CyberX8/CyberX8_RT/Config/System.sccfg

<?xml version="1.0" encoding="utf-8"?>
<root system="Venus">
	<configs name="System" nameView="System">
		<config default="1" name="AtTemperatureRange" nameView="AtTemperatureRange" description="判断到达设定温度的误差" max="5" min="0.1" paramter="" tag="" unit="" type="Double" visible="true"/>
		<config default="0.11" name="RampStepSize" nameView="RampStepSize" description="内外温度差的误差" max="1" min="0.01" paramter="" tag="" unit="" type="Double" visible="true"/>
		<config default="5" name="TemeratureDelatLimit" nameView="TemeratureDelatLimit" description="TC温度差报警值" max="10" min="1" paramter="" tag="" unit="" type="Double" visible="true"/>
		<config default="10." name="ControlIPFilter" description="Control IP Config" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="Any,SnAg,Cu,Ni" name="ChemistryList" nameView="Chemistry List" description="化学液集合" max="" min="" paramter="" tag="" unit="" type="String" visible="true"/>
		<config default="" name="LSType" nameView="Lis Seal Type" description="Lip Seal类型" max="" min="" paramter="" tag="" unit="" type="String" visible="true"/>
		<config default="200" name="WaferSize" nameView="Wafer Size" description="Wafer尺寸" max="300" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
		<config default="0.1" name="Increment" nameView="Increment" description="步进" max="100" min="0" paramter="" tag="" unit="" type="Double" visible="true"/>
		<config default="True" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
		<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
		<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库，2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
		<config default="10"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为分钟，0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
		<config default="1"  name="SystemType" nameView="SystemType" description="0 = Venus;1 = Kepler 2300;2 = Kepler 2200A;3 = Kepler 2200B;4 = Venus SE;5 = Venus DE;" max="9" min="0" paramter="" tag="" unit="min" type="Integer"/>
		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
		<config default="0" name="PressureUnitType"  nameView="Pressure Unit Type" description="0=>mtorr,1=>Pa" max="1" min="0" paramter="" tag=""  unit="" type="Integer"/>
		<config default="Cyber X8" name="Name" nameView="Name" description="Name" tag="" unit="" type="String" />
		<configs name="Job" nameView="Job"  >
			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<config default="EFEM,PUF1,PUF2,Loader1,Transporter2,Transporter1,Prewet" name="InitializeCheckModuleList" nameView="InitializeCheckModuleList" description="Initialize检验模块集合" max="" min="" paramter="" tag="" unit="" type="String"/>
		<config default="SN 03.Cyber101" name="ToolID" nameView="ToolID" description="Tool ID" tag="" unit="" type="String" />
	</configs>
	<configs name="Twincat" nameView="Twincat">
		<config default="false" name="EnableReadLog" nameView="Enalbe Twincat Variable Read log" description="是否启用Twincat变量读取日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="10" name="SlsSpeed" nameView="SLS Axis Speed" description="SLS模式下Axis的速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
	</configs>
	<!--FA-->
	<configs name="FA" nameView="FA">
		<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="45" name="T3Timeout" nameView="T3 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="10" name="T5Timeout" nameView="T5 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="10" name="T7Timeout" nameView="T7 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="0" name="SpoolingCapability" description="Spooling Capacity" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="0" name="SpoolingMaxTransmit" description="Spooling Max transmit" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="true" name="SpoolingFullOverWrite" description="Spooling Full OverWrite" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
		<config default="Local" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
	</configs>

	<!--Router-->
	<configs name="Scheduler" nameView="Scheduler" >
		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
	</configs>

	<!--EFEM-->
	<configs name="EFEM" nameView="EFEM">
		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="127.0.0.1:13001" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:13001" max="" min="" paramter="" tag="" unit="" type="String" />
		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
		
		<config default="15" name="DefaultMoveSpeedInPercent" nameView="DefaultMoveSpeed InPercent" description="机械臂初始速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
		<config default="5" name="DefaultHomeSpeedInPercent" nameView="DefaultHomeSpeed InPercent" description="机械臂Home速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />

		<config default="2" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=SunWay 3=Brooks" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" />
	
		<config default="false" name="IsLoadPort1Unable" nameView="Is LoadPort1 Unable" description="LP1是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="IsLoadPort2Unable" nameView="Is LoadPort2 Unable" description="LP2是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="IsLoadPort3Unable" nameView="Is LoadPort3 Unable" description="LP3是否无法使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
		
		<config default="0" name="AlignerOffsetAngle" nameView="Aligner Offset Angle" description="Aligner Offset Angle" max="360" min="0" paramter="" tag="" unit="deg" type="Integer" />
		
		<configs name="LoadPort" nameView="LoadPort" >
			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="25" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上，最下面的是1" max="" min="" paramter="" tag="" unit="" type="Bool" />

			<config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />

		</configs>
		<configs name="LP1" nameView="LP1">
			<config default="50" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="51" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="52" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
		</configs>
		<configs name="LP2" nameView="LP2">
			<config default="53" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="54" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="55" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
		</configs>
		<configs name="LP3" nameView="LP3">
			<config default="56" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="57" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="58" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
		</configs>
		<configs name="Dummy1" nameView="Dummy1">
			<config default="64" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="65" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="66" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
		</configs>
		<configs name="Dummy2" nameView="Dummy2">
			<config default="62" name="Cassete200Station" nameView="Cassete200Station" description="Wafer 200 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="63" name="Cassete150Station" nameView="Cassete150Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
			<config default="64" name="Cassete100Station" nameView="Cassete100Station" description="Wafer 150 Cassete station number" max="120" min="0" paramter="" tag="" unit="s" type="Integer"/>
		</configs>
	</configs>
	<!--DualPUF-->
	<configs name="DualPUF" nameView="DualPUF">
