SunWayEfemSimulator.cs 17 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.DataCenter;
  10. using System.Linq;
  11. using MECF.Framework.Common.DataCenter;
  12. using Aitex.Core.RT.ConfigCenter;
  13. using CyberX8_Simulator.Instances;
  14. using System.Collections.Generic;
  15. namespace CyberX8_Simulator.Devices
  16. {
  17. public class SunWayEfemSimulator : SocketDeviceSimulator
  18. {
  19. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  20. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  21. private const string ACK = "ACK";
  22. private readonly char[] delimiters = { ':', '/', '>', '|', ';' };
  23. private string[] _slotMap = new string[25];
  24. private string[] _slotDummy = new string[25];
  25. private PeriodicJob _HwThread;
  26. private bool _bCommReady;
  27. private bool _isDoorOpen;
  28. private bool _isLp1Placed;
  29. private bool _isLp2Placed;
  30. private bool _isLp3Placed;
  31. private bool _isLp1Clamped;
  32. private bool _isLp2Clamped;
  33. private bool _isLp3Clamped;
  34. private bool _isLP1Docked;
  35. private bool _isLP2Docked;
  36. private bool _isLP3Docked;
  37. public int WaferSize = 200;
  38. private int _speed = 20;
  39. private List<int> _lpStationNumber;
  40. private List<int> _dummyStationNumber;
  41. private readonly Queue<(string ack, TaskCompletionSource<bool> tcs)> _pendingAcks = new Queue<(string, TaskCompletionSource<bool>)>();
  42. private readonly object _syncRoot = new object();
  43. private bool _isPaused;
  44. public string SlotMap
  45. {
  46. get { return string.Join("", _slotMap); }
  47. }
  48. public bool _isVacuumError { get; set; }
  49. public bool _isAirError { get; set; }
  50. public bool _isFlowError { get; set; }
  51. public bool _isLeak { get; set; }
  52. public bool _isMaintain { get; set; }
  53. public bool _isWaferPresent { get; set; }
  54. public bool _isMaintainDoorOpen { get; private set; }
  55. public bool _isProtrude1 { get; set; }
  56. public bool _isProtrude2 { get; set; }
  57. public bool _isVAC { get; set; }
  58. public bool _isAIR { get; set; }
  59. private bool _isDoorOpen1;
  60. public bool IsDoorOpen1 { get { return _isDoorOpen1; } set { _isDoorOpen1 = value; SendLP1Data(); } }
  61. private bool _isDoorOpen2;
  62. public bool IsDoorOpen2 { get { return _isDoorOpen2; } set { _isDoorOpen2 = value;SendLP2Data(); } }
  63. private bool _isDoorOpen3;
  64. public bool IsDoorOpen3
  65. {
  66. get { return _isDoorOpen3; }
  67. set { _isDoorOpen3 = value; SendLP3Data(); }
  68. }
  69. public SunWayEfemSimulator() : base(1102, -1, "\r", ' ')
  70. {
  71. for (int i = 0; i < _slotMap.Length; i++)
  72. _slotMap[i] = "0";
  73. for(int i=0; i < _slotDummy.Length; i++)
  74. {
  75. _slotDummy[i]="0";
  76. }
  77. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  78. GetStationNumber();
  79. }
  80. private void Pause()
  81. {
  82. lock (_syncRoot)
  83. {
  84. _isPaused = true;
  85. }
  86. }
  87. private void Resume()
  88. {
  89. lock (_syncRoot)
  90. {
  91. _isPaused = false;
  92. // 发送所有积压的消息
  93. while (_pendingAcks.Count > 0)
  94. {
  95. Thread.Sleep((ushort)3000);
  96. var (ack, tcs) = _pendingAcks.Dequeue();
  97. //OnWriteMessage(ack);
  98. tcs.TrySetResult(true);
  99. }
  100. }
  101. }
  102. private bool OnSendEvent()
  103. {
  104. if (IsConnected)
  105. {
  106. }
