CyberX8/CyberX8_RT/Config/EquipmentVariables.xml

<?xml version="1.0"?>
<EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <SpoolingStreamFunctions />
  <SystemInfo clockFormat="yyMMddHHmmss" traceSampleMax="20" traceMaxCount="5" supportValidIpRestrict="false" validIps="" Encoding="ASCII" name="Hsms" version="1.0.1" />
  <CommunicationInfo remoteIpAddress="127.0.0.1" port="5000" supportHeartCheck="true" heartInterval="5" />
  <StatusVariables>
    <StatusVariable id="3" valueType="Ascii" logicalName="Clock" eventTrigger="" units="" />
    <StatusVariable id="4" valueType="U4" logicalName="ControlState" eventTrigger="" units="" />
    <StatusVariable id="9" valueType="U4" logicalName="System.SpoolingActual" eventTrigger="" units="" />
    <StatusVariable id="10" valueType="U4" logicalName="System.SpoolingTotal" eventTrigger="" units="" />
    <StatusVariable id="11" valueType="Ascii" logicalName="System.SpoolingFullTime" eventTrigger="" units="" />
    <StatusVariable id="12" valueType="Ascii" logicalName="System.SpoolingStartTime" eventTrigger="" units="" />
    <StatusVariable id="13" valueType="Ascii" logicalName="System.SpoolingState" eventTrigger="" units="" />
    <StatusVariable id="14" valueType="Boolean" logicalName="System.IsSpoolingEnable" eventTrigger="" units="" />
    <StatusVariable id="10101001" valueType="Ascii" logicalName="System.State" eventTrigger="" units="" />
    <StatusVariable id="10101004" valueType="Boolean" logicalName="System.IsAlarm" eventTrigger="" units="" />
    <StatusVariable id="10101010" valueType="Boolean" logicalName="System.IsAutoMode" eventTrigger="" units="" />
    <StatusVariable id="10101005" valueType="Boolean" logicalName="System.IsAutoRunning" eventTrigger="" units="" />
    <StatusVariable id="10101006" valueType="Boolean" logicalName="System.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10101007" valueType="Boolean" logicalName="System.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10101011" valueType="Boolean" logicalName="System.IsConnectedWithHost" eventTrigger="" units="" />
    <StatusVariable id="10101012" valueType="Boolean" logicalName="System.IsDisconnectWithHost" eventTrigger="" units="" />
    <StatusVariable id="10101013" valueType="Ascii" logicalName="System.EquipmentMode" eventTrigger="" units="" />
    <StatusVariable id="10201001" valueType="Ascii" logicalName="EFEM.State" eventTrigger="" units="" />
    <StatusVariable id="10201002" valueType="Boolean" logicalName="EFEM.IsAlarm" eventTrigger="" units="" />
    <StatusVariable id="10201003" valueType="Boolean" logicalName="EFEM.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10201004" valueType="Boolean" logicalName="EFEM.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10201005" valueType="Boolean" logicalName="EFEM.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="10201006" valueType="U4" logicalName="EFEM.RobotSpeed" eventTrigger="" units="" />
    <StatusVariable id="10301001" valueType="Boolean" logicalName="LP1.IsError" eventTrigger="" units="" />
    <StatusVariable id="10301002" valueType="Boolean" logicalName="LP1.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10301003" valueType="Boolean" logicalName="LP1.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10301004" valueType="Ascii" logicalName="LP1.CassetteState" eventTrigger="" units="" />
    <StatusVariable id="10301005" valueType="Ascii" logicalName="LP1.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="10301006" valueType="Ascii" logicalName="LP1.SlotMap" eventTrigger="" units="" />
    <StatusVariable id="10301007" valueType="Ascii" logicalName="LP1.CarrierId" eventTrigger="" units="" />
    <StatusVariable id="10301008" valueType="Boolean" logicalName="LP1.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="10301009" valueType="Boolean" logicalName="LP1.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="10301010" valueType="Boolean" logicalName="LP1.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="10301011" valueType="Boolean" logicalName="LP1.IsDoorOpen" eventTrigger="" units="" />
    <StatusVariable id="10301012" valueType="Boolean" logicalName="LP1.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="10301013" valueType="Boolean" logicalName="LP1.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="10301014" valueType="Boolean" logicalName="LP1.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="10401001" valueType="Boolean" logicalName="LP2.IsError" eventTrigger="" units="" />
    <StatusVariable id="10401002" valueType="Boolean" logicalName="LP2.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10401003" valueType="Boolean" logicalName="LP2.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10401004" valueType="Ascii" logicalName="LP2.CassetteState" eventTrigger="" units="" />
    <StatusVariable id="10401005" valueType="Ascii" logicalName="LP2.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="10401006" valueType="Ascii" logicalName="LP2.SlotMap" eventTrigger="" units="" />
    <StatusVariable id="10401007" valueType="Ascii" logicalName="LP2.CarrierId" eventTrigger="" units="" />
    <StatusVariable id="10401008" valueType="Boolean" logicalName="LP2.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="10401009" valueType="Boolean" logicalName="LP2.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="10401010" valueType="Boolean" logicalName="LP2.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="10401011" valueType="Boolean" logicalName="LP2.IsDoorOpen" eventTrigger="" units="" />
    <StatusVariable id="10401012" valueType="Boolean" logicalName="LP2.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="10401013" valueType="Boolean" logicalName="LP2.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="10401014" valueType="Boolean" logicalName="LP2.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="10501001" valueType="Boolean" logicalName="LP3.IsError" eventTrigger="" units="" />
    <StatusVariable id="10501002" valueType="Boolean" logicalName="LP3.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10501003" valueType="Boolean" logicalName="LP3.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10501004" valueType="Ascii" logicalName="LP3.CassetteState" eventTrigger="" units="" />
    <StatusVariable id="10501005" valueType="Ascii" logicalName="LP3.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="10501006" valueType="Ascii" logicalName="LP3.SlotMap" eventTrigger="" units="" />
    <StatusVariable id="10501007" valueType="Ascii" logicalName="LP3.CarrierId" eventTrigger="" units="" />
    <StatusVariable id="10501008" valueType="Boolean" logicalName="LP3.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="10501009" valueType="Boolean" logicalName="LP3.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="10501010" valueType="Boolean" logicalName="LP3.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="10501011" valueType="Boolean" logicalName="LP3.IsDoorOpen" eventTrigger="" units="" />
    <StatusVariable id="10501012" valueType="Boolean" logicalName="LP3.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="10501013" valueType="Boolean" logicalName="LP3.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="10501014" valueType="Boolean" logicalName="LP3.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="20101001" valueType="Ascii" logicalName="PUF1.State" eventTrigger="" units="" />
    <StatusVariable id="20101002" valueType="Boolean" logicalName="PUF1.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20101003" valueType="Boolean" logicalName="PUF1.IsError" eventTrigger="" units="" />
    <StatusVariable id="20101004" valueType="Boolean" logicalName="PUF1.ChuckARelease" eventTrigger="" units="" />
    <StatusVariable id="20101005" valueType="F8" logicalName="PUF1.ChuckAVac" eventTrigger="" units="" />
    <StatusVariable id="20101006" valueType="Ascii" logicalName="PUF1.ChuckAVacuumStatus" eventTrigger="" units="" />
	<StatusVariable id="20101007" valueType="Boolean" logicalName="PUF1.ChuckBRelease" eventTrigger="" units="" />
	<StatusVariable id="20101008" valueType="F8" logicalName="PUF1.ChuckBVac" eventTrigger="" units="" />
	<StatusVariable id="20101009" valueType="Ascii" logicalName="PUF1.ChuckBVacuumStatus" eventTrigger="" units="" />
    <StatusVariable id="20102001" valueType="Boolean" logicalName="PUF1.Flip.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20102002" valueType="Boolean" logicalName="PUF1.Flip.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20102003" valueType="Boolean" logicalName="PUF1.Flip.IsError" eventTrigger="" units="" />
    <StatusVariable id="20102004" valueType="Boolean" logicalName="PUF1.Flip.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20102005" valueType="F8" logicalName="PUF1.Flip.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20102006" valueType="Ascii" logicalName="PUF1.Flip.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20102007" valueType="F8" logicalName="PUF1.Flip.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20102008" valueType="F8" logicalName="PUF1.Flip.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20102009" valueType="F8" logicalName="PUF1.Flip.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="20103001" valueType="Boolean" logicalName="PUF1.Rotation.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20103002" valueType="Boolean" logicalName="PUF1.Rotation.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20103003" valueType="Boolean" logicalName="PUF1.Rotation.IsError" eventTrigger="" units="" />
    <StatusVariable id="20103004" valueType="Boolean" logicalName="PUF1.Rotation.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20103005" valueType="F8" logicalName="PUF1.Rotation.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20103006" valueType="Ascii" logicalName="PUF1.Rotation.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20103007" valueType="F8" logicalName="PUF1.Rotation.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20103008" valueType="F8" logicalName="PUF1.Rotation.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20103009" valueType="F8" logicalName="PUF1.Rotation.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="20104001" valueType="Boolean" logicalName="PUF1.Vertical.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20104002" valueType="Boolean" logicalName="PUF1.Vertical.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20104003" valueType="Boolean" logicalName="PUF1.Vertical.IsError" eventTrigger="" units="" />
    <StatusVariable id="20104004" valueType="Boolean" logicalName="PUF1.Vertical.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20104005" valueType="F8" logicalName="PUF1.Vertical.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20104006" valueType="Ascii" logicalName="PUF1.Vertical.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20104007" valueType="F8" logicalName="PUF1.Vertical.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20104008" valueType="F8" logicalName="PUF1.Vertical.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20104009" valueType="F8" logicalName="PUF1.Vertical.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="20201001" valueType="Ascii" logicalName="PUF2.State" eventTrigger="" units="" />
    <StatusVariable id="20201002" valueType="Boolean" logicalName="PUF2.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20201003" valueType="Boolean" logicalName="PUF2.IsError" eventTrigger="" units="" />
    <StatusVariable id="20201004" valueType="Boolean" logicalName="PUF2.ChuckARelease" eventTrigger="" units="" />
    <StatusVariable id="20201005" valueType="F8" logicalName="PUF2.ChuckAVac" eventTrigger="" units="" />
    <StatusVariable id="20201006" valueType="Ascii" logicalName="PUF2.ChuckAVacuumStatus" eventTrigger="" units="" />
	<StatusVariable id="20201007" valueType="Boolean" logicalName="PUF2.ChuckBRelease" eventTrigger="" units="" />
	<StatusVariable id="20201008" valueType="F8" logicalName="PUF2.ChuckBVac" eventTrigger="" units="" />
	<StatusVariable id="20201009" valueType="Ascii" logicalName="PUF2.ChuckBVacuumStatus" eventTrigger="" units="" />
    <StatusVariable id="20202001" valueType="Boolean" logicalName="PUF2.Flip.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20202002" valueType="Boolean" logicalName="PUF2.Flip.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20202003" valueType="Boolean" logicalName="PUF2.Flip.IsError" eventTrigger="" units="" />
    <StatusVariable id="20202004" valueType="Boolean" logicalName="PUF2.Flip.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20202005" valueType="F8" logicalName="PUF2.Flip.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20202006" valueType="Ascii" logicalName="PUF2.Flip.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20202007" valueType="F8" logicalName="PUF2.Flip.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20202008" valueType="F8" logicalName="PUF2.Flip.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20202009" valueType="F8" logicalName="PUF2.Flip.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="20203001" valueType="Boolean" logicalName="PUF2.Rotation.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20203002" valueType="Boolean" logicalName="PUF2.Rotation.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20203003" valueType="Boolean" logicalName="PUF2.Rotation.IsError" eventTrigger="" units="" />
    <StatusVariable id="20203004" valueType="Boolean" logicalName="PUF2.Rotation.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20203005" valueType="F8" logicalName="PUF2.Rotation.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20203006" valueType="Ascii" logicalName="PUF2.Rotation.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20203007" valueType="F8" logicalName="PUF2.Rotation.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20203008" valueType="F8" logicalName="PUF2.Rotation.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20203009" valueType="F8" logicalName="PUF2.Rotation.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="20204001" valueType="Boolean" logicalName="PUF2.Vertical.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="20204002" valueType="Boolean" logicalName="PUF2.Vertical.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="20204003" valueType="Boolean" logicalName="PUF2.Vertical.IsError" eventTrigger="" units="" />
    <StatusVariable id="20204004" valueType="Boolean" logicalName="PUF2.Vertical.IsRun" eventTrigger="" units="" />
    <StatusVariable id="20204005" valueType="F8" logicalName="PUF2.Vertical.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="20204006" valueType="Ascii" logicalName="PUF2.Vertical.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="20204007" valueType="F8" logicalName="PUF2.Vertical.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="20204008" valueType="F8" logicalName="PUF2.Vertical.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="20204009" valueType="F8" logicalName="PUF2.Vertical.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30101001" valueType="Ascii" logicalName="Loader1.State" eventTrigger="" units="" />
    <StatusVariable id="30101002" valueType="Ascii" logicalName="Loader1.LotID" eventTrigger="" units="" />
    <StatusVariable id="30101003" valueType="Ascii" logicalName="Loader1.WSID" eventTrigger="" units="" />
    <StatusVariable id="30101004" valueType="Ascii" logicalName="Loader1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="30101005" valueType="Ascii" logicalName="Loader1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="30101006" valueType="Ascii" logicalName="Loader1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="30101007" valueType="Ascii" logicalName="Loader1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="30101008" valueType="Ascii" logicalName="Loader1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="30101009" valueType="Ascii" logicalName="Loader1.Task" eventTrigger="" units="" />
    <StatusVariable id="30101010" valueType="Boolean" logicalName="Loader1.SideAWaferShuttleClamp" eventTrigger="" units="" />
    <StatusVariable id="30101011" valueType="Boolean" logicalName="Loader1.SideBWaferShuttleClamp" eventTrigger="" units="" />
    <StatusVariable id="30101012" valueType="Boolean" logicalName="Loader1.WaferShuttleClamp" eventTrigger="" units="" />
    <StatusVariable id="30101013" valueType="Boolean" logicalName="Loader1.WaferShuttlePresent" eventTrigger="" units="" />
    <StatusVariable id="30101014" valueType="F8" logicalName="Loader1.LeakFlow" eventTrigger="" units="" />
    <StatusVariable id="30101015" valueType="Boolean" logicalName="Loader1.LeakFlowClamp" eventTrigger="" units="" />
    <StatusVariable id="30101016" valueType="F8" logicalName="Loader1.LeakMinor" eventTrigger="" units="" />
    <StatusVariable id="30101017" valueType="F8" logicalName="Loader1.LeakMajor" eventTrigger="" units="" />
    <StatusVariable id="30101018" valueType="Boolean" logicalName="Loader1.LeakVacuum" eventTrigger="" units="" />
    <StatusVariable id="30101019" valueType="F8" logicalName="Loader1.LeakVacuumValue" eventTrigger="" units="" />
    <StatusVariable id="30101020" valueType="Ascii" logicalName="Loader1.LeakStatus" eventTrigger="" units="" />
    <StatusVariable id="30102001" valueType="Boolean" logicalName="Loader1.SwingA.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30102002" valueType="Boolean" logicalName="Loader1.SwingA.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30102003" valueType="Boolean" logicalName="Loader1.SwingA.IsError" eventTrigger="" units="" />
    <StatusVariable id="30102004" valueType="Boolean" logicalName="Loader1.SwingA.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30102005" valueType="F8" logicalName="Loader1.SwingA.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30102006" valueType="Ascii" logicalName="Loader1.SwingA.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30102007" valueType="F8" logicalName="Loader1.SwingA.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30102008" valueType="F8" logicalName="Loader1.SwingA.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30102009" valueType="F8" logicalName="Loader1.SwingA.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30103001" valueType="Boolean" logicalName="Loader1.SwingB.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30103002" valueType="Boolean" logicalName="Loader1.SwingB.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30103003" valueType="Boolean" logicalName="Loader1.SwingB.IsError" eventTrigger="" units="" />
    <StatusVariable id="30103004" valueType="Boolean" logicalName="Loader1.SwingB.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30103005" valueType="F8" logicalName="Loader1.SwingB.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30103006" valueType="Ascii" logicalName="Loader1.SwingB.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30103007" valueType="F8" logicalName="Loader1.SwingB.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30103008" valueType="F8" logicalName="Loader1.SwingB.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30103009" valueType="F8" logicalName="Loader1.SwingB.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30104001" valueType="Boolean" logicalName="Loader1.TiltA.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30104002" valueType="Boolean" logicalName="Loader1.TiltA.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30104003" valueType="Boolean" logicalName="Loader1.TiltA.IsError" eventTrigger="" units="" />
    <StatusVariable id="30104004" valueType="Boolean" logicalName="Loader1.TiltA.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30104005" valueType="F8" logicalName="Loader1.TiltA.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30104006" valueType="Ascii" logicalName="Loader1.TiltA.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30104007" valueType="F8" logicalName="Loader1.TiltA.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30104008" valueType="F8" logicalName="Loader1.TiltA.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30104009" valueType="F8" logicalName="Loader1.TiltA.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30105001" valueType="Boolean" logicalName="Loader1.TiltB.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30105002" valueType="Boolean" logicalName="Loader1.TiltB.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30105003" valueType="Boolean" logicalName="Loader1.TiltB.IsError" eventTrigger="" units="" />
    <StatusVariable id="30105004" valueType="Boolean" logicalName="Loader1.TiltB.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30105005" valueType="F8" logicalName="Loader1.TiltB.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30105006" valueType="Ascii" logicalName="Loader1.TiltB.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30105007" valueType="F8" logicalName="Loader1.TiltB.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30105008" valueType="F8" logicalName="Loader1.TiltB.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30105009" valueType="F8" logicalName="Loader1.TiltB.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30106001" valueType="Boolean" logicalName="Loader1.CRSA.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30106002" valueType="Boolean" logicalName="Loader1.CRSA.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30106003" valueType="Boolean" logicalName="Loader1.CRSA.IsError" eventTrigger="" units="" />
    <StatusVariable id="30106004" valueType="Boolean" logicalName="Loader1.CRSA.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30106005" valueType="F8" logicalName="Loader1.CRSA.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30106006" valueType="Ascii" logicalName="Loader1.CRSA.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30106007" valueType="F8" logicalName="Loader1.CRSA.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30106008" valueType="F8" logicalName="Loader1.CRSA.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30106009" valueType="F8" logicalName="Loader1.CRSA.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30107001" valueType="Boolean" logicalName="Loader1.CRSB.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30107002" valueType="Boolean" logicalName="Loader1.CRSB.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30107003" valueType="Boolean" logicalName="Loader1.CRSB.IsError" eventTrigger="" units="" />
    <StatusVariable id="30107004" valueType="Boolean" logicalName="Loader1.CRSB.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30107005" valueType="F8" logicalName="Loader1.CRSB.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30107006" valueType="Ascii" logicalName="Loader1.CRSB.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30107007" valueType="F8" logicalName="Loader1.CRSB.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30107008" valueType="F8" logicalName="Loader1.CRSB.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30107009" valueType="F8" logicalName="Loader1.CRSB.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30108001" valueType="Boolean" logicalName="Loader1.Rotation.IsHomed" eventTrigger="" units="" />
    <StatusVariable id="30108002" valueType="Boolean" logicalName="Loader1.Rotation.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="30108003" valueType="Boolean" logicalName="Loader1.Rotation.IsError" eventTrigger="" units="" />
    <StatusVariable id="30108004" valueType="Boolean" logicalName="Loader1.Rotation.IsRun" eventTrigger="" units="" />
    <StatusVariable id="30108005" valueType="F8" logicalName="Loader1.Rotation.ProfileVelocity" eventTrigger="" units="" />
    <StatusVariable id="30108006" valueType="Ascii" logicalName="Loader1.Rotation.CurrentStation" eventTrigger="" units="" />
    <StatusVariable id="30108007" valueType="F8" logicalName="Loader1.Rotation.Acceleration" eventTrigger="" units="" />
    <StatusVariable id="30108008" valueType="F8" logicalName="Loader1.Rotation.Deceleration" eventTrigger="" units="" />
    <StatusVariable id="30108009" valueType="F8" logicalName="Loader1.Rotation.ActualTorque" eventTrigger="" units="" />
    <StatusVariable id="30109001" valueType="F8" logicalName="Loader1.SideA.CRSVacuumValue" eventTrigger="" units="" />
    <StatusVariable id="30109002" valueType="Boolean" logicalName="Loader1.SideA.CRSVacuum" eventTrigger="" units="" />
    <StatusVariable id="30109003" valueType="F8" logicalName="Loader1.SideA.BernoulliPressure" eventTrigger="" units="" />
    <StatusVariable id="30109004" valueType="Boolean" logicalName="Loader1.SideA.BernoulliBladder" eventTrigger="" units="" />
    <StatusVariable id="30109005" valueType="Boolean" logicalName="Loader1.SideA.BernoulliExtended" eventTrigger="" units="" />
    <StatusVariable id="30109006" valueType="Boolean" logicalName="Loader1.SideA.BernoulliN2" eventTrigger="" units="" />
    <StatusVariable id="30109007" valueType="Boolean" logicalName="Loader1.SideA.BernoulliN2Second" eventTrigger="" units="" />
    <StatusVariable id="30109008" valueType="Boolean" logicalName="Loader1.SideA.DoorLowerLocked" eventTrigger="" units="" />
    <StatusVariable id="30109009" valueType="Boolean" logicalName="Loader1.SideA.DoorLowerUnlocked" eventTrigger="" units="" />
    <StatusVariable id="30109010" valueType="Boolean" logicalName="Loader1.SideA.DoorUpperLocked" eventTrigger="" units="" />
    <StatusVariable id="30109011" valueType="Boolean" logicalName="Loader1.SideA.DoorUpperUnlocked" eventTrigger="" units="" />
    <StatusVariable id="30109012" valueType="Boolean" logicalName="Loader1.SideA.TransBladder" eventTrigger="" units="" />
    <StatusVariable id="30109013" valueType="Boolean" logicalName="Loader1.SideA.TransHigh" eventTrigger="" units="" />
    <StatusVariable id="30109014" valueType="F8" logicalName="Loader1.SideA.TransPressure" eventTrigger="" units="" />
    <StatusVariable id="30109015" valueType="Boolean" logicalName="Loader1.SideA.TransRetracted" eventTrigger="" units="" />
    <StatusVariable id="30109016" valueType="Boolean" logicalName="Loader1.SideA.WaferPresent" eventTrigger="" units="" />
    <StatusVariable id="30109017" valueType="Boolean" logicalName="Loader1.SideA.WSBladder" eventTrigger="" units="" />