		<config default="513" name="PufLayoutRotationDistance" nameView="PufLayoutRotationDistance" description="Rotation Layout distance between efem and loader." max="600" min="300" paramter="" tag="" unit="mm" type="Integer" />
		<config default="-218" name="RobotLayoutPosition" nameView="RobotLayoutPosition" description="Robot Layout position." max="200" min="-300" paramter="" tag="" unit="mm" type="Integer" />
	</configs>
	<!--PUF1-->
	<configs name="PUF1" nameView="PUF1">
		<config default="5" name="CheckStuckWafer300_Offset_mm" nameView="CheckStuckWafer300_Offset_mm" description="300 wafer stick offset distance " max="20" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2.0" name="CheckStuckWafer300_Acceleration_mm_sec_sec" nameView="CheckStuckWafer300_Acceleration_mm_sec_sec" description="300 wafer stick distance acceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2.0" name="CheckStuckWafer300_Deceleration_mm_sec_sec" nameView="CheckStuckWafer300_Deceleration_mm_sec_sec" description="300 wafer stick distance deceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2.0" name="CheckStuckWafer300_Speed_mm_sec" nameView="CheckStuckWafer300_Speed_mm_sec" description="300 wafer stick distance speed" max="1500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="30" name="CheckStuckWafer300_TorqueLimit_Percent" nameView="CheckStuckWafer300_TorqueLimit_Percent" description="torque value of 300 wafer is less than this value,it is normal,otherwise innormal" max="100" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer300_DistanceOffset1" nameView="Distance Sensor Offset1 mm" description="300 wafer Check Stuck Wafer Distance Sensor Offset1 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer300_DistanceOffset2" nameView="Distance Sensor Offset2 mm" description="300 wafer Check Stuck Wafer Distance Sensor Offset2 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="5" name="CheckStuckWafer200_Offset_mm" nameView="CheckStuckWafer200_Offset_mm" description="200 wafer stick offset distance" max="20" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer200_Acceleration_mm_sec_sec" nameView="CheckStuckWafer200_Acceleration_mm_sec_sec" description="200 wafer stick distance acceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_Deceleration_mm_sec_sec" nameView="CheckStuckWafer200_Deceleration_mm_sec_sec" description="200 wafer stick distance deceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_Speed_mm_sec" nameView="CheckStuckWafer200_Speed_mm_sec" description="200 wafer stick distance speed" max="1500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="30" name="CheckStuckWafer200_TorqueLimit_Percent" nameView="CheckStuckWafer200_TorqueLimit_Percent" description="torque value of 200 wafer is less than this value,it is normal,otherwise innormal" max="100" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_DistanceOffset1" nameView="Distance Sensor Offset1 mm" description="200 wafer Check Stuck Wafer Distance Sensor Offset1 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer200_DistanceOffset2" nameView="Distance Sensor Offset2 mm" description="200 wafer Check Stuck Wafer Distance Sensor Offset2 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="-400" name="ChuckVacuumWaferPresent" nameView="ChuckVacuumWaferPresent" description="Vacuum level is more negative than this value when a wafer is present" max="-300" min="-600" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="-200" name="ChuckVacuumWaferAbsent" nameView="ChuckVacuumWaferAbsent" description="Vacuum level is more positive than this value when a wafer is absent" max="0" min="-300" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="0" name="ChuckVacuumCloseLimit" nameView="ChuckVacuumCloseLimit" description="The limit used to check vacuum level when the vacuum valve is closed. If the vacuum level is less than or equal to this value, there may be vacuum leak." max="100" min="-760" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="5" name="ChuckVacuumOpenLimit" nameView="ChuckVacuumOpenLimit" description="when the vacuum value is close,chuck vacuum level is less than this value,status is vacuum off." max="700" min="-700" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="True" name="EnableCheckStickDistanceStatus" nameView="EnableCheckStickDistanceStatus" description="Pick or place wafer procgress enable check stick distance status." max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="100" name="ChuckValveSwitchingTimeDelayInMilliSeconds" nameView="ChuckValveSwitchingTimeDelayInMilliSeconds" description="Chuck valve switching time delay." max="5000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="20" name="CheckStuckWafer_DistanceSensorThreshold_mm" nameView="CheckStuckWafer_DistanceSensorThreshold_mm" description="Distance Sensor threshold." max="20" min="0.1" paramter="" tag="" unit="mmHg" type="Double" />
	</configs>

	<!--PUF2-->
	<configs name="PUF2" nameView="PUF2">
		<config default="5" name="CheckStuckWafer300_Offset_mm" nameView="CheckStuckWafer300_Offset_mm" description="300 wafer stick offset distance" max="20" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2.0" name="CheckStuckWafer300_Acceleration_mm_sec_sec" nameView="CheckStuckWafer300_Acceleration_mm_sec_sec" description="300 wafer stick distance acceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Integer" />
		<config default="2.0" name="CheckStuckWafer300_Deceleration_mm_sec_sec" nameView="CheckStuckWafer300_Deceleration_mm_sec_sec" description="300 wafer stick distance deceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Integer" />
		<config default="2.0" name="CheckStuckWafer300_Speed_mm_sec" nameView="CheckStuckWafer300_Speed_mm_sec" description="300 wafer stick distance speed" max="1500" min="1" paramter="" tag="" unit="deg" type="Integer" />
		<config default="30" name="CheckStuckWafer300_TorqueLimit_Percent" nameView="CheckStuckWafer300_TorqueLimit_Percent" description="torque value of 300 wafer is less than this value,it is normal,otherwise innormal" max="100" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer300_DistanceOffset1" nameView="Distance Sensor Offset1 mm" description="300 wafer Check Stuck Wafer Distance Sensor Offset1 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer300_DistanceOffset2" nameView="Distance Sensor Offset2 mm" description="300 wafer Check Stuck Wafer Distance Sensor Offset2 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="5" name="CheckStuckWafer200_Offset_mm" nameView="CheckStuckWafer200_Offset_mm" description="300 wafer stick offset distance" max="20" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer200_Acceleration_mm_sec_sec" nameView="CheckStuckWafer200_Acceleration_mm_sec_sec" description="200 wafer stick distance acceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_Deceleration_mm_sec_sec" nameView="CheckStuckWafer200_Deceleration_mm_sec_sec" description="200 wafer stick distance deceleration" max="2500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_Speed_mm_sec" nameView="CheckStuckWafer200_Speed_mm_sec" description="200 wafer stick distance speed" max="1500" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="30" name="CheckStuckWafer200_TorqueLimit_Percent" nameView="CheckStuckWafer200_TorqueLimit_Percent" description="torque value of 200 wafer is less than this value,it is normal,otherwise innormal" max="100" min="1" paramter="" tag="" unit="deg" type="Double" />
