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ModuleIOCfg.xml

ModuleIOCfg.xml 29 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <BeckhoffModuleIOCfg xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 	<Module Name="LP1">
    4. 

  4. 		<IO Name="LP1.Cassete200Present" IOName="r_Cassette_1_200"/>
    5. 

  5. 		<IO Name="LP1.Cassete150Present" IOName="r_Cassette_1_150"/>
    6. 

  6. 		<IO Name="LP1.Cassete100Present" IOName="r_Cassette_1_100"/>
    7. 

  7. 	</Module>
    8. 

  8. 	<Module Name="LP2">
    9. 

  9. 		<IO Name="LP2.Cassete200Present" IOName="r_Cassette_2_200"/>
    10. 

  10. 		<IO Name="LP2.Cassete150Present" IOName="r_Cassette_2_150"/>
    11. 

  11. 		<IO Name="LP2.Cassete100Present" IOName="r_Cassette_2_100"/>
    12. 

  12. 	</Module>
    13. 

  13. 	<Module Name="LP3">
    14. 

  14. 		<IO Name="LP3.Cassete200Present" IOName="r_Cassette_3_200"/>
    15. 

  15. 		<IO Name="LP3.Cassete150Present" IOName="r_Cassette_3_150"/>
    16. 

  16. 		<IO Name="LP3.Cassete100Present" IOName="r_Cassette_3_100"/>
    17. 

  17. 	</Module>
    18. 

  18. 	<Module Name="Dummy1">
    19. 

  19. 		<IO Name="Dummy1.Cassete200Present" IOName="r_Dummy_1_200"/>
    20. 

  20. 		<IO Name="Dummy1.Cassete150Present" IOName="r_Dummy_1_150"/>
    21. 

  21. 		<IO Name="Dummy1.Cassete100Present" IOName="r_Dummy_1_100"/>
    22. 

  22. 	</Module>
    23. 

  23. 	<Module Name="Dummy2">
    24. 

  24. 		<IO Name="Dummy2.Cassete200Present" IOName="r_Dummy_2_200"/>
    25. 

  25. 		<IO Name="Dummy2.Cassete150Present" IOName="r_Dummy_2_150"/>
    26. 

  26. 		<IO Name="Dummy2.Cassete100Present" IOName="r_Dummy_2_100"/>
    27. 

  27. 	</Module>
    28. 

  28. 	<Module Name="LightTower">
    29. 

  29. 		<IO Name="LightTower.Buzzer" IOName="c_System_Alarm"/>
    30. 

  30. 		<IO Name="LightTower.RedLight" IOName="c_Pole_Red"/>
    31. 

  31. 		<IO Name="LightTower.YellowLight" IOName="c_Pole_Amber"/>
    32. 

  32. 		<IO Name="LightTower.GreenLight" IOName="c_Pole_Green"/>
    33. 

  33. 		<IO Name="LightTower.BlueLight" IOName="c_Pole_Blue"/>
    34. 

  34. 	</Module>
    35. 

  35. 	<Module Name="PUF1">
    36. 

  36. 	<IO Name="PUF1.Chuck" IOName="c_PUF_CHUCK" />
    37. 

  37. 	<IO Name="PUF1.SideAChuckOut" IOName="r_PUF_A_CHUCK_OUT" />
    38. 

  38. 	<IO Name="PUF1.SideAChuckIn" IOName="r_PUF_A_CHUCK_IN" />
    39. 

  39. 	<IO Name="PUF1.SideBChuckOut" IOName="r_PUF_B_CHUCK_OUT" />
    40. 

  40. 	<IO Name="PUF1.SideBChuckIn" IOName="r_PUF_B_CHUCK_IN" />
    41. 

  41. 	<IO Name="PUF1.ChuckAVac" IOName="r_DPUF_A_CHUCK_A_VAC" />
    42. 

  42. 	<IO Name="PUF1.ChuckBVac" IOName="r_DPUF_A_CHUCK_B_VAC" />
    43. 

