CyberX8/CyberX8_RT/Devices/EFEM/EfemMessage.cs

using System;
using System.Collections.Generic;
using System.IO;
using System.Reflection;
using System.Runtime.Serialization;
using System.Runtime.Serialization.Formatters.Binary;
using System.Text.RegularExpressions;
using Aitex.Core.Backend;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using CyberX8_Core;

namespace CyberX8_RT.Devices.YASKAWA
{
    [Serializable]
    public sealed class EfemMessage : IEfemMessage, ICloneable
    {

        public enum MsgHead
        {
            MOV, GET, ACK, INF, SET, CAN, ABS, EVT, NAK
        }

        public const char EOF = ';';

        public EfemOperation Operation  { get; set; }
        public MsgHead Head             { get; set; }
        public ModuleName Module          { get; set; }
        public IList<string> Data       { get; set; }
        public MsgDirection Direct      { get; set; } = MsgDirection.To;
        public IList<string> Parameters { get; set; }
        public string RawString         { get; set; }
        public string Factor            { get; set; }       // NAK, CAN

        public override string ToString()
        {
            string sPara = ToParamString();
            string sOP = EfemConstant.OperationString[Operation];
            string context = $"{Head}:{sOP}{sPara}{EOF}\r";
            LOG.WriteBackgroundLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), context.Replace("\r",""));
            return context;
        }

        public string ToParamString()
        {
            string res = string.Empty;
            if (Parameters == null || Parameters.Count <= 0)
                return res;

            foreach (var para in Parameters)
            {
                res += '/' + para;
            }
            return res;
        }

        public object Clone()
        {
            using (Stream objStream = new MemoryStream())
            {
                IFormatter formatter = new BinaryFormatter();
                formatter.Serialize(objStream, this);
                objStream.Seek(0, SeekOrigin.Begin);
                return formatter.Deserialize(objStream) as EfemMessage ?? throw new InvalidOperationException();
            }
        }
    }
    public static class Extension
    {
        private const string ERROR_MSG = "hardware message invalid";

        /// <summary>
        /// NAK:FACTOR|Message*;
        /// ACK:Message*;
        /// CAN:Message*|Factor/Place;
        /// ABS:Message*|Error/Parameter1/Parameter2;
        /// EVT:Message*;
        /// </summary>
        public static EfemMessage ToMessage(this string context)
        {
            if (string.IsNullOrEmpty(context) || context.Length < 3)
                throw new ArgumentNullException(ERROR_MSG);

            EfemMessage msg = new EfemMessage { RawString = context, Direct = MsgDirection.From, Data = new List<string>() };

            // remove EOT
            string messageBody = context.Substring(0, context.IndexOf(EfemMessage.EOF) + 1);

            try
            {
                // split up the string
                string[] sBodies = messageBody.Split(Constant.delimiters);

                string sHead = sBodies[0];
                string sBasic = sBodies[1];
                string sPort = sBodies[2];

                // Head
                if (Enum.TryParse(sHead, true, out EfemMessage.MsgHead msgHead))
                {
                    msg.Head = msgHead;
                }

                switch (msg.Head)
                {
                case EfemMessage.MsgHead.ACK:
                case EfemMessage.MsgHead.MOV:
                case EfemMessage.MsgHead.INF:
                case EfemMessage.MsgHead.EVT:
                    // Basic
                    msg.Operation = EfemConstant.ToOperation(sBasic);

                    // Port
                    if (Regex.IsMatch(sPort, @"P[123]$"))
                    {
                        msg.Module = sPort.ToModule();
                    }
                    else if (Regex.IsMatch(sPort, @"ALIGN\d?", RegexOptions.IgnoreCase))
                    {
                        msg.Module = sPort.ToModule();
                    }
                    else
                    {
                        msg.Module = ModuleName.EFEM;
                    }

                        // Data
                        switch (msg.Operation)
                        {
                            case EfemOperation.StateTrack:
                            case EfemOperation.GetWaferInfo:
                                msg.Data.Add(sBodies[3]);
                                break;
                            case EfemOperation.CarrierId:
                                msg.Data.Add(msg.RawString.Substring("INF:CSTID/P1/".Length));
                                break;
                            case EfemOperation.SigStatus:
                                msg.Data.Add(sBodies[2]);
                                msg.Data.Add(sBodies[3]);
                                msg.Data.Add(sBodies[4]);
                                break;
                            case EfemOperation.Ready:
                                msg.Data.Add(sBodies[2]);
                                break;
                            default:
                                break;
                        }
                        break;

                    case EfemMessage.MsgHead.NAK:
                        msg.Operation = EfemConstant.ToOperation(sBasic);
                        // Port
                        if (Regex.IsMatch(sPort, @"P[123]$"))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else if (Regex.IsMatch(sPort, @"ALIGN\d?", RegexOptions.IgnoreCase))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else
                        {
                            msg.Module = ModuleName.EFEM;
                        }

                        msg.Factor = sBodies[1];
                        msg.Data.Add(sBodies[2]);