		<config default="2" name="CheckStuckWafer200_DistanceOffset1" nameView="Distance Sensor Offset1 mm" description="200 wafer Check Stuck Wafer Distance Sensor Offset1 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="2" name="CheckStuckWafer200_DistanceOffset2" nameView="Distance Sensor Offset2 mm" description="200 wafer Check Stuck Wafer Distance Sensor Offset2 MM" max="100" min="0" paramter="" tag="" unit="mm" type="Double" />
		<config default="-400" name="ChuckVacuumWaferPresent" nameView="ChuckVacuumWaferPresent" description="Vacuum level is more negative than this value when a wafer is present" max="-300" min="-600" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="-200" name="ChuckVacuumWaferAbsent" nameView="ChuckVacuumWaferAbsent" description="Vacuum level is more positive than this value when a wafer is absent" max="0" min="-300" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="0" name="ChuckVacuumCloseLimit" nameView="ChuckVacuumCloseLimit" description="The limit used to check vacuum level when the vacuum valve is closed. If the vacuum level is less than or equal to this value, there may be vacuum leak." max="100" min="-760" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="5" name="ChuckVacuumOpenLimit" nameView="ChuckVacuumOpenLimit" description="when the vacuum value is close,chuck vacuum level is less than this value,status is vacuum off." max="700" min="-700" paramter="" tag="" unit="mmHg" type="Double" />
		<config default="True" name="EnableCheckStickDistanceStatus" nameView="EnableCheckStickDistanceStatus" description="Pick or place wafer procgress enable check stick distance status." max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="100" name="ChuckValveSwitchingTimeDelayInMilliSeconds" nameView="ChuckValveSwitchingTimeDelayInMilliSeconds" description="Chuck valve switching time delay." max="5000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="20" name="CheckStuckWafer_DistanceSensorThreshold_mm" nameView="CheckStuckWafer_DistanceSensorThreshold_mm" description="Distance Sensor threshold." max="20" min="0.1" paramter="" tag="" unit="mmHg" type="Double" />
	</configs>

	<!--Loader1-->
	<configs name="Loader1" nameView="Loader1">
		<config default="200" name="SideAWaferSize" nameView="SideA Wafer Size" description="SideA Wafer尺寸" max="200" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
		<config default="200" name="SideBWaferSize" nameView="SideB Wafer Size" description="SideB Wafer尺寸" max="200" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
		<config default="30000" name="DoorLockTimeout" nameView="DoorLockTimeout" description="Max amount of time to wait for doors to be opened/closed. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="10000" name="LSVacuumTimeout" nameView="LSVacuumTimeout" description="Max amount of time to wait for LS vacuum to be enabled/disabled. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="30000" name="WSBladderEnableTimeout" nameView="WSBladderEnableTimeout" description="Max amount of time to wait for WS bladder to be enabled. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="30000" name="WSBladderDisableTimeout" nameView="WSBladderDisableTimeout" description="Max amount of time to wait for WS bladder to be disabled. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="30000" name="TranslateBladderTimeout" nameView="TranslateBladderTimeout" description="Max amount of time to wait for translation bladder to extend/retract. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="30000" name="BernoulliBladderTimeout" nameView="BernoulliBladderTimeout" description="Max amount of time to wait for bernoulli bladder to extend/retract. (ms)" max="60000" min="1000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="400" name="LeakTestLSOKLimit" nameView="LeakTestLSOKLimit" description="Leak Test LS OK Limit" max="700" min="0" paramter="" tag="" unit="" type="Double" />
		<config default="20000" name="LeakTestCutOffTime" nameView="LeakTestCutOffTime" description="Leak Test Cut Off Time (ms)" max="50000" min="10000" paramter="" tag="" unit="ms" type="Integer" />
		<config default="50" name="LeakTestCutOffValue" nameView="LeakTestCutOffValue" description="Leak Test Cut Off Value" max="700" min="0" paramter="" tag="" unit="" type="Double" />
		<config default="5" name="LeakTestRetryWait" nameView="LeakTestRetryWait" description="Wait time before retry (sec)." max="600" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="-550" name="LSVacuumHighLimit" nameView="LSVacuumHighLimit" description="LS vacuum high limit" max="0" min="-760" paramter="" tag="" unit="s" type="Double" />
		<config default="-480" name="LSVacuumLowLimit" nameView="LSVacuumLowLimit" description="LS vacuum low limit" max="0" min="-760" paramter="" tag="" unit="s" type="Double" />
		<config default="20" name="MinBernoulliN2Pressure" nameView="MinBernoulliN2Pressure" description="Minimum pressure of Bernoulli N2" max="100" min="0" paramter="" tag="" unit="" type="Double" />
		<config default="250" name="LSVacuumReleaseDelayInMilliseconds" nameView="LSVacuumReleaseDelayInMilliseconds" description="Delay before turning off LS vacuum after WH bladder is turned off in Load operation. (ms)" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="250" name="TranslateOutDelayInMilliseconds" nameView="TranslateOutDelayInMilliseconds" description="Delay before retracting loader chuck after CRS vacuum is turned off in Load operation. (ms)" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="52" name="WSBladderPressure" nameView="WSBladderPressure" description="Minimum pressure of WS Bladder" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
		<config default="false" name="PlateOutCameraEnable" nameView="PlateOutCameraEnable" description="Enable Plate Out Detection Camera" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="12" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
	</configs>
	<!--Transporter-->
	<configs name="Transporter" nameView="Transporter">
		<config default="600" name="TransporterMinimumDistance" nameView="TransporterMinimumDistance" description="Miminum Distance between Loader Transporter and Process Transporter." max="2000" min="100" paramter="" tag="" unit="mm" type="Integer" />
		<config default="1460" name="TransporterLayoutHorizontalDistance" nameView="TransporterLayoutHorizontalDistance" description="Transporter Layout distance betwwn cell1 and loader." max="2000" min="100" paramter="" tag="" unit="mm" type="Integer" />
		<config default="265" name="TransporterLayoutLoaderPosition" nameView="TransporterLayoutLoaderPosition" description="Transporter Layout loader cell position." max="2000" min="100" paramter="" tag="" unit="mm" type="Integer" />
		<config default="8" name="BiasDistanceBetweenLoaderAndProcess" nameView="BiasDistanceBetweenLoaderAndProcess" description="Bias Distance between Loader Transporter and Process Transporter" max="1000" min="0" paramter="" tag="" unit="mm" type="Integer" />
		<config default="false" name="BypassWaferHolderPresent" nameView="BypassWaferHolderPresent" description="Transporter bypass check waferholder present when Transporter pick or place wafer holder" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="20" name="TransporterTransferSeconds" nameView="TransporterTransferSeconds" description="Transporter Transfer WaferHolder Seconds." max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="5" name="TransporterTransferOffSeconds" nameView="TransporterTransferOffSeconds" description="Transporter Transfer WaferHolder offset seconds between Max Seconds and Min Seconds." max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="2" name="MaxPickTries" nameView="MaxPickTries" description="Transporter pick up max retry times." max="5" min="0" paramter="" tag="" unit="" type="Integer" />