    <StatusVariable id="30109018" valueType="F8" logicalName="Loader1.SideA.WSBladderPressure" eventTrigger="" units="" />
    <StatusVariable id="30110001" valueType="F8" logicalName="Loader1.SideB.CRSVacuumValue" eventTrigger="" units="" />
    <StatusVariable id="30110002" valueType="Boolean" logicalName="Loader1.SideB.CRSVacuum" eventTrigger="" units="" />
    <StatusVariable id="30110003" valueType="F8" logicalName="Loader1.SideB.BernoulliPressure" eventTrigger="" units="" />
    <StatusVariable id="30110004" valueType="Boolean" logicalName="Loader1.SideB.BernoulliBladder" eventTrigger="" units="" />
    <StatusVariable id="30110005" valueType="Boolean" logicalName="Loader1.SideB.BernoulliExtended" eventTrigger="" units="" />
    <StatusVariable id="30110006" valueType="Boolean" logicalName="Loader1.SideB.BernoulliN2" eventTrigger="" units="" />
    <StatusVariable id="30110007" valueType="Boolean" logicalName="Loader1.SideB.BernoulliN2Second" eventTrigger="" units="" />
    <StatusVariable id="30110008" valueType="Boolean" logicalName="Loader1.SideB.DoorLowerLocked" eventTrigger="" units="" />
    <StatusVariable id="30110009" valueType="Boolean" logicalName="Loader1.SideB.DoorLowerUnlocked" eventTrigger="" units="" />
    <StatusVariable id="30110010" valueType="Boolean" logicalName="Loader1.SideB.DoorUpperLocked" eventTrigger="" units="" />
    <StatusVariable id="30110011" valueType="Boolean" logicalName="Loader1.SideB.DoorUpperUnlocked" eventTrigger="" units="" />
    <StatusVariable id="30110012" valueType="Boolean" logicalName="Loader1.SideB.TransBladder" eventTrigger="" units="" />
    <StatusVariable id="30110013" valueType="Boolean" logicalName="Loader1.SideB.TransHigh" eventTrigger="" units="" />
    <StatusVariable id="30110014" valueType="F8" logicalName="Loader1.SideB.TransPressure" eventTrigger="" units="" />
    <StatusVariable id="30110015" valueType="Boolean" logicalName="Loader1.SideB.TransRetracted" eventTrigger="" units="" />
    <StatusVariable id="30110016" valueType="Boolean" logicalName="Loader1.SideB.WaferPresent" eventTrigger="" units="" />
    <StatusVariable id="30110017" valueType="Boolean" logicalName="Loader1.SideB.WSBladder" eventTrigger="" units="" />
    <StatusVariable id="30110018" valueType="F8" logicalName="Loader1.SideB.WSBladderPressure" eventTrigger="" units="" />
    <StatusVariable id="40101001" valueType="Ascii" logicalName="Transporter2.State" eventTrigger="" units="" />
    <StatusVariable id="40101002" valueType="Ascii" logicalName="Transporter2.LotID" eventTrigger="" units="" />
    <StatusVariable id="40101003" valueType="Ascii" logicalName="Transporter2.WSID" eventTrigger="" units="" />
    <StatusVariable id="40101004" valueType="Ascii" logicalName="Transporter2.LSAID" eventTrigger="" units="" />
    <StatusVariable id="40101005" valueType="Ascii" logicalName="Transporter2.LSBID" eventTrigger="" units="" />
    <StatusVariable id="40101006" valueType="Ascii" logicalName="Transporter2.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="40101007" valueType="Ascii" logicalName="Transporter2.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="40101008" valueType="Ascii" logicalName="Transporter2.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="40101009" valueType="Ascii" logicalName="Transporter2.Task" eventTrigger="" units="" />
    <StatusVariable id="40101010" valueType="Boolean" logicalName="Transporter2.WSPresent1" eventTrigger="" units="" />
    <StatusVariable id="40101011" valueType="Boolean" logicalName="Transporter2.WSPresent2" eventTrigger="" units="" />
    <StatusVariable id="40101012" valueType="Boolean" logicalName="Transporter2.ImmobilizeActive1" eventTrigger="" units="" />
    <StatusVariable id="40101013" valueType="Boolean" logicalName="Transporter2.ImmobilizeActive2" eventTrigger="" units="" />
    <StatusVariable id="40101014" valueType="Boolean" logicalName="Transporter2.ImmobilizeRetracted1" eventTrigger="" units="" />
    <StatusVariable id="40101015" valueType="Boolean" logicalName="Transporter2.ImmobilizeRetracted2" eventTrigger="" units="" />
    <StatusVariable id="40101016" valueType="Boolean" logicalName="Transporter2.ImmobilizeExtended1" eventTrigger="" units="" />
    <StatusVariable id="40101017" valueType="Boolean" logicalName="Transporter2.ImmobilizeExtended2" eventTrigger="" units="" />
    <StatusVariable id="40101018" valueType="Boolean" logicalName="Transporter2.Locked1" eventTrigger="" units="" />
    <StatusVariable id="40101019" valueType="Boolean" logicalName="Transporter2.Locked2" eventTrigger="" units="" />
    <StatusVariable id="40101020" valueType="Boolean" logicalName="Transporter2.ReadyToLock1" eventTrigger="" units="" />
    <StatusVariable id="40101021" valueType="Boolean" logicalName="Transporter2.ReadyToLock2" eventTrigger="" units="" />
    <StatusVariable id="40101022" valueType="Boolean" logicalName="Transporter2.Unlocked1" eventTrigger="" units="" />
    <StatusVariable id="40101023" valueType="Boolean" logicalName="Transporter2.Unlocked2" eventTrigger="" units="" />
    <StatusVariable id="40201001" valueType="Ascii" logicalName="Transporter1.State" eventTrigger="" units="" />
    <StatusVariable id="40201002" valueType="Ascii" logicalName="Transporter1.LotID" eventTrigger="" units="" />
    <StatusVariable id="40201003" valueType="Ascii" logicalName="Transporter1.WSID" eventTrigger="" units="" />
    <StatusVariable id="40201004" valueType="Ascii" logicalName="Transporter1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="40201005" valueType="Ascii" logicalName="Transporter1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="40201006" valueType="Ascii" logicalName="Transporter1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="40201007" valueType="Ascii" logicalName="Transporter1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="40201008" valueType="Ascii" logicalName="Transporter1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="40201009" valueType="Ascii" logicalName="Transporter1.Task" eventTrigger="" units="" />
    <StatusVariable id="40201010" valueType="Boolean" logicalName="Transporter1.WSPresent1" eventTrigger="" units="" />
    <StatusVariable id="40201011" valueType="Boolean" logicalName="Transporter1.WSPresent2" eventTrigger="" units="" />
    <StatusVariable id="40201012" valueType="Boolean" logicalName="Transporter1.ImmobilizeActive1" eventTrigger="" units="" />
    <StatusVariable id="40201013" valueType="Boolean" logicalName="Transporter1.ImmobilizeActive2" eventTrigger="" units="" />
    <StatusVariable id="40201014" valueType="Boolean" logicalName="Transporter1.ImmobilizeRetracted1" eventTrigger="" units="" />
    <StatusVariable id="40201015" valueType="Boolean" logicalName="Transporter1.ImmobilizeRetracted2" eventTrigger="" units="" />
    <StatusVariable id="40201016" valueType="Boolean" logicalName="Transporter1.ImmobilizeExtended1" eventTrigger="" units="" />
    <StatusVariable id="40201017" valueType="Boolean" logicalName="Transporter1.ImmobilizeExtended2" eventTrigger="" units="" />
    <StatusVariable id="40201018" valueType="Boolean" logicalName="Transporter1.Locked1" eventTrigger="" units="" />
    <StatusVariable id="40201019" valueType="Boolean" logicalName="Transporter1.Locked2" eventTrigger="" units="" />
    <StatusVariable id="40201020" valueType="Boolean" logicalName="Transporter1.ReadyToLock1" eventTrigger="" units="" />
    <StatusVariable id="40201021" valueType="Boolean" logicalName="Transporter1.ReadyToLock2" eventTrigger="" units="" />
    <StatusVariable id="40201022" valueType="Boolean" logicalName="Transporter1.Unlocked1" eventTrigger="" units="" />
    <StatusVariable id="40201023" valueType="Boolean" logicalName="Transporter1.Unlocked2" eventTrigger="" units="" />
    <StatusVariable id="50101001" valueType="Ascii" logicalName="Buffer1.LotID" eventTrigger="" units="" />
    <StatusVariable id="50101002" valueType="Ascii" logicalName="Buffer1.WSID" eventTrigger="" units="" />
    <StatusVariable id="50101003" valueType="Ascii" logicalName="Buffer1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50101004" valueType="Ascii" logicalName="Buffer1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50101005" valueType="Ascii" logicalName="Buffer1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50101006" valueType="Ascii" logicalName="Buffer1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50101007" valueType="Ascii" logicalName="Buffer1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50101008" valueType="Ascii" logicalName="Buffer1.Task" eventTrigger="" units="" />
    <StatusVariable id="50102001" valueType="Ascii" logicalName="Buffer2.LotID" eventTrigger="" units="" />
    <StatusVariable id="50102002" valueType="Ascii" logicalName="Buffer2.WSID" eventTrigger="" units="" />
    <StatusVariable id="50102003" valueType="Ascii" logicalName="Buffer2.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50102004" valueType="Ascii" logicalName="Buffer2.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50102005" valueType="Ascii" logicalName="Buffer2.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50102006" valueType="Ascii" logicalName="Buffer2.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50102007" valueType="Ascii" logicalName="Buffer2.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50102008" valueType="Ascii" logicalName="Buffer2.Task" eventTrigger="" units="" />
    <StatusVariable id="50103001" valueType="Ascii" logicalName="Buffer3.LotID" eventTrigger="" units="" />
    <StatusVariable id="50103002" valueType="Ascii" logicalName="Buffer3.WSID" eventTrigger="" units="" />
    <StatusVariable id="50103003" valueType="Ascii" logicalName="Buffer3.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50103004" valueType="Ascii" logicalName="Buffer3.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50103005" valueType="Ascii" logicalName="Buffer3.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50103006" valueType="Ascii" logicalName="Buffer3.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50103007" valueType="Ascii" logicalName="Buffer3.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50103008" valueType="Ascii" logicalName="Buffer3.Task" eventTrigger="" units="" />
    <StatusVariable id="50104001" valueType="Ascii" logicalName="Buffer4.LotID" eventTrigger="" units="" />
    <StatusVariable id="50104002" valueType="Ascii" logicalName="Buffer4.WSID" eventTrigger="" units="" />
    <StatusVariable id="50104003" valueType="Ascii" logicalName="Buffer4.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50104004" valueType="Ascii" logicalName="Buffer4.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50104005" valueType="Ascii" logicalName="Buffer4.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50104006" valueType="Ascii" logicalName="Buffer4.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50104007" valueType="Ascii" logicalName="Buffer4.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50104008" valueType="Ascii" logicalName="Buffer4.Task" eventTrigger="" units="" />
    <StatusVariable id="50105001" valueType="Ascii" logicalName="Buffer5.LotID" eventTrigger="" units="" />
    <StatusVariable id="50105002" valueType="Ascii" logicalName="Buffer5.WSID" eventTrigger="" units="" />
    <StatusVariable id="50105003" valueType="Ascii" logicalName="Buffer5.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50105004" valueType="Ascii" logicalName="Buffer5.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50105005" valueType="Ascii" logicalName="Buffer5.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50105006" valueType="Ascii" logicalName="Buffer5.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50105007" valueType="Ascii" logicalName="Buffer5.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50105008" valueType="Ascii" logicalName="Buffer5.Task" eventTrigger="" units="" />
    <StatusVariable id="50106001" valueType="Ascii" logicalName="Buffer6.LotID" eventTrigger="" units="" />
    <StatusVariable id="50106002" valueType="Ascii" logicalName="Buffer6.WSID" eventTrigger="" units="" />
    <StatusVariable id="50106003" valueType="Ascii" logicalName="Buffer6.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50106004" valueType="Ascii" logicalName="Buffer6.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50106005" valueType="Ascii" logicalName="Buffer6.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50106006" valueType="Ascii" logicalName="Buffer6.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50106007" valueType="Ascii" logicalName="Buffer6.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50106008" valueType="Ascii" logicalName="Buffer6.Task" eventTrigger="" units="" />
    <StatusVariable id="50107001" valueType="Ascii" logicalName="Buffer7.LotID" eventTrigger="" units="" />
    <StatusVariable id="50107002" valueType="Ascii" logicalName="Buffer7.WSID" eventTrigger="" units="" />
    <StatusVariable id="50107003" valueType="Ascii" logicalName="Buffer7.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50107004" valueType="Ascii" logicalName="Buffer7.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50107005" valueType="Ascii" logicalName="Buffer7.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50107006" valueType="Ascii" logicalName="Buffer7.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50107007" valueType="Ascii" logicalName="Buffer7.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50107008" valueType="Ascii" logicalName="Buffer7.Task" eventTrigger="" units="" />
    <StatusVariable id="50108001" valueType="Ascii" logicalName="Buffer8.LotID" eventTrigger="" units="" />
    <StatusVariable id="50108002" valueType="Ascii" logicalName="Buffer8.WSID" eventTrigger="" units="" />
    <StatusVariable id="50108003" valueType="Ascii" logicalName="Buffer8.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50108004" valueType="Ascii" logicalName="Buffer8.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50108005" valueType="Ascii" logicalName="Buffer8.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50108006" valueType="Ascii" logicalName="Buffer8.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50108007" valueType="Ascii" logicalName="Buffer8.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50108008" valueType="Ascii" logicalName="Buffer8.Task" eventTrigger="" units="" />
    <StatusVariable id="50109001" valueType="Ascii" logicalName="Buffer9.LotID" eventTrigger="" units="" />
    <StatusVariable id="50109002" valueType="Ascii" logicalName="Buffer9.WSID" eventTrigger="" units="" />
    <StatusVariable id="50109003" valueType="Ascii" logicalName="Buffer9.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50109004" valueType="Ascii" logicalName="Buffer9.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50109005" valueType="Ascii" logicalName="Buffer9.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50109006" valueType="Ascii" logicalName="Buffer9.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50109007" valueType="Ascii" logicalName="Buffer9.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50109008" valueType="Ascii" logicalName="Buffer9.Task" eventTrigger="" units="" />
    <StatusVariable id="50110001" valueType="Ascii" logicalName="Buffer10.LotID" eventTrigger="" units="" />
    <StatusVariable id="50110002" valueType="Ascii" logicalName="Buffer10.WSID" eventTrigger="" units="" />
    <StatusVariable id="50110003" valueType="Ascii" logicalName="Buffer10.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50110004" valueType="Ascii" logicalName="Buffer10.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50110005" valueType="Ascii" logicalName="Buffer10.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50110006" valueType="Ascii" logicalName="Buffer10.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50110007" valueType="Ascii" logicalName="Buffer10.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50110008" valueType="Ascii" logicalName="Buffer10.Task" eventTrigger="" units="" />
    <StatusVariable id="50111001" valueType="Ascii" logicalName="Buffer11.LotID" eventTrigger="" units="" />
    <StatusVariable id="50111002" valueType="Ascii" logicalName="Buffer11.WSID" eventTrigger="" units="" />
    <StatusVariable id="50111003" valueType="Ascii" logicalName="Buffer11.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50111004" valueType="Ascii" logicalName="Buffer11.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50111005" valueType="Ascii" logicalName="Buffer11.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50111006" valueType="Ascii" logicalName="Buffer11.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50111007" valueType="Ascii" logicalName="Buffer11.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50111008" valueType="Ascii" logicalName="Buffer11.Task" eventTrigger="" units="" />
    <StatusVariable id="50112001" valueType="Ascii" logicalName="Buffer12.LotID" eventTrigger="" units="" />
    <StatusVariable id="50112002" valueType="Ascii" logicalName="Buffer12.WSID" eventTrigger="" units="" />
    <StatusVariable id="50112003" valueType="Ascii" logicalName="Buffer12.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50112004" valueType="Ascii" logicalName="Buffer12.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50112005" valueType="Ascii" logicalName="Buffer12.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50112006" valueType="Ascii" logicalName="Buffer12.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50112007" valueType="Ascii" logicalName="Buffer12.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50112008" valueType="Ascii" logicalName="Buffer12.Task" eventTrigger="" units="" />
    <StatusVariable id="50113001" valueType="Ascii" logicalName="Buffer13.LotID" eventTrigger="" units="" />
    <StatusVariable id="50113002" valueType="Ascii" logicalName="Buffer13.WSID" eventTrigger="" units="" />
    <StatusVariable id="50113003" valueType="Ascii" logicalName="Buffer13.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50113004" valueType="Ascii" logicalName="Buffer13.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50113005" valueType="Ascii" logicalName="Buffer13.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50113006" valueType="Ascii" logicalName="Buffer13.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50113007" valueType="Ascii" logicalName="Buffer13.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50113008" valueType="Ascii" logicalName="Buffer13.Task" eventTrigger="" units="" />
    <StatusVariable id="50114001" valueType="Ascii" logicalName="Buffer14.LotID" eventTrigger="" units="" />
    <StatusVariable id="50114002" valueType="Ascii" logicalName="Buffer14.WSID" eventTrigger="" units="" />
    <StatusVariable id="50114003" valueType="Ascii" logicalName="Buffer14.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50114004" valueType="Ascii" logicalName="Buffer14.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50114005" valueType="Ascii" logicalName="Buffer14.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50114006" valueType="Ascii" logicalName="Buffer14.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50114007" valueType="Ascii" logicalName="Buffer14.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50114008" valueType="Ascii" logicalName="Buffer14.Task" eventTrigger="" units="" />
    <StatusVariable id="50115001" valueType="Ascii" logicalName="Buffer15.LotID" eventTrigger="" units="" />
    <StatusVariable id="50115002" valueType="Ascii" logicalName="Buffer15.WSID" eventTrigger="" units="" />
    <StatusVariable id="50115003" valueType="Ascii" logicalName="Buffer15.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50115004" valueType="Ascii" logicalName="Buffer15.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50115005" valueType="Ascii" logicalName="Buffer15.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50115006" valueType="Ascii" logicalName="Buffer15.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50115007" valueType="Ascii" logicalName="Buffer15.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50115008" valueType="Ascii" logicalName="Buffer15.Task" eventTrigger="" units="" />
    <StatusVariable id="50116001" valueType="Ascii" logicalName="Buffer16.LotID" eventTrigger="" units="" />
    <StatusVariable id="50116002" valueType="Ascii" logicalName="Buffer16.WSID" eventTrigger="" units="" />
    <StatusVariable id="50116003" valueType="Ascii" logicalName="Buffer16.LSAID" eventTrigger="" units="" />
    <StatusVariable id="50116004" valueType="Ascii" logicalName="Buffer16.LSBID" eventTrigger="" units="" />
    <StatusVariable id="50116005" valueType="Ascii" logicalName="Buffer16.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="50116006" valueType="Ascii" logicalName="Buffer16.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="50116007" valueType="Ascii" logicalName="Buffer16.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="50116008" valueType="Ascii" logicalName="Buffer16.Task" eventTrigger="" units="" />
    <StatusVariable id="60101001" valueType="Ascii" logicalName="Prewet1.State" eventTrigger="" units="" />
    <StatusVariable id="60101002" valueType="Ascii" logicalName="Prewet1.LotID" eventTrigger="" units="" />
    <StatusVariable id="60101003" valueType="Ascii" logicalName="Prewet1.WSID" eventTrigger="" units="" />
    <StatusVariable id="60101004" valueType="Ascii" logicalName="Prewet1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="60101005" valueType="Ascii" logicalName="Prewet1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="60101006" valueType="Ascii" logicalName="Prewet1.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="60101007" valueType="Ascii" logicalName="Prewet1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="60101008" valueType="Ascii" logicalName="Prewet1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="60101009" valueType="Ascii" logicalName="Prewet1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="60101010" valueType="Ascii" logicalName="Prewet1.Task" eventTrigger="" units="" />
    <StatusVariable id="60101011" valueType="Ascii" logicalName="Prewet1.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="60101012" valueType="Boolean" logicalName="Prewet1.PumpStatus" eventTrigger="" units="" />
    <StatusVariable id="60101013" valueType="F8" logicalName="Prewet1.PumpCurrent" eventTrigger="" units="" />
    <StatusVariable id="60101014" valueType="U4" logicalName="Prewet1.PumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="60101015" valueType="Boolean" logicalName="Prewet1.PumpEnable" eventTrigger="" units="" />
    <StatusVariable id="60101016" valueType="Boolean" logicalName="Prewet1.PumpValve" eventTrigger="" units="" />
    <StatusVariable id="60101017" valueType="F8" logicalName="Prewet1.PumpFlow" eventTrigger="" units="" />
    <StatusVariable id="60101018" valueType="F8" logicalName="Prewet1.PumpFlow.MinWarning" eventTrigger="" units="" />
    <StatusVariable id="60101019" valueType="F8" logicalName="Prewet1.PumpFlow.MaxWarning" eventTrigger="" units="" />
    <StatusVariable id="60101020" valueType="F8" logicalName="Prewet1.PumpFlow.MinError" eventTrigger="" units="" />
    <StatusVariable id="60101021" valueType="F8" logicalName="Prewet1.PumpFlow.MaxError" eventTrigger="" units="" />
    <StatusVariable id="60101022" valueType="F8" logicalName="Prewet1.PumpPressure" eventTrigger="" units="" />
    <StatusVariable id="60101023" valueType="F8" logicalName="Prewet1.PumpPressure.MinWarning" eventTrigger="" units="" />
    <StatusVariable id="60101024" valueType="F8" logicalName="Prewet1.PumpPressure.MaxWarning" eventTrigger="" units="" />
    <StatusVariable id="60101025" valueType="F8" logicalName="Prewet1.PumpPressure.MinError" eventTrigger="" units="" />
    <StatusVariable id="60101026" valueType="F8" logicalName="Prewet1.PumpPressure.MaxError" eventTrigger="" units="" />
    <StatusVariable id="60101027" valueType="F8" logicalName="Prewet1.PressureTarget" eventTrigger="" units="" />
    <StatusVariable id="60101028" valueType="Ascii" logicalName="Prewet1.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="60101029" valueType="Boolean" logicalName="Prewet1.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="60101030" valueType="Boolean" logicalName="Prewet1.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="60101031" valueType="Boolean" logicalName="Prewet1.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="60101032" valueType="U4" logicalName="Prewet1.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="60101033" valueType="U4" logicalName="Prewet1.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="60101034" valueType="F8" logicalName="Prewet1.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="60101034" valueType="U4" logicalName="Prewet1.Linmot.ScanCount" eventTrigger="" units="" />
    <StatusVariable id="70101001" valueType="Ascii" logicalName="Dryer1.State" eventTrigger="" units="" />
    <StatusVariable id="70101002" valueType="Ascii" logicalName="Dryer1.LotID" eventTrigger="" units="" />
    <StatusVariable id="70101003" valueType="Ascii" logicalName="Dryer1.WSID" eventTrigger="" units="" />
    <StatusVariable id="70101004" valueType="Ascii" logicalName="Dryer1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="70101005" valueType="Ascii" logicalName="Dryer1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="70101006" valueType="Ascii" logicalName="Dryer1.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="70101007" valueType="Ascii" logicalName="Dryer1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="70101008" valueType="Ascii" logicalName="Dryer1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="70101009" valueType="Ascii" logicalName="Dryer1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="70101010" valueType="Ascii" logicalName="Dryer1.Task" eventTrigger="" units="" />
    <StatusVariable id="70101011" valueType="Ascii" logicalName="Dryer1.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="70101012" valueType="F8" logicalName="Dryer1.ExhaustPressure" eventTrigger="" units="" />