                        msg.Operation = EfemConstant.ToOperation(sBasic);
                        break;

                    case EfemMessage.MsgHead.CAN:
                        msg.Operation = EfemConstant.ToOperation(sBasic);
                        // Port
                        if (Regex.IsMatch(sPort, @"P[123]$"))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else if (Regex.IsMatch(sPort, @"ALIGN\d?", RegexOptions.IgnoreCase))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else
                        {
                            msg.Module = ModuleName.EFEM;
                        }
                        // CAN:ERROR/CLEAR;
                        int a1 = messageBody.IndexOf(':');
                        int a3 = messageBody.IndexOf(';');

                    int a2 = messageBody.IndexOf('|');
                    if (a2 > 0)
                    {
                        msg.Data.Add(messageBody.Substring(a1 + 1, a2 - a1 - 1));
                        msg.Factor = messageBody.Substring(a2 + 1, a3 - a2 - 1);
                    }
                    else
                    {
                        int a8 = messageBody.IndexOf('/');
                        msg.Factor = sBodies[2];
                    }
                    break;

                    case EfemMessage.MsgHead.ABS:
                        msg.Operation = EfemConstant.ToOperation(sBasic);
                        // Port
                        if (Regex.IsMatch(sPort, @"P[123]$"))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else if (Regex.IsMatch(sPort, @"ALIGN\d?", RegexOptions.IgnoreCase))
                        {
                            msg.Module = sPort.ToModule();
                        }
                        else
                        {
                            msg.Module = ModuleName.EFEM;
                        }
                        // ABS:INIT/ALL|ERROR/SYSTEM_FF10/UNDEFINITION;
                        int a4 = messageBody.IndexOf('|');
                        int a5 = messageBody.IndexOf(';');

                        // ABS:LOAD/LLLB01/ARM2|ERROR/RB|2B80;


                    string errStr = messageBody.Substring(a4 + 1, a5 - a4 - 1);
                        //分割位置和因素 最后一位是需要处理
                    string[] a6 = errStr.Split('/','|');

                    if (a6.Length < 3)
                    {
                       //因为小于导致后续使用相关变量时会越界
                       //需要补全 已保证使用
                       msg.Factor = errStr;
                       msg.Data.Add($"ABS 格式错误");
                       msg.Data.Add($"{errStr}");
                       LOG.Write(eEvent.WARN_EFEM_COMMON_WARN, ModuleName.EFEM, $"ABS 格式错误 {errStr}");
                    }
                    else
                    {
                        msg.Factor = a6[0];
                        msg.Data.Add(a6[1]);
                        string errorcode = a6[2].Substring(1);
                        if (Constant._EFEMHWErrorCode2Msg.ContainsKey(errorcode))
                            msg.Data.Add(Constant._EFEMHWErrorCode2Msg[errorcode]);
                        else if (!string.IsNullOrEmpty(MatchError(errorcode)))
                            msg.Data.Add(MatchError(errorcode));
                        else
                            msg.Data.Add(a6[2]);
                    }
                    break;
                }
            }
            catch (Exception ex)
            {
                EV.PostAlarmLog(ModuleName.EFEM.ToString(), $"收到[{context}],解析出错[{ex.Message}]");
            }

            return msg;
        }

        public static EfemMessage ToSunWayMessage(this string context)
        {
            if (string.IsNullOrEmpty(context) || context.Length < 3)
                throw new ArgumentNullException(ERROR_MSG);

            EfemMessage msg = new EfemMessage { RawString = context, Direct = MsgDirection.From, Data = new List<string>() };
            return msg;
        }
        private static string MatchError(string errorcode)
        {
            foreach (KeyValuePair<Regex, string> item in Constant._EFEMHWRegexError2Msg) 
            { 
                if (item.Key.IsMatch(errorcode))
                    return item.Value; 
            }
            return string.Empty;
        }

        public static string ToHWString(this Position pos)
        {
            string res = string.Empty;
            //todo 需要增加新的协议确认Aligner,Puf,Srd,Dummy内容
            if (ModuleHelper.IsAligner(pos.Module))
            {
                res = Constant.ModuleString[pos.Module];
            }
            else
            {
                string sMod = Constant.ModuleString[pos.Module];
                int num = pos.Slot + 1;
                string sSlot = num.ToString("D2");
                res = $"{sMod}{sSlot}";
            }
            return res;
        }

        public static string ToHWString(this ModuleName mod)
        {
            return Constant.ModuleString[mod];
        }

        public static ModuleName ToModule(this string str)
        {
            if (Constant.StringModule.ContainsKey(str))
                return Constant.StringModule[str];
            throw new ApplicationException($"Cannot translate {str}");
        }
        public static ModuleName SunWayToModule(this string str)
        {
            if (Constant.SunWayStringModule.ContainsKey(str))
                return Constant.SunWayStringModule[str];
            throw new ApplicationException($"Cannot translate {str}");
        }
    }

    /// <summary>
    /// constant define
    /// </summary>
    public class Constant
    {
        public static readonly char[] delimiters = { ':', '/', '>', '|', ';' };

        public const string ALL = "ALL";
        public const string MAP = "MAPDT";
        public const string SYS = "SYSTEM";
        public const string STOWER = "STOWER";

        public static readonly Dictionary<ModuleName, string> ModuleString = new Dictionary<ModuleName, string>
        {
            [ModuleName.EFEM] = "ALL",
            [ModuleName.EfemRobot] = "ROB",
            [ModuleName.LP1] = "P1",
            [ModuleName.LP2] = "P2",
            [ModuleName.LP3] = "P3",
            [ModuleName.PMA] = "LLA",
            [ModuleName.PMB] = "LLB",
            [ModuleName.SRD1] = "SRD1",
            [ModuleName.SRD2]="SRD2",
            [ModuleName.Dummy1]="Dummy1",
            [ModuleName.Dummy2] = "Dummy2",
            [ModuleName.Aligner1] = "ALIGN3",
            [ModuleName.Aligner2] = "ALIGN4"
        };

