LoaderCommonDevice.cs 17 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.Beckhoff.ModuleIO;
  10. using MECF.Framework.Common.CommonData.Loader;
  11. using MECF.Framework.Common.TwinCat;
  12. using CyberX8_Core;
  13. using CyberX8_RT.Devices.AXIS.CANOpen;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Linq;
  17. using System.Reflection;
  18. using System.Text;
  19. using System.Threading.Tasks;
  20. using MECF.Framework.Common.IOCore;
  21. namespace CyberX8_RT.Devices.Loader
  22. {
  23. public class LoaderCommonDevice : BaseDevice, IDevice
  24. {
  25. private enum LoaderCommonOperation
  26. {
  27. None,
  28. WaferHolderClampOn,
  29. WaferHolderClampOff,
  30. WaferHolderSideABClampOn,
  31. WaferHolderSideABClampOff,
  32. LeakFlowClampOn,
  33. LeakFlowClampOff,
  34. LeakVacuumOn,
  35. LeakVacuumOff,
  36. FlowTest,
  37. StopFlowTest
  38. }
  39. #region 常量
  40. private const string WAFER_HOLDER_PRESENT = "WaferHolderPresent";
  41. private const string WAFER_HOLDER_CLAMP = "WaferHolderClamp";
  42. private const string DRIP_TRAY_FLUID="DripTrayFluid";
  43. private const string WS_SIDE_CLAMP = "WSSideABClamp";
  44. private const string SIDEA_WAFER_HOLDER_CLAMP="SideAWaferHolderClamp";
  45. private const string SIDEB_WAFER_HOLDER_CLAMP = "SideBWaferHolderClamp";
  46. private const string LEAK_FLOW = "LeakFlow";
  47. private const string LEAK_FLOW_CLAMP = "LeakFlowClamp";
  48. private const string LEAK_VACUUM = "LeakVacuum";
  49. private const string LEAK_VACUUM_VALUE = "LeakVacuumValue";
  50. private const string COMMON_DATA = "CommonData";
  51. #endregion
  52. #region 内部变量
  53. /// <summary>
  54. /// 数据
  55. /// </summary>
  56. private LoaderCommonData _commonData = new LoaderCommonData();
  57. /// <summary>
  58. /// 状态
  59. /// </summary>
  60. private RState _status;
  61. /// <summary>
  62. /// 当前操作
  63. /// </summary>
  64. private LoaderCommonOperation _currentOperation;
  65. /// <summary>
  66. /// Flow LotTrackDatas
  67. /// </summary>
  68. private List<LoaderFlowLotTrackData> _flowDatas = new List<LoaderFlowLotTrackData>();
  69. #region Routine
  70. /// <summary>
  71. /// Wafer Holder Side Clamp Routine
  72. /// </summary>
  73. private LoaderCommonWaferHolderSideClampRoutine _sideClampRoutine;
  74. /// <summary>
  75. /// Flow Test Routine
  76. /// </summary>
  77. private LoaderFlowTestRoutine _flowTestRoutine;
  78. #endregion
  79. #endregion
  80. #region 属性
  81. /// <summary>
  82. /// Flow LotTrackData
  83. /// </summary>
  84. public List<LoaderFlowLotTrackData> FlowLotTrackDatas { get { return _flowDatas; } }
  85. /// <summary>
  86. /// 数据
  87. /// </summary>
  88. public LoaderCommonData CommonData { get { return _commonData; } set { _commonData = value; } }
  89. /// <summary>
  90. /// 状态
  91. /// </summary>
  92. public RState Status { get { return _status; } }
  93. #endregion
  94. /// <summary>
  95. /// 构造函数
  96. /// </summary>
  97. /// <param name="moduleName"></param>
  98. /// <param name="name"></param>
  99. public LoaderCommonDevice(string moduleName) : base(moduleName, "Common", "Common", "Common")
  100. {
  101. }
  102. /// <summary>
  103. /// 初始化
  104. /// </summary>
  105. /// <returns></returns>
  106. public bool Initialize()
  107. {
  108. InitializeRoutine();
  109. SubscribeData();
  110. SubscribeValueAction();
  111. InitializeOpertation();
  112. return true;
  113. }
  114. /// <summary>
  115. /// 初始化Routine
  116. /// </summary>
  117. private void InitializeRoutine()
  118. {
  119. _sideClampRoutine = new LoaderCommonWaferHolderSideClampRoutine(Module);