    <StatusVariable id="70101013" valueType="Boolean" logicalName="Dryer1.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="70101014" valueType="Boolean" logicalName="Dryer1.BlowerHigh" eventTrigger="" units="" />
    <StatusVariable id="70201001" valueType="Ascii" logicalName="Dryer2.State" eventTrigger="" units="" />
    <StatusVariable id="70201002" valueType="Ascii" logicalName="Dryer2.LotID" eventTrigger="" units="" />
    <StatusVariable id="70201003" valueType="Ascii" logicalName="Dryer2.WSID" eventTrigger="" units="" />
    <StatusVariable id="70201004" valueType="Ascii" logicalName="Dryer2.LSAID" eventTrigger="" units="" />
    <StatusVariable id="70201005" valueType="Ascii" logicalName="Dryer2.LSBID" eventTrigger="" units="" />
    <StatusVariable id="70201006" valueType="Ascii" logicalName="Dryer2.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="70201007" valueType="Ascii" logicalName="Dryer2.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="70201008" valueType="Ascii" logicalName="Dryer2.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="70201009" valueType="Ascii" logicalName="Dryer2.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="70201010" valueType="Ascii" logicalName="Dryer2.Task" eventTrigger="" units="" />
    <StatusVariable id="70201011" valueType="Ascii" logicalName="Dryer2.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="70201012" valueType="F8" logicalName="Dryer2.ExhaustPressure" eventTrigger="" units="" />
    <StatusVariable id="70201013" valueType="Boolean" logicalName="Dryer2.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="70201014" valueType="Boolean" logicalName="Dryer2.BlowerHigh" eventTrigger="" units="" />
    <StatusVariable id="80101001" valueType="Ascii" logicalName="Reservoir1.State" eventTrigger="" units="" />
    <StatusVariable id="80101002" valueType="Boolean" logicalName="Reservoir1.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="80101003" valueType="Boolean" logicalName="Reservoir1.IsError" eventTrigger="" units="" />
    <StatusVariable id="80101004" valueType="Ascii" logicalName="Reservoir1.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="80101005" valueType="F8" logicalName="Reservoir1.ReservoirTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80101006" valueType="F8" logicalName="Reservoir1.ReservoirTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101007" valueType="F8" logicalName="Reservoir1.ReservoirTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101008" valueType="F8" logicalName="Reservoir1.BathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80101009" valueType="F8" logicalName="Reservoir1.BathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101010" valueType="F8" logicalName="Reservoir1.BathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101011" valueType="F8" logicalName="Reservoir1.ANBathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80101012" valueType="F8" logicalName="Reservoir1.ANBathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101013" valueType="F8" logicalName="Reservoir1.ANBathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101014" valueType="F8" logicalName="Reservoir1.MembraneTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80101015" valueType="F8" logicalName="Reservoir1.MembraneTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101016" valueType="F8" logicalName="Reservoir1.MembraneTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101017" valueType="F8" logicalName="Reservoir1.BathTotalDays" eventTrigger="" units="" />
    <StatusVariable id="80101018" valueType="F8" logicalName="Reservoir1.BathTotalDays.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101019" valueType="F8" logicalName="Reservoir1.BathTotalDays.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101020" valueType="F8" logicalName="Reservoir1.ReservoirTotalWafers" eventTrigger="" units="" />
    <StatusVariable id="80101021" valueType="F8" logicalName="Reservoir1.ReservoirTotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80101022" valueType="F8" logicalName="Reservoir1.ReservoirTotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80101023" valueType="F8" logicalName="Reservoir1.Temperature" eventTrigger="" units="" />
    <StatusVariable id="80101024" valueType="F8" logicalName="Reservoir1.ANPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80101025" valueType="F8" logicalName="Reservoir1.CAPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80101026" valueType="Ascii" logicalName="Reservoir1.RecipeName" eventTrigger="" units="" />
    <StatusVariable id="80101027" valueType="F8" logicalName="Reservoir1.ANLevel" eventTrigger="" units="" />
    <StatusVariable id="80101028" valueType="F8" logicalName="Reservoir1.CALevel" eventTrigger="" units="" />
    <StatusVariable id="80101029" valueType="F8" logicalName="Reservoir1.ANBypassFlow" eventTrigger="" units="" />
    <StatusVariable id="80101030" valueType="F8" logicalName="Reservoir1.HedFlow" eventTrigger="" units="" />
    <StatusVariable id="80101031" valueType="F8" logicalName="Reservoir1.ANBypassCounterFlow" eventTrigger="" units="" />
    <StatusVariable id="80101032" valueType="F8" logicalName="Reservoir1.PHValue" eventTrigger="" units="" />
    <StatusVariable id="80101033" valueType="U4" logicalName="Reservoir1.ReplenNum" eventTrigger="" units="" />
    <StatusVariable id="80101034" valueType="Ascii" logicalName="Reservoir1.DosingSystemState" eventTrigger="" units="" />
    <StatusVariable id="80101035" valueType="Boolean" logicalName="Reservoir1.PHEnable" eventTrigger="" units="" />
    <StatusVariable id="80101036" valueType="Ascii" logicalName="Reservoir1.Temperature.ID" eventTrigger="" units="" />
    <StatusVariable id="80101037" valueType="Ascii" logicalName="Reservoir1.Temperature.Status" eventTrigger="" units="" />
    <StatusVariable id="80101038" valueType="F8" logicalName="Reservoir1.Temperature.TargetTemperature" eventTrigger="" units="" />
    <StatusVariable id="80101038" valueType="Ascii" logicalName="Reservoir1.Temperature.Alarm" eventTrigger="" units="" />
    <StatusVariable id="80101039" valueType="F8" logicalName="Reservoir1.Temperature.HeatExchangerTemperature" eventTrigger="" units="" />
    <StatusVariable id="80201001" valueType="Ascii" logicalName="Reservoir2.State" eventTrigger="" units="" />
    <StatusVariable id="80201002" valueType="Boolean" logicalName="Reservoir2.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="80201003" valueType="Boolean" logicalName="Reservoir2.IsError" eventTrigger="" units="" />
    <StatusVariable id="80201004" valueType="Ascii" logicalName="Reservoir2.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="80201005" valueType="F8" logicalName="Reservoir2.ReservoirTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80201006" valueType="F8" logicalName="Reservoir2.ReservoirTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201007" valueType="F8" logicalName="Reservoir2.ReservoirTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201008" valueType="F8" logicalName="Reservoir2.BathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80201009" valueType="F8" logicalName="Reservoir2.BathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201010" valueType="F8" logicalName="Reservoir2.BathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201011" valueType="F8" logicalName="Reservoir2.ANBathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80201012" valueType="F8" logicalName="Reservoir2.ANBathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201013" valueType="F8" logicalName="Reservoir2.ANBathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201014" valueType="F8" logicalName="Reservoir2.MembraneTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80201015" valueType="F8" logicalName="Reservoir2.MembraneTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201016" valueType="F8" logicalName="Reservoir2.MembraneTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201017" valueType="F8" logicalName="Reservoir2.BathTotalDays" eventTrigger="" units="" />
    <StatusVariable id="80201018" valueType="F8" logicalName="Reservoir2.BathTotalDays.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201019" valueType="F8" logicalName="Reservoir2.BathTotalDays.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201020" valueType="F8" logicalName="Reservoir2.ReservoirTotalWafers" eventTrigger="" units="" />
    <StatusVariable id="80201021" valueType="F8" logicalName="Reservoir2.ReservoirTotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80201022" valueType="F8" logicalName="Reservoir2.ReservoirTotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80201023" valueType="F8" logicalName="Reservoir2.Temperature" eventTrigger="" units="" />
    <StatusVariable id="80201024" valueType="F8" logicalName="Reservoir2.ANPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80201025" valueType="F8" logicalName="Reservoir2.CAPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80201026" valueType="Ascii" logicalName="Reservoir2.RecipeName" eventTrigger="" units="" />
    <StatusVariable id="80201027" valueType="F8" logicalName="Reservoir2.ANLevel" eventTrigger="" units="" />
    <StatusVariable id="80201028" valueType="F8" logicalName="Reservoir2.CALevel" eventTrigger="" units="" />
    <StatusVariable id="80201029" valueType="F8" logicalName="Reservoir2.ANBypassFlow" eventTrigger="" units="" />
    <StatusVariable id="80201030" valueType="F8" logicalName="Reservoir2.HedFlow" eventTrigger="" units="" />
    <StatusVariable id="80201031" valueType="F8" logicalName="Reservoir2.ANBypassCounterFlow" eventTrigger="" units="" />
    <StatusVariable id="80201032" valueType="F8" logicalName="Reservoir2.PHValue" eventTrigger="" units="" />
    <StatusVariable id="80201033" valueType="U4" logicalName="Reservoir2.ReplenNum" eventTrigger="" units="" />
    <StatusVariable id="80201034" valueType="Ascii" logicalName="Reservoir2.DosingSystemState" eventTrigger="" units="" />
    <StatusVariable id="80201035" valueType="Boolean" logicalName="Reservoir2.PHEnable" eventTrigger="" units="" />
    <StatusVariable id="80201036" valueType="Ascii" logicalName="Reservoir2.Temperature.ID" eventTrigger="" units="" />
    <StatusVariable id="80201037" valueType="Ascii" logicalName="Reservoir2.Temperature.Status" eventTrigger="" units="" />
    <StatusVariable id="80201038" valueType="F8" logicalName="Reservoir2.Temperature.TargetTemperature" eventTrigger="" units="" />
    <StatusVariable id="80201038" valueType="Ascii" logicalName="Reservoir2.Temperature.Alarm" eventTrigger="" units="" />
    <StatusVariable id="80201039" valueType="F8" logicalName="Reservoir2.Temperature.HeatExchangerTemperature" eventTrigger="" units="" />
    <StatusVariable id="80301001" valueType="Ascii" logicalName="Reservoir3.State" eventTrigger="" units="" />
    <StatusVariable id="80301002" valueType="Boolean" logicalName="Reservoir3.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="80301003" valueType="Boolean" logicalName="Reservoir3.IsError" eventTrigger="" units="" />
    <StatusVariable id="80301004" valueType="Ascii" logicalName="Reservoir3.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="80301005" valueType="F8" logicalName="Reservoir3.ReservoirTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80301006" valueType="F8" logicalName="Reservoir3.ReservoirTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301007" valueType="F8" logicalName="Reservoir3.ReservoirTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301008" valueType="F8" logicalName="Reservoir3.BathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80301009" valueType="F8" logicalName="Reservoir3.BathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301010" valueType="F8" logicalName="Reservoir3.BathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301011" valueType="F8" logicalName="Reservoir3.ANBathTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80301012" valueType="F8" logicalName="Reservoir3.ANBathTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301013" valueType="F8" logicalName="Reservoir3.ANBathTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301014" valueType="F8" logicalName="Reservoir3.MembraneTotalAmpHours" eventTrigger="" units="" />
    <StatusVariable id="80301015" valueType="F8" logicalName="Reservoir3.MembraneTotalAmpHours.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301016" valueType="F8" logicalName="Reservoir3.MembraneTotalAmpHours.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301017" valueType="F8" logicalName="Reservoir3.BathTotalDays" eventTrigger="" units="" />
    <StatusVariable id="80301018" valueType="F8" logicalName="Reservoir3.BathTotalDays.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301019" valueType="F8" logicalName="Reservoir3.BathTotalDays.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301020" valueType="F8" logicalName="Reservoir3.ReservoirTotalWafers" eventTrigger="" units="" />
    <StatusVariable id="80301021" valueType="F8" logicalName="Reservoir3.ReservoirTotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="80301022" valueType="F8" logicalName="Reservoir3.ReservoirTotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="80301023" valueType="F8" logicalName="Reservoir3.Temperature" eventTrigger="" units="" />
    <StatusVariable id="80301024" valueType="F8" logicalName="Reservoir3.ANPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80301025" valueType="F8" logicalName="Reservoir3.CAPumpSpeed" eventTrigger="" units="" />
    <StatusVariable id="80301026" valueType="Ascii" logicalName="Reservoir3.RecipeName" eventTrigger="" units="" />
    <StatusVariable id="80301027" valueType="F8" logicalName="Reservoir3.ANLevel" eventTrigger="" units="" />
    <StatusVariable id="80301028" valueType="F8" logicalName="Reservoir3.CALevel" eventTrigger="" units="" />
    <StatusVariable id="80301029" valueType="F8" logicalName="Reservoir3.ANBypassFlow" eventTrigger="" units="" />
    <StatusVariable id="80301030" valueType="F8" logicalName="Reservoir3.HedFlow" eventTrigger="" units="" />
    <StatusVariable id="80301031" valueType="F8" logicalName="Reservoir3.ANBypassCounterFlow" eventTrigger="" units="" />
    <StatusVariable id="80301032" valueType="F8" logicalName="Reservoir3.PHValue" eventTrigger="" units="" />
    <StatusVariable id="80301033" valueType="U4" logicalName="Reservoir3.ReplenNum" eventTrigger="" units="" />
    <StatusVariable id="80301034" valueType="Ascii" logicalName="Reservoir3.DosingSystemState" eventTrigger="" units="" />
    <StatusVariable id="80301035" valueType="Boolean" logicalName="Reservoir3.PHEnable" eventTrigger="" units="" />
    <StatusVariable id="80301036" valueType="Ascii" logicalName="Reservoir3.Temperature.ID" eventTrigger="" units="" />
    <StatusVariable id="80301037" valueType="Ascii" logicalName="Reservoir3.Temperature.Status" eventTrigger="" units="" />
    <StatusVariable id="80301038" valueType="F8" logicalName="Reservoir3.Temperature.TargetTemperature" eventTrigger="" units="" />
    <StatusVariable id="80301038" valueType="Ascii" logicalName="Reservoir3.Temperature.Alarm" eventTrigger="" units="" />
    <StatusVariable id="80301039" valueType="F8" logicalName="Reservoir3.Temperature.HeatExchangerTemperature" eventTrigger="" units="" />
    <StatusVariable id="90101001" valueType="Ascii" logicalName="Metal1.State" eventTrigger="" units="" />
    <StatusVariable id="90101002" valueType="Ascii" logicalName="Metal1.LotID" eventTrigger="" units="" />
    <StatusVariable id="90101003" valueType="Ascii" logicalName="Metal1.WSID" eventTrigger="" units="" />
    <StatusVariable id="90101004" valueType="Ascii" logicalName="Metal1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90101005" valueType="Ascii" logicalName="Metal1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90101006" valueType="Ascii" logicalName="Metal1.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90101007" valueType="Ascii" logicalName="Metal1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90101008" valueType="Ascii" logicalName="Metal1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90101009" valueType="Ascii" logicalName="Metal1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90101010" valueType="Ascii" logicalName="Metal1.Task" eventTrigger="" units="" />
    <StatusVariable id="90101011" valueType="F8" logicalName="Metal1.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90101012" valueType="F8" logicalName="Metal1.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101013" valueType="F8" logicalName="Metal1.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101014" valueType="F8" logicalName="Metal1.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90101015" valueType="F8" logicalName="Metal1.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101016" valueType="F8" logicalName="Metal1.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101017" valueType="F8" logicalName="Metal1.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90101018" valueType="F8" logicalName="Metal1.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101019" valueType="F8" logicalName="Metal1.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101020" valueType="F8" logicalName="Metal1.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90101021" valueType="F8" logicalName="Metal1.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101022" valueType="F8" logicalName="Metal1.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101023" valueType="F8" logicalName="Metal1.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90101024" valueType="F8" logicalName="Metal1.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101025" valueType="F8" logicalName="Metal1.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101026" valueType="F8" logicalName="Metal1.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90101027" valueType="F8" logicalName="Metal1.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101028" valueType="F8" logicalName="Metal1.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101029" valueType="F8" logicalName="Metal1.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90101030" valueType="F8" logicalName="Metal1.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101031" valueType="F8" logicalName="Metal1.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101032" valueType="F8" logicalName="Metal1.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90101033" valueType="F8" logicalName="Metal1.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90101034" valueType="F8" logicalName="Metal1.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90101036" valueType="F8" logicalName="Metal1.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90101037" valueType="Ascii" logicalName="Metal1.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90101038" valueType="F8" logicalName="Metal1.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90101039" valueType="F8" logicalName="Metal1.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90101040" valueType="F8" logicalName="Metal1.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90101041" valueType="Boolean" logicalName="Metal1.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90101042" valueType="Boolean" logicalName="Metal1.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90101043" valueType="Boolean" logicalName="Metal1.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90101044" valueType="Boolean" logicalName="Metal1.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90101045" valueType="Boolean" logicalName="Metal1.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90101046" valueType="Boolean" logicalName="Metal1.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90101047" valueType="Boolean" logicalName="Metal1.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90101048" valueType="Boolean" logicalName="Metal1.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90101049" valueType="Ascii" logicalName="Metal1.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90101050" valueType="Boolean" logicalName="Metal1.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90101051" valueType="F8" logicalName="Metal1.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90101052" valueType="F8" logicalName="Metal1.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90101053" valueType="F8" logicalName="Metal1.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90101054" valueType="Ascii" logicalName="Metal1.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90101055" valueType="Ascii" logicalName="Metal1.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90101056" valueType="Ascii" logicalName="Metal1.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90101057" valueType="Boolean" logicalName="Metal1.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90101058" valueType="Ascii" logicalName="Metal1.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90101059" valueType="Boolean" logicalName="Metal1.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90101060" valueType="F8" logicalName="Metal1.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90101061" valueType="F8" logicalName="Metal1.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90101062" valueType="F8" logicalName="Metal1.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90101063" valueType="Ascii" logicalName="Metal1.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90101064" valueType="Ascii" logicalName="Metal1.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90101065" valueType="Ascii" logicalName="Metal1.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90101066" valueType="Boolean" logicalName="Metal1.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90101067" valueType="Ascii" logicalName="Metal1.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90101068" valueType="Boolean" logicalName="Metal1.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90101069" valueType="Boolean" logicalName="Metal1.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90101070" valueType="Boolean" logicalName="Metal1.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90101071" valueType="U4" logicalName="Metal1.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90101072" valueType="U4" logicalName="Metal1.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90101073" valueType="F8" logicalName="Metal1.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90101074" valueType="Ascii" logicalName="Metal1.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90201001" valueType="Ascii" logicalName="Metal2.State" eventTrigger="" units="" />
    <StatusVariable id="90201002" valueType="Ascii" logicalName="Metal2.LotID" eventTrigger="" units="" />
    <StatusVariable id="90201003" valueType="Ascii" logicalName="Metal2.WSID" eventTrigger="" units="" />
    <StatusVariable id="90201004" valueType="Ascii" logicalName="Metal2.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90201005" valueType="Ascii" logicalName="Metal2.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90201006" valueType="Ascii" logicalName="Metal2.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90201007" valueType="Ascii" logicalName="Metal2.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90201008" valueType="Ascii" logicalName="Metal2.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90201009" valueType="Ascii" logicalName="Metal2.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90201010" valueType="Ascii" logicalName="Metal2.Task" eventTrigger="" units="" />