        public static readonly Dictionary<string, ModuleName> StringModule = new Dictionary<string, ModuleName>
        {
            ["ALL"]    = ModuleName.EFEM,
            ["System"] = ModuleName.EFEM,
            ["P1"]     = ModuleName.LP1,
            ["P2"]     = ModuleName.LP2,
            ["P3"]     = ModuleName.LP3,
            ["LLA"]    = ModuleName.PMA,
            ["LLB"]    = ModuleName.PMB,
            ["ALIGN3"] = ModuleName.Aligner1,
            ["ALIGN4"] = ModuleName.Aligner2
        };
        public static readonly Dictionary<ModuleName, string> SunWayModuleString = new Dictionary<ModuleName, string>
        {
            [ModuleName.EFEM] = "ALL",
            [ModuleName.EfemRobot] = "ROB",
            [ModuleName.LP1] = "LP1",
            [ModuleName.LP2] = "LP2",
            [ModuleName.LP3] = "LP3",
            [ModuleName.Aligner1] = "ALN1"
        };
        public static readonly Dictionary<string, ModuleName> SunWayStringModule = new Dictionary<string, ModuleName>
        {
            ["ALL"] = ModuleName.EFEM,
            ["System"] = ModuleName.EFEM,
            ["LP1"] = ModuleName.LP1,
            ["LP2"] = ModuleName.LP2,
            ["LP3"] = ModuleName.LP3,
            ["ALN1"] = ModuleName.Aligner1
        };

        public static readonly Dictionary<Hand, string> ArmString = new Dictionary<Hand, string>
        {
            [Hand.Blade1] = "ARM2",
            [Hand.Blade2] = "ARM1",
            [Hand.Both] = "ARM3"
        };

        public static readonly Dictionary<Hand, string> SunWayArmString = new Dictionary<Hand, string>
        {
            [Hand.Blade1]="ARM1"
        };

        public static readonly Dictionary<ExtendPos, string> ExtendPosString = new Dictionary<ExtendPos, string>
        {
            //[ExtendPos.GetReady]  = "G1",
            //[ExtendPos.GetTarget] = "GB",
            //[ExtendPos.GetBack]   = "G4",
            //[ExtendPos.PutReady]  = "P1",
            //[ExtendPos.PutTarget] = "PB",
            //[ExtendPos.PutBack]   = "P4"
        };

        public static readonly Dictionary<string, string> SunWayFactorString = new Dictionary<string, string>
        {
            { "NOREADY","通信握手未完成" },
            { "SORC_NOWAF","Robot 手指无片，无法执行放片" },
            { "DEST_NOWAF","目标位无片，无法执行取片" },
            { "SORC_WAFER","Robot 手指有片，无法执行取片" },
            { "DEST_WAFER","目标位有片，无法执行放片" },
            { "VAC","真空不足" },
            { "AIR","大气不足" },
            { "MAPPARAM_NG","执行扫片失败" },
            { "WAFERUPDATEFAIL","晶圆状态更新异常" },
            { "NOLOCATION","未找到工位配置信息" },
            { "REMOVE","未找到设备或设备已断开连接" },
            { "NOMAPPINGDATA","没有找到相应的 Mapping 结果" },
            { "ALARM","触发 Alarm 报警" },
            { "CLOSE","LoadPort 门没有开启" },
            { "PODNOTCLOSED","POD 门未关闭" },
            { "AREASENSOR","触发安全光栅" },
            { "EMS","触发 EMS 急停" },
            { "WAFERPROTRUSION","晶圆突出检测触发" },
            { "DOOR","安全门开启" },
            { "COMM","设备通信异常" },
            { "EXCEPTION","系统抛出异常" },
            { "BUSY","系统繁忙" },
            { "CKSUM","校验和验证失败" },
            { "MAINTENANCE","当前系统为维护模式" },
            { "MSG_NG","指令错误" },
            { "PARAM_NG","参数错误" },
            { "NODEVICEMODEL","未找到该设备型号" },
            { "SLOT_NG","Slot 超出范围" },
            { "UNDEFINITION","发生未知错误" },
            { "NOIOSET","未找到 IO 设置信息" },
            { "SETFAIL","设置失败" },
            { "SETCLAMPFAIL","设置 Unclamp 失败" },
            { "SETMAGNETICSWITCHFAIL","设置电磁阀失败" },
            { "TIMEOUT","设备通信超时" },
            { "CSTSIZEMISMATCH","Cassette 尺寸不匹配" },
            { "ROBEXTEND","机械手伸手报警" },
            { "WAFSIZEMISMATCH","晶圆尺寸不匹配" },
            { "MAPPARAM_NG_WAFER","robot 手指带片无法 mapping" },
            { "LIQUIDLEAKAGE","漏液检测报警" },
            { "WATERFLOWCHECK","水流检测报警" },
            { "SLOT_ERROR","设置槽数错误" }
        };