  120. _flowTestRoutine = new LoaderFlowTestRoutine(Module);
  121. }
  122. /// <summary>
  123. /// 订阅数据
  124. /// </summary>
  125. private void SubscribeData()
  126. {
  127. if(SC.ContainsItem($"{Module}.LeakTestLSOKLimit"))
  128. {
  129. _commonData.LeakMajor = SC.GetValue<double>($"{Module}.LeakTestLSOKLimit");
  130. }
  131. if(SC.ContainsItem($"{Module}.LeakTestCutOffValue"))
  132. {
  133. _commonData.LeakMinor = SC.GetValue<double>($"{Module}.LeakTestCutOffValue");
  134. }
  135. DATA.Subscribe($"{Module}.{COMMON_DATA}", () => _commonData);
  136. DATA.Subscribe($"{Module}.DripTrayFluid", () => _commonData.DripTrayFluid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  137. DATA.Subscribe($"{Module}.SideAWaferShuttleClamp", () => _commonData.SideAWaferHolderClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  138. DATA.Subscribe($"{Module}.SideBWaferShuttleClamp", () => _commonData.SideBWaferHolderClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  139. DATA.Subscribe($"{Module}.WaferShuttleClamp", () => _commonData.WaferHolderClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  140. DATA.Subscribe($"{Module}.WaferShuttlePresent", () => _commonData.WaferHolderPresent, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  141. DATA.Subscribe($"{Module}.LeakFlow", () => _commonData.LeakFlow, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  142. DATA.Subscribe($"{Module}.LeakFlowClamp", () => _commonData.LeakFlowClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  143. DATA.Subscribe($"{Module}.LeakMinor", () => _commonData.LeakMinor, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  144. DATA.Subscribe($"{Module}.LeakMajor", () => _commonData.LeakMajor, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  145. DATA.Subscribe($"{Module}.LeakVacuum", () => _commonData.LeakVacuum, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  146. DATA.Subscribe($"{Module}.LeakVacuumValue", () => _commonData.LeakVacuumValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  147. DATA.Subscribe($"{Module}.LeakStatus", () => _commonData.LeakStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  148. }
  149. /// <summary>
  150. /// 订阅变量数值发生变化
  151. /// </summary>
  152. private void SubscribeValueAction()
  153. {
  154. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", WAFER_HOLDER_PRESENT, UpdateVariableValue);
  155. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", WAFER_HOLDER_CLAMP, UpdateVariableValue);
  156. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", DRIP_TRAY_FLUID, UpdateVariableValue);
  157. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", WS_SIDE_CLAMP, UpdateVariableValue);
  158. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", SIDEA_WAFER_HOLDER_CLAMP, UpdateVariableValue);
  159. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", SIDEB_WAFER_HOLDER_CLAMP, UpdateVariableValue);
  160. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", LEAK_FLOW, UpdateVariableValue);
  161. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", LEAK_FLOW_CLAMP, UpdateVariableValue);
  162. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", LEAK_VACUUM, UpdateVariableValue);
  163. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", LEAK_VACUUM_VALUE, UpdateVariableValue);
  164. }
  165. /// <summary>
  166. /// 初始化操作
  167. /// </summary>
  168. private void InitializeOpertation()
  169. {
  170. OP.Subscribe($"{Module}.{Name}.WaferHolderClampOn",(cmd,args)=> { return WaferHolderClampOnAction(); });
  171. OP.Subscribe($"{Module}.{Name}.WaferHolderClampOff",(cmd,args)=> { return WaferHolderClampOffAction(); });