    <StatusVariable id="90201011" valueType="F8" logicalName="Metal2.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90201012" valueType="F8" logicalName="Metal2.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201013" valueType="F8" logicalName="Metal2.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201014" valueType="F8" logicalName="Metal2.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90201015" valueType="F8" logicalName="Metal2.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201016" valueType="F8" logicalName="Metal2.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201017" valueType="F8" logicalName="Metal2.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90201018" valueType="F8" logicalName="Metal2.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201019" valueType="F8" logicalName="Metal2.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201020" valueType="F8" logicalName="Metal2.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90201021" valueType="F8" logicalName="Metal2.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201022" valueType="F8" logicalName="Metal2.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201023" valueType="F8" logicalName="Metal2.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90201024" valueType="F8" logicalName="Metal2.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201025" valueType="F8" logicalName="Metal2.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201026" valueType="F8" logicalName="Metal2.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90201027" valueType="F8" logicalName="Metal2.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201028" valueType="F8" logicalName="Metal2.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201029" valueType="F8" logicalName="Metal2.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90201030" valueType="F8" logicalName="Metal2.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201031" valueType="F8" logicalName="Metal2.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201032" valueType="F8" logicalName="Metal2.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90201033" valueType="F8" logicalName="Metal2.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90201034" valueType="F8" logicalName="Metal2.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90201036" valueType="F8" logicalName="Metal2.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90201037" valueType="Ascii" logicalName="Metal2.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90201038" valueType="F8" logicalName="Metal2.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90201039" valueType="F8" logicalName="Metal2.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90201040" valueType="F8" logicalName="Metal2.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90201041" valueType="Boolean" logicalName="Metal2.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90201042" valueType="Boolean" logicalName="Metal2.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90201043" valueType="Boolean" logicalName="Metal2.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90201044" valueType="Boolean" logicalName="Metal2.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90201045" valueType="Boolean" logicalName="Metal2.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90201046" valueType="Boolean" logicalName="Metal2.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90201047" valueType="Boolean" logicalName="Metal2.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90201048" valueType="Boolean" logicalName="Metal2.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90201049" valueType="Ascii" logicalName="Metal2.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90201050" valueType="Boolean" logicalName="Metal2.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90201051" valueType="F8" logicalName="Metal2.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90201052" valueType="F8" logicalName="Metal2.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90201053" valueType="F8" logicalName="Metal2.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90201054" valueType="Ascii" logicalName="Metal2.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90201055" valueType="Ascii" logicalName="Metal2.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90201056" valueType="Ascii" logicalName="Metal2.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90201057" valueType="Boolean" logicalName="Metal2.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90201058" valueType="Ascii" logicalName="Metal2.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90201059" valueType="Boolean" logicalName="Metal2.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90201060" valueType="F8" logicalName="Metal2.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90201061" valueType="F8" logicalName="Metal2.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90201062" valueType="F8" logicalName="Metal2.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90201063" valueType="Ascii" logicalName="Metal2.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90201064" valueType="Ascii" logicalName="Metal2.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90201065" valueType="Ascii" logicalName="Metal2.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90201066" valueType="Boolean" logicalName="Metal2.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90201067" valueType="Ascii" logicalName="Metal2.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90201068" valueType="Boolean" logicalName="Metal2.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90201069" valueType="Boolean" logicalName="Metal2.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90201070" valueType="Boolean" logicalName="Metal2.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90201071" valueType="U4" logicalName="Metal2.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90201072" valueType="U4" logicalName="Metal2.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90201073" valueType="F8" logicalName="Metal2.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90201074" valueType="Ascii" logicalName="Metal2.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90301001" valueType="Ascii" logicalName="Metal3.State" eventTrigger="" units="" />
    <StatusVariable id="90301002" valueType="Ascii" logicalName="Metal3.LotID" eventTrigger="" units="" />
    <StatusVariable id="90301003" valueType="Ascii" logicalName="Metal3.WSID" eventTrigger="" units="" />
    <StatusVariable id="90301004" valueType="Ascii" logicalName="Metal3.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90301005" valueType="Ascii" logicalName="Metal3.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90301006" valueType="Ascii" logicalName="Metal3.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90301007" valueType="Ascii" logicalName="Metal3.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90301008" valueType="Ascii" logicalName="Metal3.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90301009" valueType="Ascii" logicalName="Metal3.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90301010" valueType="Ascii" logicalName="Metal3.Task" eventTrigger="" units="" />
    <StatusVariable id="90301011" valueType="F8" logicalName="Metal3.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90301012" valueType="F8" logicalName="Metal3.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301013" valueType="F8" logicalName="Metal3.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301014" valueType="F8" logicalName="Metal3.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90301015" valueType="F8" logicalName="Metal3.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301016" valueType="F8" logicalName="Metal3.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301017" valueType="F8" logicalName="Metal3.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90301018" valueType="F8" logicalName="Metal3.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301019" valueType="F8" logicalName="Metal3.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301020" valueType="F8" logicalName="Metal3.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90301021" valueType="F8" logicalName="Metal3.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301022" valueType="F8" logicalName="Metal3.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301023" valueType="F8" logicalName="Metal3.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90301024" valueType="F8" logicalName="Metal3.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301025" valueType="F8" logicalName="Metal3.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301026" valueType="F8" logicalName="Metal3.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90301027" valueType="F8" logicalName="Metal3.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301028" valueType="F8" logicalName="Metal3.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301029" valueType="F8" logicalName="Metal3.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90301030" valueType="F8" logicalName="Metal3.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301031" valueType="F8" logicalName="Metal3.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301032" valueType="F8" logicalName="Metal3.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90301033" valueType="F8" logicalName="Metal3.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90301034" valueType="F8" logicalName="Metal3.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90301036" valueType="F8" logicalName="Metal3.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90301037" valueType="Ascii" logicalName="Metal3.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90301038" valueType="F8" logicalName="Metal3.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90301039" valueType="F8" logicalName="Metal3.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90301040" valueType="F8" logicalName="Metal3.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90301041" valueType="Boolean" logicalName="Metal3.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90301042" valueType="Boolean" logicalName="Metal3.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90301043" valueType="Boolean" logicalName="Metal3.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90301044" valueType="Boolean" logicalName="Metal3.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90301045" valueType="Boolean" logicalName="Metal3.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90301046" valueType="Boolean" logicalName="Metal3.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90301047" valueType="Boolean" logicalName="Metal3.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90301048" valueType="Boolean" logicalName="Metal3.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90301049" valueType="Ascii" logicalName="Metal3.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90301050" valueType="Boolean" logicalName="Metal3.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90301051" valueType="F8" logicalName="Metal3.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90301052" valueType="F8" logicalName="Metal3.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90301053" valueType="F8" logicalName="Metal3.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90301054" valueType="Ascii" logicalName="Metal3.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90301055" valueType="Ascii" logicalName="Metal3.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90301056" valueType="Ascii" logicalName="Metal3.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90301057" valueType="Boolean" logicalName="Metal3.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90301058" valueType="Ascii" logicalName="Metal3.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90301059" valueType="Boolean" logicalName="Metal3.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90301060" valueType="F8" logicalName="Metal3.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90301061" valueType="F8" logicalName="Metal3.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90301062" valueType="F8" logicalName="Metal3.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90301063" valueType="Ascii" logicalName="Metal3.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90301064" valueType="Ascii" logicalName="Metal3.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90301065" valueType="Ascii" logicalName="Metal3.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90301066" valueType="Boolean" logicalName="Metal3.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90301067" valueType="Ascii" logicalName="Metal3.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90301068" valueType="Boolean" logicalName="Metal3.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90301069" valueType="Boolean" logicalName="Metal3.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90301070" valueType="Boolean" logicalName="Metal3.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90301071" valueType="U4" logicalName="Metal3.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90301072" valueType="U4" logicalName="Metal3.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90301073" valueType="F8" logicalName="Metal3.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90301074" valueType="Ascii" logicalName="Metal3.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90401001" valueType="Ascii" logicalName="Metal4.State" eventTrigger="" units="" />
    <StatusVariable id="90401002" valueType="Ascii" logicalName="Metal4.LotID" eventTrigger="" units="" />
    <StatusVariable id="90401003" valueType="Ascii" logicalName="Metal4.WSID" eventTrigger="" units="" />
    <StatusVariable id="90401004" valueType="Ascii" logicalName="Metal4.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90401005" valueType="Ascii" logicalName="Metal4.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90401006" valueType="Ascii" logicalName="Metal4.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90401007" valueType="Ascii" logicalName="Metal4.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90401008" valueType="Ascii" logicalName="Metal4.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90401009" valueType="Ascii" logicalName="Metal4.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90401010" valueType="Ascii" logicalName="Metal4.Task" eventTrigger="" units="" />
    <StatusVariable id="90401011" valueType="F8" logicalName="Metal4.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90401012" valueType="F8" logicalName="Metal4.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401013" valueType="F8" logicalName="Metal4.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401014" valueType="F8" logicalName="Metal4.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90401015" valueType="F8" logicalName="Metal4.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401016" valueType="F8" logicalName="Metal4.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401017" valueType="F8" logicalName="Metal4.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90401018" valueType="F8" logicalName="Metal4.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401019" valueType="F8" logicalName="Metal4.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401020" valueType="F8" logicalName="Metal4.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90401021" valueType="F8" logicalName="Metal4.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401022" valueType="F8" logicalName="Metal4.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401023" valueType="F8" logicalName="Metal4.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90401024" valueType="F8" logicalName="Metal4.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401025" valueType="F8" logicalName="Metal4.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401026" valueType="F8" logicalName="Metal4.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90401027" valueType="F8" logicalName="Metal4.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401028" valueType="F8" logicalName="Metal4.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401029" valueType="F8" logicalName="Metal4.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90401030" valueType="F8" logicalName="Metal4.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401031" valueType="F8" logicalName="Metal4.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401032" valueType="F8" logicalName="Metal4.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90401033" valueType="F8" logicalName="Metal4.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90401034" valueType="F8" logicalName="Metal4.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90401036" valueType="F8" logicalName="Metal4.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90401037" valueType="Ascii" logicalName="Metal4.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90401038" valueType="F8" logicalName="Metal4.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90401039" valueType="F8" logicalName="Metal4.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90401040" valueType="F8" logicalName="Metal4.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90401041" valueType="Boolean" logicalName="Metal4.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90401042" valueType="Boolean" logicalName="Metal4.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90401043" valueType="Boolean" logicalName="Metal4.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90401044" valueType="Boolean" logicalName="Metal4.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90401045" valueType="Boolean" logicalName="Metal4.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90401046" valueType="Boolean" logicalName="Metal4.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90401047" valueType="Boolean" logicalName="Metal4.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90401048" valueType="Boolean" logicalName="Metal4.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90401049" valueType="Ascii" logicalName="Metal4.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90401050" valueType="Boolean" logicalName="Metal4.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90401051" valueType="F8" logicalName="Metal4.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90401052" valueType="F8" logicalName="Metal4.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90401053" valueType="F8" logicalName="Metal4.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90401054" valueType="Ascii" logicalName="Metal4.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90401055" valueType="Ascii" logicalName="Metal4.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90401056" valueType="Ascii" logicalName="Metal4.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90401057" valueType="Boolean" logicalName="Metal4.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90401058" valueType="Ascii" logicalName="Metal4.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90401059" valueType="Boolean" logicalName="Metal4.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90401060" valueType="F8" logicalName="Metal4.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90401061" valueType="F8" logicalName="Metal4.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90401062" valueType="F8" logicalName="Metal4.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90401063" valueType="Ascii" logicalName="Metal4.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90401064" valueType="Ascii" logicalName="Metal4.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90401065" valueType="Ascii" logicalName="Metal4.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90401066" valueType="Boolean" logicalName="Metal4.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90401067" valueType="Ascii" logicalName="Metal4.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90401068" valueType="Boolean" logicalName="Metal4.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90401069" valueType="Boolean" logicalName="Metal4.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90401070" valueType="Boolean" logicalName="Metal4.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90401071" valueType="U4" logicalName="Metal4.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90401072" valueType="U4" logicalName="Metal4.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90401073" valueType="F8" logicalName="Metal4.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90401074" valueType="Ascii" logicalName="Metal4.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90501001" valueType="Ascii" logicalName="Metal5.State" eventTrigger="" units="" />
    <StatusVariable id="90501002" valueType="Ascii" logicalName="Metal5.LotID" eventTrigger="" units="" />
    <StatusVariable id="90501003" valueType="Ascii" logicalName="Metal5.WSID" eventTrigger="" units="" />
    <StatusVariable id="90501004" valueType="Ascii" logicalName="Metal5.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90501005" valueType="Ascii" logicalName="Metal5.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90501006" valueType="Ascii" logicalName="Metal5.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90501007" valueType="Ascii" logicalName="Metal5.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90501008" valueType="Ascii" logicalName="Metal5.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90501009" valueType="Ascii" logicalName="Metal5.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90501010" valueType="Ascii" logicalName="Metal5.Task" eventTrigger="" units="" />
    <StatusVariable id="90501011" valueType="F8" logicalName="Metal5.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90501012" valueType="F8" logicalName="Metal5.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501013" valueType="F8" logicalName="Metal5.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501014" valueType="F8" logicalName="Metal5.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90501015" valueType="F8" logicalName="Metal5.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501016" valueType="F8" logicalName="Metal5.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501017" valueType="F8" logicalName="Metal5.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90501018" valueType="F8" logicalName="Metal5.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501019" valueType="F8" logicalName="Metal5.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501020" valueType="F8" logicalName="Metal5.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90501021" valueType="F8" logicalName="Metal5.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501022" valueType="F8" logicalName="Metal5.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501023" valueType="F8" logicalName="Metal5.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90501024" valueType="F8" logicalName="Metal5.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501025" valueType="F8" logicalName="Metal5.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501026" valueType="F8" logicalName="Metal5.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90501027" valueType="F8" logicalName="Metal5.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501028" valueType="F8" logicalName="Metal5.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501029" valueType="F8" logicalName="Metal5.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90501030" valueType="F8" logicalName="Metal5.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501031" valueType="F8" logicalName="Metal5.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501032" valueType="F8" logicalName="Metal5.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90501033" valueType="F8" logicalName="Metal5.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90501034" valueType="F8" logicalName="Metal5.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90501036" valueType="F8" logicalName="Metal5.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90501037" valueType="Ascii" logicalName="Metal5.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90501038" valueType="F8" logicalName="Metal5.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90501039" valueType="F8" logicalName="Metal5.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90501040" valueType="F8" logicalName="Metal5.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90501041" valueType="Boolean" logicalName="Metal5.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90501042" valueType="Boolean" logicalName="Metal5.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90501043" valueType="Boolean" logicalName="Metal5.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90501044" valueType="Boolean" logicalName="Metal5.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90501045" valueType="Boolean" logicalName="Metal5.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90501046" valueType="Boolean" logicalName="Metal5.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90501047" valueType="Boolean" logicalName="Metal5.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90501048" valueType="Boolean" logicalName="Metal5.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90501049" valueType="Ascii" logicalName="Metal5.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90501050" valueType="Boolean" logicalName="Metal5.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90501051" valueType="F8" logicalName="Metal5.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90501052" valueType="F8" logicalName="Metal5.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90501053" valueType="F8" logicalName="Metal5.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90501054" valueType="Ascii" logicalName="Metal5.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90501055" valueType="Ascii" logicalName="Metal5.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90501056" valueType="Ascii" logicalName="Metal5.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90501057" valueType="Boolean" logicalName="Metal5.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90501058" valueType="Ascii" logicalName="Metal5.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90501059" valueType="Boolean" logicalName="Metal5.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90501060" valueType="F8" logicalName="Metal5.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90501061" valueType="F8" logicalName="Metal5.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90501062" valueType="F8" logicalName="Metal5.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90501063" valueType="Ascii" logicalName="Metal5.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90501064" valueType="Ascii" logicalName="Metal5.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90501065" valueType="Ascii" logicalName="Metal5.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90501066" valueType="Boolean" logicalName="Metal5.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90501067" valueType="Ascii" logicalName="Metal5.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90501068" valueType="Boolean" logicalName="Metal5.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90501069" valueType="Boolean" logicalName="Metal5.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90501070" valueType="Boolean" logicalName="Metal5.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90501071" valueType="U4" logicalName="Metal5.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90501072" valueType="U4" logicalName="Metal5.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90501073" valueType="F8" logicalName="Metal5.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90501074" valueType="Ascii" logicalName="Metal5.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90601001" valueType="Ascii" logicalName="Metal6.State" eventTrigger="" units="" />
    <StatusVariable id="90601002" valueType="Ascii" logicalName="Metal6.LotID" eventTrigger="" units="" />
    <StatusVariable id="90601003" valueType="Ascii" logicalName="Metal6.WSID" eventTrigger="" units="" />
    <StatusVariable id="90601004" valueType="Ascii" logicalName="Metal6.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90601005" valueType="Ascii" logicalName="Metal6.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90601006" valueType="Ascii" logicalName="Metal6.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90601007" valueType="Ascii" logicalName="Metal6.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90601008" valueType="Ascii" logicalName="Metal6.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90601009" valueType="Ascii" logicalName="Metal6.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90601010" valueType="Ascii" logicalName="Metal6.Task" eventTrigger="" units="" />