        public static readonly Dictionary<string, string> FactorString = new Dictionary<string, string>
        {
            { "MSG",        "Message error" },
            { "NOREAD",     "Communication not established" },
            { "NOINITCMPL", "Initialization not completed" },
            { "NOORGCMPL",  "Not org finished" },
            { "VAC",        "Vac error" },
            { "AIR",        "Air error" },
            { "EMS",        "EMS pushed" },
            { "ERROR",      "Has Error" },
            { "BUSY",       "Busy (Module in use)" },
            { "CMPL",       "Already Completed" },
            { "NOMAPCMPL",  "Not Mapped" },
            { "NONWAF",     "NO wafer on the position" },
            { "WAFER",      "Wafer already existed" },
            { "NONPOD",     "No Pod" },
            { "POD",        "Pod Exist" },
            { "NOTINMOTION","Not in Motion" },
            { "HOLD",       "Holded" },
            { "NOHOLD",     "Not hold" },
            { "LLCLOSE",    "LL door closed state" },
            { "LLNOEXTEND", "LL not extended" },
            { "REMOVE",     "remove" },
            { "MAINTENANCE","In maintain mode or EFEM offline" },
            { "NOLINK",     "not config" },
            { "ARMEXTEND",  "arm extended" },
            { "POWER",      "power off" },
            { "PRTWAF",     "TODO" },
            { "NOPOS",      "Not at valid position" },
            { "NOFUNC",     "not support" },
            { "PARAM_NG",   "Invalid parameters are included" }
        };

        public static readonly Dictionary<string, string> ABS_PARA1 = new Dictionary<string, string>
        {
            { "SYSTEM_FF01", "No specific route data or malfunction" },
            { "SYSTEM_FF10", "Operation time out" },
            { "SYSTEM_FF11", "Communication time out between PC for robot control and controller" },
            { "SYSTEM_FF12", "Encoder battery error" },
            { "SYSTEM_FF13", "Loss of encoder information" },
            { "SYSTEM_FF20", "No data file of route" },
            { "SYSTEM_FF21", "Serial number in route data is wrong" },
            { "SYSTEM_FF22", "No line for serial number in route data" },
            { "SYSTEM_FF23", "Discrepancy in serial number between route data and teaching data" },
            { "SYSTEM_FF30", "Failure of pre-operation movement at the wrist in the robot" },
            { "SYSTEM_FF83", "Inability of the robot to return origin" },
            { "SYSTEM_FFB0", "Operation malfunction at fan in robot" },
            { "SYSTEM_FFF0", "Alarm at Z-axis driver in the robot" },
            { "SYSTEM_FFFF", "Robot control program malfunction" }
        };