  172. OP.Subscribe($"{Module}.{Name}.WaferHolderSideClampOn", WaferHolderSideClampOnAction);
  173. OP.Subscribe($"{Module}.{Name}.WaferHolderSideClampOff", WaferHolderSideClampOffAction);
  174. OP.Subscribe($"{Module}.{Name}.LeakFlowClampOn", (cmd,args)=> { return LeakFlowClampOnAction(); });
  175. OP.Subscribe($"{Module}.{Name}.LeakFlowClampOff", (cmd, args) => { return LeakFlowClampOffAction(); });
  176. OP.Subscribe($"{Module}.{Name}.LeakVacuumOn", (cmd, args) => { return LeakVacuumOnAction(); });
  177. OP.Subscribe($"{Module}.{Name}.LeakVacuumOff", (cmd, args) => { return LeakVacuumOffAction(); });
  178. OP.Subscribe($"{Module}.Common.StartFlowTest", (cmd, args) => { return StartFlowTestAction(); });
  179. OP.Subscribe($"{Module}.Common.StopFlowTest", (cmd, args) => { return StopFlowTestAction(); });
  180. }
  181. #region Operation
  182. /// <summary>
  183. /// Wafer Holder Clamp On操作
  184. /// </summary>
  185. public bool WaferHolderClampOnAction()
  186. {
  187. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
  188. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  189. }
  190. /// <summary>
  191. /// Wafer Holder Clamp Off操作
  192. /// </summary>
  193. public bool WaferHolderClampOffAction()
  194. {
  195. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
  196. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  197. }
  198. /// <summary>
  199. /// Wafer Holder Side Clamp On操作
  200. /// </summary>
  201. private bool WaferHolderSideClampOnAction(string cmd, object[] args)
  202. {
  203. if (!JudgeRunningState(LoaderCommonOperation.WaferHolderSideABClampOn))
  204. {
  205. _currentOperation = LoaderCommonOperation.WaferHolderSideABClampOn;
  206. _status = _sideClampRoutine.Start(true);
  207. return true;
  208. }
  209. else
  210. {
  211. return false;
  212. }
  213. }
  214. /// <summary>
  215. /// Wafer Holder Side Clamp Off操作
  216. /// </summary>
  217. private bool WaferHolderSideClampOffAction(string cmd, object[] args)
  218. {
  219. if (!JudgeRunningState(LoaderCommonOperation.WaferHolderSideABClampOff))
  220. {
  221. _currentOperation = LoaderCommonOperation.WaferHolderSideABClampOff;
  222. _status = _sideClampRoutine.Start(false);
  223. return true;
  224. }
  225. else
  226. {
  227. return false;
  228. }
  229. }
  230. /// <summary>
  231. /// Leak Flow Clamp On操作
  232. /// </summary>
  233. public bool LeakFlowClampOnAction()
  234. {
  235. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{LEAK_FLOW_CLAMP}");
  236. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  237. }
  238. /// <summary>
  239. /// Leak Flow Clamp Off操作
  240. /// </summary>
  241. public bool LeakFlowClampOffAction()
  242. {
  243. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{LEAK_FLOW_CLAMP}");
  244. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  245. }
  246. /// <summary>
  247. /// Leak Vacuum On操作
  248. /// </summary>
  249. public bool LeakVacuumOnAction()
  250. {
  251. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{LEAK_VACUUM}");
  252. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  253. }
  254. /// <summary>
  255. /// Leak Vacuum Off操作
  256. /// </summary>
  257. public bool LeakVacuumOffAction()
  258. {
  259. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{LEAK_VACUUM}");
  260. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  261. }
  262. /// <summary>
  263. /// FlowTest操作
  264. /// </summary>
  265. public bool StartFlowTestAction()
  266. {
  267. if (!JudgeRunningState(LoaderCommonOperation.FlowTest))
  268. {
  269. _currentOperation = LoaderCommonOperation.FlowTest;