		<!--Loader Transporter-->
		<configs name="Transporter2" nameView="Transporter2">
			<config default="15" name="StartCellId" nameView="StartCellId" description="Loader Transporter transfer start cell id." max="40" min="1" paramter="" tag="" unit="" type="Integer" />
			<config default="40" name="EndCellId" nameView="EndCellId" description="Loader Transporter transfer start cell id." max="40" min="1" paramter="" tag="" unit="" type="Integer" />
			<config default="20" name="UnlockTimerLock" nameView="UnlockTimerLock" description="start unlock after unlocktimerlock seconds,transporter auto lock." max="30" min="5" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="LockCheckTime" nameView="LockCheckTime" description="start lock after lockchecktime seconds,check 1,2 locker status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="UnlockCheckTime" nameView="UnlockCheckTime" description="start unlock after unlockchecktime seconds,check 1,2 unlocker status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="RetractCheckTime" nameView="RetractCheckTime" description="start restract after retractchecktime seconds,check 1,2 retract status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="ExtendCheckTime" nameView="ExtendCheckTime" description="start extend after extendchecktime seconds,check 1,2 extend status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="Transporter1" nameView="Transporter1">
			<config default="1" name="StartCellId" nameView="StartCellId" description="Loader Transporter transfer start cell id." max="40" min="1" paramter="" tag="" unit="" type="Integer" />
			<config default="33" name="EndCellId" nameView="EndCellId" description="Loader Transporter transfer start cell id." max="40" min="1" paramter="" tag="" unit="" type="Integer" />
			<config default="20" name="UnlockTimerLock" nameView="UnlockTimerLock" description="start unlock after unlocktimerlock seconds,transporter auto lock." max="30" min="5" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="LockCheckTime" nameView="LockCheckTime" description="start lock after lockchecktime seconds,check 1,2 locker status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="UnlockCheckTime" nameView="UnlockCheckTime" description="start unlock after unlockchecktime seconds,check 1,2 unlocker status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="RetractCheckTime" nameView="RetractCheckTime" description="start restract after retractchecktime seconds,check 1,2 retract status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="2" name="ExtendCheckTime" nameView="ExtendCheckTime" description="start extend after extendchecktime seconds,check 1,2 extend status." max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
	</configs>
	<configs name="Log" nameView="Log">
		<config default="false" name="EnableLinmotLog" nameView="EnableLinmotLog" description="是否启用Linmot日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="EnableResistivityLog" nameView="EnableResistivityLog" description="是否启用Resistivity日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="EnableTemperatureLog" nameView="EnableTemperatureLog" description="是否启用Temperature日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="EnableBarcodeReaderLog" nameView="Enalbe BarcodeReader log" description="是否启用BarcodeReader日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
	</configs>
	<configs name="Metal" nameView="Metal">
		<config default="10000" name="CellFlowFaultHoldOffTime" nameView="CellFlowFaultHoldOffTime" description="Cell Flow fault Hold Off time" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
		<config default="0.5" name="MinPumpFlow" nameView="MinPumpFlow" description="Minimum pump flow" max="10" min="0" paramter="" tag="" unit="L/min" type="Double"></config>
		<config default="12" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="0" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="0" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="0" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2.5" name="AnodeFillVolume" nameView="AnodeFillVolume" description="Time delay after placing wafer holder down to cell" max="5" min="0" paramter="" tag="" unit="" type="Double"/>
		<config default="240" name="AnodeDrainTime" nameView="AnodeDrainTime" description="Time for AN Drain" max="600" min="0" paramter="" tag="" unit="s" type="Double"/>
		<config default="3.0" name="CellFlowStartLowLimit" nameView="CellFlowStartLowLimit" description="cell flow start low limit" max="30" min="0" paramter="" tag="" unit="" type="Double"/>
		<config default="0.125" name="ShortTestThreshold" nameView="ShortTestThreshold" description="short test threshold" max="1" min="0" paramter="" tag="" unit="A" type="Double"/>
		<config default="50" name="MetalTotalAmpHoursWarningLimit" nameView="MetalTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
		<config default="100" name="MetalTotalAmpHoursFaultLimit" nameView="MetalTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="AnodeATotalAmpHoursWarningLimit" nameView="AnodeATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="AnodeATotalAmpHoursFaultLimit" nameView="AnodeATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="AnodeBTotalAmpHoursWarningLimit" nameView="AnodeBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="AnodeBTotalAmpHoursFaultLimit" nameView="AnodeBTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="MembraneATotalAmpHoursWarningLimit" nameView="MembraneATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="MembraneATotalAmpHoursFaultLimit" nameView="MembraneATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="MembraneBTotalAmpHoursWarningLimit" nameView="MembraneBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="MembraneBTotalAmpHoursFaultLimit" nameView="MembraneBTotalAmpHoursFaultLimit"  type="Double" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="MetalTotalWafersWarningLimit" nameView="MetalTotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="MetalTotalWafersFaultLimit" nameView="MetalTotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
		<config default="50" name="AnodeATotalWafersWarningLimit" nameView="AnodeATotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="AnodeATotalWafersFaultLimit" nameView="AnodeATotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="AnodeBTotalWafersWarningLimit" nameView="AnodeBTotalWafersWarningLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="AnodeBTotalWafersFaultLimit" nameView="AnodeBTotalWafersFaultLimit" type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description=""/>
		<config default="100" name="WaferShuttleSoakMaxTime" nameView="Max Time Length of Wafer Shuttle Soak in metal" type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="minute" description=""/>
	</configs>
	<configs name="Buffer" nameView="Buffer">
		<config default="10" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
	</configs>
	<configs name="Facilities" nameView="Facilities">
		<config default="300" name="SampleAutoDisableTime" nameView="SampleAutoDisableTime" description="Sample Auto Disable Time" max="600" min="1" paramter="" tag="" unit="s" type="Integer"/>
		<configs name="CDA_1_Pressure" nameView="CDA_1_Pressure">
