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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_Core
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Manual,
- Transfer,
- AutoIdle,
- AutoRunning,
- AutoRunningPaused,
- AutoAborting,
- ReturningCassette,
- Cycle,
- PrepareCycle,
- PostCycle,
- SetSpeed,
- Error,
- Reset,
- Processing,
- PostProcess,
- PauseProcess,
- //Maintenance,
- //WaferMapping,
- //Cycling,
- TMCycle,
- SETMCycle,
- SERunning,
- ReturnWafer,
- SETransfer,
- SEReturnWafer
- }
- public enum EFEMSTATE
- {
- Unknown, // 0
- Homing, // 1
- Idle, // 2
- Error, // 3
- Picking, // 4
- Placing, // 5
- Aligning, // 6
- Mapping, // 7
- Init, // 8
- Orgshing, // 9
- Lifting, // 10
- InitingAL, // 11
- InitingRB, // 12
- Extending, // 13
- Retracting, // 14
- //SettingLamp, // 15
- Swapping,
- Gotoing,
- Gripping,
- Ungripping,
- Fliping,
- Initializing,
- Vacuuming,
- Retrying,
- ConfirmCompleting,
- ErrorPicking,
- ErrorPlacing
- }
- public enum PUFSTATE
- {
- Unknown, // 0
- Homing, // 1
- Idle, // 2
- Error,
- Init,
- SwitchOning,
- SwitchOffing,
- Calibrating,
- Picking,
- Placing,
- Positioning,
- GotoRobotPositionForPlace,
- GotoRobotPositionForPick,
- WaitForRobotPlacing,
- WaitForRobotPlace,
- WaitForSwaping,
- WaitForSwap,
- Swaping,
- AferSwapParkStation,
- WaitForRobotPicking,
- WaitForRobotPick,
- BackToPackStationing,
- Retrying,
- ConfirmCompleting,
- Fliping
- }
- public enum LOADERSTATE
- {
- Unknown, // 0
- Homing, // 1
- Idle, // 2
- Error,
- Init,
- Positioning,
- SwitchOning,
- SwitchOffing,
- Loading,
- Unloading,
- InstallCRSing,
- PrepreForPlacing,
- WaitForUnload,
- WaitForLoad,
- WaitForPick,
- Retrying,
- ConfirmCompleting
- }
- public enum TransporterState
- {
- Unknown,
- Init,
- Initialized,
- Homing,
- Idle,
- Error,
- ErrorGantryPositioning,
- GantryPositioning,
- Positioning,
- SwitchOning,
- SwitchOffing,
- PickUping,
- MovingTo,
- Placing,
- Parking,
- ElevatorUping,
- ElevatorLowing,
- Transfering,
- PickUpMoveToing,
- PickUpMoveToComplete,
- PickUpValidating,
- PickUpValidateComplete,
- ValidateMoveTo,
- ValidateMoveToComplete,
- GantrySafeMoving,
- Retrying,
- ConfirmCompleting
- }
- public enum SRDState
- {
- Unknown,
- Init,
- Initialized,
- Initializing,
- InitializeHoming,
- Homing,
- Idle,
- Error,
- SwitchOning,
- SwitchOffing,
- Positioning,
- Aborting,
- Abort,
- Rotating,
- Stopping,
- PresenceTesting,
- ProcessReciping,
- ProcessError,
- AWCCycling,
- AWCHoming,
- Retrying,
- ConfirmCompleting
- }
- public enum PrewetState
- {
- Unknown,
- Error,
- Abort,
- Init,
- Initialized,
- Idle,
- Initializing,
- PrepareToTransfering,
- ReadyForPick,
- KeepWeting,
- Linmot_Scanning,
- ManualProcessing,
- CycleManualProcessing,
- RunReciping,
- Aborting,
- PreparingToPick,
- PreparingToPlace,
- WaitForPick,
- WaitForPlace,
- RunRecipeComplete,
- DelayKeepweting,
- DelayKeepwetComplete
- }
- public enum DryerState
- {
- Unknown,
- Disable,
- Abort,
- Error,
- Init,
- Initialized,
- Idle,
- Initializing,
- RunReciping,
- CycleManualProcessing,
- Retrying
- }
- public enum RinseState
- {
- Unknown,
- Disable,
- Error,
- Init,
- Initialized,
- Idle,
- Initializing,
- CycleManualProcessing,
- RunReciping,
- RunRecipeComplete,
- KeepWeting,
- KeepWetComplete,
- Retrying,
- Aborting,
- Abort,
- }
- public enum MetalState
- {
- Unknown,
- Disable,
- Error,
- Init,
- Initialized,
- Idle,
- Initializing,
- ShortTesting,
- RunReciping,
- CurrentShortTesting,
- WaitCloseFlow,
- WaitOpenFlow,
- WaitForRunRecipe,
- Abort
- }
- public enum DummyState
- {
- Unknown,
- Disable,
- Error,
- Init,
- Initializing,
- Initialized,
- Idle
- }
- public enum ReservoirState
- {
- Unknown,
- Disable,
- Error,
- Init,
- Initializing,
- Initialized,
- Idle,
- }
- }
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