  43. 	<IO Name="PUF1.ChuckARelease" IOName="c_DPUF_A_CHUCK_A_RELEASE" />
    44. 

  44. 	<IO Name="PUF1.ChuckBRelease" IOName="c_DPUF_A_CHUCK_B_RELEASE" />
    45. 

  45. 	<IO Name="PUF1.DistanceSensor1" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_1" />
    46. 

  46. 	<IO Name="PUF1.DistanceSensor2" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_2" />		
    47. 

  47. 	</Module>
    48. 

  48. 	<Module Name="Loader1">
    49. 

  49. 	<IO Name="Loader1.SideA.WaferPresent" IOName="r_LoaderA_Wafer_Present" />
    50. 

  50. 	<IO Name="Loader1.SideA.DoorUnlock" IOName="c_LOADERA_DOOR_UNLOCK" />
    51. 

  51. 	<IO Name="Loader1.SideA.DoorUpperLocked" IOName="r_LOADERA_DOOR_UPPER_LOCKED" />
    52. 

  52. 	<IO Name="Loader1.SideA.DoorUpperUnlocked" IOName="r_LOADERA_DOOR_UPPER_UNLOCKED" />
    53. 

  53. 	<IO Name="Loader1.SideA.DoorLowerLocked" IOName="r_LOADERA_DOOR_LOWER_LOCKED" />
    54. 

  54. 	<IO Name="Loader1.SideA.DoorLowerUnlocked" IOName="r_LOADERA_DOOR_LOWER_UNLOCKED" />
    55. 

  55. 	<IO Name="Loader1.SideA.TransRetracted" IOName="r_LOADERA_TRANSLATION_RETRACTED" />
    56. 

  56. 	<IO Name="Loader1.SideA.BernoulliExtended" IOName="r_LOADERA_BERNOULLI_EXTENDED" />
    57. 

  57. 	<IO Name="Loader1.SideA.CRSVacuumValue" IOName="r_LoaderA_LS_Vacuum_anlg" />
    58. 

  58. 	<IO Name="Loader1.SideA.WHBladderPressure" IOName="r_LOADERA_WS_BLADDER_PRESSURE" />
    59. 

  59. 	<IO Name="Loader1.SideA.TransPressure" IOName="r_LOADERA_TRANSLATION_PRESSURE" />
    60. 

  60. 	<IO Name="Loader1.SideA.BernoulliPressure" IOName="r_LOADERA_BERNOULLI_PRESSURE" />
    61. 

  61. 	<IO Name="Loader1.SideA.BernoulliBladderPressure" IOName="r_LOADERA_CHUCK_BLADDER" />
    62. 

  62. 	<IO Name="Loader1.SideA.CRSVacuum" IOName="c_LoaderA_LS_Vacuum" />	
    63. 

  63. 	<IO Name="Loader1.SideA.WHBladder" IOName="c_LOADERA_WS_BLADDER" />	
    64. 

  64. 	<IO Name="Loader1.SideA.TransBladder" IOName="c_LOADERA_TRANS_BLADDER" />	
    65. 

  65. 	<IO Name="Loader1.SideA.TransHigh" IOName="c_LOADERA_TRANS_HIGH" />	
    66. 

  66. 	<IO Name="Loader1.SideA.BernoulliBladder" IOName="c_LOADERA_BERNOULLI_BLADDER" />	
    67. 

  67. 	<IO Name="Loader1.SideA.BernoulliN2" IOName="c_LOADERA_BERNOULLI_N2" />	
    68. 

  68. 	<IO Name="Loader1.SideA.BernoulliN2Second" IOName="c_LOADERA_BERNOULLI_N2_SECOND" />	
    69. 

  69. 	<IO Name="Loader1.SideB.WaferPresent" IOName="r_LoaderB_Wafer_Present" />
    70. 