			<config default="90.0" name="Error_Max" nameView="Error_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="65.0" name="Error_Min" nameView="Error_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="68.0" name="Warning_Min" nameView="Warning_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="CDA_2_Pressure" nameView="CDA_2_Pressure">
			<config default="90.0" name="Error_Max" nameView="Error_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="65.0" name="Error_Min" nameView="Error_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="68.0" name="Warning_Min" nameView="Warning_Min" max="90.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="N2_1A_Pressure" nameView="N2_1A_Pressure">
			<config default="80.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="75.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="60.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="62.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="N2_1B_Pressure" nameView="N2_1B_Pressure">
			<config default="29.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="27.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="20.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="22.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="N2_2A_Pressure" nameView="N2_1A_Pressure">
			<config default="80.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="75.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="60.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="62.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="N2_2B_Pressure" nameView="N2_1B_Pressure">
			<config default="29.0" name="Error_Max" nameView="Error_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="27.0" name="Warning_Max" nameView="Warning_Max" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="20.0" name="Error_Min" nameView="Error_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="22.0" name="Warning_Min" nameView="Warning_Min" max="80.0" min="20.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="DIWater_Pressure" nameView="DIWater_Pressure">
			<config default="48.0" name="Error_Max" nameView="Error_Max" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="45.0" name="Warning_Max" nameView="Warning_Max" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="25.0" name="Error_Min" nameView="Error_Min" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="30.0" name="Warning_Min" nameView="Warning_Min" max="60.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="HouseChilledWater_Flow" nameView="HouseChilledWater_Flow">
			<config default="30.0" name="Error_Max" nameView="Error_Max" max="30.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="25.0" name="Warning_Max" nameView="Warning_Max" max="30.0" min="10.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="10.0" name="Error_Min" nameView="Error_Min" max="30.0" min="5.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="15.0" name="Warning_Min" nameView="Warning_Min" max="30.0" min="5.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="CDA_External_Pressure" nameView="CDA_External_Pressure">
			<config default="85.0" name="Error_Max" nameView="Error_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="80.0" name="Warning_Max" nameView="Warning_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="65.0" name="Error_Min" nameView="Error_Min" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="70.0" name="Warning_Min" nameView="Error_Max" max="85.0" min="65.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="Vacuum_Pressure" nameView="Vacuum_Pressure">
			<config default="-600.0" name="Error_Max" nameView="Error_Max" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="-625.0" name="Warning_Max" nameView="Warning_Max" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="-800.0" name="Error_Min" nameView="Error_Min" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="-760.0" name="Warning_Min" nameView="Warning_Min" max="-600.0" min="-800.0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="Exhaust_Pressure" nameView="Exhaust_Pressure">
			<config default="2.0" name="Error_Max" nameView="Error_Max" max="2.0" min="0.5" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Error state."/>
			<config default="1.8" name="Warning_Max" nameView="Warning_Max" max="2.0" min="0.5" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum pressure, in psi (pounds per square inch), above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="0.5" name="Error_Min" nameView="Error_Min" max="2.0" min="0.3" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Error state."/>
			<config default="0.7" name="Warning_Min" nameView="Warning_Min" max="2.0" min="0.3" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum pressure, in psi (pounds per square inch), below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
	</configs>
	<configs name="SRD">
		<config default="-500" name="ChuckVacuumOnLimit" nameView="ChuckVacuumOnLimit" description="Chuck vacuum is ON if vacuum pressure is less than this value." max="0" min="-760" paramter="" tag="" unit="s" type="Integer"/>
		<config default="-100" name="ChuckVacuumOffLimit" nameView="ChuckVacuumOffLimit" description="Chuck vacuum is OFF if vacuum pressure is greater than this value." max="100" min="-760" paramter="" tag="" unit="s" type="Integer"/>
		<config default="20" name="SRDRotationPlusSecond" nameView="SRDRotationPlusSecond" description="SRD Rotation motion surplus second to complete motion" max="100" min="-760" paramter="" tag="" unit="s" type="Integer"/>
		<config default="false" name="N2Enabled" nameView="N2Enabled" description="N2 Enabled" max="" min="" paramter="" tag="" unit="s" type="Bool"/>
		<config default="50" name="WaferPresenceCheckAccelDecelPercentage" nameView="WaferPresenceCheckAccelDecelPercentage" description="Accel/Decel to apply to the wafer presence check rotation move." max="100" min="1" paramter="" tag="" unit="" type="Integer"/>
		<config default="25" name="WaferPresenceCheckSpeedInRPMs" nameView="WaferPresenceCheckSpeedInRPMs" description="Wafer check rotation speed in rpms." max="25" min="1" paramter="" tag="" unit="" type="Integer"/>
		<config default="25" name="WaferPresenceCheckDistanceInDegrees" nameView="WaferPresenceCheckDistanceInDegrees" description="WaferPresenceCheckDistanceInDegrees" max="3600" min="0" paramter="" tag="" unit="deg" type="Integer"/>
		<config default="true" name="SRD1EnablePresenceCheckvalue" nameView="SRD1EnablePresenceCheckvalue" description="SRD1 Enable Presence Test" max="" min="" paramter="" tag="" unit="" type="Bool"/>
		<config default="true" name="SRD2EnablePresenceCheckvalue" nameView="SRD2EnablePresenceCheckvalue" description="SRD2 Enable Presence Test" max="" min="" paramter="" tag="" unit="" type="Bool"/>
	</configs>
	<configs name="Dryer">
		<config default="1800" name="AutoShutoffTimeoutSeconds" nameView="AutoShutoffTimeoutSeconds" description="Auto shutoff timeout in seconds" max="10000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="-3" name="MinimumPressure" nameView="MinimumPressure" description="Minimum Pressure" max="1000" min="-1000" paramter="" tag="" unit="mmHg" type="Double"/>
		<config default="5" name="PressureCheckWarningHoldoffSeconds" nameView="PressureCheckWarningHoldoffSeconds" description="Hold off seconds to check pressure warning" max="10000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="-100" name="PressureCheckWarningMMHG" nameView="PressureCheckWarningMMHG" description="Warning Pressure Value" max="1000" min="-1000" paramter="" tag="" unit="mmHg" type="Double"/>