  107. return true;
  108. }
  109. private void GetStationNumber()
  110. {
  111. _lpStationNumber = new List<int>();
  112. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete200Station"));
  113. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete150Station"));
  114. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete100Station"));
  115. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete200Station"));
  116. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete150Station"));
  117. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete100Station"));
  118. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete200Station"));
  119. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete150Station"));
  120. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete100Station"));
  121. _dummyStationNumber = new List<int>();
  122. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete200Station"));
  123. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete150Station"));
  124. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete100Station"));
  125. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete200Station"));
  126. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete150Station"));
  127. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete100Station"));
  128. }
  129. protected override void ProcessUnsplitMessage(string str)
  130. {
  131. //OnWriteMessage(ack);
  132. // 处理INF
  133. OnWork(str);
  134. }
  135. internal void SetCassetteDoor(bool doorOpen)
  136. {
  137. _isMaintainDoorOpen = doorOpen;
  138. uint data = doorOpen ? (uint)0b0111111111000001110 : (uint)0b0111111111000001111;
  139. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  140. OnWriteMessage(msg);
  141. }
  142. internal void SetMaintain(bool maintain)
  143. {
  144. _isMaintain = maintain;
  145. uint data = maintain ? (uint)0b0111111111000011111 : (uint)0b0111111111000001111;
  146. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  147. OnWriteMessage(msg);
  148. }
  149. internal void SetProtrude1(bool protrude)
  150. {
  151. _isProtrude1 = protrude;
  152. uint data = protrude? (uint)0b0111111111000101111: (uint)0b0111111111000001111;
  153. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  154. OnWriteMessage(msg);
  155. }
  156. internal void SetProtrude2(bool protrude)
  157. {
  158. _isProtrude2 = protrude;
  159. uint data = protrude ? (uint)0b0111111111001001111 : (uint)0b0111111111000001111;
  160. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  161. OnWriteMessage(msg);
  162. }
  163. internal void SetVAC(bool VAC)
  164. {
  165. _isVAC = VAC;
  166. uint data = VAC ? (uint)0b0111111111000001101 : (uint)0b0111111111000001111;
  167. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  168. OnWriteMessage(msg);
  169. }
  170. internal void SetAIR(bool AIR)
  171. {
  172. _isAIR = AIR;
  173. uint data = AIR ? (uint)0b0111111111000001011 : (uint)0b0111111111000001111;
  174. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  175. OnWriteMessage(msg);
  176. }
  177. private async void OnWork(string str)
  178. {
  179. string ack = "";
  180. if (str.StartsWith("RQ LOAD")) //查询手指是否带片
  181. {
  182. ack = "LOAD A OFF\n_RDY";
  183. OnWriteMessage(ack);
  184. }
  185. else if (str.StartsWith("RSR")) //返回扫片结果
  186. {
  187. string[] strings = str.Split(' ').ToArray();