    <StatusVariable id="90601011" valueType="F8" logicalName="Metal6.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90601012" valueType="F8" logicalName="Metal6.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601013" valueType="F8" logicalName="Metal6.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601014" valueType="F8" logicalName="Metal6.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90601015" valueType="F8" logicalName="Metal6.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601016" valueType="F8" logicalName="Metal6.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601017" valueType="F8" logicalName="Metal6.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90601018" valueType="F8" logicalName="Metal6.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601019" valueType="F8" logicalName="Metal6.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601020" valueType="F8" logicalName="Metal6.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90601021" valueType="F8" logicalName="Metal6.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601022" valueType="F8" logicalName="Metal6.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601023" valueType="F8" logicalName="Metal6.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90601024" valueType="F8" logicalName="Metal6.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601025" valueType="F8" logicalName="Metal6.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601026" valueType="F8" logicalName="Metal6.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90601027" valueType="F8" logicalName="Metal6.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601028" valueType="F8" logicalName="Metal6.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601029" valueType="F8" logicalName="Metal6.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90601030" valueType="F8" logicalName="Metal6.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601031" valueType="F8" logicalName="Metal6.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601032" valueType="F8" logicalName="Metal6.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90601033" valueType="F8" logicalName="Metal6.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90601034" valueType="F8" logicalName="Metal6.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90601036" valueType="F8" logicalName="Metal6.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90601037" valueType="Ascii" logicalName="Metal6.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90601038" valueType="F8" logicalName="Metal6.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90601039" valueType="F8" logicalName="Metal6.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90601040" valueType="F8" logicalName="Metal6.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90601041" valueType="Boolean" logicalName="Metal6.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90601042" valueType="Boolean" logicalName="Metal6.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90601043" valueType="Boolean" logicalName="Metal6.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90601044" valueType="Boolean" logicalName="Metal6.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90601045" valueType="Boolean" logicalName="Metal6.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90601046" valueType="Boolean" logicalName="Metal6.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90601047" valueType="Boolean" logicalName="Metal6.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90601048" valueType="Boolean" logicalName="Metal6.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90601049" valueType="Ascii" logicalName="Metal6.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90601050" valueType="Boolean" logicalName="Metal6.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90601051" valueType="F8" logicalName="Metal6.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90601052" valueType="F8" logicalName="Metal6.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90601053" valueType="F8" logicalName="Metal6.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90601054" valueType="Ascii" logicalName="Metal6.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90601055" valueType="Ascii" logicalName="Metal6.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90601056" valueType="Ascii" logicalName="Metal6.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90601057" valueType="Boolean" logicalName="Metal6.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90601058" valueType="Ascii" logicalName="Metal6.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90601059" valueType="Boolean" logicalName="Metal6.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90601060" valueType="F8" logicalName="Metal6.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90601061" valueType="F8" logicalName="Metal6.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90601062" valueType="F8" logicalName="Metal6.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90601063" valueType="Ascii" logicalName="Metal6.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90601064" valueType="Ascii" logicalName="Metal6.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90601065" valueType="Ascii" logicalName="Metal6.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90601066" valueType="Boolean" logicalName="Metal6.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90601067" valueType="Ascii" logicalName="Metal6.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90601068" valueType="Boolean" logicalName="Metal6.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90601069" valueType="Boolean" logicalName="Metal6.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90601070" valueType="Boolean" logicalName="Metal6.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90601071" valueType="U4" logicalName="Metal6.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90601072" valueType="U4" logicalName="Metal6.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90601073" valueType="F8" logicalName="Metal6.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90601074" valueType="Ascii" logicalName="Metal6.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="90701001" valueType="Ascii" logicalName="Metal7.State" eventTrigger="" units="" />
    <StatusVariable id="90701002" valueType="Ascii" logicalName="Metal7.LotID" eventTrigger="" units="" />
    <StatusVariable id="90701003" valueType="Ascii" logicalName="Metal7.WSID" eventTrigger="" units="" />
    <StatusVariable id="90701004" valueType="Ascii" logicalName="Metal7.LSAID" eventTrigger="" units="" />
    <StatusVariable id="90701005" valueType="Ascii" logicalName="Metal7.LSBID" eventTrigger="" units="" />
    <StatusVariable id="90701006" valueType="Ascii" logicalName="Metal7.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="90701007" valueType="Ascii" logicalName="Metal7.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="90701008" valueType="Ascii" logicalName="Metal7.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="90701009" valueType="Ascii" logicalName="Metal7.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="90701010" valueType="Ascii" logicalName="Metal7.Task" eventTrigger="" units="" />
    <StatusVariable id="90701011" valueType="F8" logicalName="Metal7.TotalUsage" eventTrigger="" units="" />
    <StatusVariable id="90701012" valueType="F8" logicalName="Metal7.TotalUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701013" valueType="F8" logicalName="Metal7.TotalUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701014" valueType="F8" logicalName="Metal7.AnodeAUsage" eventTrigger="" units="" />
    <StatusVariable id="90701015" valueType="F8" logicalName="Metal7.AnodeAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701016" valueType="F8" logicalName="Metal7.AnodeAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701017" valueType="F8" logicalName="Metal7.AnodeBUsage" eventTrigger="" units="" />
    <StatusVariable id="90701018" valueType="F8" logicalName="Metal7.AnodeBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701019" valueType="F8" logicalName="Metal7.AnodeBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701020" valueType="F8" logicalName="Metal7.MembranceAUsage" eventTrigger="" units="" />
    <StatusVariable id="90701021" valueType="F8" logicalName="Metal7.MembranceAUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701022" valueType="F8" logicalName="Metal7.MembranceAUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701023" valueType="F8" logicalName="Metal7.MembranceBUsage" eventTrigger="" units="" />
    <StatusVariable id="90701024" valueType="F8" logicalName="Metal7.MembranceBUsage.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701025" valueType="F8" logicalName="Metal7.MembranceBUsage.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701026" valueType="F8" logicalName="Metal7.TotalWafers" eventTrigger="" units="" />
    <StatusVariable id="90701027" valueType="F8" logicalName="Metal7.TotalWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701028" valueType="F8" logicalName="Metal7.TotalWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701029" valueType="F8" logicalName="Metal7.AnodeAWafers" eventTrigger="" units="" />
    <StatusVariable id="90701030" valueType="F8" logicalName="Metal7.AnodeAWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701031" valueType="F8" logicalName="Metal7.AnodeAWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701032" valueType="F8" logicalName="Metal7.AnodeBWafers" eventTrigger="" units="" />
    <StatusVariable id="90701033" valueType="F8" logicalName="Metal7.AnodeBWafers.WarningLimit" eventTrigger="" units="" />
    <StatusVariable id="90701034" valueType="F8" logicalName="Metal7.AnodeBWafers.FaultLimit" eventTrigger="" units="" />
    <StatusVariable id="90701036" valueType="F8" logicalName="Metal7.SideAFlow" eventTrigger="" units="" />
    <StatusVariable id="90701037" valueType="Ascii" logicalName="Metal7.SideAFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90701038" valueType="F8" logicalName="Metal7.SideBFlow" eventTrigger="" units="" />
    <StatusVariable id="90701039" valueType="F8" logicalName="Metal7.SideBFlowStatus" eventTrigger="" units="" />
    <StatusVariable id="90701040" valueType="F8" logicalName="Metal7.CellFlow" eventTrigger="" units="" />
    <StatusVariable id="90701041" valueType="Boolean" logicalName="Metal7.ANAPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90701042" valueType="Boolean" logicalName="Metal7.ANBPinEnable" eventTrigger="" units="" />
    <StatusVariable id="90701043" valueType="Boolean" logicalName="Metal7.ANAPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90701044" valueType="Boolean" logicalName="Metal7.ANBPoutEnable" eventTrigger="" units="" />
    <StatusVariable id="90701045" valueType="Boolean" logicalName="Metal7.CellFlowEnable" eventTrigger="" units="" />
    <StatusVariable id="90701046" valueType="Boolean" logicalName="Metal7.CellPumpEnable" eventTrigger="" units="" />
    <StatusVariable id="90701047" valueType="Boolean" logicalName="Metal7.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="90701048" valueType="Boolean" logicalName="Metal7.Circulation" eventTrigger="" units="" />
    <StatusVariable id="90701049" valueType="Ascii" logicalName="Metal7.SideAPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90701050" valueType="Boolean" logicalName="Metal7.SideAPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90701051" valueType="F8" logicalName="Metal7.SideAPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90701052" valueType="F8" logicalName="Metal7.SideAPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90701053" valueType="F8" logicalName="Metal7.SideAPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90701054" valueType="Ascii" logicalName="Metal7.SideAPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90701055" valueType="Ascii" logicalName="Metal7.SideAPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90701056" valueType="Ascii" logicalName="Metal7.SideAPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90701057" valueType="Boolean" logicalName="Metal7.SideAPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90701058" valueType="Ascii" logicalName="Metal7.SideBPowerSupplier.ID" eventTrigger="" units="" />
    <StatusVariable id="90701059" valueType="Boolean" logicalName="Metal7.SideBPowerSupplier.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="90701060" valueType="F8" logicalName="Metal7.SideBPowerSupplier.Voltage" eventTrigger="" units="" />
    <StatusVariable id="90701061" valueType="F8" logicalName="Metal7.SideBPowerSupplier.Current" eventTrigger="" units="" />
    <StatusVariable id="90701062" valueType="F8" logicalName="Metal7.SideBPowerSupplier.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="90701063" valueType="Ascii" logicalName="Metal7.SideBPowerSupplier.RunModel" eventTrigger="" units="" />
    <StatusVariable id="90701064" valueType="Ascii" logicalName="Metal7.SideBPowerSupplier.PowerControl" eventTrigger="" units="" />
    <StatusVariable id="90701065" valueType="Ascii" logicalName="Metal7.SideBPowerSupplier.PowerStatus" eventTrigger="" units="" />
    <StatusVariable id="90701066" valueType="Boolean" logicalName="Metal7.SideBPowerSupplier.Enable" eventTrigger="" units="" />
    <StatusVariable id="90701067" valueType="Ascii" logicalName="Metal7.Linmot.ID" eventTrigger="" units="" />
    <StatusVariable id="90701068" valueType="Boolean" logicalName="Metal7.Linmot.IsMotorOn" eventTrigger="" units="" />
    <StatusVariable id="90701069" valueType="Boolean" logicalName="Metal7.Linmot.IsError" eventTrigger="" units="" />
    <StatusVariable id="90701070" valueType="Boolean" logicalName="Metal7.Linmot.IsSwitchOn" eventTrigger="" units="" />
    <StatusVariable id="90701071" valueType="U4" logicalName="Metal7.Linmot.CurveSpeed" eventTrigger="" units="" />
    <StatusVariable id="90701072" valueType="U4" logicalName="Metal7.Linmot.ErrorCode" eventTrigger="" units="" />
    <StatusVariable id="90701073" valueType="F8" logicalName="Metal7.Linmot.CurrentPosition" eventTrigger="" units="" />
    <StatusVariable id="90701074" valueType="Ascii" logicalName="Metal7.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="100101001" valueType="Ascii" logicalName="Rinse1.State" eventTrigger="" units="" />
    <StatusVariable id="100101002" valueType="Ascii" logicalName="Rinse1.LotID" eventTrigger="" units="" />
    <StatusVariable id="100101003" valueType="Ascii" logicalName="Rinse1.WSID" eventTrigger="" units="" />
    <StatusVariable id="100101004" valueType="Ascii" logicalName="Rinse1.LSAID" eventTrigger="" units="" />
    <StatusVariable id="100101005" valueType="Ascii" logicalName="Rinse1.LSBID" eventTrigger="" units="" />
    <StatusVariable id="100101006" valueType="Ascii" logicalName="Rinse1.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="100101007" valueType="Ascii" logicalName="Rinse1.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="100101008" valueType="Ascii" logicalName="Rinse1.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="100101009" valueType="Ascii" logicalName="Rinse1.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="100101010" valueType="Ascii" logicalName="Rinse1.Task" eventTrigger="" units="" />
    <StatusVariable id="100101011" valueType="Ascii" logicalName="Rinse1.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="100101012" valueType="Ascii" logicalName="Rinse1.Resistivity.ID" eventTrigger="" units="" />
    <StatusVariable id="100101013" valueType="F8" logicalName="Rinse1.Resistivity" eventTrigger="" units="" />
    <StatusVariable id="100101014" valueType="Ascii" logicalName="Rinse1.WaterLevel" eventTrigger="" units="" />
    <StatusVariable id="100101015" valueType="Boolean" logicalName="Rinse1.DIFillEnable" eventTrigger="" units="" />
    <StatusVariable id="100101016" valueType="Boolean" logicalName="Rinse1.DrainEnable" eventTrigger="" units="" />
    <StatusVariable id="100101017" valueType="Boolean" logicalName="Rinse1.N2Enable" eventTrigger="" units="" />
    <StatusVariable id="100101018" valueType="Boolean" logicalName="Rinse1.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="100101019" valueType="Boolean" logicalName="Rinse1.WasteEnable" eventTrigger="" units="" />
    <StatusVariable id="110101001" valueType="Ascii" logicalName="Rinse2.State" eventTrigger="" units="" />
    <StatusVariable id="110101002" valueType="Ascii" logicalName="Rinse2.LotID" eventTrigger="" units="" />
    <StatusVariable id="110101003" valueType="Ascii" logicalName="Rinse2.WSID" eventTrigger="" units="" />
    <StatusVariable id="110101004" valueType="Ascii" logicalName="Rinse2.LSAID" eventTrigger="" units="" />
    <StatusVariable id="110101005" valueType="Ascii" logicalName="Rinse2.LSBID" eventTrigger="" units="" />
    <StatusVariable id="110101006" valueType="Ascii" logicalName="Rinse2.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="110101007" valueType="Ascii" logicalName="Rinse2.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="110101008" valueType="Ascii" logicalName="Rinse2.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="110101009" valueType="Ascii" logicalName="Rinse2.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="110101010" valueType="Ascii" logicalName="Rinse2.Task" eventTrigger="" units="" />
    <StatusVariable id="110101011" valueType="Ascii" logicalName="Rinse2.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="110101012" valueType="Ascii" logicalName="Rinse2.Resistivity.ID" eventTrigger="" units="" />
    <StatusVariable id="110101013" valueType="F8" logicalName="Rinse2.Resistivity" eventTrigger="" units="" />
    <StatusVariable id="110101014" valueType="Ascii" logicalName="Rinse2.WaterLevel" eventTrigger="" units="" />
    <StatusVariable id="110101015" valueType="Boolean" logicalName="Rinse2.DIFillEnable" eventTrigger="" units="" />
    <StatusVariable id="110101016" valueType="Boolean" logicalName="Rinse2.DrainEnable" eventTrigger="" units="" />
    <StatusVariable id="110101017" valueType="Boolean" logicalName="Rinse2.N2Enable" eventTrigger="" units="" />
    <StatusVariable id="110101018" valueType="Boolean" logicalName="Rinse2.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="110101019" valueType="Boolean" logicalName="Rinse2.WasteEnable" eventTrigger="" units="" />
    <StatusVariable id="120101001" valueType="Ascii" logicalName="Rinse3.State" eventTrigger="" units="" />
    <StatusVariable id="120101002" valueType="Ascii" logicalName="Rinse3.LotID" eventTrigger="" units="" />
    <StatusVariable id="120101003" valueType="Ascii" logicalName="Rinse3.WSID" eventTrigger="" units="" />
    <StatusVariable id="120101004" valueType="Ascii" logicalName="Rinse3.LSAID" eventTrigger="" units="" />
    <StatusVariable id="120101005" valueType="Ascii" logicalName="Rinse3.LSBID" eventTrigger="" units="" />
    <StatusVariable id="120101006" valueType="Ascii" logicalName="Rinse3.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="120101007" valueType="Ascii" logicalName="Rinse3.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="120101008" valueType="Ascii" logicalName="Rinse3.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="120101009" valueType="Ascii" logicalName="Rinse3.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="120101010" valueType="Ascii" logicalName="Rinse3.Task" eventTrigger="" units="" />
    <StatusVariable id="120101011" valueType="Ascii" logicalName="Rinse3.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="120101012" valueType="Ascii" logicalName="Rinse3.Resistivity.ID" eventTrigger="" units="" />
    <StatusVariable id="120101013" valueType="F8" logicalName="Rinse3.Resistivity" eventTrigger="" units="" />
    <StatusVariable id="120101014" valueType="Ascii" logicalName="Rinse3.WaterLevel" eventTrigger="" units="" />
    <StatusVariable id="120101015" valueType="Boolean" logicalName="Rinse3.DIFillEnable" eventTrigger="" units="" />
    <StatusVariable id="120101016" valueType="Boolean" logicalName="Rinse3.DrainEnable" eventTrigger="" units="" />
    <StatusVariable id="120101017" valueType="Boolean" logicalName="Rinse3.N2Enable" eventTrigger="" units="" />
    <StatusVariable id="120101018" valueType="Boolean" logicalName="Rinse3.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="120101019" valueType="Boolean" logicalName="Rinse3.WasteEnable" eventTrigger="" units="" />
    <StatusVariable id="130101001" valueType="Ascii" logicalName="Rinse4.State" eventTrigger="" units="" />
    <StatusVariable id="130101002" valueType="Ascii" logicalName="Rinse4.LotID" eventTrigger="" units="" />
    <StatusVariable id="130101003" valueType="Ascii" logicalName="Rinse4.WSID" eventTrigger="" units="" />
    <StatusVariable id="130101004" valueType="Ascii" logicalName="Rinse4.LSAID" eventTrigger="" units="" />
    <StatusVariable id="130101005" valueType="Ascii" logicalName="Rinse4.LSBID" eventTrigger="" units="" />
    <StatusVariable id="130101006" valueType="Ascii" logicalName="Rinse4.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="130101007" valueType="Ascii" logicalName="Rinse4.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="130101008" valueType="Ascii" logicalName="Rinse4.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="130101009" valueType="Ascii" logicalName="Rinse4.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="130101010" valueType="Ascii" logicalName="Rinse4.Task" eventTrigger="" units="" />
    <StatusVariable id="130101011" valueType="Ascii" logicalName="Rinse4.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="130101012" valueType="Ascii" logicalName="Rinse4.Resistivity.ID" eventTrigger="" units="" />
    <StatusVariable id="130101013" valueType="F8" logicalName="Rinse4.Resistivity" eventTrigger="" units="" />
    <StatusVariable id="130101014" valueType="Ascii" logicalName="Rinse4.WaterLevel" eventTrigger="" units="" />
    <StatusVariable id="130101015" valueType="Boolean" logicalName="Rinse4.DIFillEnable" eventTrigger="" units="" />
    <StatusVariable id="130101016" valueType="Boolean" logicalName="Rinse4.DrainEnable" eventTrigger="" units="" />
    <StatusVariable id="130101017" valueType="Boolean" logicalName="Rinse4.N2Enable" eventTrigger="" units="" />
    <StatusVariable id="130101018" valueType="Boolean" logicalName="Rinse4.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="130101019" valueType="Boolean" logicalName="Rinse4.WasteEnable" eventTrigger="" units="" />
    <StatusVariable id="140101001" valueType="Ascii" logicalName="Rinse5.State" eventTrigger="" units="" />
    <StatusVariable id="140101002" valueType="Ascii" logicalName="Rinse5.LotID" eventTrigger="" units="" />
    <StatusVariable id="140101003" valueType="Ascii" logicalName="Rinse5.WSID" eventTrigger="" units="" />
    <StatusVariable id="140101004" valueType="Ascii" logicalName="Rinse5.LSAID" eventTrigger="" units="" />
    <StatusVariable id="140101005" valueType="Ascii" logicalName="Rinse5.LSBID" eventTrigger="" units="" />
    <StatusVariable id="140101006" valueType="Ascii" logicalName="Rinse5.ModuleRecipe" eventTrigger="" units="" />
    <StatusVariable id="140101007" valueType="Ascii" logicalName="Rinse5.SequenceRecipe" eventTrigger="" units="" />
    <StatusVariable id="140101008" valueType="Ascii" logicalName="Rinse5.WaferAID" eventTrigger="" units="" />
    <StatusVariable id="140101009" valueType="Ascii" logicalName="Rinse5.WaferBID" eventTrigger="" units="" />
    <StatusVariable id="140101010" valueType="Ascii" logicalName="Rinse5.Task" eventTrigger="" units="" />
    <StatusVariable id="140101011" valueType="Ascii" logicalName="Rinse5.OperatingMode" eventTrigger="" units="" />
    <StatusVariable id="140101012" valueType="Ascii" logicalName="Rinse5.Resistivity.ID" eventTrigger="" units="" />
    <StatusVariable id="140101013" valueType="F8" logicalName="Rinse5.Resistivity" eventTrigger="" units="" />
    <StatusVariable id="140101014" valueType="Ascii" logicalName="Rinse5.WaterLevel" eventTrigger="" units="" />
    <StatusVariable id="140101015" valueType="Boolean" logicalName="Rinse5.DIFillEnable" eventTrigger="" units="" />
    <StatusVariable id="140101016" valueType="Boolean" logicalName="Rinse5.DrainEnable" eventTrigger="" units="" />
    <StatusVariable id="140101017" valueType="Boolean" logicalName="Rinse5.N2Enable" eventTrigger="" units="" />
    <StatusVariable id="140101018" valueType="Boolean" logicalName="Rinse5.WaferShuttleClamped" eventTrigger="" units="" />
    <StatusVariable id="140101019" valueType="Boolean" logicalName="Rinse5.WasteEnable" eventTrigger="" units="" />
	<StatusVariable id="150101001" valueType="Boolean" logicalName="System.Facilities.N2Enable" eventTrigger="" units="" />
	<StatusVariable id="150101002" valueType="Boolean" logicalName="System.Facilities.CDAEnable" eventTrigger="" units="" />
	<StatusVariable id="150101003" valueType="Boolean" logicalName="System.Facilities.ExternalCDAEnable" eventTrigger="" units="" />
	<StatusVariable id="150101004" valueType="Boolean" logicalName="System.Facilities.DiWaterEnable" eventTrigger="" units="" />
	<StatusVariable id="150101005" valueType="Boolean" logicalName="System.Facilities.HouseChilledWaterEnable" eventTrigger="" units="" />
	<StatusVariable id="150101006" valueType="Boolean" logicalName="System.Facilities.DiReplenEnable" eventTrigger="" units="" />
	<StatusVariable id="150101007" valueType="Boolean" logicalName="System.Facilities.DiFillEnable" eventTrigger="" units="" />
	<StatusVariable id="150101008" valueType="Boolean" logicalName="System.Facilities.LoaderDiEnable" eventTrigger="" units="" />
	<StatusVariable id="150101010" valueType="F8" logicalName="System.Facilities.CDA1Pressure" eventTrigger="" units="" />
	<StatusVariable id="150101011" valueType="F8" logicalName="System.Facilities.CDA2Pressure" eventTrigger="" units="" />
	<StatusVariable id="150101012" valueType="F8" logicalName="System.Facilities.Nitrogen1APressure" eventTrigger="" units="" />
	<StatusVariable id="150101013" valueType="F8" logicalName="System.Facilities.Nitrogen1BPressure" eventTrigger="" units="" />
	<StatusVariable id="150101014" valueType="F8" logicalName="System.Facilities.Nitrogen2APressure" eventTrigger="" units="" />