		<config default="5" name="PressureCheckErrorHoldoffSeconds" nameView="PressureCheckErrorHoldoffSeconds" description="Hold off seconds to check pressure error" max="10000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="-150" name="PressureCheckErrorMMHG" nameView="PressureCheckErrorMMHG" description="Error Pressure Value" max="1000" min="-1000" paramter="" tag="" unit="mmHg" type="Double"/>
		<config default="10" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
	</configs>
	<configs name="Prewet">
		<config default="5.1" name="PumpKp" nameView="PumpKp" description="PumpKp" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
		<config default="0" name="PumpKi" nameView="PumpKi" description="PumpKi" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
		<config default="0" name="PumpKd" nameView="PumpKd" description="PumpKd" max="1000" min="0" paramter="" tag="" unit="s" type="Double"/>
		<config default="42" name="PressureTarget" nameView="PressureTarget" description="PressureTarget" max="100" min="0" paramter="" tag="" unit="s" type="Double"/>
		<config default="30" name="KeepWetMaxLimit" nameView="KeepWetMaxLimit" description="Keep Max Max Times" max="100" min="0" paramter="" tag="" unit="" type="Integer"/>
		<config default="10" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="7300" name="MaxPumpSpeed" nameView="MaxPumpSpeed" description="Max Pump Speed" max="32768" min="0" paramter="" tag="" unit="" type="Integer"/>
		<config default="300" name="MinPumpSpeed" nameView="MinPumpSpeed" description="Min Pump Speed" max="32768" min="0" paramter="" tag="" unit="" type="Integer"/>
		<config default="30" name="IdleKeepwetPauseBetweenScanSeconds" nameView="IdleKeepwetPauseBetweenScanSeconds" description="Idle Keepwet Pause Between Scan Seconds" max="60" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="0.5" name="PrewetTargetLimit" nameView="PrewetTargetLimit" description="Prewet pressure in PrewetTarget Limit,device stop adjust speed" max="60" min="0" paramter="" tag="" unit="" type="Double"/>
		<configs name="PumpFlow" nameView="PumpFlow">
			<config default="60.0" name="Error_Max" nameView="Error_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Error state."/>
			<config default="50.0" name="Warning_Max" nameView="Warning_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="5.0" name="Error_Min" nameView="Error_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Error state."/>
			<config default="10.0" name="Warning_Min" nameView="Warning_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
		<configs name="PumpPressure" nameView="PumpPressure">
			<config default="50.0" name="Error_Max" nameView="Error_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Error state."/>
			<config default="40.0" name="Warning_Max" nameView="Warning_Max" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the maximum flow, in liters per minute, above which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
			<config default="20.0" name="Error_Min" nameView="Error_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Error state."/>
			<config default="30.0" name="Warning_Min" nameView="Warning_Min" max="100.0" min="0" paramter="" tag="" unit="" type="Double"  description="This value defines the minimum flow, in liters per minute, below which this interlock will transition to an Warning state.  Note corresponding Error_Min/Error_Max testing supersedes this test."/>
		</configs>
	</configs>
	<configs name="QDR">
		<config default="65" name="SensorReadingFull" nameView="SensorReadingFull" description="QDR Sensor Reading Full" max="100" min="0" paramter="" tag="" unit="" type="Integer"/>
		<config default="20" name="SensorReadingEmpty" nameView="SensorReadingEmpty" description="QDR Sensor Reading Empty" max="100" min="0" paramter="" tag="" unit="" type="Integer"/>
		<config default="8" name="NominalDrainTimeSeconds" nameView="NominalDrainTimeSeconds" description="QDR Nominal Drain Time" max="1000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="35.0" name="FillingStartedDelta" nameView="FillingStartedDelta" description="water level substract start water level is over delta means filling water normal" max="100" min="0" paramter="" tag="" unit="" type="Double"/>
		<config default="20" name="ConcurrentFillTimeSeconds" nameView="ConcurrentFillTimeSeconds" description="QDR Concurrent Fill Time" max="60" min="1" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="ClampCycleTimeSeconds" nameView="ClampCycleTimeSeconds" description="Clamp cycle time seconds" max="60" min="1" paramter="" tag="" unit="s" type="Double"/>
		<config default="3" name="NumberClampCyclesToComplete" nameView="NumberClampCyclesToComplete" description="Clamp cycle counts" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
		<config default="120" name="PickupDelayWarningSeconds" nameView="PickupDelayWarningSeconds" description="Wait transporter goto QDR to pickup Wafer Shuttle" max="500" min="1" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PickTimeSeconds" nameView="PickTimeSeconds" description="Time taken to pick up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="PlaceTimeSeconds" nameView="PlaceTimeSeconds" description="Time taken to place down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PickDelaySeconds" nameView="PickDelaySeconds" description="Time delay before picking wafer holder up from cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="2" name="PlaceDelaySeconds" nameView="PlaceDelaySeconds" description="Time delay after placing wafer holder down to cell" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="5" name="NominalCheckFillWaterTimeSeconds" nameView="NominalCheckFillWaterTimeSeconds" description="Time delay to check water is filling" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="10" name="NominalCheckFillFullTimeSeconds" nameView="NominalCheckFillFullTimeSeconds" description="Time delay to check water is full" max="100000" min="0" paramter="" tag="" unit="s" type="Integer"/>
		<config default="false" name="KeepWaferShuttleWetUntilTransfer" nameView="KeepWaferShuttleWetUntilTransfer" description="whether or not to execute keepwet action" max="" min="" paramter="" tag="" unit="s" type="Bool"/>
	</configs>
	<configs name="Reservoir" nameView="Reservoir">
		<config default="0.5" name="LevelHysteresis" nameView="LevelHysteresis" description="level Hysteresis" max="2" min="0" paramter="" tag="" unit="" type="Double"></config>
		<config default="300" name="PHUpdatePeriod" nameView="PHUpdatePeriod" description="PH update period" max="500" min="0" paramter="" tag="" unit="s" type="Double"></config>
		<config default="10" name="PHFlowTime" nameView="PHFlowTime" description="PH Valve time" max="20" min="0" paramter="" tag="" unit="s" type="Double"></config>
		<config default="240" name="PHStabilizationTime" nameView="PHStabilizationTime" description="PH Stabilization time" max="500" min="0" paramter="" tag="" unit="s" type="Double"></config>
		<config default="2.5" name="PHSampleTime" nameView="PHSampleTime" description="PH sample time" max="10" min="0" paramter="" tag="" unit="s" type="Double"></config>
		<config default="20" name="PHSamples" nameView="PHSamples" description="PH sample count" max="50" min="0" paramter="" tag="" unit="" type="Integer"></config>