        #region 硬件错误码

        public static readonly Dictionary<string, string> _EFEMHWErrorCode2Msg = new Dictionary<string, string>()
        {
            {"020","伺服电源关闭，运动指令失败"},
            {"021","伺服电源开启，设置命令失败"},
            {"040","命令被拒绝，因为主机命令是在控制器处于TEACH模式时发送的"},
            {"050","命令被拒绝，因为当主机向同一单元发送另一个运动命令时，该单元正在执行运动命令"},
            {"051","当间距生成方法设置为“自动计算模式”时，主机尝试在槽间设置间距"},
            {"052","重新启动命令被拒绝，因为在电源打开后立即发生错误"},
            {"053","Get/Put(或exchange)命令被拒绝，因为在此之前没有执行“移动到就绪位置”命令"},
            {"054","晶圆片对准命令被拒绝，因为在对准命令之前，预对准器的“移动到对准就绪位置”命令没有被执行"},
            {"055","指定了不可访问的站类型"},
            {"058","命令被拒绝，因为发送的命令不被指定的单元支持"},
            {"059","“传送点之间的移动”命令被拒绝，因为指定了一个无效点"},
            {"05A","不能移动，因为机械手在线性运动不能执行的范围(或姿势)"},
            {"05C","晶圆对中没有执行"},
            {"05D","手臂校准被拒绝，因为预对准阶段没有记录"},
            {"05E","映射数据引用命令被拒绝，因为映射从未执行过"},
            {"05F","命令被拒绝，因为数据上传/下载命令正在进行中"},
            {"061","无法从目前的操纵姿势安全回家"},
            {"064","升降机与预对准器相撞"},
            {"070","命令被拒绝，因为底部槽位没有被记录"},
            {"071","命令被拒绝，因为当俯仰产生方法设置为“自动计算模式”时，没有记录顶部槽位"},
            {"088","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"089","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"08A","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"08B","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"08C","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"08D","由教学位置计算出的转换位置(姿势)超出了运动极限"},
            {"090","来自主机的通信命令的参数设置超出范围"},
            {"0A0","未执行对齐运动，因为对齐器未准备好在具有对齐角度的put运动命令中运行"},
            {"0E0","调整偏移量超过限额"},
            {"0F0","输入电压太低" },
            {"701","伺服控制板或ROM有缺陷"},
            {"703","主控制板与伺服控制板之间发生通信错误"},
            {"704","主控制板与伺服控制板之间发生通信错误"},
            {"705","主控板与变频器之间发生通信错误"},
            {"706","伺服控制板出现系统错误"},
            {"707","伺服控制板出现系统错误"},
            {"709","电流不正常"},
            {"70A","检测到电源丢失"},
            {"70B","防突电流继电器不正常"},
            {"70C","转换器类型不匹配"},
            {"70F","伺服控制板无响应"},
            {"713","DB是不正常的"},
            {"714","发生变换器充电错误"},
            {"715","出现硬线基块错误"},
            {"716","发生硬线基启用错误"},
            {"717","发生基本块错误"},
            {"718","发生基本启用错误"},
            {"719","请求硬线座释放，但不释放"},
            {"71A","刹车锁定错误"},
            {"71B","刹车解锁错误"},
            {"71C","电源继电器不正常"},
            {"721","伺服参数异常"},
            {"722","伺服参数异常"},
            {"725","检测到转换器过热"},
            {"726","检测到未定义的命令"},
            {"727","检测到不支持的命令"},
            {"728","检测到命令的数据异常"},
            {"729","伺服控制板出现系统错误"},
            {"72A","伺服控制板出现系统错误"},
            {"72B","伺服参数值异常"},
            {"730","Amp模块未安装"},
            {"732","伺服参数异常"},
            {"733","伺服参数异常"},
            {"734","伺服参数异常"},
            {"735","伺服参数异常"},
            {"73F","从伺服控制板接收未定义的错误"},
            {"740","发生错误时PG"},
            {"741","请求多重伺服开启"},
            {"742","伺服控制板出现系统错误"},
            {"743","伺服控制板出现系统错误"},
            {"744","伺服控制板出现系统错误"},
            {"745","伺服控制板出现系统错误"},
            {"746","伺服控制板出现系统错误"},
            {"74A","伺服控制板出现系统错误"},
            {"74B","伺服控制板出现系统错误"},
            {"74C","伺服控制板出现系统错误"},
            {"74D","伺服控制板出现系统错误"},
            {"7A0","PAIF接收到一条未定义的命令"},
            {"7A1","PAIF板检测到命令的参数值超出范围"},
            {"7A2","检测到不支持的命令"},
            {"7A3","数据缓冲区已满"},
            {"7A4","检测到不支持的命令"},
            {"7A5","编码器数据异常"},
            {"7A6","检测到不支持的命令"},
            {"7AE","PA板还没有准备好"},
            {"7AF","PA板没有回应"},
            {"7B0","CCD传感器头电源电压低"},
            {"7B4","关闭CCD光源LED"},
            {"7B5","CCD光源LED光强下降"},
            {"7C0","发现PAIF板的看门狗"},
            {"7C1","检测到低电压"},
            {"7C2","异常中断发生"},
            {"7C3","打开LED，但光强度为零"},
            {"7CF","没有安装PAIF板"},
            {"7D0","检测到过电压"},
            {"7D1","数据采集失败"},
            {"900","主机命令消息中断"},
            {"910","从主机接收到的数据的总和是无效的"},
            {"920","从主机接收到未定义单元的命令"},
            {"930","从主机接收的命令未定义"},
            {"940","附加到从主机接收到的命令的参数为"},
            {"950","执行完成的确认报告没有从主机收到"},
            {"960","从主机接收到的命令消息中序列号不正确"},
            {"961","序列号与先前从主机接收到的命令消息上的序列号相同"},
