmStartReadTagData, STATE.ReadingTagData);
- Transition(STATE.ReadingTagData, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.ReadingTagData, MSG.Abort, FsmAbortTask, STATE.Idle);
- //write tag data
- Transition(STATE.Idle, MSG.WriteTagData, FsmStartWriteTagData, STATE.WritingTagData);
- Transition(STATE.WritingTagData, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.WritingTagData, MSG.Abort, FsmAbortTask, STATE.Idle);
- //Cycle Load
- Transition(STATE.Idle, MSG.CycleLoadUnload, CycleLoadUnload, STATE.CycleLoadUnloading);
- Transition(STATE.CycleLoadUnloading, FSM_MSG.TIMER, CycleLoadUnloadMonitor, STATE.Idle);
- Transition(STATE.CycleLoadUnloading, MSG.Abort, CycleLoadUnloadAbort, STATE.Idle);
- EnumLoop<STATE>.ForEach((item) =>
- {
- MapState((int)item, item.ToString());
- });
- EnumLoop<MSG>.ForEach((item) =>
- {
- MapMessage((int)item, item.ToString());
- });
- }
- private bool FsmAbortTask(object[] param)
- {
- AbortRoutine();
- LPDevice.Abort();
- return true;
- }
- private bool FsmEnterIdle(object[] param)
- {
- return true;
- }
- private bool FsmReset(object[] param)
- {
- //if (!_isInit)
- //{
- // PostMsg(MSG.ToInit);
- // return false;
- //}
- return true;
- }
- private bool FsmOnError(object[] param)
- {
- if (FsmState == (int)STATE.Error)
- {
- return false;
- }
- AbortRoutine();
- if (FsmState == (int)STATE.Init)
- return false;
- return true;
- }
- private bool FsmExitError(object[] param)
- {
- return true;
- }
- private bool FsmEnterError(object[] param)
- {
- if (OnEnterError != null)
- OnEnterError(Module);
- return true;
- }
- private bool FsmMonitorTask(object[] param)
- {
- RState ret = MonitorRoutine();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FsmStartHome(object[] param)
- {
- RState ret = StartRoutine(_home);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- //_isInit = false;
- return ret == RState.Running;
- }
- private bool FsmMonitorHomeTask(object[] param)
- {
- RState ret = MonitorRoutine();
- if (ret == RState.Failed||ret==RState.Timeout)
- {
- LPDevice.OnError();
- PostMsg(MSG.Error);
- return false;
- }
- if (ret == RState.End)
- {
- //_isInit = true;
- return true;
- }
- return false;
- }
- private bool FsmStartUndock(object[] param)
- {
- RState ret = StartRoutine(_undockRoutine);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartDock(object[] param)
- {
- RState ret = StartRoutine(_dockRoutine);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartMap(object[] param)
- {
- RState ret = StartRoutine(_map);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartUnclamp(object[] param)
- {
- RState ret = StartRoutine(_unclamp);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartClamp(object[] param)
- {
- _clamp.IsUnloadClamp = false;
- RState ret = StartRoutine(_clamp);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartReadCarrierId(object[] param)
- {
- RState ret = StartRoutine(_readCarrierId);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartWriteCarrierId(object[] param)
- {
- _writeCarrierId.CarrierIdSetPoint = (string) param[0];
- RState ret = StartRoutine(_writeCarrierId);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartReadTagData(object[] param)
- {
- RState ret = StartRoutine(_readTag);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartWriteTagData(object[] param)
- {
- _writeTag.TagDataSetPoint = (string)param[0];
- RState ret = StartRoutine(_writeTag);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- return ret == RState.Running;
- }
- private bool FsmStartUnload(object[] param)
- {
- RState ret = StartRoutine(_unload);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- if(ret == RState.Running)
- {
- _lpDevice.UnloadStart();
- }
- return ret == RState.Running;
- }
- private bool FsmStartLoad(object[] param)
- {
- RState ret = StartRoutine(_load);
- if (ret == RState.Failed || ret == RState.End)
- return false;
- if (ret == RState.Running)
- {
- _lpDevice.LoadStart();
- }
- return ret == RState.Running;
- }
- private bool CycleLoadUnload(object[] param)
- {
- return _cycleLoadUnloadRoutine.Start(param) == RState.Running;
- }
- private bool CycleLoadUnloadMonitor(object[] param)
- {
- RState state = _cycleLoadUnloadRoutine.Monitor();
- if(state==RState.Failed||state==RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return state == RState.End;
- }
- private bool CycleLoadUnloadAbort(object[] param)
- {
- _cycleLoadUnloadRoutine.Abort();
- return true;
- }
- private bool fnOnline(object[] param)
- {
- bool online = (bool)param[0];
- //_efem.SetOnline(ModuleHelper.Converter(Module), online);
- return true;
- }
- public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
- {
- if (type == EnumTransferType.Pick)
- {
- //需要补充:判断LP 放好了,而且已经map过。
- //return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
- }
- else if (type == EnumTransferType.Place)
- {
- //需要补充:判断LP 放好了,而且已经map过。
- //return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
- }
- return false;
- }
- internal bool CheckReadyRunNewJob(ModuleName module)
- {
- return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
- }
- internal bool CheckReadyTransfer(ModuleName module)
- {
- return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
- }
- public override bool Home(out string reason)
- {
- throw new NotImplementedException();
- }
- public override void NoteJobStart()
- {
- throw new NotImplementedException();
- }
- public override void NoteJobComplete()
- {
- throw new NotImplementedException();
- }
- public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- throw new NotImplementedException();
- }
- public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- throw new NotImplementedException();
- }
- public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- throw new NotImplementedException();
- }
- public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
- out string reason)
- {
- throw new NotImplementedException();
- }
- public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
- {
- throw new NotImplementedException();
- }
- public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
- {
- throw new NotImplementedException();
- }
- public override bool CheckReadyForMap(ModuleName robot, Hand blade, out string reason)
- {
- throw new NotImplementedException();
- }
- }
- }
|