		<config default="20" name="LevelAvgSamples" nameView="LevelAvgSamples" description="Level average sample" max="100" min="0" paramter="" tag="" unit="" type="Integer"></config>
		<config default="5000" name="CADefaultPumpSpeed" nameView="CADefaultPumpSpeed" description="CA pump default speed" max="7200" min="0" paramter="" tag="" unit="" type="Double"></config>
		<config default="7200" name="CAMaxPumpSpeed" nameView="CAMaxPumpSpeed" description="CA Max Pump Speed" max="10000" min="1" paramter="" tag="" unit="rpm" type="Double"></config>
		<config default="3" name="ANDefaultPumpSpeed" nameView="ANDefaultPumpSpeed" description="AN pump default speed" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
		<config default="5" name="ANOverFlow" nameView="ANOverFlow" description="AN Pump ignor AN over flow " max="10" min="0" paramter="" tag="" unit="" type="Double"></config>
		<config default="3" name="DrainSpeed" nameView="DrainSpeed" description="AN drain pump default speed" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
		<config default="30" name="CellFlowUpdatePeriod" nameView="CellFlowUpdatePeriod" description="Cell Flow Update Period" max="60" min="0" paramter="" tag="" unit="s" type="Integer"/>
		
		<config default="50" name="ReservoirTotalAmpHoursWarningLimit" nameView="ReservoirTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="ReservoirTotalAmpHoursFaultLimit" nameView="ReservoirTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="BathTotalAmpHoursWarningLimit" nameView="BathTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="BathTotalAmpHoursFaultLimit" nameView="BathTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="ANBathTotalAmpHoursWarningLimit" nameView="ANBathTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="ANBathTotalAmpHoursFaultLimit" nameView="ANBathTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="BathTotalDaysWarningLimit" nameView="BathTotalDaysWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="BathTotalDaysFaultLimit" nameView="BathTotalDaysFaultLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="50" name="MembraneTotalAmpHoursWarningLimit" nameView="MembraneTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="MembraneTotalAmpHoursFaultLimit" nameView="MembraneTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
		<config default="50" name="ReservoirTotalWafersWarningLimit" nameView="ReservoirTotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		<config default="100" name="ReservoirTotalWafersFaultLimit" nameView="ReservoirTotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
		
		<configs name="CMM" nameView="CMM">
			<config default="20" name="CMMFlowHighFault" nameView="CMMFlowHighFault" description="CMM Flow Over HighFault,system occurs error " max="20" min="0" paramter="" tag="" unit="L/min" type="Double" />
			<config default="20" name="CMMFlowHighWarning" nameView="CMMFlowHighWarning" description="CMM Flow Over HighWarninb,system occurs warning " max="20" min="0" paramter="" tag="" unit="L/min" type="Double" />
			<config default="0" name="CMMFlowLowFault" nameView="CMMFlowLowFault" description="CMM Flow Less LowFault,system occurs error " max="20" min="0" paramter="" tag="" unit="L/min" type="Double" />
			<config default="0" name="CMMFlowLowWarning" nameView="CMMFlowLowWarning" description="CMM Flow less HighFault,system occurs warning " max="20" min="0" paramter="" tag="" unit="L/min" type="Double" />
			<config default="1000" name="CMMAnodeLifeTimeAHrs" nameView="CMMAnodeLifeTimeAHrs" description="CMM Anode LifeTimeAHrs" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
			<config default="1000" name="CMMCathodeLifeTimeAHrs" nameView="CMMCathodeLifeTimeAHrs" description="CMM Cathode LifeTimeAHrs" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
			<config default="6" name="CMMFlowCheckDelaySeconds" nameView="CMMFlowCheckDelaySeconds" description="CMM Flow Check Delay Seconds" max="30" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="50" name="CMMAnodeTotalAmpHoursWarningLimit" nameView="CMMAnodeTotalAmpHoursWarningLimit" description="CMM Anode Total Amp Hours Warning Limit" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
			<config default="100" name="CMMAnodeTotalAmpHoursFaultLimit" nameView="CMMAnodeTotalAmpHoursFaultLimit" description="CMM Anode Total Amp Hours Fault Limit" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
			<config default="50" name="CMMCathodeTotalAmpHoursWarningLimit" nameView="CMMCathodeTotalAmpHoursWarningLimit" description="CMM Cathode Total AmpHours Warning Limit" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
			<config default="100" name="CMMCathodeTotalAmpHoursFaultLimit" nameView="CMMCathodeTotalAmpHoursFaultLimit" description="CMM Cathode Total AmpHours Fault Limit" max="100000" min="0" paramter="" tag="" unit="Ah" type="Double" />
		</configs>
		<configs name="Reservoir1" nameView="Reservoir1">
			<config default="16" name="DIValveMaxOnTime" nameView="DIValveMaxOnTime" description="DI Valve Max Time in period " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="5" name="DIValveMaxOnTimePerFill" nameView="DIValveMaxOnTimePerFill" description="DI Valve Max Time per fill " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="24" name="DIValveMaxOnTimePeriod" nameView="DIValveMaxOnTimePeriod" description="DI Valve Max Time in period " max="48" min="0" paramter="" tag="" unit="hour" type="Double" />
			<config default="95" name="CAHighLevel" nameView="CAHighLevel" description="CA High Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="0,0,1.5022,94.782" name="CALevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="0,0,0.4,2.6" name="ANLevelCurve" nameView="ANLevelCurve" description="AN Level Curve " max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="95" name="ANHighLevel" nameView="ANHighLevel" description="AN High Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5" name="ANLowLevel" nameView="ANLowLevel" description="AN Low Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="CALowLevel" nameView="CALowLevel" description="CA Low Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5.0" name="CAMainFlowFaultLow" nameView="CAMainFlowFaultLow" description="CA Main Flow Fault Low" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="10000" name="FlowFaultHoldOffTime" nameView="FlowFaultHoldOffTime" description="CA Flow Fault Hold Off Time" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
			<config default="3.0" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Low Limit" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>			
			<config default="1.0" name="ANFastLeakLevelTolerance" nameView="ANFastLeakLevelTolerance" description="AN FastLeakLevel Tolerance Volue" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="3" name="ANLeakOperatingUpdateTime" nameView="ANLeakOperatingUpdateTime" description="AN LeakOperating Update Time" max="30" min="0" paramter="" tag="" unit="min" type="Integer"></config>
			<config default="1.0" name="MaxLeakVolume" nameView="MaxLeakVolume" description="MaxLeakVolume" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="0.3" name="MaxFlowDelta" nameView="MaxFlowDelta" description="MaxFlowDelta" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="0.2" name="ByPassMetalTotalFlowMinLimit" nameView="ByPassMetalTotalFlowMinLimit" description="Open CA Pump Safety detected used" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="3" name="CleraLeakVolumeTime" nameView="CleraLeakVolumeTime" description="Clera LeakVolume Time" max="30" min="0" paramter="" tag="" unit="min" type="Integer"></config>