            {"970","没有定界符"},
            {"9A1","当控制器收到来自主机的命令时，消息缓冲区已满"},
            {"9C0","局域网设备设置无效"},
            {"9C1","设置的IP地址无效"},
            {"9C2","设置子网掩码无效"},
            {"9C3","设置默认的门方式无效"},
            {"9D0","主机消息接收失败(以太网)"},
            {"9E0","来自主机的请求是不可接受的，因为在运行维护工具期间"},
            {"9E1","由于使用维护工具获取数据时内部数据被破坏，无法获取"},
            {"A01","重新检测电源电压的下降"},
            {"A10","外部紧急停机(EXESP)由I/O启用"},
            {"A20","TP紧急停止按钮被按下"},
            {"A21","检测联锁板故障"},
            {"A30","紧急停机由主机发出指令"},
            {"A40","控制器冷却风扇1出现错误"},
            {"A41","控制器冷却风扇2出现错误"},
            {"A42","控制器冷却风扇3出现错误"},
            {"A45","1号风机有故障"},
            {"A46","2号机有故障"},
            {"A4F","控制器的内存备份电池不足"},
            {"AC0","从I/O输入一个安全栅栏(SAFF)信号"},
            {"AC9","保护停止(ONEN)信号从I/O输入"},
            {"AE0","由教学挂件控制，切换到“主机”模式"},
            {"AE1","模式切换到“教导”，同时由主机控制"},
            {"AE8","教学挂起过程中释放了死门开关"},
            {"AF0","检测联锁板故障"},
            {"AF1","检测联锁板故障"},
            {"AF2","检测联锁板故障"},
            {"AF3","检测联锁板故障"},
            {"AF4","检测联锁板故障"},
            {"AF5","检测联锁板故障"},
            {"AF6","检测联锁板故障"},
            {"AF8","交叉检查比较错误的教学挂件紧急停止"},
            {"AF9","对联锁输入信号1进行交叉校验比较误差"},
            {"AFA","对外部紧急停止信号的比较误差进行交叉检查"},
            {"AFB","反复检查死区开关信号的比较误差"},
            {"AFC","反复检查安全围栏信号(SAFF)的比较误差"},
            {"AFD","反复检查保护停止信号(ONEN)的比较误差"},
            {"AFE","对联锁输入信号2进行交叉校验比较误差"},
            {"AFF","对联锁输入信号进行交叉校验比较误差3" },
            {"B10","轴1超过允许速度"},
            {"B11","轴2超过允许速度"},
            {"B12","轴3超过允许速度"},
            {"B13","轴4超过允许速度"},
            {"B14","轴5超过允许速度"},
            {"B20","超过正向轴对称-1运动范围"},
            {"B21","在正方向超过轴-2运动范围"},
            {"B22","在正方向超过轴-3运动范围"},
            {"B23","在正方向超过轴-4运动范围"},
            {"B24","超过轴-5正向运动范围"},
            {"B28","当映射运动开始时，正向超过Axis-1运动范围"},
            {"B29","当映射运动开始时，正向超过轴-2运动范围"},
            {"B2A","当映射运动开始时，正向超过轴-3运动范围"},
            {"B2B","当映射运动开始时，正向超过轴-4运动范围"},
            {"B2C","当映射运动开始时，正向超过轴-5运动范围"},
            {"B30","超轴向-1运动范围"},
            {"B31","超过轴-2的负向运动范围"},
            {"B32","超过轴-3向负方向的运动范围"},
            {"B33","超过轴-4的负向运动范围"},
            {"B34","超过轴-5的负向运动范围"},
            {"B38","当映射运动开始时，在负方向上超过了Axis-1运动范围"},
            {"B39","当映射运动开始时，超过轴-2的负向运动范围"},
            {"B3A","当映射运动开始时，超过轴-3的负向运动范围"},
            {"B3B","当映射运动开始时，超过轴-4的负向运动范围"},
            {"B3C","当映射运动开始时，超过轴-5的负向运动范围"},
            {"B40","超时访问权限信号1发生"},
            {"B41","超时访问权限信号2发生"},
            {"B42","超时访问权限信号3发生"},
            {"B43","超时访问权限信号4发生"},
            {"B44","超时访问权限信号5发生"},
            {"B45","超时访问权限信号6发生"},
            {"B46","超时访问权限信号7发生" },
            {"B47","超时访问权限信号8发生"},
            {"B48","超时访问权限信号9发生"},
            {"B49","超时访问权限信号10发生"},
            {"B4A","超时访问权限信号11发生"},
            {"B4B","超时访问权限信号12发生"},
            {"B4C","超时访问权限信号13发生"},
            {"B4D","超时访问权限信号14发生"},
            {"B4E","超时访问权限信号15发生"},
            {"B4F","超时访问权限信号16发生"},
            {"B60","预对准器在访问P/A阶段时正在运行(用于边缘对准器)"},
            {"B61","预对准器在进入P/ a阶段时持晶圆片"},
            {"B62","晶圆片在到达P/A阶段时不在预对准器上晶圆片在P/A阶段的预对准器上(用于边缘抓地力预平衡器)"},
            {"B63","当P/A阶段访问时，预对准器没有处于“发布”状态(用于边缘对准器)"},
            {"B64","当P/A阶段进入时，Lifer不是上/下端(用于边缘对准器)"},
            {"B65","当P/A阶段进入时，预对准器未处于准备位置(用于边缘对准器)"},
            {"B66","使用Get指定的P/A阶段不是指定的阶段(用于边缘对准器)"},
            {"B68","由于机械手已经进入P/A阶段或机械手的进入阶段不理解预对准器无法移动(用于边缘对准器)"},
            {"B70","操作过程中检测到软件停止信号"},
            {"B80","真空/抓地力传感器未在规定时间内打开"},
            {"B81","真空/抓地力传感器未在规定时间内关闭"},
            {"B82","晶圆片存在/缺失传感器在规定的时间内没有打开"},
            {"B83","晶圆片存在/缺失传感器没有在规定的时间内关闭"},
            {"B88","抓地力传感器未在规定时间内打开(用于边缘对准器)"},
            {"B89","抓地力传感器未在规定时间内关闭(用于边缘对准器)"},
            {"B8A","松开传感器在规定时间内不打开(用于边缘对准器)"},
            {"B8B","松开感测器未在规定时间内关闭(用于边缘对准器)"},
            {"B8F","叉1的柱塞在观察时间内没有移动"},
            {"B90","真空/抓地力传感器未在规定时间内打开"},
            {"B91","真空/抓地力传感器未在规定时间内关闭"},
            {"B92","晶圆片存在/缺失传感器在规定的时间内没有打开"},
            {"B93","晶圆片存在/缺失传感器没有在规定的时间内关闭"},
