EfemHomeRoutine.cs 8.3 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229
  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using CyberX8_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using CyberX8_RT.Devices.EFEM;
  15. using MECF.Framework.Common.Utilities;
  16. namespace CyberX8_RT.Modules.EFEM
  17. {
  18. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  19. {
  20. private enum HomeStep
  21. {
  22. SetHomeSpeed,
  23. HomeAll,
  24. InitAligner,
  25. CheckWaferPresence,
  26. DummyMap,
  27. CheckDummyMap,
  28. SetRobotSpeed,
  29. End,
  30. }
  31. private enum HomeModuleStep
  32. {
  33. SetHomeSpeed,
  34. Home,
  35. HomeAxes,
  36. SetRobotSpeed,
  37. End,
  38. }
  39. private int _homeTimeout = 30 * 1000;
  40. ModuleName _targetModule;
  41. EfemBase _efem;
  42. int _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  43. int _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  44. bool _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  45. bool _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  46. bool _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  47. private
  48. Hand _hand = Hand.Blade1;
  49. private EfemMapDummyRoutine _mapDummyRoutine;
  50. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  51. {
  52. _efem = efem;
  53. _mapDummyRoutine = new EfemMapDummyRoutine(efem);
  54. }
  55. public RState Start(params object[] objs)
  56. {
  57. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
  58. {
  59. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the home action");
  60. return RState.Failed;
  61. }
  62. _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  63. _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  64. _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  65. _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  66. _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  67. _targetModule = (ModuleName)objs[0];
  68. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  69. return Runner.Start(Module, $"Home {_targetModule}");
  70. }
  71. public RState Monitor()
  72. {
  73. if(_targetModule == ModuleName.EFEM)
  74. {
  75. Runner.Run(HomeStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  76. .Run(HomeStep.HomeAll, HomeAll, IsStepComplete, _homeTimeout)
  77. //.Run(HomeStep.InitAligner, () => { return HomeModule(ModuleName.Aligner1); },IsStepComplete, _homeTimeout)
  78. .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _delay_5s)
  79. .Run(HomeStep.DummyMap, StartMapDummy,_delay_1ms)
  80. .WaitWithStopCondition(HomeStep.CheckDummyMap,()=>CommonFunction.CheckRoutineEndState(_mapDummyRoutine),
  81. ()=>CommonFunction.CheckRoutineStopState(_mapDummyRoutine))
  82. .Run(HomeStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  83. .End(HomeStep.End, NullFun, _delay_1ms);
  84. }
  85. else
  86. {
  87. Runner.Run(HomeModuleStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  88. .Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  89. .Run(HomeModuleStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  90. .End(HomeModuleStep.End, NullFun, _delay_50ms);
  91. }
  92. return Runner.Status;
  93. }
  94. private bool StartMapDummy()
  95. {
  96. return _mapDummyRoutine.Start() == RState.Running;
  97. }
  98. public void Abort()
  99. {
  100. }
  101. private bool IsStepComplete()
  102. {
  103. if (_efem.Status == RState.End)
  104. {
  105. return true;
  106. }
  107. else if (_efem.Status == RState.Failed)
  108. {
  109. Runner.Stop($"Efem home failed: {_efem.Status}");
  110. return true;
  111. }
  112. else
  113. return false;
  114. }
  115. private bool HomeAll()
  116. {
  117. return _efem.HomeAll();
  118. }
  119. private bool HomeModule()
  120. {
  121. return _efem.Home(_targetModule);
  122. }
  123. private bool CheckWaferPresence()
  124. {
  125. return _efem.CheckWaferPresence();
  126. }
  127. private bool SetHomeSpeed()
  128. {
  129. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _homeSpeed);
  130. }
  131. private bool SetRobotSpeed()
  132. {
  133. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _defaultSpeed);
  134. }
  135. private bool VerifyWaferPresence()
  136. {
  137. if (_efem.Status == RState.End)
  138. {
  139. var waferPresence = _efem.GetWaferPresence();
  140. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
  141. //if (waferPresence.Length != 3)
  142. //{
  143. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
  144. // return false;
  145. //}
  146. //aligner2
  147. //if (waferPresence[3] == '1')
  148. //{
  149. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  150. // {
  151. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  152. // }
  153. //}
  154. //else
  155. //{
  156. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  157. // {
  158. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  159. // }
  160. //}
  161. //cooling1
  162. //if (waferPresence[4] == '1')
  163. //{
  164. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  165. // {
  166. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  167. // }
  168. //}
  169. //else
  170. //{
  171. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  172. // {
  173. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  174. // }
  175. //}
  176. //cooling2
  177. //if (waferPresence[5] == '1')
  178. //{
  179. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  180. // {
  181. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  182. // }
  183. //}
  184. //else
  185. //{
  186. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  187. // {
  188. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  189. // }
  190. //}
  191. return true;
  192. }
  193. else if (_efem.Status == RState.Failed||_efem.Status==RState.Timeout)
  194. {
  195. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  196. return false;
  197. }
  198. else
  199. return false;
  200. }
  201. }
  202. }