	<StatusVariable id="150101015" valueType="F8" logicalName="System.Facilities.Nitrogen2BPressure" eventTrigger="" units="" />
	<StatusVariable id="150101016" valueType="F8" logicalName="System.Facilities.DiWaterPressure" eventTrigger="" units="" />
	<StatusVariable id="150101017" valueType="F8" logicalName="System.Facilities.HouseChilledWaterPressure" eventTrigger="" units="" />
	<StatusVariable id="150101018" valueType="F8" logicalName="System.Facilities.ExternalCDAPressure" eventTrigger="" units="" />
	<StatusVariable id="150101019" valueType="F8" logicalName="System.Facilities.VacuumPressure" eventTrigger="" units="" />
	<StatusVariable id="150101020" valueType="F8" logicalName="System.Facilities.ExhaustPressure" eventTrigger="" units="" />
	<StatusVariable id="160101001" valueType="F8" logicalName="Safety.TwincatState" eventTrigger="" units="" />
  </StatusVariables>
  <EquipmentConstants>
    <EquipmentConstant id="10101001" valueType="U4" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="0" max="300" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="10101002" valueType="F8" logicalName="System.AtTemperatureRange" value="" min="0.1" max="5" units="" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="10101003" valueType="F8" logicalName="System.RampStepSize" value="" min="0.01" max="1" units="" defaultValue="0.11" eventTrigger="" />
    <EquipmentConstant id="10101004" valueType="F8" logicalName="System.TemeratureDelatLimit" value="" min="1" max="10" units="" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="10101005" valueType="Ascii" logicalName="System.ControlIPFilter" value="" min="0" max="0" units="" defaultValue="10." eventTrigger="" />
    <EquipmentConstant id="10101006" valueType="Ascii" logicalName="System.ChemistryList" value="" min="" max="" units="" defaultValue="Any,SnAg,Cu,Ni" eventTrigger="" />
    <EquipmentConstant id="10101007" valueType="Ascii" logicalName="System.LSType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101008" valueType="U4" logicalName="System.WaferSize" value="" min="0" max="300" units="" defaultValue="200" eventTrigger="" />
    <EquipmentConstant id="10101009" valueType="F8" logicalName="System.Increment" value="" min="0" max="100" units="" defaultValue="0.1" eventTrigger="" />
    <EquipmentConstant id="10101010" valueType="Boolean" logicalName="System.IsSimulatorMode" value="" min="" max="" units="" defaultValue="True" eventTrigger="" />
    <EquipmentConstant id="10101011" valueType="Boolean" logicalName="System.DisplayPopDialogWhenJobComplete" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="10101012" valueType="U4" logicalName="System.MaxInternalWaferCount" value="" min="1" max="8" units="" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="10101013" valueType="Ascii" logicalName="System.COMLogFlag" value="" min="" max="" units="" defaultValue="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" eventTrigger="" />
    <EquipmentConstant id="10101014" valueType="Boolean" logicalName="System.IsIgnoreSaveDB" value="" min="" max="" units="" defaultValue="True" eventTrigger="" />
    <EquipmentConstant id="10101015" valueType="U4" logicalName="System.CheckResourceInterval" value="" min="0" max="60" units="min" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="10101016" valueType="U4" logicalName="System.SystemType" value="" min="0" max="9" units="min" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="10101017" valueType="U4" logicalName="System.DataCollectionInterval" value="" min="200" max="2000" units="ms" defaultValue="1000" eventTrigger="" />
    <EquipmentConstant id="10101018" valueType="U4" logicalName="System.PressureUnitType" value="" min="0" max="1" units="" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="10101019" valueType="Ascii" logicalName="System.Name" value="" min="" max="" units="" defaultValue="Cyber X8" eventTrigger="" />
    <EquipmentConstant id="10101020" valueType="Ascii" logicalName="System.InitializeCheckModuleList" value="" min="" max="" units="" defaultValue="EFEM,PUF1,PUF2,Loader1,Transporter2,Transporter1,Prewet" eventTrigger="" />
    <EquipmentConstant id="10101021" valueType="Ascii" logicalName="System.ToolID" value="" min="" max="" units="" defaultValue="SN 03.Cyber101" eventTrigger="" />
    <EquipmentConstant id="10201001" valueType="Boolean" logicalName="Twincat.EnableReadLog" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="10201002" valueType="U4" logicalName="Twincat.SlsSpeed" value="" min="1" max="100" units="" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="10301001" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="0" max="0" units="" defaultValue="Passive" eventTrigger="" />
    <EquipmentConstant id="10301002" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="0" max="0" units="" defaultValue="127.0.0.1" eventTrigger="" />
    <EquipmentConstant id="10301003" valueType="U4" logicalName="FA.LocalPortNumber" value="" min="0" max="99999" units="" defaultValue="5000" eventTrigger="" />
    <EquipmentConstant id="10301004" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="0" max="0" units="" defaultValue="127.0.0.1" eventTrigger="" />
    <EquipmentConstant id="10301005" valueType="U4" logicalName="FA.RemotePortNumber" value="" min="0" max="99999" units="" defaultValue="5001" eventTrigger="" />
    <EquipmentConstant id="10301006" valueType="U4" logicalName="FA.T3Timeout" value="" min="0" max="999" units="s" defaultValue="45" eventTrigger="" />
    <EquipmentConstant id="10301007" valueType="U4" logicalName="FA.T5Timeout" value="" min="0" max="999" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="10301008" valueType="U4" logicalName="FA.T6Timeout" value="" min="0" max="999" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="10301009" valueType="U4" logicalName="FA.T7Timeout" value="" min="0" max="999" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="10301010" valueType="U4" logicalName="FA.T8Timeout" value="" min="0" max="999" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="10301011" valueType="Boolean" logicalName="FA.EnableSpooling" value="" min="0" max="0" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="10301012" valueType="U4" logicalName="FA.LinkTestInterval" value="" min="0" max="999" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="10301013" valueType="Ascii" logicalName="FA.DeviceId" value="" min="0" max="0" units="" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="10301014" valueType="U4" logicalName="FA.SpoolingCapability" value="" min="0" max="99999" units="" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="10301015" valueType="U4" logicalName="FA.SpoolingMaxTransmit" value="" min="0" max="99999" units="" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="10301016" valueType="Ascii" logicalName="FA.SpoolingFullOverWrite" value="" min="0" max="0" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="10301017" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="0" max="0" units="" defaultValue="Enabled" eventTrigger="" />
    <EquipmentConstant id="10301018" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="0" max="0" units="" defaultValue="Online" eventTrigger="" />
    <EquipmentConstant id="10301019" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="0" max="0" units="" defaultValue="Local" eventTrigger="" />
    <EquipmentConstant id="10401001" valueType="Boolean" logicalName="Scheduler.GroupWaferBySequence" value="" min="0" max="0" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="10401002" valueType="Boolean" logicalName="Scheduler.IsRunInParallelMode" value="" min="0" max="0" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="20101001" valueType="U4" logicalName="EFEM.LoadPort.MotionTimeout" value="" min="1" max="60" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="20101002" valueType="U4" logicalName="EFEM.LoadPort.HomeTimeout" value="" min="1" max="60" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="20101003" valueType="U4" logicalName="EFEM.LoadPort.SlotNumber" value="" min="1" max="60" units="s" defaultValue="25" eventTrigger="" />
    <EquipmentConstant id="20101004" valueType="Boolean" logicalName="EFEM.LoadPort.SlotFromBottom" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="20101005" valueType="Boolean" logicalName="EFEM.LoadPort.EnableScanner" value="" min="0" max="0" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="20101006" valueType="U4" logicalName="EFEM.HomeTimeout" value="" min="1" max="300" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="20101007" valueType="U4" logicalName="EFEM.MotionTimeout" value="" min="1" max="600" units="s" defaultValue="60" eventTrigger="" />
    <EquipmentConstant id="20101008" valueType="Ascii" logicalName="EFEM.IPAddress" value="" min="" max="" units="" defaultValue="127.0.0.1:13001" eventTrigger="" />
    <EquipmentConstant id="20101009" valueType="Boolean" logicalName="EFEM.CheckSideDoorOnEAPMap" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="20101010" valueType="Boolean" logicalName="EFEM.CheckCassetteDoorOnEAPMap" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="20101011" valueType="U4" logicalName="EFEM.DefaultMoveSpeedInPercent" value="" min="1" max="100" units="" defaultValue="15" eventTrigger="" />
    <EquipmentConstant id="20101012" valueType="U4" logicalName="EFEM.DefaultHomeSpeedInPercent" value="" min="1" max="100" units="" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="20101013" valueType="U4" logicalName="EFEM.EfemType" value="" min="1" max="300" units="" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="20101014" valueType="Boolean" logicalName="EFEM.AutoUnlockAfterUnload" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="20101015" valueType="Boolean" logicalName="EFEM.IsLoadPort1Unable" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="20101016" valueType="Boolean" logicalName="EFEM.IsLoadPort2Unable" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="20101017" valueType="Boolean" logicalName="EFEM.IsLoadPort3Unable" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="30101001" valueType="U4" logicalName="DualPUF.PufLayoutRotationDistance" value="" min="300" max="600" units="mm" defaultValue="513" eventTrigger="" />
    <EquipmentConstant id="30101002" valueType="U4" logicalName="DualPUF.RobotLayoutPosition" value="" min="-300" max="200" units="mm" defaultValue="-218" eventTrigger="" />
    <EquipmentConstant id="30201001" valueType="F8" logicalName="PUF1.CheckStuckWafer300_Offset_mm" value="" min="0" max="20" units="mm" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30201002" valueType="F8" logicalName="PUF1.CheckStuckWafer300_Acceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30201003" valueType="F8" logicalName="PUF1.CheckStuckWafer300_Deceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30201004" valueType="F8" logicalName="PUF1.CheckStuckWafer300_Speed_mm_sec" value="" min="1" max="1500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30201005" valueType="F8" logicalName="PUF1.CheckStuckWafer300_TorqueLimit_Percent" value="" min="1" max="100" units="deg" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="30201006" valueType="F8" logicalName="PUF1.CheckStuckWafer300_DistanceOffset1" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201007" valueType="F8" logicalName="PUF1.CheckStuckWafer300_DistanceOffset2" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201008" valueType="F8" logicalName="PUF1.CheckStuckWafer200_Offset_mm" value="" min="0" max="20" units="mm" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30201009" valueType="F8" logicalName="PUF1.CheckStuckWafer200_Acceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201010" valueType="F8" logicalName="PUF1.CheckStuckWafer200_Deceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201011" valueType="F8" logicalName="PUF1.CheckStuckWafer200_Speed_mm_sec" value="" min="1" max="1500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201012" valueType="F8" logicalName="PUF1.CheckStuckWafer200_TorqueLimit_Percent" value="" min="1" max="100" units="deg" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="30201013" valueType="F8" logicalName="PUF1.CheckStuckWafer200_DistanceOffset1" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201014" valueType="F8" logicalName="PUF1.CheckStuckWafer200_DistanceOffset2" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30201015" valueType="F8" logicalName="PUF1.ChuckVacuumWaferPresent" value="" min="-600" max="-300" units="mmHg" defaultValue="-400" eventTrigger="" />
    <EquipmentConstant id="30201016" valueType="F8" logicalName="PUF1.ChuckVacuumWaferAbsent" value="" min="-300" max="0" units="mmHg" defaultValue="-200" eventTrigger="" />
    <EquipmentConstant id="30201017" valueType="F8" logicalName="PUF1.ChuckVacuumCloseLimit" value="" min="-760" max="100" units="mmHg" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="30201018" valueType="F8" logicalName="PUF1.ChuckVacuumOpenLimit" value="" min="-700" max="700" units="mmHg" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30201019" valueType="Boolean" logicalName="PUF1.EnableCheckStickDistanceStatus" value="" min="" max="" units="" defaultValue="True" eventTrigger="" />
    <EquipmentConstant id="30201020" valueType="U4" logicalName="PUF1.ChuckValveSwitchingTimeDelayInMilliSeconds" value="" min="0" max="5000" units="ms" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="30201021" valueType="F8" logicalName="PUF1.CheckStuckWafer_DistanceSensorThreshold_mm" value="" min="0.1" max="20" units="mmHg" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="30301001" valueType="F8" logicalName="PUF2.CheckStuckWafer300_Offset_mm" value="" min="0" max="20" units="mm" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30301002" valueType="U4" logicalName="PUF2.CheckStuckWafer300_Acceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30301003" valueType="U4" logicalName="PUF2.CheckStuckWafer300_Deceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30301004" valueType="U4" logicalName="PUF2.CheckStuckWafer300_Speed_mm_sec" value="" min="1" max="1500" units="deg" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="30301005" valueType="F8" logicalName="PUF2.CheckStuckWafer300_TorqueLimit_Percent" value="" min="1" max="100" units="deg" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="30301006" valueType="F8" logicalName="PUF2.CheckStuckWafer300_DistanceOffset1" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301007" valueType="F8" logicalName="PUF2.CheckStuckWafer300_DistanceOffset2" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301008" valueType="F8" logicalName="PUF2.CheckStuckWafer200_Offset_mm" value="" min="0" max="20" units="mm" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30301009" valueType="F8" logicalName="PUF2.CheckStuckWafer200_Acceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301010" valueType="F8" logicalName="PUF2.CheckStuckWafer200_Deceleration_mm_sec_sec" value="" min="1" max="2500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301011" valueType="F8" logicalName="PUF2.CheckStuckWafer200_Speed_mm_sec" value="" min="1" max="1500" units="deg" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301012" valueType="F8" logicalName="PUF2.CheckStuckWafer200_TorqueLimit_Percent" value="" min="1" max="100" units="deg" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="30301013" valueType="F8" logicalName="PUF2.CheckStuckWafer200_DistanceOffset1" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301014" valueType="F8" logicalName="PUF2.CheckStuckWafer200_DistanceOffset2" value="" min="0" max="100" units="mm" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="30301015" valueType="F8" logicalName="PUF2.ChuckVacuumWaferPresent" value="" min="-600" max="-300" units="mmHg" defaultValue="-400" eventTrigger="" />
    <EquipmentConstant id="30301016" valueType="F8" logicalName="PUF2.ChuckVacuumWaferAbsent" value="" min="-300" max="0" units="mmHg" defaultValue="-200" eventTrigger="" />
    <EquipmentConstant id="30301017" valueType="F8" logicalName="PUF2.ChuckVacuumCloseLimit" value="" min="-760" max="100" units="mmHg" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="30301018" valueType="F8" logicalName="PUF2.ChuckVacuumOpenLimit" value="" min="-700" max="700" units="mmHg" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="30301019" valueType="Boolean" logicalName="PUF2.EnableCheckStickDistanceStatus" value="" min="" max="" units="" defaultValue="True" eventTrigger="" />
    <EquipmentConstant id="30301020" valueType="U4" logicalName="PUF2.ChuckValveSwitchingTimeDelayInMilliSeconds" value="" min="0" max="5000" units="ms" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="30301021" valueType="F8" logicalName="PUF2.CheckStuckWafer_DistanceSensorThreshold_mm" value="" min="0.1" max="20" units="mmHg" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="40101001" valueType="U4" logicalName="Loader1.DoorLockTimeout" value="" min="1000" max="60000" units="ms" defaultValue="30000" eventTrigger="" />
    <EquipmentConstant id="40101002" valueType="U4" logicalName="Loader1.LSVacuumTimeout" value="" min="1000" max="60000" units="ms" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="40101003" valueType="U4" logicalName="Loader1.WSBladderEnableTimeout" value="" min="1000" max="60000" units="ms" defaultValue="30000" eventTrigger="" />
    <EquipmentConstant id="40101004" valueType="U4" logicalName="Loader1.WSBladderDisableTimeout" value="" min="1000" max="60000" units="ms" defaultValue="30000" eventTrigger="" />
    <EquipmentConstant id="40101005" valueType="U4" logicalName="Loader1.TranslateBladderTimeout" value="" min="1000" max="60000" units="ms" defaultValue="30000" eventTrigger="" />
    <EquipmentConstant id="40101006" valueType="U4" logicalName="Loader1.BernoulliBladderTimeout" value="" min="1000" max="60000" units="ms" defaultValue="30000" eventTrigger="" />
    <EquipmentConstant id="40101007" valueType="F8" logicalName="Loader1.LeakTestLSOKLimit" value="" min="0" max="700" units="" defaultValue="400" eventTrigger="" />
    <EquipmentConstant id="40101008" valueType="U4" logicalName="Loader1.LeakTestCutOffTime" value="" min="10000" max="50000" units="ms" defaultValue="20000" eventTrigger="" />
    <EquipmentConstant id="40101009" valueType="F8" logicalName="Loader1.LeakTestCutOffValue" value="" min="0" max="700" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="40101010" valueType="U4" logicalName="Loader1.LeakTestRetryWait" value="" min="0" max="600" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="40101011" valueType="F8" logicalName="Loader1.LSVacuumHighLimit" value="" min="-760" max="0" units="s" defaultValue="-550" eventTrigger="" />
    <EquipmentConstant id="40101012" valueType="F8" logicalName="Loader1.LSVacuumLowLimit" value="" min="-760" max="0" units="s" defaultValue="-480" eventTrigger="" />
    <EquipmentConstant id="40101013" valueType="F8" logicalName="Loader1.MinBernoulliN2Pressure" value="" min="0" max="100" units="" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="40101014" valueType="U4" logicalName="Loader1.LSVacuumReleaseDelayInMilliseconds" value="" min="0" max="10000" units="ms" defaultValue="250" eventTrigger="" />
    <EquipmentConstant id="40101015" valueType="U4" logicalName="Loader1.TranslateOutDelayInMilliseconds" value="" min="0" max="10000" units="ms" defaultValue="250" eventTrigger="" />
    <EquipmentConstant id="40101016" valueType="F8" logicalName="Loader1.WSBladderPressure" value="" min="0" max="100" units="s" defaultValue="52" eventTrigger="" />
    <EquipmentConstant id="40101017" valueType="Boolean" logicalName="Loader1.PlateOutCameraEnable" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="40101018" valueType="U4" logicalName="Loader1.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="12" eventTrigger="" />
    <EquipmentConstant id="40101019" valueType="U4" logicalName="Loader1.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="40101020" valueType="U4" logicalName="Loader1.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="40101021" valueType="U4" logicalName="Loader1.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101001" valueType="U4" logicalName="Transporter.Transporter2.StartCellId" value="" min="1" max="40" units="" defaultValue="15" eventTrigger="" />
    <EquipmentConstant id="50101002" valueType="U4" logicalName="Transporter.Transporter2.EndCellId" value="" min="1" max="40" units="" defaultValue="40" eventTrigger="" />
    <EquipmentConstant id="50101003" valueType="U4" logicalName="Transporter.Transporter2.UnlockTimerLock" value="" min="5" max="30" units="s" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="50101004" valueType="U4" logicalName="Transporter.Transporter2.LockCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101005" valueType="U4" logicalName="Transporter.Transporter2.UnlockCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101006" valueType="U4" logicalName="Transporter.Transporter2.RetractCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101007" valueType="U4" logicalName="Transporter.Transporter2.ExtendCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101008" valueType="U4" logicalName="Transporter.Transporter1.StartCellId" value="" min="1" max="40" units="" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="50101009" valueType="U4" logicalName="Transporter.Transporter1.EndCellId" value="" min="1" max="40" units="" defaultValue="33" eventTrigger="" />
    <EquipmentConstant id="50101010" valueType="U4" logicalName="Transporter.Transporter1.UnlockTimerLock" value="" min="5" max="30" units="s" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="50101011" valueType="U4" logicalName="Transporter.Transporter1.LockCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101012" valueType="U4" logicalName="Transporter.Transporter1.UnlockCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101013" valueType="U4" logicalName="Transporter.Transporter1.RetractCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101014" valueType="U4" logicalName="Transporter.Transporter1.ExtendCheckTime" value="" min="0" max="5" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="50101015" valueType="U4" logicalName="Transporter.TransporterMinimumDistance" value="" min="100" max="2000" units="mm" defaultValue="600" eventTrigger="" />
    <EquipmentConstant id="50101016" valueType="U4" logicalName="Transporter.TransporterLayoutHorizontalDistance" value="" min="100" max="2000" units="mm" defaultValue="1460" eventTrigger="" />
    <EquipmentConstant id="50101017" valueType="U4" logicalName="Transporter.TransporterLayoutLoaderPosition" value="" min="100" max="2000" units="mm" defaultValue="265" eventTrigger="" />
    <EquipmentConstant id="50101018" valueType="U4" logicalName="Transporter.BiasDistanceBetweenLoaderAndProcess" value="" min="0" max="1000" units="mm" defaultValue="8" eventTrigger="" />
    <EquipmentConstant id="50101019" valueType="Boolean" logicalName="Transporter.BypassWaferHolderPresent" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="50101020" valueType="U4" logicalName="Transporter.TransporterTransferSeconds" value="" min="1" max="100" units="s" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="50101021" valueType="U4" logicalName="Transporter.TransporterTransferOffSeconds" value="" min="1" max="100" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="50101022" valueType="U4" logicalName="Transporter.MaxPickTries" value="" min="0" max="5" units="" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="60101001" valueType="Boolean" logicalName="Log.EnableLinmotLog" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="60101002" valueType="Boolean" logicalName="Log.EnableResistivityLog" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="60101003" valueType="Boolean" logicalName="Log.EnableTemperatureLog" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="60101004" valueType="Boolean" logicalName="Log.EnableBarcodeReaderLog" value="" min="" max="" units="" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="70101001" valueType="U4" logicalName="Metal.CellFlowFaultHoldOffTime" value="" min="0" max="50000" units="ms" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="70101002" valueType="F8" logicalName="Metal.MinPumpFlow" value="" min="0" max="10" units="L/min" defaultValue="0.5" eventTrigger="" />
    <EquipmentConstant id="70101003" valueType="U4" logicalName="Metal.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="12" eventTrigger="" />
    <EquipmentConstant id="70101004" valueType="U4" logicalName="Metal.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="70101005" valueType="U4" logicalName="Metal.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="70101006" valueType="U4" logicalName="Metal.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="70101007" valueType="F8" logicalName="Metal.AnodeFillVolume" value="" min="0" max="5" units="" defaultValue="2.5" eventTrigger="" />
    <EquipmentConstant id="70101008" valueType="F8" logicalName="Metal.AnodeDrainTime" value="" min="0" max="600" units="s" defaultValue="240" eventTrigger="" />
    <EquipmentConstant id="70101009" valueType="F8" logicalName="Metal.CellFlowStartLowLimit" value="" min="0" max="30" units="" defaultValue="3.0" eventTrigger="" />
    <EquipmentConstant id="70101010" valueType="F8" logicalName="Metal.ShortTestThreshold" value="" min="0" max="1" units="A" defaultValue="0.125" eventTrigger="" />
