| .. |
|
AXIS
|
e246616627
Revise FwdLimit;
|
8 months ago |
|
BarcodeReader
|
f7533a737b
Initialize
|
10 months ago |
|
Dose
|
31c26804e6
add Festo Communication Protocol
|
10 months ago |
|
Dryer
|
31c26804e6
add Festo Communication Protocol
|
10 months ago |
|
EFEM
|
fc844d450d
update robot aligner vacuum
|
8 months ago |
|
Facilities
|
dce33ff7d5
revise reservoir/metal
|
8 months ago |
|
LinMot
|
f7533a737b
Initialize
|
10 months ago |
|
Loader
|
fc844d450d
update robot aligner vacuum
|
8 months ago |
|
Metal
|
dce33ff7d5
revise reservoir/metal
|
8 months ago |
|
PUF
|
0f6f0fbadc
update efem pick and place wafer size
|
8 months ago |
|
PowerSupplier
|
f7533a737b
Initialize
|
10 months ago |
|
Prewet
|
31c26804e6
add Festo Communication Protocol
|
10 months ago |
|
Reservoir
|
8714d1f457
revise reservoir config
|
8 months ago |
|
Resistivity
|
f7533a737b
Initialize
|
10 months ago |
|
Rinse
|
31c26804e6
add Festo Communication Protocol
|
10 months ago |
|
SRD
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
8 months ago |
|
Safety
|
0f6f0fbadc
update efem pick and place wafer size
|
8 months ago |
|
SignalLight
|
e2d5bb5c5d
update galil controller inputs
|
8 months ago |
|
Temperature
|
dce33ff7d5
revise reservoir/metal
|
8 months ago |
|
TransPorter
|
2192df7ad3
Modify Transporter related routine and UI;
|
8 months ago |
|
DataDefine.cs
|
f7533a737b
Initialize
|
10 months ago |
|
DeviceManager.cs
|
00c6fabca5
update transporter
|
8 months ago |
|
FinsPlc.cs
|
f7533a737b
Initialize
|
10 months ago |
chenkui
fc844d450d
update robot aligner vacuum