  70. 	<IO Name="Loader1.SideB.DoorUpperLocked" IOName="r_LOADERB_DOOR_UPPER_LOCKED" />
    71. 

  71. 	<IO Name="Loader1.SideB.DoorUpperUnlocked" IOName="r_LOADERB_DOOR_UPPER_UNLOCKED" />	
    72. 

  72. 	<IO Name="Loader1.SideB.DoorLowerLocked" IOName="r_LOADERB_DOOR_LOWER_LOCKED" />	
    73. 

  73. 	<IO Name="Loader1.SideB.DoorLowerUnlocked" IOName="r_LOADERB_DOOR_LOWER_UNLOCKED" />	
    74. 

  74. 	<IO Name="Loader1.SideB.TransRetracted" IOName="r_LOADERB_TRANSLATION_RETRACTED" />	
    75. 

  75. 	<IO Name="Loader1.SideB.BernoulliExtended" IOName="r_LOADERB_BERNOULLI_EXTENDED" />	
    76. 

  76. 	<IO Name="Loader1.SideB.CRSVacuumValue" IOName="r_LoaderB_LS_Vacuum_anlg" />
    77. 

  77. 	<IO Name="Loader1.SideB.WHBladderPressure" IOName="r_LOADERB_WS_BLADDER_PRESSURE" />
    78. 

  78. 	<IO Name="Loader1.SideB.TransPressure" IOName="r_LOADERB_TRANSLATION_PRESSURE" />		
    79. 

  79. 	<IO Name="Loader1.SideB.BernoulliPressure" IOName="r_LOADERB_BERNOULLI_PRESSURE" />	
    80. 

  80. 	<IO Name="Loader1.SideB.BernoulliBladderPressure" IOName="r_LOADERB_CHUCK_BLADDER" />	
    81. 

  81. 	<IO Name="Loader1.SideB.DoorUnlock" IOName="c_LOADERB_DOOR_UNLOCK" />	
    82. 

  82. 	<IO Name="Loader1.SideB.CRSVacuum" IOName="c_LoaderB_LS_Vacuum" />	
    83. 

  83. 	<IO Name="Loader1.SideB.WHBladder" IOName="c_LOADERB_WS_BLADDER" />	
    84. 

  84. 	<IO Name="Loader1.SideB.TransBladder" IOName="c_LOADERB_TRANS_BLADDER" />	
    85. 

  85. 	<IO Name="Loader1.SideB.TransHigh" IOName="c_LOADERB_TRANS_HIGH" />	
    86. 

  86. 	<IO Name="Loader1.SideB.BernoulliBladder" IOName="c_LOADERB_BERNOULLI_BLADDER" />	
    87. 

  87. 	<IO Name="Loader1.SideB.BernoulliN2" IOName="c_LOADERB_BERNOULLI_N2" />	
    88. 

  88. 	<IO Name="Loader1.SideB.BernoulliN2Second" IOName="c_LOADERB_BERNOULLI_N2_SECOND" />	
    89. 

  89. 	<IO Name="Loader1.WaferHolderPresent" IOName="r_Cathode_Present" />	
    90. 

  90. 	<IO Name="Loader1.DripTrayFluid" IOName="r_DRIP_TRAY_FLUID_DETECTION" />	
    91. 

  91. 	<IO Name="Loader1.WaferHolderClamp" IOName="c_Cathode_Clamp" />	
    92. 

  92. 	<IO Name="Loader1.WSSideABClamp" IOName="c_WAFER_HOLDER_CLAMPED" />	
    93. 

  93. 	<IO Name="Loader1.SideAWaferHolderClamp" IOName="r_LOADERA_WS_LOCKED" />
    94. 

  94. 	<IO Name="Loader1.SideBWaferHolderClamp" IOName="r_LOADERB_WS_LOCKED" />
    95. 

  95. 	<IO Name="Loader1.LeakFlow" IOName="r_LOADER_GasFlowSensor_FLOW" />
    96. 