    <EquipmentConstant id="70101011" valueType="F8" logicalName="Metal.MetalTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101012" valueType="F8" logicalName="Metal.MetalTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101013" valueType="F8" logicalName="Metal.AnodeATotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101014" valueType="F8" logicalName="Metal.AnodeATotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101015" valueType="F8" logicalName="Metal.AnodeBTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101016" valueType="F8" logicalName="Metal.AnodeBTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101017" valueType="F8" logicalName="Metal.MembraneATotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101018" valueType="F8" logicalName="Metal.MembraneATotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101019" valueType="F8" logicalName="Metal.MembraneBTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101020" valueType="F8" logicalName="Metal.MembraneBTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101021" valueType="U4" logicalName="Metal.MetalTotalWafersWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101022" valueType="U4" logicalName="Metal.MetalTotalWafersFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101023" valueType="U4" logicalName="Metal.AnodeATotalWafersWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101024" valueType="U4" logicalName="Metal.AnodeATotalWafersFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101025" valueType="U4" logicalName="Metal.AnodeBTotalWafersWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="70101026" valueType="U4" logicalName="Metal.AnodeBTotalWafersFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="70101027" valueType="U4" logicalName="Metal.WaferShuttleSoakMaxTime" value="" min="0" max="100000" units="minute" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="80101001" valueType="U4" logicalName="Buffer.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="80101002" valueType="U4" logicalName="Buffer.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="80101003" valueType="U4" logicalName="Buffer.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="80101004" valueType="U4" logicalName="Buffer.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="90101001" valueType="F8" logicalName="Facilities.CDA_1_Pressure.Error_Max" value="" min="65.0" max="90.0" units="" defaultValue="90.0" eventTrigger="" />
    <EquipmentConstant id="90101002" valueType="F8" logicalName="Facilities.CDA_1_Pressure.Warning_Max" value="" min="65.0" max="90.0" units="" defaultValue="80.0" eventTrigger="" />
    <EquipmentConstant id="90101003" valueType="F8" logicalName="Facilities.CDA_1_Pressure.Error_Min" value="" min="65.0" max="90.0" units="" defaultValue="65.0" eventTrigger="" />
    <EquipmentConstant id="90101004" valueType="F8" logicalName="Facilities.CDA_1_Pressure.Warning_Min" value="" min="65.0" max="90.0" units="" defaultValue="68.0" eventTrigger="" />
    <EquipmentConstant id="90101005" valueType="F8" logicalName="Facilities.CDA_2_Pressure.Error_Max" value="" min="65.0" max="90.0" units="" defaultValue="90.0" eventTrigger="" />
    <EquipmentConstant id="90101006" valueType="F8" logicalName="Facilities.CDA_2_Pressure.Warning_Max" value="" min="65.0" max="90.0" units="" defaultValue="80.0" eventTrigger="" />
    <EquipmentConstant id="90101007" valueType="F8" logicalName="Facilities.CDA_2_Pressure.Error_Min" value="" min="65.0" max="90.0" units="" defaultValue="65.0" eventTrigger="" />
    <EquipmentConstant id="90101008" valueType="F8" logicalName="Facilities.CDA_2_Pressure.Warning_Min" value="" min="65.0" max="90.0" units="" defaultValue="68.0" eventTrigger="" />
    <EquipmentConstant id="90101009" valueType="F8" logicalName="Facilities.N2_1A_Pressure.Error_Max" value="" min="20.0" max="80.0" units="" defaultValue="80.0" eventTrigger="" />
    <EquipmentConstant id="90101010" valueType="F8" logicalName="Facilities.N2_1A_Pressure.Warning_Max" value="" min="20.0" max="80.0" units="" defaultValue="75.0" eventTrigger="" />
    <EquipmentConstant id="90101011" valueType="F8" logicalName="Facilities.N2_1A_Pressure.Error_Min" value="" min="20.0" max="80.0" units="" defaultValue="60.0" eventTrigger="" />
    <EquipmentConstant id="90101012" valueType="F8" logicalName="Facilities.N2_1A_Pressure.Warning_Min" value="" min="20.0" max="80.0" units="" defaultValue="62.0" eventTrigger="" />
    <EquipmentConstant id="90101013" valueType="F8" logicalName="Facilities.N2_1B_Pressure.Error_Max" value="" min="20.0" max="80.0" units="" defaultValue="29.0" eventTrigger="" />
    <EquipmentConstant id="90101014" valueType="F8" logicalName="Facilities.N2_1B_Pressure.Warning_Max" value="" min="20.0" max="80.0" units="" defaultValue="27.0" eventTrigger="" />
    <EquipmentConstant id="90101015" valueType="F8" logicalName="Facilities.N2_1B_Pressure.Error_Min" value="" min="20.0" max="80.0" units="" defaultValue="20.0" eventTrigger="" />
    <EquipmentConstant id="90101016" valueType="F8" logicalName="Facilities.N2_1B_Pressure.Warning_Min" value="" min="20.0" max="80.0" units="" defaultValue="22.0" eventTrigger="" />
    <EquipmentConstant id="90101017" valueType="F8" logicalName="Facilities.N2_2A_Pressure.Error_Max" value="" min="20.0" max="80.0" units="" defaultValue="80.0" eventTrigger="" />
    <EquipmentConstant id="90101018" valueType="F8" logicalName="Facilities.N2_2A_Pressure.Warning_Max" value="" min="20.0" max="80.0" units="" defaultValue="75.0" eventTrigger="" />
    <EquipmentConstant id="90101019" valueType="F8" logicalName="Facilities.N2_2A_Pressure.Error_Min" value="" min="20.0" max="80.0" units="" defaultValue="60.0" eventTrigger="" />
    <EquipmentConstant id="90101020" valueType="F8" logicalName="Facilities.N2_2A_Pressure.Warning_Min" value="" min="20.0" max="80.0" units="" defaultValue="62.0" eventTrigger="" />
    <EquipmentConstant id="90101021" valueType="F8" logicalName="Facilities.N2_2B_Pressure.Error_Max" value="" min="20.0" max="80.0" units="" defaultValue="29.0" eventTrigger="" />
    <EquipmentConstant id="90101022" valueType="F8" logicalName="Facilities.N2_2B_Pressure.Warning_Max" value="" min="20.0" max="80.0" units="" defaultValue="27.0" eventTrigger="" />
    <EquipmentConstant id="90101023" valueType="F8" logicalName="Facilities.N2_2B_Pressure.Error_Min" value="" min="20.0" max="80.0" units="" defaultValue="20.0" eventTrigger="" />
    <EquipmentConstant id="90101024" valueType="F8" logicalName="Facilities.N2_2B_Pressure.Warning_Min" value="" min="20.0" max="80.0" units="" defaultValue="22.0" eventTrigger="" />
    <EquipmentConstant id="90101025" valueType="F8" logicalName="Facilities.DIWater_Pressure.Error_Max" value="" min="10.0" max="60.0" units="" defaultValue="48.0" eventTrigger="" />
    <EquipmentConstant id="90101026" valueType="F8" logicalName="Facilities.DIWater_Pressure.Warning_Max" value="" min="10.0" max="60.0" units="" defaultValue="45.0" eventTrigger="" />
    <EquipmentConstant id="90101027" valueType="F8" logicalName="Facilities.DIWater_Pressure.Error_Min" value="" min="10.0" max="60.0" units="" defaultValue="25.0" eventTrigger="" />
    <EquipmentConstant id="90101028" valueType="F8" logicalName="Facilities.DIWater_Pressure.Warning_Min" value="" min="10.0" max="60.0" units="" defaultValue="30.0" eventTrigger="" />
    <EquipmentConstant id="90101029" valueType="F8" logicalName="Facilities.HouseChilledWater_Flow.Error_Max" value="" min="10.0" max="30.0" units="" defaultValue="30.0" eventTrigger="" />
    <EquipmentConstant id="90101030" valueType="F8" logicalName="Facilities.HouseChilledWater_Flow.Warning_Max" value="" min="10.0" max="30.0" units="" defaultValue="25.0" eventTrigger="" />
    <EquipmentConstant id="90101031" valueType="F8" logicalName="Facilities.HouseChilledWater_Flow.Error_Min" value="" min="5.0" max="30.0" units="" defaultValue="10.0" eventTrigger="" />
    <EquipmentConstant id="90101032" valueType="F8" logicalName="Facilities.HouseChilledWater_Flow.Warning_Min" value="" min="5.0" max="30.0" units="" defaultValue="15.0" eventTrigger="" />
    <EquipmentConstant id="90101033" valueType="F8" logicalName="Facilities.CDA_External_Pressure.Error_Max" value="" min="65.0" max="85.0" units="" defaultValue="85.0" eventTrigger="" />
    <EquipmentConstant id="90101034" valueType="F8" logicalName="Facilities.CDA_External_Pressure.Warning_Max" value="" min="65.0" max="85.0" units="" defaultValue="80.0" eventTrigger="" />
    <EquipmentConstant id="90101035" valueType="F8" logicalName="Facilities.CDA_External_Pressure.Error_Min" value="" min="65.0" max="85.0" units="" defaultValue="65.0" eventTrigger="" />
    <EquipmentConstant id="90101036" valueType="F8" logicalName="Facilities.CDA_External_Pressure.Warning_Min" value="" min="65.0" max="85.0" units="" defaultValue="70.0" eventTrigger="" />
    <EquipmentConstant id="90101037" valueType="F8" logicalName="Facilities.Vacuum_Pressure.Error_Max" value="" min="-800.0" max="-600.0" units="" defaultValue="-600.0" eventTrigger="" />
    <EquipmentConstant id="90101038" valueType="F8" logicalName="Facilities.Vacuum_Pressure.Warning_Max" value="" min="-800.0" max="-600.0" units="" defaultValue="-625.0" eventTrigger="" />
    <EquipmentConstant id="90101039" valueType="F8" logicalName="Facilities.Vacuum_Pressure.Error_Min" value="" min="-800.0" max="-600.0" units="" defaultValue="-800.0" eventTrigger="" />
    <EquipmentConstant id="90101040" valueType="F8" logicalName="Facilities.Vacuum_Pressure.Warning_Min" value="" min="-800.0" max="-600.0" units="" defaultValue="-760.0" eventTrigger="" />
    <EquipmentConstant id="90101041" valueType="F8" logicalName="Facilities.Exhaust_Pressure.Error_Max" value="" min="0.5" max="2.0" units="" defaultValue="2.0" eventTrigger="" />
    <EquipmentConstant id="90101042" valueType="F8" logicalName="Facilities.Exhaust_Pressure.Warning_Max" value="" min="0.5" max="2.0" units="" defaultValue="1.8" eventTrigger="" />
    <EquipmentConstant id="90101043" valueType="F8" logicalName="Facilities.Exhaust_Pressure.Error_Min" value="" min="0.3" max="2.0" units="" defaultValue="0.5" eventTrigger="" />
    <EquipmentConstant id="90101044" valueType="F8" logicalName="Facilities.Exhaust_Pressure.Warning_Min" value="" min="0.3" max="2.0" units="" defaultValue="0.7" eventTrigger="" />
    <EquipmentConstant id="90101045" valueType="U4" logicalName="Facilities.SampleAutoDisableTime" value="" min="1" max="600" units="s" defaultValue="300" eventTrigger="" />
    <EquipmentConstant id="100101001" valueType="U4" logicalName="SRD.ChuckVacuumOnLimit" value="" min="-760" max="0" units="s" defaultValue="-500" eventTrigger="" />
    <EquipmentConstant id="100101002" valueType="U4" logicalName="SRD.ChuckVacuumOffLimit" value="" min="-760" max="100" units="s" defaultValue="-100" eventTrigger="" />
    <EquipmentConstant id="100101003" valueType="U4" logicalName="SRD.SRDRotationPlusSecond" value="" min="-760" max="100" units="s" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="100101004" valueType="Boolean" logicalName="SRD.N2Enabled" value="" min="" max="" units="s" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="100101005" valueType="U4" logicalName="SRD.WaferPresenceCheckAccelDecelPercentage" value="" min="1" max="100" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="100101006" valueType="U4" logicalName="SRD.WaferPresenceCheckSpeedInRPMs" value="" min="1" max="25" units="" defaultValue="25" eventTrigger="" />
    <EquipmentConstant id="100101007" valueType="U4" logicalName="SRD.WaferPresenceCheckDistanceInDegrees" value="" min="0" max="3600" units="deg" defaultValue="25" eventTrigger="" />
    <EquipmentConstant id="100101008" valueType="Boolean" logicalName="SRD.SRD1EnablePresenceCheckvalue" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="100101009" valueType="Boolean" logicalName="SRD.SRD2EnablePresenceCheckvalue" value="" min="" max="" units="" defaultValue="true" eventTrigger="" />
    <EquipmentConstant id="110101001" valueType="U4" logicalName="Dryer.AutoShutoffTimeoutSeconds" value="" min="0" max="10000" units="s" defaultValue="1800" eventTrigger="" />
    <EquipmentConstant id="110101002" valueType="F8" logicalName="Dryer.MinimumPressure" value="" min="-1000" max="1000" units="mmHg" defaultValue="-3" eventTrigger="" />
    <EquipmentConstant id="110101003" valueType="U4" logicalName="Dryer.PressureCheckWarningHoldoffSeconds" value="" min="0" max="10000" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="110101004" valueType="F8" logicalName="Dryer.PressureCheckWarningMMHG" value="" min="-1000" max="1000" units="mmHg" defaultValue="-100" eventTrigger="" />
    <EquipmentConstant id="110101005" valueType="U4" logicalName="Dryer.PressureCheckErrorHoldoffSeconds" value="" min="0" max="10000" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="110101006" valueType="F8" logicalName="Dryer.PressureCheckErrorMMHG" value="" min="-1000" max="1000" units="mmHg" defaultValue="-150" eventTrigger="" />
    <EquipmentConstant id="110101007" valueType="U4" logicalName="Dryer.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="110101008" valueType="U4" logicalName="Dryer.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="110101009" valueType="U4" logicalName="Dryer.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="110101010" valueType="U4" logicalName="Dryer.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="120101001" valueType="F8" logicalName="Prewet.PumpFlow.Error_Max" value="" min="0" max="100.0" units="" defaultValue="60.0" eventTrigger="" />
    <EquipmentConstant id="120101002" valueType="F8" logicalName="Prewet.PumpFlow.Warning_Max" value="" min="0" max="100.0" units="" defaultValue="50.0" eventTrigger="" />
    <EquipmentConstant id="120101003" valueType="F8" logicalName="Prewet.PumpFlow.Error_Min" value="" min="0" max="100.0" units="" defaultValue="5.0" eventTrigger="" />
    <EquipmentConstant id="120101004" valueType="F8" logicalName="Prewet.PumpFlow.Warning_Min" value="" min="0" max="100.0" units="" defaultValue="10.0" eventTrigger="" />
    <EquipmentConstant id="120101005" valueType="F8" logicalName="Prewet.PumpPressure.Error_Max" value="" min="0" max="100.0" units="" defaultValue="50.0" eventTrigger="" />
    <EquipmentConstant id="120101006" valueType="F8" logicalName="Prewet.PumpPressure.Warning_Max" value="" min="0" max="100.0" units="" defaultValue="40.0" eventTrigger="" />
    <EquipmentConstant id="120101007" valueType="F8" logicalName="Prewet.PumpPressure.Error_Min" value="" min="0" max="100.0" units="" defaultValue="20.0" eventTrigger="" />
    <EquipmentConstant id="120101008" valueType="F8" logicalName="Prewet.PumpPressure.Warning_Min" value="" min="0" max="100.0" units="" defaultValue="30.0" eventTrigger="" />
    <EquipmentConstant id="120101009" valueType="F8" logicalName="Prewet.PumpKp" value="" min="0" max="1000" units="s" defaultValue="5.1" eventTrigger="" />
    <EquipmentConstant id="120101010" valueType="F8" logicalName="Prewet.PumpKi" value="" min="0" max="1000" units="s" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="120101011" valueType="F8" logicalName="Prewet.PumpKd" value="" min="0" max="1000" units="s" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="120101012" valueType="F8" logicalName="Prewet.PressureTarget" value="" min="0" max="100" units="s" defaultValue="42" eventTrigger="" />
    <EquipmentConstant id="120101013" valueType="U4" logicalName="Prewet.KeepWetMaxLimit" value="" min="0" max="100" units="" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="120101014" valueType="U4" logicalName="Prewet.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="120101015" valueType="U4" logicalName="Prewet.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="120101016" valueType="U4" logicalName="Prewet.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="120101017" valueType="U4" logicalName="Prewet.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="120101018" valueType="U4" logicalName="Prewet.MaxPumpSpeed" value="" min="0" max="32768" units="" defaultValue="7300" eventTrigger="" />
    <EquipmentConstant id="120101019" valueType="U4" logicalName="Prewet.MinPumpSpeed" value="" min="0" max="32768" units="" defaultValue="300" eventTrigger="" />
    <EquipmentConstant id="120101020" valueType="U4" logicalName="Prewet.IdleKeepwetPauseBetweenScanSeconds" value="" min="0" max="60" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="130101001" valueType="U4" logicalName="QDR.SensorReadingFull" value="" min="0" max="100" units="" defaultValue="65" eventTrigger="" />
    <EquipmentConstant id="130101002" valueType="U4" logicalName="QDR.SensorReadingEmpty" value="" min="0" max="100" units="" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="130101003" valueType="U4" logicalName="QDR.NominalDrainTimeSeconds" value="" min="0" max="1000" units="s" defaultValue="8" eventTrigger="" />
    <EquipmentConstant id="130101004" valueType="F8" logicalName="QDR.FillingStartedDelta" value="" min="0" max="100" units="" defaultValue="35.0" eventTrigger="" />
    <EquipmentConstant id="130101005" valueType="U4" logicalName="QDR.ConcurrentFillTimeSeconds" value="" min="1" max="60" units="s" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="130101006" valueType="F8" logicalName="QDR.ClampCycleTimeSeconds" value="" min="1" max="60" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="130101007" valueType="U4" logicalName="QDR.NumberClampCyclesToComplete" value="" min="1" max="60" units="" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="130101008" valueType="U4" logicalName="QDR.PickupDelayWarningSeconds" value="" min="1" max="500" units="s" defaultValue="120" eventTrigger="" />
    <EquipmentConstant id="130101009" valueType="U4" logicalName="QDR.PickTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="130101010" valueType="U4" logicalName="QDR.PlaceTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="130101011" valueType="U4" logicalName="QDR.PickDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="130101012" valueType="U4" logicalName="QDR.PlaceDelaySeconds" value="" min="0" max="100000" units="s" defaultValue="2" eventTrigger="" />
    <EquipmentConstant id="130101013" valueType="U4" logicalName="QDR.NominalCheckFillWaterTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="130101014" valueType="U4" logicalName="QDR.NominalCheckFillFullTimeSeconds" value="" min="0" max="100000" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="130101015" valueType="Boolean" logicalName="QDR.KeepWaferShuttleWetUntilTransfer" value="" min="" max="" units="s" defaultValue="false" eventTrigger="" />
    <EquipmentConstant id="140101001" valueType="F8" logicalName="Reservoir.CMM.CMMFlowHighFault" value="" min="0" max="20" units="L/min" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="140101002" valueType="F8" logicalName="Reservoir.CMM.CMMFlowHighWarning" value="" min="0" max="20" units="L/min" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="140101003" valueType="F8" logicalName="Reservoir.CMM.CMMFlowLowFault" value="" min="0" max="20" units="L/min" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="140101004" valueType="F8" logicalName="Reservoir.CMM.CMMFlowLowWarning" value="" min="0" max="20" units="L/min" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="140101005" valueType="F8" logicalName="Reservoir.CMM.CMMAnodeLifeTimeAHrs" value="" min="0" max="10000" units="Ah" defaultValue="1000" eventTrigger="" />
    <EquipmentConstant id="140101006" valueType="F8" logicalName="Reservoir.CMM.CMMCathodeLifeTimeAHrs" value="" min="0" max="10000" units="Ah" defaultValue="1000" eventTrigger="" />
    <EquipmentConstant id="140101007" valueType="U4" logicalName="Reservoir.CMM.CMMFlowCheckDelaySeconds" value="" min="0" max="30" units="s" defaultValue="6" eventTrigger="" />
    <EquipmentConstant id="140101008" valueType="F8" logicalName="Reservoir.Reservoir1.DIValveMaxOnTime" value="" min="0" max="50" units="minute" defaultValue="16" eventTrigger="" />
    <EquipmentConstant id="140101009" valueType="F8" logicalName="Reservoir.Reservoir1.DIValveMaxOnTimePerFill" value="" min="0" max="50" units="minute" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="140101010" valueType="F8" logicalName="Reservoir.Reservoir1.DIValveMaxOnTimePeriod" value="" min="0" max="48" units="hour" defaultValue="24" eventTrigger="" />
    <EquipmentConstant id="140101011" valueType="F8" logicalName="Reservoir.Reservoir1.CAHighLevel" value="" min="0" max="100" units="" defaultValue="95" eventTrigger="" />
    <EquipmentConstant id="140101012" valueType="Ascii" logicalName="Reservoir.Reservoir1.CALevelCurve" value="" min="" max="" units="" defaultValue="0,0,1.5022,94.782" eventTrigger="" />
    <EquipmentConstant id="140101013" valueType="Ascii" logicalName="Reservoir.Reservoir1.ANLevelCurve" value="" min="" max="" units="" defaultValue="0,0,0.4,2.6" eventTrigger="" />
    <EquipmentConstant id="140101014" valueType="F8" logicalName="Reservoir.Reservoir1.ANHighLevel" value="" min="0" max="100" units="" defaultValue="95" eventTrigger="" />
    <EquipmentConstant id="140101015" valueType="F8" logicalName="Reservoir.Reservoir1.ANLowLevel" value="" min="0" max="100" units="" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="140101016" valueType="F8" logicalName="Reservoir.Reservoir1.CALowLevel" value="" min="0" max="100" units="" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="140101017" valueType="F8" logicalName="Reservoir.Reservoir1.CAMainFlowFaultLow" value="" min="0" max="30" units="" defaultValue="5.0" eventTrigger="" />
    <EquipmentConstant id="140101018" valueType="U4" logicalName="Reservoir.Reservoir1.FlowFaultHoldOffTime" value="" min="0" max="50000" units="ms" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="140101019" valueType="F8" logicalName="Reservoir.Reservoir1.HEDFlowLowLimit" value="" min="0" max="30" units="" defaultValue="3.0" eventTrigger="" />
    <EquipmentConstant id="140101020" valueType="F8" logicalName="Reservoir.Reservoir1.ANFastLeakLevelTolerance" value="" min="0" max="30" units="" defaultValue="1.0" eventTrigger="" />
    <EquipmentConstant id="140101021" valueType="U4" logicalName="Reservoir.Reservoir1.ANLeakOperatingUpdateTime" value="" min="0" max="30" units="min" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101022" valueType="F8" logicalName="Reservoir.Reservoir1.MaxLeakVolume" value="" min="0" max="5" units="" defaultValue="1.0" eventTrigger="" />
    <EquipmentConstant id="140101023" valueType="F8" logicalName="Reservoir.Reservoir1.MaxFlowDelta" value="" min="0" max="5" units="" defaultValue="0.3" eventTrigger="" />
    <EquipmentConstant id="140101024" valueType="F8" logicalName="Reservoir.Reservoir1.ByPassMetalTotalFlowMinLimit" value="" min="0" max="5" units="" defaultValue="0.2" eventTrigger="" />
    <EquipmentConstant id="140101025" valueType="U4" logicalName="Reservoir.Reservoir1.CleraLeakVolumeTime" value="" min="0" max="30" units="min" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101026" valueType="U4" logicalName="Reservoir.Reservoir1.ANBypassMinCellCount" value="" min="1" max="5" units="" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="140101027" valueType="U4" logicalName="Reservoir.Reservoir1.CAMaxTankVolume" value="" min="1" max="200" units="L" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101028" valueType="U4" logicalName="Reservoir.Reservoir1.DIValveMaxAccumulation" value="" min="1" max="10000" units="mL" defaultValue="1000" eventTrigger="" />
    <EquipmentConstant id="140101029" valueType="F8" logicalName="Reservoir.Reservoir2.DIValveMaxOnTime" value="" min="0" max="50" units="minute" defaultValue="16" eventTrigger="" />
    <EquipmentConstant id="140101030" valueType="F8" logicalName="Reservoir.Reservoir2.DIValveMaxOnTimePerFill" value="" min="0" max="50" units="minute" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="140101031" valueType="F8" logicalName="Reservoir.Reservoir2.DIValveMaxOnTimePeriod" value="" min="0" max="48" units="hour" defaultValue="24" eventTrigger="" />
    <EquipmentConstant id="140101032" valueType="F8" logicalName="Reservoir.Reservoir2.DIReplenMaxAccumulation" value="" min="0" max="20000" units="mL" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="140101033" valueType="F8" logicalName="Reservoir.Reservoir2.HighLevel" value="" min="0" max="100" units="" defaultValue="95" eventTrigger="" />
    <EquipmentConstant id="140101034" valueType="Ascii" logicalName="Reservoir.Reservoir2.LevelCurve" value="" min="" max="" units="" defaultValue="0,0,1.5022,94.782" eventTrigger="" />
    <EquipmentConstant id="140101035" valueType="F8" logicalName="Reservoir.Reservoir2.MaxTankVolume" value="" min="0" max="300" units="" defaultValue="260" eventTrigger="" />
    <EquipmentConstant id="140101036" valueType="F8" logicalName="Reservoir.Reservoir2.HEDFlowLowLimit" value="" min="0" max="30" units="" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101037" valueType="F8" logicalName="Reservoir.Reservoir2.InitialDosingSpeed" value="" min="0" max="0.672" units="mL/min" defaultValue="0.56" eventTrigger="" />
    <EquipmentConstant id="140101038" valueType="F8" logicalName="Reservoir.Reservoir2.MinDoseAmount" value="" min="0" max="200" units="mL" defaultValue="0.14" eventTrigger="" />
    <EquipmentConstant id="140101039" valueType="F8" logicalName="Reservoir.Reservoir2.BottleReserveVolume1" value="" min="0" max="5000" units="mL" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="140101040" valueType="F8" logicalName="Reservoir.Reservoir2.BottleReserveVolume2" value="" min="0" max="5000" units="mL" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="140101041" valueType="F8" logicalName="Reservoir.Reservoir2.DosingOutTime" value="" min="1" max="600" units="s" defaultValue="60" eventTrigger="" />
    <EquipmentConstant id="140101042" valueType="F8" logicalName="Reservoir.Reservoir3.DIValveMaxOnTime" value="" min="0" max="50" units="minute" defaultValue="16" eventTrigger="" />
    <EquipmentConstant id="140101043" valueType="F8" logicalName="Reservoir.Reservoir3.DIValveMaxOnTimePerFill" value="" min="0" max="50" units="minute" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="140101044" valueType="F8" logicalName="Reservoir.Reservoir3.DIValveMaxOnTimePeriod" value="" min="0" max="48" units="hour" defaultValue="24" eventTrigger="" />
    <EquipmentConstant id="140101045" valueType="F8" logicalName="Reservoir.Reservoir3.CAHighLevel" value="" min="0" max="100" units="" defaultValue="95" eventTrigger="" />
    <EquipmentConstant id="140101046" valueType="Ascii" logicalName="Reservoir.Reservoir3.CALevelCurve" value="" min="" max="" units="" defaultValue="0,0,1.5022,94.782" eventTrigger="" />
    <EquipmentConstant id="140101047" valueType="Ascii" logicalName="Reservoir.Reservoir3.ANLevelCurve" value="" min="" max="" units="" defaultValue="0,0,0.4,2.6" eventTrigger="" />
    <EquipmentConstant id="140101048" valueType="F8" logicalName="Reservoir.Reservoir3.ANHighLevel" value="" min="0" max="100" units="" defaultValue="95" eventTrigger="" />