            {"B98","升降机上传感器在规定的时间内没有打开(用于边缘对准器)"},
            {"B99","升降机上传感器没有在规定的时间内关闭(用于边缘对准器)"},
            {"B9A","升降机下降传感器未在规定时间内打开(用于边缘对准器)"},
            {"B9B","升降机下降传感器未在规定时间内关闭(用于边缘对准器)"},
            {"B9F","叉2的柱塞在观察时间内没有移动"},
            {"BA0","当机械手(Fork1)/预对准器传送晶圆时，真空/握把传感器或晶圆存在/缺失传感器关闭"},
            {"BA1","Fork 1的真空/握把传感器是开着的，而wafer存在/缺失传感器是关着的"},
            {"BA8","握力传感器在预对准器运动时关闭，握力传感器打开(用于边缘对准器)"},
            {"BA9","抓地力传感器在预对准器运动时打开，抓地力传感器关闭(对于边缘抓地力预对准器)"},
            {"BAA","在预对准过程中，松开传感器关闭，松开传感器打开(用于边缘对准器)"},
            {"BAB","在预对准期间，松开传感器打开，松开传感器关闭(对于边缘握把预对准器)"},
            {"BAC","握力传感器和反握力传感器都打开了(用于边缘对准器)"},
            {"BAD","手柄传感器指示晶圆存在，升降机传感器指示lifer启动(用于边缘对准器)"},
            {"BB0","吸/抓力传感器或晶圆片存在/缺失传感器在叉2保持和传送晶圆片时关闭"},
            {"BB1","Fork 2的吸力/抓力传感器是开着的，而晶圆的存在/缺失传感器是关着时"},
            {"BB8","升力传感器在预对准过程中处于关闭状态，升力传感器处于开启状态(用于边缘对准器)"},
            {"BB9","在预对准过程中，升降传感器处于开启状态，升降传感器处于关闭状态(用于边缘抓地力预对准)"},
            {"BBA","在预对准过程中，升降传感器处于关闭状态，升降传感器处于开启状态(用于边缘对准器)"},
            {"BBB","在预对准过程中，升降传感器处于开启状态，升降传感器处于关闭状态(用于边缘抓地力预对准)"},
            {"BBC","升降式传感器和升降式传感器均处于工作状态(用于边缘握把预对准器)"},
            {"BF0","当机械手被保持信号停止时，运动请求被传送"},
            {"C80","晶圆片对准的有效数据不足"},
            {"C90","缺口/定位平面位置无法分辨"},
            {"CA0","无法检测到准确的晶圆中心位置"},
            {"CB0","晶圆偏心轮数量过多"},
            {"CC0","无法检测到准确的缺口/定位平面位置"},
            {"CD0","校正后的量超过允许的范围"},
            {"CE0","无法正确执行手臂校准"},
            {"D00","映射传感器波束在映射开始时就已经被阻塞"},
            {"D10","无法正确执行映射校准"},
            {"D20","从未执行映射校准"},
            {"D30","测图或测图校准的采样数据异常"},
            {"D40","在绘图或绘图校准时检测到晶圆突出"},
            {"D50","在映射或映射校准时检测到抖动"},
            {"D60","对于“顶面GET / PUT工作站”，映射或映射校准无法强制执行" },
            {"E90","系统配置错误"},
            {"E91","机械手配置错误"},
            {"EA0","实型通用参数设置警告"},
            {"EA1","整型通用参数设置警告"},
            {"EA4","实型机组参数设置警告"},
            {"EA5","整型单元参数设置警告"},
            {"EB0","实型通用参数设置无效"},
            {"EB1","整型通用参数设置无效"},
            {"EB4","实型单元参数设置无效"},
            {"EB5","整型单元参数设置无效"},
            {"EC0","软件与设置参数不匹配"},
            {"ED0","发生内存操作错误"},
            {"ED1","发生内存操作错误"},
            {"EE0","文件打开失败"},
            {"EE1","关闭文件失败"},
            {"EE2","读取文件失败"},
            {"EE3","写入文件失败"},
            {"EE4","删除文件失败"},
            {"EE5","参数初始化文件大小无效"},
            {"EE8","创建文件夹失败"},
            {"EF0","“格式请求文件”中的数据无效"},
            {"EF1","“自动更新请求文件”中的数据无效"},
            {"EF2","“伺服参数文件”中的数据无效"},
            {"EF3","“通用参数文件”中的无效数据"},
            {"EF4","“单元参数文件”中的数据无效"},
            {"EF5","“位置数据文件”中的数据无效"},
            {"EF8","“伺服参数自动更新文件”中的数据无效"},
            {"EF9","“常用参数自动更新文件”中的无效数据"},
            {"EFA","“单元参数自动更新文件”中的无效数据"},
            {"EFE","在控制器中记录数据异常1"},
            {"EFF","文件数据异常2在控制器"},
            {"F10","System error 1-0."},
            {"F11","System error 1-1."},
            {"F12","System error 1-2."},
            {"F14","System error 1-4."},
            {"F20","System error 2-0."},
            {"F21","System error 2-1."},
            {"F22","System error 2-2."},
            {"F50","System error 5-0."},
            {"F51","System error 5-1."},
            {"F61","System Error 6-1."},
            {"F62","System Error 6-2."},
            {"F70","System Error 7-0."},
            {"F82","System error 8-2."},
            {"F83","System error 8-3."},
            {"F84","System error 8-4."},
            {"F86","System error 8-6."},
            {"F88","System error 8-8."},
            {"F90","System trap 9-0."},
            {"F91","System trap 9-1."},
            {"F92","System trap 9-2."},
            {"F93","System trap 9-3."},
            {"F94","System trap 9-4."},
            {"F95","System trap 9-5."},
            {"F98","System trap 9-8."},
            {"F99","System trap 9-9."},
            {"F9A","System trap 9-10."},
            {"F9B","System trap 9-11."},
            {"F9C","System trap 9-12."},
            {"F9D","System trap 9-13."},
            {"FA0","System trap A-0."},
            {"FA1","System trap A-1."},
            {"FA2","System trap A-2."},