  96. 	<IO Name="Loader1.LeakVacuumValue" IOName="r_LOADER_GasFlowSensor_VACUUM" />
    97. 

  97. 	<IO Name="Loader1.LeakFlowClamp" IOName="c_Flow_Test_Clamp" />
    98. 

  98. 	<IO Name="Loader1.LeakVacuum" IOName="c_VACUUM_TEST" />
    99. 

  99. 	</Module>
    100. 

  100. 	<Module Name="Facilities">
    101. 

  101. 	<IO Name="Facilities.N2Enable" IOName="c_N2_ENABLE"/>
    102. 

  102. 	<IO Name="Facilities.CDAEnable" IOName="c_CDA_ENABLE"/>
    103. 

  103. 	<IO Name="Facilities.ExternalCDAEnable" IOName="c_EXTERNAL_CDA_ENABLE"/>
    104. 

  104. 	<IO Name="Facilities.DiWaterEnable" IOName="c_DI_MAIN_ENABLE"/>
    105. 

  105. 	<IO Name="Facilities.HouseChilledWaterEnable" IOName="c_HCW_ENABLE"/>
    106. 

  106. 	<IO Name="Facilities.DiReplenEnable" IOName="c_DI_REPLEN_ENABLE"/>
    107. 

  107. 	<IO Name="Facilities.DiFillEnable" IOName="c_DI_FILL_ENABLE"/>
    108. 

  108. 	<IO Name="Facilities.LoaderDiEnable" IOName="c_DI_LOADER_ENABLE"/>
    109. 

  109. 	<IO Name="Facilities.FilterPurgeEnable" IOName="c_FILTER_PURGE_ENABLE"/>
    110. 

  110. 	<IO Name="Facilities.Nitrogen1BPressure" IOName="r_N2_1B_PRESSURE"/>
    111. 

  111. 	<IO Name="Facilities.Nitrogen1APressure" IOName="r_N2_1A_PRESSURE"/>
    112. 

  112. 	<IO Name="Facilities.Nitrogen2BPressure" IOName="r_N2_2B_PRESSURE"/>
    113. 

  113. 	<IO Name="Facilities.Nitrogen2APressure" IOName="r_N2_2A_PRESSURE"/>
    114. 

  114. 	<IO Name="Facilities.CDA2Pressure" IOName="r_CDA_HIGH_PRESSURE"/>
    115. 

  115. 	<IO Name="Facilities.CDA1Pressure" IOName="r_CDA_LOW_PRESSURE"/>
    116. 

  116. 	<IO Name="Facilities.ExternalCDAPressure" IOName="r_CDA_EXTERNAL_PRESSURE"/>
    117. 

  117. 	<IO Name="Facilities.DiWaterPressure" IOName="r_DI_WATER_PRESSURE"/>
    118. 

  118. 	<IO Name="Facilities.HouseChilledWaterPressure" IOName="r_HCW_FLOW"/>
    119. 

  119. 	<IO Name="Facilities.ExhaustPressure" IOName="r_SYSTEM_EXHAUST"/>
    120. 

  120. 	<IO Name="Facilities.VacuumPressure" IOName="r_SYSTEM_VACUUM"/>
    121. 

  121. 	<IO Name="Facilities.N2BlanketPressure" IOName="r_N2_BLANKET_PRESSURE"/>
    122. 

  122. 	<IO Name="Facilities.SampleEnable" IOName="c_SAMPLE_STATION_ENABLE"/>
    123. 

  123. 	<IO Name="Facilities.SampleFlow1Enable" IOName="c_SAMPLE_STATION_FLOW_1_ENABLE"/>
    124. 

  124. 	<IO Name="Facilities.SampleFlow2Enable" IOName="c_SAMPLE_STATION_FLOW_2_ENABLE"/>
    125. 

  125. 	<IO Name="Facilities.SampleFlow3Enable" IOName="c_SAMPLE_STATION_FLOW_3_ENABLE"/>
    126. 

