RtState.cs 5.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace CyberX8_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. AutoAborting,
  19. ReturningCassette,
  20. Cycle,
  21. PrepareCycle,
  22. PostCycle,
  23. SetSpeed,
  24. Error,
  25. Reset,
  26. Processing,
  27. PostProcess,
  28. PauseProcess,
  29. //Maintenance,
  30. //WaferMapping,
  31. //Cycling,
  32. TMCycle,
  33. SETMCycle,
  34. SERunning,
  35. ReturnWafer,
  36. SETransfer,
  37. SEReturnWafer
  38. }
  39. public enum EFEMSTATE
  40. {
  41. Unknown, // 0
  42. Homing, // 1
  43. Idle, // 2
  44. Error, // 3
  45. Picking, // 4
  46. Placing, // 5
  47. Aligning, // 6
  48. Mapping, // 7
  49. Init, // 8
  50. Orgshing, // 9
  51. Lifting, // 10
  52. InitingAL, // 11
  53. InitingRB, // 12
  54. Extending, // 13
  55. Retracting, // 14
  56. //SettingLamp, // 15
  57. Swapping,
  58. Gotoing,
  59. Gripping,
  60. Ungripping,
  61. Fliping,
  62. Initializing,
  63. Vacuuming,
  64. Retrying,
  65. ConfirmCompleting,
  66. ErrorPicking,
  67. ErrorPlacing
  68. }
  69. public enum PUFSTATE
  70. {
  71. Unknown, // 0
  72. Homing, // 1
  73. Idle, // 2
  74. Error,
  75. Init,
  76. SwitchOning,
  77. SwitchOffing,
  78. Calibrating,
  79. Picking,
  80. Placing,
  81. Positioning,
  82. GotoRobotPositionForPlace,
  83. GotoRobotPositionForPick,
  84. WaitForRobotPlacing,
  85. WaitForRobotPlace,
  86. WaitForSwaping,
  87. WaitForSwap,
  88. Swaping,
  89. AferSwapParkStation,
  90. WaitForRobotPicking,
  91. WaitForRobotPick,
  92. BackToPackStationing,
  93. Retrying,
  94. ConfirmCompleting,
  95. Fliping
  96. }
  97. public enum LOADERSTATE
  98. {
  99. Unknown, // 0
  100. Homing, // 1
  101. Idle, // 2
  102. Error,
  103. Init,
  104. Positioning,
  105. SwitchOning,
  106. SwitchOffing,
  107. Loading,
  108. Unloading,
  109. InstallCRSing,
  110. PrepreForPlacing,
  111. WaitForUnload,
  112. WaitForLoad,
  113. WaitForPick,
  114. Retrying,
  115. ConfirmCompleting
  116. }
  117. public enum TransporterState
  118. {
  119. Unknown,
  120. Init,
  121. Initialized,
  122. Homing,
  123. Idle,
  124. Error,
  125. ErrorGantryPositioning,
  126. GantryPositioning,
  127. Positioning,
  128. SwitchOning,
  129. SwitchOffing,
  130. PickUping,
  131. MovingTo,
  132. Placing,
  133. Parking,
  134. ElevatorUping,
  135. ElevatorLowing,
  136. Transfering,
  137. PickUpMoveToing,
  138. PickUpMoveToComplete,
  139. PickUpValidating,
  140. PickUpValidateComplete,
  141. ValidateMoveTo,
  142. ValidateMoveToComplete,
  143. GantrySafeMoving,
  144. Retrying,
  145. ConfirmCompleting
  146. }
  147. public enum SRDState
  148. {
  149. Unknown,
  150. Init,
  151. Initialized,
  152. Initializing,
  153. InitializeHoming,
  154. Homing,
  155. Idle,
  156. Error,
  157. SwitchOning,
  158. SwitchOffing,
  159. Positioning,
  160. Aborting,
  161. Abort,
  162. Rotating,
  163. Stopping,
  164. PresenceTesting,
  165. ProcessReciping,
  166. ProcessError,
  167. AWCCycling,
  168. AWCHoming,
  169. Retrying,
  170. ConfirmCompleting
  171. }
  172. public enum PrewetState
  173. {
  174. Unknown,
  175. Error,
  176. Abort,
  177. Init,
  178. Initialized,
  179. Idle,
  180. Initializing,
  181. PrepareToTransfering,
  182. ReadyForPick,
  183. KeepWeting,
  184. Linmot_Scanning,
  185. ManualProcessing,
  186. CycleManualProcessing,
  187. RunReciping,
  188. Aborting,
  189. PreparingToPick,
  190. PreparingToPlace,
  191. WaitForPick,
  192. WaitForPlace,
  193. RunRecipeComplete,
  194. DelayKeepweting,
  195. DelayKeepwetComplete
  196. }
  197. public enum DryerState
  198. {
  199. Unknown,
  200. Disable,
  201. Abort,
  202. Error,
  203. Init,
  204. Initialized,
  205. Idle,
  206. Initializing,
  207. RunReciping,
  208. CycleManualProcessing,
  209. Retrying
  210. }
  211. public enum RinseState
  212. {
  213. Unknown,
  214. Disable,
  215. Error,
  216. Init,
  217. Initialized,
  218. Idle,
  219. Initializing,
  220. CycleManualProcessing,
  221. RunReciping,
  222. RunRecipeComplete,
  223. KeepWeting,
  224. KeepWetComplete,
  225. Retrying,
  226. Aborting,
  227. Abort,
  228. }
  229. public enum MetalState
  230. {
  231. Unknown,
  232. Disable,
  233. Error,
  234. Init,
  235. Initialized,
  236. Idle,
  237. Initializing,
  238. ShortTesting,
  239. RunReciping,
  240. CurrentShortTesting,
  241. WaitCloseFlow,
  242. WaitOpenFlow,
  243. WaitForRunRecipe,
  244. Abort
  245. }
  246. public enum DummyState
  247. {
  248. Unknown,
  249. Disable,
  250. Error,
  251. Init,
  252. Initializing,
  253. Initialized,
  254. Idle
  255. }
  256. public enum ReservoirState
  257. {
  258. Unknown,
  259. Disable,
  260. Error,
  261. Init,
  262. Initializing,
  263. Initialized,
  264. Idle,
  265. }
  266. }