    <EquipmentConstant id="140101049" valueType="F8" logicalName="Reservoir.Reservoir3.ANLowLevel" value="" min="0" max="100" units="" defaultValue="5" eventTrigger="" />
    <EquipmentConstant id="140101050" valueType="F8" logicalName="Reservoir.Reservoir3.CALowLevel" value="" min="0" max="100" units="" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="140101051" valueType="F8" logicalName="Reservoir.Reservoir3.CAMainFlowFaultLow" value="" min="0" max="30" units="" defaultValue="5.0" eventTrigger="" />
    <EquipmentConstant id="140101052" valueType="U4" logicalName="Reservoir.Reservoir3.FlowFaultHoldOffTime" value="" min="0" max="50000" units="ms" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="140101053" valueType="F8" logicalName="Reservoir.Reservoir3.HEDFlowLowLimit" value="" min="0" max="30" units="" defaultValue="3.0" eventTrigger="" />
    <EquipmentConstant id="140101054" valueType="F8" logicalName="Reservoir.Reservoir3.ANFastLeakLevelTolerance" value="" min="0" max="30" units="" defaultValue="1.0" eventTrigger="" />
    <EquipmentConstant id="140101055" valueType="U4" logicalName="Reservoir.Reservoir3.ANLeakOperatingUpdateTime" value="" min="0" max="5" units="min" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="140101056" valueType="F8" logicalName="Reservoir.Reservoir3.MaxLeakVolume" value="" min="0" max="5" units="" defaultValue="1.0" eventTrigger="" />
    <EquipmentConstant id="140101057" valueType="U4" logicalName="Reservoir.Reservoir3.CleraLeakVolumeTime" value="" min="0" max="30" units="min" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101058" valueType="U4" logicalName="Reservoir.Reservoir3.ANBypassMinCellCount" value="" min="1" max="5" units="" defaultValue="1" eventTrigger="" />
    <EquipmentConstant id="140101059" valueType="F8" logicalName="Reservoir.Reservoir3.MaxFlowDelta" value="" min="0" max="5" units="" defaultValue="0.3" eventTrigger="" />
    <EquipmentConstant id="140101060" valueType="F8" logicalName="Reservoir.Reservoir3.ByPassMetalTotalFlowMinLimit" value="" min="0" max="5" units="" defaultValue="0.2" eventTrigger="" />
    <EquipmentConstant id="140101061" valueType="U4" logicalName="Reservoir.Reservoir3.ANTransferPumpAcceleration" value="" min="0" max="5000" units="ms" defaultValue="2000" eventTrigger="" />
    <EquipmentConstant id="140101062" valueType="U4" logicalName="Reservoir.Reservoir3.ANTransferPumpDeceleration" value="" min="0" max="5000" units="ms" defaultValue="2000" eventTrigger="" />
    <EquipmentConstant id="140101063" valueType="U4" logicalName="Reservoir.Reservoir3.ANTransferPumpSpeed" value="" min="100" max="5000" units="count" defaultValue="5000" eventTrigger="" />
    <EquipmentConstant id="140101064" valueType="F8" logicalName="Reservoir.Reservoir3.FlowRateMin" value="" min="0" max="50" units="mL/min" defaultValue="0" eventTrigger="" />
    <EquipmentConstant id="140101065" valueType="U4" logicalName="Reservoir.Reservoir3.StartUpHoldOffTime" value="" min="0" max="50000" units="ms" defaultValue="10000" eventTrigger="" />
    <EquipmentConstant id="140101066" valueType="U4" logicalName="Reservoir.Reservoir3.CAMaxTankVolume" value="" min="1" max="200" units="L" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101067" valueType="U4" logicalName="Reservoir.Reservoir3.DIValveMaxAccumulation" value="" min="1" max="10000" units="mL" defaultValue="1000" eventTrigger="" />
    <EquipmentConstant id="140101068" valueType="F8" logicalName="Reservoir.LevelHysteresis" value="" min="0" max="2" units="" defaultValue="0.5" eventTrigger="" />
    <EquipmentConstant id="140101069" valueType="F8" logicalName="Reservoir.PHUpdatePeriod" value="" min="0" max="500" units="s" defaultValue="300" eventTrigger="" />
    <EquipmentConstant id="140101070" valueType="F8" logicalName="Reservoir.PHFlowTime" value="" min="0" max="20" units="s" defaultValue="10" eventTrigger="" />
    <EquipmentConstant id="140101071" valueType="F8" logicalName="Reservoir.PHStabilizationTime" value="" min="0" max="500" units="s" defaultValue="240" eventTrigger="" />
    <EquipmentConstant id="140101072" valueType="F8" logicalName="Reservoir.PHSampleTime" value="" min="0" max="10" units="s" defaultValue="2.5" eventTrigger="" />
    <EquipmentConstant id="140101073" valueType="U4" logicalName="Reservoir.PHSamples" value="" min="0" max="50" units="" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="140101074" valueType="U4" logicalName="Reservoir.LevelAvgSamples" value="" min="0" max="100" units="" defaultValue="20" eventTrigger="" />
    <EquipmentConstant id="140101075" valueType="F8" logicalName="Reservoir.CADefaultPumpSpeed" value="" min="0" max="7200" units="" defaultValue="5000" eventTrigger="" />
    <EquipmentConstant id="140101076" valueType="F8" logicalName="Reservoir.CAMaxPumpSpeed" value="" min="1" max="10000" units="rpm" defaultValue="7200" eventTrigger="" />
    <EquipmentConstant id="140101077" valueType="F8" logicalName="Reservoir.ANDefaultPumpSpeed" value="" min="0" max="5" units="" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101078" valueType="F8" logicalName="Reservoir.DrainSpeed" value="" min="0" max="5" units="" defaultValue="3" eventTrigger="" />
    <EquipmentConstant id="140101079" valueType="U4" logicalName="Reservoir.CellFlowUpdatePeriod" value="" min="0" max="60" units="s" defaultValue="30" eventTrigger="" />
    <EquipmentConstant id="140101080" valueType="F8" logicalName="Reservoir.ReservoirTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101081" valueType="F8" logicalName="Reservoir.ReservoirTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101082" valueType="F8" logicalName="Reservoir.BathTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101083" valueType="F8" logicalName="Reservoir.BathTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101084" valueType="F8" logicalName="Reservoir.ANBathTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101085" valueType="F8" logicalName="Reservoir.ANBathTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101086" valueType="U4" logicalName="Reservoir.BathTotalDaysWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101087" valueType="U4" logicalName="Reservoir.BathTotalDaysFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101088" valueType="F8" logicalName="Reservoir.MembraneTotalAmpHoursWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101089" valueType="F8" logicalName="Reservoir.MembraneTotalAmpHoursFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
    <EquipmentConstant id="140101090" valueType="U4" logicalName="Reservoir.ReservoirTotalWafersWarningLimit" value="" min="0" max="100000" units="" defaultValue="50" eventTrigger="" />
    <EquipmentConstant id="140101091" valueType="U4" logicalName="Reservoir.ReservoirTotalWafersFaultLimit" value="" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
  </EquipmentConstants>
  <DataVariables>
    <DataVariable id="3007" valueType="I4" logicalName="ECChangedID" eventTrigger="" />
    <DataVariable id="3102" valueType="Ascii" logicalName="LotID" eventTrigger="" />
    <DataVariable id="3103" valueType="Ascii" logicalName="RecipeID" eventTrigger="" />
    <DataVariable id="3104" valueType="Ascii" logicalName="JobID" eventTrigger="" />
    <DataVariable id="3105" valueType="Ascii" logicalName="CarrierID" eventTrigger="" />
    <DataVariable id="3106" valueType="Ascii" logicalName="SlotMap" eventTrigger="" />
    <DataVariable id="3107" valueType="Ascii" logicalName="SequenceID" eventTrigger="" />
    <DataVariable id="3108" valueType="Ascii" logicalName="StationName" eventTrigger="" />
    <DataVariable id="3109" valueType="Ascii" logicalName="RecipeStepNumber" eventTrigger="" />
    <DataVariable id="3110" valueType="Ascii" logicalName="SlotID" eventTrigger="" />
    <DataVariable id="3113" valueType="I4" logicalName="PortID" eventTrigger="" />
    <DataVariable id="3124" valueType="I4" logicalName="ProcessedWaferCount" eventTrigger="" />
    <DataVariable id="3125" valueType="I4" logicalName="WaferProcessResult" eventTrigger="" />
    <DataVariable id="3126" valueType="Ascii" logicalName="Reason" eventTrigger="" />
    <DataVariable id="3404" valueType="Ascii" logicalName="SubstID" eventTrigger="" />
    <DataVariable id="3405" valueType="Ascii" logicalName="SubstLocID" eventTrigger="" />
    <DataVariable id="3406" valueType="I4" logicalName="SubstLocState" eventTrigger="" />
    <DataVariable id="3503" valueType="Ascii" logicalName="SmartTag" eventTrigger="" />
    <DataVariable id="4000" valueType="Ascii" logicalName="WaferShuttleId" eventTrigger="" />
    <DataVariable id="4001" valueType="Ascii" logicalName="WaferShuttleWaferAId" eventTrigger="" />
    <DataVariable id="4002" valueType="Ascii" logicalName="WaferShuttleWaferBId" eventTrigger="" />
    <DataVariable id="4003" valueType="Ascii" logicalName="WaferShuttleLsAId" eventTrigger="" />
    <DataVariable id="4004" valueType="Ascii" logicalName="WaferShuttleLsBId" eventTrigger="" />
    <DataVariable id="4005" valueType="Ascii" logicalName="ProcessTimeLength" eventTrigger="" />
  </DataVariables>
  <AlarmVariables>
    <AlarmVariable id="10101001" logicalName="EFEM.ERROR_EFEM_COMMUNICATION" description="EFEM Communication error." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101002" logicalName="EFEM.ERROR_EFEM_NOREADY" description="EFEM Communication no ready." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101003" logicalName="EFEM.ERROR_EFEM_SORC_NOWAF" description="Robot does not has wafer,cannot execute place." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101004" logicalName="EFEM.ERROR_EFEM_DEST_NOWAF" description="dest does not has wafer,cannot execute pick." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101005" logicalName="EFEM.ERROR_EFEM_SORC_WAFER" description="Robot has wafer,cannot execute pick." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101006" logicalName="EFEM.ERROR_EFEM_DEST_WAFER" description="dest does not has wafer,cannot execute place." alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101007" logicalName="EFEM.ERROR_EFEM_VAC" description="EFEM Vacuum error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101008" logicalName="EFEM.ERROR_EFEM_AIR" description="EFEM Air error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101001" logicalName="PUF1.Flip.ERROR_PUF_NOT_SWITCHON" description="Flip Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101002" logicalName="PUF1.Flip.ERROR_PUF_NOT_HOME" description="Flip Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101003" logicalName="PUF1.Flip.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101004" logicalName="PUF1.Flip.ERROR_PUF_HAS_WAFER" description="flip axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101005" logicalName="PUF1.Flip.ERROR_PUF_OTHER_AXIS_EMPTY" description="other axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20101006" logicalName="PUF1.Flip.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102001" logicalName="PUF1.Rotation.ERROR_PUF_NOT_SWITCHON" description="Rotation Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102002" logicalName="PUF1.Rotation.ERROR_PUF_NOT_HOME" description="Rotation Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102003" logicalName="PUF1.Rotation.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102004" logicalName="PUF1.Rotation.ERROR_PUF_HAS_WAFER" description="Rotation axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102005" logicalName="PUF1.Rotation.ERROR_PUF_OTHER_AXIS_EMPTY" description="other axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20102006" logicalName="PUF1.Rotation.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103001" logicalName="PUF1.Vertical.ERROR_PUF_NOT_SWITCHON" description="Vertical Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103002" logicalName="PUF1.Vertical.ERROR_PUF_NOT_HOME" description="Vertical Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103003" logicalName="PUF1.Vertical.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103004" logicalName="PUF1.Vertical.ERROR_PUF_HAS_WAFER" description="Vertical axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103005" logicalName="PUF1.Vertical.ERROR_PUF_OTHER_AXIS_EMPTY" description="axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20103006" logicalName="PUF1.Vertical.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201001" logicalName="PUF2.Flip.ERROR_PUF_NOT_SWITCHON" description="Flip Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201002" logicalName="PUF2.Flip.ERROR_PUF_NOT_HOME" description="Flip Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201003" logicalName="PUF2.Flip.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201004" logicalName="PUF2.Flip.ERROR_PUF_HAS_WAFER" description="flip axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201005" logicalName="PUF2.Flip.ERROR_PUF_OTHER_AXIS_EMPTY" description="axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20201006" logicalName="PUF2.Flip.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202001" logicalName="PUF2.Rotation.ERROR_PUF_NOT_SWITCHON" description="Rotation Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202002" logicalName="PUF2.Rotation.ERROR_PUF_NOT_HOME" description="Rotation Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202003" logicalName="PUF2.Rotation.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202004" logicalName="PUF2.Rotation.ERROR_PUF_HAS_WAFER" description="Rotation axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202005" logicalName="PUF2.Rotation.ERROR_PUF_OTHER_AXIS_EMPTY" description="other axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20202006" logicalName="PUF2.Rotation.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203001" logicalName="PUF2.Vertical.ERROR_PUF_NOT_SWITCHON" description="Vertical Axis is not switch on" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203002" logicalName="PUF2.Vertical.ERROR_PUF_NOT_HOME" description="Vertical Axis is not home" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203003" logicalName="PUF2.Vertical.ERROR_PUF_OTHERAXIS_RUNNING" description="Other axis is running" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203004" logicalName="PUF2.Vertical.ERROR_PUF_HAS_WAFER" description="Vertical axis has wafer" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203005" logicalName="PUF2.Vertical.ERROR_PUF_OTHER_AXIS_EMPTY" description="axis current station is empty" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="20203006" logicalName="PUF2.Vertical.ERROR_PUF_OTHER_AXIS_STATION" description="other axis current station is error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
  </AlarmVariables>
  <Reports>
    <Report id="1" logicalName="HostDefinedReport_1">
      <Variables>
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="4" variableType="StatusVariable" logicalName="ControlState" />
      </Variables>
    </Report>
    <Report id="10" logicalName="HostDefinedReport_10">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="11" logicalName="HostDefinedReport_11">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="12" logicalName="HostDefinedReport_12">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="13" logicalName="HostDefinedReport_13">
      <Variables>
        <ReportVariable id="3106" variableType="DataVariable" logicalName="SlotMap" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="14" logicalName="HostDefinedReport_14">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="15" logicalName="HostDefinedReport_15">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="16" logicalName="HostDefinedReport_16">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="17" logicalName="HostDefinedReport_17">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="18" logicalName="HostDefinedReport_18">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="19" logicalName="HostDefinedReport_19">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="2" logicalName="HostDefinedReport_2">
      <Variables>
        <ReportVariable id="3007" variableType="DataVariable" logicalName="ECChangedID" />
      </Variables>
    </Report>
    <Report id="20" logicalName="HostDefinedReport_20">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="21" logicalName="HostDefinedReport_21">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3124" variableType="DataVariable" logicalName="ProcessedWaferCount" />
      </Variables>
    </Report>
    <Report id="22" logicalName="HostDefinedReport_22">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="23" logicalName="HostDefinedReport_23">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
      </Variables>
    </Report>
    <Report id="24" logicalName="HostDefinedReport_24">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3126" variableType="DataVariable" logicalName="Reason" />
      </Variables>
    </Report>
    <Report id="25" logicalName="HostDefinedReport_25">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="26" logicalName="HostDefinedReport_26">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3125" variableType="DataVariable" logicalName="WaferProcessResult" />
      </Variables>
    </Report>
    <Report id="27" logicalName="HostDefinedReport_27">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="4000" variableType="DataVariable" logicalName="WaferShuttleId" />
        <ReportVariable id="4001" variableType="DataVariable" logicalName="WaferShuttleWaferAId" />
        <ReportVariable id="4002" variableType="DataVariable" logicalName="WaferShuttleWaferBId" />
        <ReportVariable id="4003" variableType="DataVariable" logicalName="WaferShuttleLsAId" />
        <ReportVariable id="4004" variableType="DataVariable" logicalName="WaferShuttleLsBId" />
      </Variables>
    </Report>
    <Report id="28" logicalName="HostDefinedReport_28">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="4000" variableType="DataVariable" logicalName="WaferShuttleId" />
        <ReportVariable id="4001" variableType="DataVariable" logicalName="WaferShuttleWaferAId" />
        <ReportVariable id="4002" variableType="DataVariable" logicalName="WaferShuttleWaferBId" />
        <ReportVariable id="4003" variableType="DataVariable" logicalName="WaferShuttleLsAId" />
        <ReportVariable id="4004" variableType="DataVariable" logicalName="WaferShuttleLsBId" />
      </Variables>
    </Report>
    <Report id="29" logicalName="HostDefinedReport_29">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="4000" variableType="DataVariable" logicalName="WaferShuttleId" />
        <ReportVariable id="4001" variableType="DataVariable" logicalName="WaferShuttleWaferAId" />
        <ReportVariable id="4002" variableType="DataVariable" logicalName="WaferShuttleWaferBId" />
        <ReportVariable id="4003" variableType="DataVariable" logicalName="WaferShuttleLsAId" />
        <ReportVariable id="4004" variableType="DataVariable" logicalName="WaferShuttleLsBId" />
      </Variables>
    </Report>
    <Report id="3" logicalName="HostDefinedReport_3">
      <Variables>
        <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
        <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
        <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="30" logicalName="HostDefinedReport_30">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="4000" variableType="DataVariable" logicalName="WaferShuttleId" />
        <ReportVariable id="4001" variableType="DataVariable" logicalName="WaferShuttleWaferAId" />
        <ReportVariable id="4002" variableType="DataVariable" logicalName="WaferShuttleWaferBId" />
        <ReportVariable id="4003" variableType="DataVariable" logicalName="WaferShuttleLsAId" />
        <ReportVariable id="4004" variableType="DataVariable" logicalName="WaferShuttleLsBId" />
        <ReportVariable id="4005" variableType="DataVariable" logicalName="ProcessTimeLength" />
      </Variables>
    </Report>
    <Report id="31" logicalName="HostDefinedReport_31">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="4000" variableType="DataVariable" logicalName="WaferShuttleId" />
        <ReportVariable id="4001" variableType="DataVariable" logicalName="WaferShuttleWaferAId" />
        <ReportVariable id="4002" variableType="DataVariable" logicalName="WaferShuttleWaferBId" />
        <ReportVariable id="4003" variableType="DataVariable" logicalName="WaferShuttleLsAId" />
        <ReportVariable id="4004" variableType="DataVariable" logicalName="WaferShuttleLsBId" />
      </Variables>
    </Report>
    <Report id="32" logicalName="HostDefinedReport_32">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="33" logicalName="HostDefinedReport_33">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="34" logicalName="HostDefinedReport_34">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="4" logicalName="HostDefinedReport_4">
      <Variables>
        <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
        <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
        <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="5" logicalName="HostDefinedReport_5">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="6" logicalName="HostDefinedReport_6">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="7" logicalName="HostDefinedReport_7">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3503" variableType="DataVariable" logicalName="SmartTag" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="8" logicalName="HostDefinedReport_8">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="9" logicalName="HostDefinedReport_9">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
  </Reports>
  <CollectionEvents>
    <CollectionEvent id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="160" logicalName="SpoolingActivated" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="161" logicalName="SpoolingDeactivated" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="162" logicalName="SpoolingFailed" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
      <Reports>
        <int>3</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
      <Reports>
        <int>4</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
      <Reports>
        <int>5</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
      <Reports>
        <int>6</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
      <Reports>
        <int>7</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
      <Reports>
        <int>8</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
      <Reports>
        <int>9</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
      <Reports>
        <int>10</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
      <Reports>
        <int>11</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
      <Reports>
        <int>12</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
      <Reports>
        <int>13</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1012" logicalName="PortClamped" description="" enabled="true">
      <Reports>
        <int>14</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1013" logicalName="PortUnClamped" description="" enabled="true">
      <Reports>
        <int>15</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1022" logicalName="PortJobStarted" description="" enabled="true">
      <Reports>
        <int>16</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1023" logicalName="PortJobStopped" description="" enabled="true">
      <Reports>
        <int>17</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1024" logicalName="PortJobPaused" description="" enabled="true">
      <Reports>
        <int>18</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1025" logicalName="PortJobResumed" description="" enabled="true">
      <Reports>
        <int>19</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1026" logicalName="PortJobAborted" description="" enabled="true">
      <Reports>
        <int>20</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1027" logicalName="PortJobFinished" description="" enabled="true">
      <Reports>
        <int>21</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1028" logicalName="PortJobFailed" description="" enabled="true">
      <Reports>
        <int>22</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1030" logicalName="PortPPSelected" description="" enabled="true">
      <Reports>
        <int>23</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1031" logicalName="PortPPSelectFailed" description="" enabled="true">
      <Reports>
        <int>24</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1032" logicalName="PortJobWaferStart" description="" enabled="true">
      <Reports>
        <int>25</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1033" logicalName="PortJobWaferEnd" description="" enabled="true">
      <Reports>
        <int>26</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1034" logicalName="WaferShuttleJobStart" description="" enabled="true">
      <Reports>
        <int>27</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1035" logicalName="WaferShuttleJobEnd" description="" enabled="true">
      <Reports>
        <int>28</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1036" logicalName="WaferShuttleRecipeStart" description="" enabled="true">
      <Reports>
        <int>29</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1037" logicalName="WaferShuttleRecipeEnd" description="" enabled="true">
      <Reports>
        <int>30</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1038" logicalName="WaferShuttleRecipeFailed" description="" enabled="true">
      <Reports>
        <int>31</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1039" logicalName="SRDRecipeStart" description="" enabled="true">
      <Reports>
        <int>32</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1037" logicalName="SRDRecipeEnd" description="" enabled="true">
      <Reports>
        <int>33</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1036" logicalName="SRDRecipeFailed" description="" enabled="true">
      <Reports>
        <int>34</int>
      </Reports>
    </CollectionEvent>
  </CollectionEvents>
</EquipmentVariables>