  270. _status = _flowTestRoutine.Start(false);
  271. return true;
  272. }
  273. else
  274. {
  275. return false;
  276. }
  277. }
  278. /// <summary>
  279. /// 停止 FlowTest操作
  280. /// </summary>
  281. public bool StopFlowTestAction()
  282. {
  283. if (_currentOperation==LoaderCommonOperation.FlowTest)
  284. {
  285. _flowTestRoutine.Abort();
  286. _currentOperation = LoaderCommonOperation.None;
  287. _status = RState.End;
  288. return true;
  289. }
  290. else
  291. {
  292. return true;
  293. }
  294. }
  295. /// <summary>
  296. /// 判定运行状态
  297. /// </summary>
  298. /// <returns></returns>
  299. private bool JudgeRunningState(LoaderCommonOperation operation)
  300. {
  301. if (_status == RState.Running)
  302. {
  303. EV.PostAlarmLog($"{Module}.{Name}", eEvent.ERR_LOADER, $"{Module}.{Name} current execute {_currentOperation},cannot {operation}");
  304. return true;
  305. }
  306. return false;
  307. }
  308. #endregion
  309. /// 更新变量数值
  310. /// </summary>
  311. /// <param name="variable"></param>
  312. /// <param name="value"></param>
  313. private void UpdateVariableValue(string variable, object value)
  314. {
  315. PropertyInfo property = CommonData.GetType().GetProperty(variable);
  316. if (property != null)
  317. {
  318. property.SetValue(CommonData, value);
  319. }
  320. }
  321. /// <summary>
  322. /// 定时器
  323. /// </summary>
  324. /// <returns></returns>
  325. public bool OnTimer()
  326. {
  327. if (_status == RState.Running)
  328. {
  329. if (_currentOperation != LoaderCommonOperation.None)
  330. {
  331. IRoutine routine = GetCurrentRoutine(_currentOperation);
  332. if (routine != null)
  333. {
  334. CheckRoutineState(routine, _currentOperation);
  335. }
  336. else
  337. {
  338. EndOperation(RState.End);
  339. }
  340. }
  341. }
  342. return true;
  343. }
  344. /// <summary>
  345. /// 获取当前操作对应的Routine
  346. /// </summary>
  347. /// <param name="currentOperation"></param>
  348. /// <returns></returns>
  349. private IRoutine GetCurrentRoutine(LoaderCommonOperation currentOperation)
  350. {
  351. switch (currentOperation)
  352. {
  353. case LoaderCommonOperation.WaferHolderSideABClampOn:
  354. case LoaderCommonOperation.WaferHolderSideABClampOff:
  355. return _sideClampRoutine;
  356. case LoaderCommonOperation.FlowTest:
  357. return _flowTestRoutine;
  358. default:
  359. return null;
  360. }
  361. }
  362. /// <summary>
  363. /// 检验Routine状态
  364. /// </summary>
  365. /// <param name="routine"></param>
  366. /// <param name="currentOperation"></param>
  367. private void CheckRoutineState(IRoutine routine, LoaderCommonOperation currentOperation)
  368. {
  369. RState state = routine.Monitor();
  370. if (state == RState.End)
  371. {
  372. EndOperation(RState.End);
  373. }
  374. else if (state == RState.Failed || state == RState.Timeout)
  375. {
  376. LOG.WriteLog(eEvent.ERR_LOADER, $"{Module}.{Name}", $"{currentOperation} error");
  377. EndOperation(RState.Failed);
  378. }
  379. }
  380. /// <summary>
  381. /// 结束操作
  382. /// </summary>
  383. private void EndOperation(RState state)
  384. {
  385. _status = state;
  386. _currentOperation = LoaderCommonOperation.None;
  387. }
  388. public void ExportFlowLotTrackDatas(List<LoaderFlowLotTrackData> flowDatas)
  389. {
  390. _flowDatas.Clear();
  391. _flowDatas = flowDatas;
  392. }
  393. #region 设备接口
  394. /// <summary>
  395. /// 监控
  396. /// </summary>
  397. public void Monitor()
  398. {
  399. }
  400. public void Reset()
  401. {
  402. }
  403. public void Terminate()
  404. {
  405. }
  406. #endregion
  407. }
  408. }