			<config default="1" name="ANBypassMinCellCount" nameView="ANBypassMinCellCount" description="AN Bypass Min Cell Count" max="5" min="1" paramter="" tag="" unit="" type="Integer"></config>			
			<config default="100" name="CAMaxTankVolume" nameView="CAMaxTankVolume" description="CA Max Tank Volume" max="200" min="1" paramter="" tag="" unit="L" type="Integer"></config>
			<config default="1000" name="DIValveMaxAccumulation" nameView="DIValveMaxAccumulation" description="DI Valve Max Accumulation" max="10000" min="1" paramter="" tag="" unit="mL" type="Integer"></config>
		</configs>
		<configs name="Reservoir2" nameView="Reservoir2">
			<config default="16" name="DIValveMaxOnTime" nameView="DIValveMaxOnTime" description="DI Valve Max Time in period " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="5" name="DIValveMaxOnTimePerFill" nameView="DIValveMaxOnTimePerFill" description="DI Valve Max Time per fill " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="24" name="DIValveMaxOnTimePeriod" nameView="DIValveMaxOnTimePeriod" description="DI Valve Max Time in period " max="48" min="0" paramter="" tag="" unit="hour" type="Double" />
			<config default="10000" name="DIReplenMaxAccumulation" nameView="DIReplenMaxAccumulation" description="DI Valve Max Time in period " max="20000" min="0" paramter="" tag="" unit="mL" type="Double" />
			<config default="95" name="HighLevel" nameView="HighLevel" description="High Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="0,0,1.5022,94.782" name="LevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="260" name="MaxTankVolume" nameView="MaxTankVolume" description="Maximum Tank volume" max="300" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="3" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="0.56" name="InitialDosingSpeed" nameView="InitialDosingSpeed" description="Initial Dosing Speed" max="0.672" min="0" paramter="" tag="" unit="mL/min" type="Double" />
			<config default="0.14" name="MinDoseAmount" nameView="MinDoseAmount" description="Minimum Dose Amount" max="200" min="0" paramter="" tag="" unit="mL" type="Double" />
			<config default="1" name="BottleReserveVolume1" nameView="BottleReserveVolume1" description="Bottle Reserve Volume of Replen1" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />
			<config default="1" name="BottleReserveVolume2" nameView="BottleReserveVolume2" description="Bottle Reserve Volume of Replen2" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />
			<config default="60" name="DosingOutTime" nameView="DosingOutTime" description="Dosing Out Time" max="600" min="1" paramter="" tag="" unit="s" type="Double" />
		</configs>
		<configs name="Reservoir3" nameView="Reservoir3">
			<config default="16" name="DIValveMaxOnTime" nameView="DIValveMaxOnTime" description="DI Valve Max Time in period " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="5" name="DIValveMaxOnTimePerFill" nameView="DIValveMaxOnTimePerFill" description="DI Valve Max Time per fill " max="50" min="0" paramter="" tag="" unit="minute" type="Double" />
			<config default="24" name="DIValveMaxOnTimePeriod" nameView="DIValveMaxOnTimePeriod" description="DI Valve Max Time in period " max="48" min="0" paramter="" tag="" unit="hour" type="Double" />
			<config default="95" name="CAHighLevel" nameView="CAHighLevel" description="CA High Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="0,0,1.5022,94.782" name="CALevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="0,0,0.4,2.6" name="ANLevelCurve" nameView="ANLevelCurve" description="AN Level Curve " max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="95" name="ANHighLevel" nameView="ANHighLevel" description="AN High Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5" name="ANLowLevel" nameView="ANLowLevel" description="AN Low Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="CALowLevel" nameView="CALowLevel" description="CA Low Level" max="100" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5.0" name="CAMainFlowFaultLow" nameView="CAMainFlowFaultLow" description="CA Main Flow Fault Low" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="10000" name="FlowFaultHoldOffTime" nameView="FlowFaultHoldOffTime" description="CA Flow Fault Hold Off Time" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
			<config default="3.0" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Low Limit" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="1.0" name="ANFastLeakLevelTolerance" nameView="ANFastLeakLevelTolerance" description="AN FastLeakLevel Tolerance Volue" max="30" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="1" name="ANLeakOperatingUpdateTime" nameView="ANLeakOperatingUpdateTime" description="AN LeakOperating Update Time" max="5" min="0" paramter="" tag="" unit="min" type="Integer"></config>
			<config default="1.0" name="MaxLeakVolume" nameView="MaxLeakVolume" description="MaxLeakVolume" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="3" name="CleraLeakVolumeTime" nameView="CleraLeakVolumeTime" description="Clera LeakVolume Time" max="30" min="0" paramter="" tag="" unit="min" type="Integer"></config>
			<config default="1" name="ANBypassMinCellCount" nameView="ANBypassMinCellCount" description="AN Bypass Min Cell Count" max="5" min="1" paramter="" tag="" unit="" type="Integer"></config>
			<config default="0.3" name="MaxFlowDelta" nameView="MaxFlowDelta" description="MaxFlowDelta" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="0.2" name="ByPassMetalTotalFlowMinLimit" nameView="ByPassMetalTotalFlowMinLimit" description="Open CA Pump Safety detected used" max="5" min="0" paramter="" tag="" unit="" type="Double"></config>
			<config default="2000" name="ANTransferPumpAcceleration" nameView="ANTransferPumpAcceleration" description="ANTransferPump Acceleration" max="5000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
			<config default="2000" name="ANTransferPumpDeceleration" nameView="ANTransferPumpDeceleration" description="ANTransferPump Deceleration" max="5000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
			<config default="5000" name="ANTransferPumpSpeed" nameView="ANTransferPumpSpeed" description="ANTransferPump Speed" max="5000" min="100" paramter="" tag="" unit="count" type="Integer"></config>
			<config default="0" name="FlowRateMin" nameView="FlowRateMin" description="Minimum Flow Rate of Cross Dose" max="50" min="0" paramter="" tag="" unit="mL/min" type="Double"></config>
			<config default="10000" name="StartUpHoldOffTime" nameView="StartUpHoldOffTime" description="Start Up Hold Off Time" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer"></config>
			<config default="100" name="CAMaxTankVolume" nameView="CAMaxTankVolume" description="CA Max Tank Volume" max="200" min="1" paramter="" tag="" unit="L" type="Integer"></config>
			<config default="1000" name="DIValveMaxAccumulation" nameView="DIValveMaxAccumulation" description="DI Valve Max Accumulation" max="10000" min="1" paramter="" tag="" unit="mL" type="Integer"></config>
		</configs>
	</configs>
	<configs name="Linmot" nameView="Linmot">
		<config default="5000" name="LinmotHoldoffMilliseconds" nameView="LinmotHoldoffMilliseconds" description="Linmot Hold off Milliseconds" max="10000" min="1" paramter="" tag="" unit="ms" type="Integer"></config>
	</configs>
</root>