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AXIS
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1fba73d760
update axis run judger
|
hace 7 meses |
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BarcodeReader
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f7533a737b
Initialize
|
hace 9 meses |
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Dose
|
31c26804e6
add Festo Communication Protocol
|
hace 8 meses |
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Dryer
|
31c26804e6
add Festo Communication Protocol
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hace 8 meses |
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EFEM
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1fba73d760
update axis run judger
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hace 7 meses |
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Facilities
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dce33ff7d5
revise reservoir/metal
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hace 7 meses |
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LinMot
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f7533a737b
Initialize
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hace 9 meses |
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Loader
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fc844d450d
update robot aligner vacuum
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hace 7 meses |
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Metal
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2b887d9e15
add reservoir regulate pump
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hace 7 meses |
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PUF
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0f6f0fbadc
update efem pick and place wafer size
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hace 7 meses |
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PowerSupplier
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f7533a737b
Initialize
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hace 9 meses |
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Prewet
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31c26804e6
add Festo Communication Protocol
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hace 8 meses |
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Reservoir
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2b887d9e15
add reservoir regulate pump
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hace 7 meses |
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Resistivity
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f7533a737b
Initialize
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hace 9 meses |
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Rinse
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31c26804e6
add Festo Communication Protocol
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hace 8 meses |
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SRD
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ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
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hace 7 meses |
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Safety
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0f6f0fbadc
update efem pick and place wafer size
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hace 7 meses |
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SignalLight
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e2d5bb5c5d
update galil controller inputs
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hace 7 meses |
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Temperature
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dce33ff7d5
revise reservoir/metal
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hace 7 meses |
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TransPorter
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2192df7ad3
Modify Transporter related routine and UI;
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hace 7 meses |
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DataDefine.cs
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f7533a737b
Initialize
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hace 9 meses |
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DeviceManager.cs
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ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
|
hace 7 meses |
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FinsPlc.cs
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f7533a737b
Initialize
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hace 9 meses |
niuyx
ed99981344
Revise SRD related Routines; Add SRD Galil simulator;