  188. int stationNumber = int.Parse(strings[1]);
  189. if (_lpStationNumber.Contains(stationNumber)) //LP
  190. {
  191. string lpwafer = "";
  192. foreach (var item in _slotMap)
  193. {
  194. lpwafer += $" {item}";
  195. }
  196. ack = "MAP" + lpwafer;
  197. }
  198. else if (_dummyStationNumber.Contains(stationNumber)) //dummy
  199. {
  200. string dummywafer = "";
  201. foreach (var item in _slotDummy)
  202. {
  203. dummywafer += $" {item}";
  204. }
  205. ack = "MAP" + dummywafer;
  206. }
  207. OnWriteMessage(ack);
  208. }
  209. else if (str.StartsWith("PAUSE"))
  210. {
  211. Pause();
  212. ack = "PAUSE_RDY";
  213. OnWriteMessage(ack);
  214. }
  215. else if(str.StartsWith("RESUME"))
  216. {
  217. ack = "RESUME_RDY";
  218. OnWriteMessage(ack);
  219. _ = Task.Run(DelayAnswerResume); // 启动后台任务
  220. Resume();
  221. }
  222. else //默认回复
  223. {
  224. ack = "_RDY";
  225. if (str.StartsWith("PICK") || str.StartsWith("PLACE") || str.StartsWith("MAP")
  226. || str.StartsWith("ALIGNER ALGN") || str.StartsWith("ALIGNER HOME"))
  227. {
  228. var tcs = new TaskCompletionSource<bool>();
  229. lock (_syncRoot)
  230. {
  231. // 如果已经暂停,直接加入队列
  232. if (_isPaused)
  233. {
  234. _pendingAcks.Enqueue((ack, tcs));
  235. return;
  236. }
  237. }
  238. // 启动延迟任务
  239. var delayTask = Task.Delay(2200);
  240. // 创建监控任务
  241. var monitorTask = Task.Run(async () =>
  242. {
  243. while (!delayTask.IsCompleted)
  244. {
  245. await Task.Delay(100);
  246. lock (_syncRoot)
  247. {
  248. if (_isPaused)
  249. {
  250. _pendingAcks.Enqueue((ack, tcs));
  251. return;
  252. }
  253. }
  254. }
  255. // 延迟完成且未被暂停
  256. OnWriteMessage(ack);
  257. tcs.SetResult(true);
  258. });
  259. await monitorTask;
  260. }
  261. else
  262. {
  263. OnWriteMessage(ack);
  264. }
  265. }
  266. }
  267. private void DelayAnswerResume()
  268. {
  269. Thread.Sleep((ushort)2200);
  270. if (_pendingAcks.Count > 0)
  271. {
  272. OnWriteMessage("ACTION_RDY");
  273. }
  274. }
  275. private void UpdateLocked(string lpNumber,bool locked)
  276. {
  277. if (lpNumber== "1")
  278. {
  279. _isLP1Docked = locked;
  280. SendLP1Data();
  281. }
  282. else if (lpNumber == "2")
  283. {
  284. _isLP2Docked = locked;
  285. SendLP2Data();
  286. }
  287. else if (lpNumber == "3")
  288. {
  289. _isLP3Docked = locked;
  290. SendLP3Data();
  291. }
  292. }
  293. private void UpdateClamped(string lpNumber, bool clamped)
  294. {
  295. if (lpNumber == "1")
  296. {
  297. _isLp1Clamped = clamped;
  298. SendLP1Data();
  299. }
  300. else if (lpNumber == "2")
  301. {
  302. _isLp2Clamped = clamped;
  303. SendLP2Data();
  304. }
  305. else if (lpNumber == "3")
  306. {
  307. _isLp3Clamped = clamped;
  308. SendLP3Data();
  309. }
  310. }
  311. private void SendLP1Data()
  312. {
  313. uint data = GetLP1Data1();
  314. string msg = $"EVT:SIGSTAT/LP1/{data:X8}/0000;";
  315. OnWriteMessage(msg);
  316. }
  317. private void SendLP2Data()
  318. {
  319. uint data = GetLP2Data1();
  320. string msg = $"EVT:SIGSTAT/LP2/{data:X8}/0000;";
  321. OnWriteMessage(msg);
  322. }
  323. private void SendLP3Data()
  324. {
  325. uint data = GetLP3Data1();
  326. string msg = $"EVT:SIGSTAT/LP3/{data:X8}/0000;";
  327. OnWriteMessage(msg);
  328. }
  329. private void SendAlignData()
  330. {
  331. string msg = $"EVT:ALIGN/ALN1/0;";