            {"FA3","System trap A-3."},
            {"FA4","System trap A-4."},
            {"FA8","System trap A-8."},
            {"FA9","System trap A-9."},
            {"FAA","System trap A-10."},
            {"FAB","System trap A-11."},
            {"FB0","System trap b-0."},
            {"FB1","System trap b-1."},
            {"FB8","System trap b-8."},
            {"FB9","System trap b-9." },
            {"FC0","System trap C-0."},
            {"FC4","System trap C-4."},
            {"FC5","System trap C-5."},
            {"FC8","System trap C-8."},
            {"FCC","System trap C-12."},
            {"FD0","System trap d-0."},
            {"FD1","System trap d-1."},
            {"FD2","System trap d-2."},
            {"FD3","System trap d-3."},
            {"FD4","System trap d-4."},
            {"FD5","System trap d-5."},
            {"FD6","System trap d-6."},
            {"FD7","System trap d-7."},
            {"FD8","System trap d-8."},
            {"FD9","System trap d-9."},
            {"FDA","System trap d-10."},
            {"FDB","System trap d-11."},
            {"FDC","System trap d-12."},
            {"FDD","System trap d-13."},
            {"FDE","System trap d-14."},
            {"FDF","System trap d-15."},
            {"FE0","System trap E-0."},
            {"FE2","System trap E-2."},
            {"FE4","System trap E-4."},
            {"FE6","System trap E-6."},
            {"FE8","System trap E-8."},
            {"FEA","System trap E-10."},
            {"FEC","System trap E-12." },
        };
        #endregion
        #region 含有缺省的错误码
        public static readonly Dictionary<Regex, string> _EFEMHWRegexError2Msg = new Dictionary<Regex, string>()
        {
            { new Regex(@"(.)(?=06)"),"放大器类型不匹配"},
            { new Regex(@"(.)(?=07)"),"编码器类型不匹配"},
            { new Regex(@"(.)(?=10)"),"溢出电流已运行"},
            { new Regex(@"(.)(?=30)"),"检测再生电路误差"},
            { new Regex(@"(.)(?=40)"),"变换器电压异常高"},
            { new Regex(@"(.)(?=41)"),"变换器电压低"},
            { new Regex(@"(.)(?=45)"),"刹车被锁住了"},
            { new Regex(@"(.)(?=46)"),"转换器出现错误"},
            { new Regex(@"(.)(?=47)"),"输入功率出错"},
            { new Regex(@"(.)(?=48)"),"变频器主电路出现错误"},
            { new Regex(@"(.)(?=49)"),"放大器发生误差"},
            { new Regex(@"(.)(?=51)"),"电机转速过高"},
            { new Regex(@"(.)(?=71)"),"当扭矩很大程度上超过额定值时，应用几秒钟或几十秒钟"},
            { new Regex(@"(.)(?=72)"),"一个很大程度上超过额定值的扭矩被连续施加"},
            { new Regex(@"(.)(?=78)"),"转换器已经超载"},
            { new Regex(@"(.)(?=7B)"),"放大器发生过热"},
            { new Regex(@"(.)(?=7C)"),"当扭矩很大程度上超过额定值时，应用几秒钟或几十秒钟"},
            { new Regex(@"(.)(?=7D)"),"一个很大程度上超过额定值的扭矩被连续施加"},
            { new Regex(@"(.)(?=81)"),"绝对编码器的所有电源关闭，位置数据被清除"},
            { new Regex(@"(.)(?=83)"),"编码器的后备电池的电压很低"},
            { new Regex(@"(.)(?=84)"),"编码器内部数据错误"},
            { new Regex(@"(.)(?=85)"),"开机时编码器高速旋转"},
            { new Regex(@"(.)(?=86)"),"过热的任何类型的编码器"},
            { new Regex(@"(.)(?=88)"),"编码器发生错误"},
            { new Regex(@"(.)(?=89)"),"编码器的响应出现错误"},
            { new Regex(@"(.)(?=8A)"),"编码器多圈范围错误发生"},
            { new Regex(@"(.)(?=8C)"),"编码器复位未完成"},
            { new Regex(@"(.)(?=98)"),"伺服参数异常"},
            { new Regex(@"(.)(?=9A)"),"反馈发生溢出"},
            { new Regex(@"(.)(?=B4)"),"发生微程序传输错误"},
            { new Regex(@"(.)(?=BC)"),"编码器发生错误"},
            { new Regex(@"(.)(?=C1)"),"伺服马达失去控制"},
            { new Regex(@"(.)(?=C9)"),"编码器与伺服控制板之间的通信错误"},
            { new Regex(@"(.)(?=CE)"),"编码器发生错误"},
            { new Regex(@"(.)(?=CF)"),"编码器发生错误"},
            { new Regex(@"(.)(?=D0)"),"位置偏移脉冲已超过设定值"},
            { new Regex(@"(.)(?=D1)"),"位置偏差饱和"},
            { new Regex(@"(.)(?=D2)"),"电机定向位置错误"},
            { new Regex(@"(.)(?=D4)"),"伺服跟踪误差"},
            { new Regex(@"(.)(?=F1)"),"阶段损失(转换器)"},
            { new Regex(@"(?<=E)(.)(?=1)"),"命令发送后，轴定位无法完成"},
            { new Regex(@"(?<=E)(.)(?=D)"),"不准备将命令发送到伺服控制板"},
            { new Regex(@"(?<=E)(.)(?=E)"),"主控制板与伺服控制板之间发生通信错误"},
            { new Regex(@"(?<=E)(.)(?=F)"),"伺服控制板无响应"},
        };
        #endregion
    }
}