  332. OnWriteMessage(msg);
  333. }
  334. private void SendDummyMapData(string dummy)
  335. {
  336. string s2 = $"EVT:MAPDT/{dummy}/{_slotDummy};\r";
  337. OnWriteMessage(s2);
  338. }
  339. private void SendSystemData()
  340. {
  341. uint data = 0b0111111111000001111;
  342. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  343. OnWriteMessage(msg);
  344. }
  345. private ushort SimuOperationTime(EfemOperation op)
  346. {
  347. ushort sec = 0;
  348. switch (op)
  349. {
  350. case EfemOperation.Map:
  351. case EfemOperation.GetWaferInfo:
  352. case EfemOperation.Align:
  353. sec = 2200;
  354. break;
  355. case EfemOperation.Pick:
  356. case EfemOperation.Place:
  357. case EfemOperation.Orgsh:
  358. sec = 2200;
  359. break;
  360. case EfemOperation.Light:
  361. case EfemOperation.SigStatus:
  362. sec = 0;
  363. break;
  364. default:
  365. sec = 100;
  366. break;
  367. }
  368. return sec;
  369. }
  370. public void PlaceCarrier1()
  371. {
  372. _isLp1Placed = true;
  373. SendLP1Data();
  374. }
  375. public void RemoveCarrier1()
  376. {
  377. _isLp1Placed = false;
  378. SendLP1Data();
  379. }
  380. public void PlaceCarrier2()
  381. {
  382. _isLp2Placed = true;
  383. SendLP2Data();
  384. }
  385. public void RemoveCarrier2()
  386. {
  387. _isLp2Placed = false;
  388. SendLP2Data();
  389. }
  390. public void PlaceCarrier3()
  391. {
  392. _isLp3Placed = true;
  393. SendLP3Data();
  394. }
  395. public void RemoveCarrier3()
  396. {
  397. _isLp3Placed = false;
  398. SendLP3Data();
  399. }
  400. public void ClearWafer()
  401. {
  402. for (int i = 0; i < _slotMap.Length; i++)
  403. {
  404. _slotMap[i] = "0";
  405. }
  406. for (int i = 0; i < _slotDummy.Length; i++)
  407. {
  408. _slotDummy[i] = "0";
  409. }
  410. }
  411. public void SetAllWafer()
  412. {
  413. for (int i = 0; i < _slotMap.Length; i++)
  414. {
  415. _slotMap[i] = "1";
  416. }
  417. }
  418. public void RandomWafer()
  419. {
  420. Random _rd = new Random();
  421. for (int i = 0; i < _slotMap.Length; i++)
  422. {
  423. //_slotMap[i] = (i % 9).ToString();
  424. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  425. }
  426. }
  427. public void RandomDummyWafer()
  428. {
  429. Random _rdDummy = new Random();
  430. for (int i = 0; i < _slotDummy.Length; i++)
  431. {
  432. _slotDummy[i] = _rdDummy.Next(0, 10) < 6 ? "0" : "1";
  433. }
  434. }
  435. private uint GetLP1Data1()
  436. {
  437. uint data1 = 0x0u;
  438. data1 |= (_isLp1Placed ? 0x00000001u : 0x0);
  439. data1 |= (_isLp1Clamped ? 0x00000002u : 0x0);
  440. data1 |= (_isLP1Docked ? 0x00000004u : 0x0);
  441. data1 |= (_isDoorOpen1 ? 0x00000020u : 0x0);
  442. return data1;
  443. }
  444. private uint GetLP2Data1()
  445. {
  446. uint data1 = 0x0u;
  447. data1 |= (_isLp2Placed ? 0x00000001u : 0x0);
  448. data1 |= (_isLp2Clamped ? 0x00000002u : 0x0);
  449. data1 |= (_isLP2Docked ? 0x00000004u : 0x0);
  450. data1 |= (_isDoorOpen2 ? 0x00000020u : 0x0);
  451. return data1;
  452. }
  453. private uint GetLP3Data1()
  454. {
  455. uint data1 = 0x0u;
  456. data1 |= (_isLp3Placed ? 0x00000001u : 0x0);
  457. data1 |= (_isLp3Clamped ? 0x00000002u : 0x0);
  458. data1 |= (_isLP3Docked ? 0x00000004u : 0x0);
  459. data1 |= (_isDoorOpen3 ? 0x00000020u : 0x0);
  460. return data1;
  461. }
  462. }
  463. }