  126. 	<IO Name="Facilities.SampleFlow4Enable" IOName="c_SAMPLE_STATION_FLOW_4_ENABLE"/>
    127. 

  127. 	<IO Name="Facilities.FFULoaderError" IOName="r_FFUFaultLoader"/>
    128. 

  128. 	<IO Name="Facilities.FFUProcessError" IOName="r_FFUFaultProcess"/>
    129. 

  129. 	<IO Name="Facilities.FFULoaderPressure" IOName="r_FFUPressureLoader"/>
    130. 

  130. 	<IO Name="Facilities.FFUProcessPressure" IOName="r_FFUPressureProcess"/>
    131. 

  131. 	<IO Name="Facilities.ArsFluidDetect" IOName="r_SLIPSTREAM_FLUID_PRESENT"/>
    132. 

  132. 	<IO Name="Facilities.ProcessFluidDetect" IOName="r_CONTAINMENT_FLUID"/>
    133. 

  133. 	<IO Name="Facilities.SampleFluidDetect" IOName="r_SAMPLE_SYS_FLUID_PRESENT"/>
    134. 

  134. 	</Module>
    135. 

  135. 	<Module Name="Transporter2">
    136. 

  136. 	<IO Name="Transporter2.Unlock" IOName="c_ENCLOSED_TRANSPORT2_UNLOCK_SOLENOID"/> 
    137. 

  137. 	<IO Name="Transporter2.Locked1" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_1"/> 
    138. 

  138. 	<IO Name="Transporter2.Locked2" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_2"/> 
    139. 

  139. 	<IO Name="Transporter2.Unlocked1" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_1"/> 
    140. 

  140. 	<IO Name="Transporter2.Unlocked2" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_2"/>  
    141. 

  141. 	<IO Name="Transporter2.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE"/>  
    142. 

  142. 	<IO Name="Transporter2.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE2"/> 
    143. 

  143. 	<IO Name="Transporter2.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_RETRACTED"/> 
    144. 

  144. 	<IO Name="Transporter2.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_RETRACTED"/> 
    145. 

  145. 	<IO Name="Transporter2.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_EXTENDED"/> 
    146. 

  146. 	<IO Name="Transporter2.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_EXTENDED"/> 
    147. 

  147. 	<IO Name="Transporter2.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_1"/> 
    148. 

  148. 	<IO Name="Transporter2.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_2"/> 
    149. 

  149. 	<IO Name="Transporter2.WhPresent1" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_1"/> 
    150. 

  150. 	<IO Name="Transporter2.WhPresent2" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_2"/>
    151. 

  151. 		
    152. 

  152. 	<IO Name="Transporter2.Lock" IOName="c_TRANSPORT2_DROP_BLOCK_LOCK"/>
    153. 

  153. 	<IO Name="Transporter2.WSHoldPresent" IOName="r_TRANSPORT2_WS_HOLD_PRESENT"/>	
    154. 

  154. 	</Module>
    155. 

  155. 	<Module Name="Transporter1">
    156. 

  156. 	<IO Name="Transporter1.Unlock" IOName="c_ENCLOSED_TRANSPORT_UNLOCK_SOLENOID"/>  
    157. 

  157. 	<IO Name="Transporter1.Unlocked1" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_1"/> 
    158. 

  158. 	<IO Name="Transporter1.Locked2" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_2"/> 
    159. 

  159. 	<IO Name="Transporter1.Locked1" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_1"/> 
    160. 

  160. 	<IO Name="Transporter1.Unlocked2" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_2"/>  
    161. 

  161. 	<IO Name="Transporter1.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE"/>  
    162. 

  162. 	<IO Name="Transporter1.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE2"/>  	
    163. 

  163. 	<IO Name="Transporter1.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_RETRACTED"/> 
    164. 

  164. 	<IO Name="Transporter1.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_RETRACTED"/> 
    165. 

  165. 	<IO Name="Transporter1.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_EXTENDED"/> 
    166. 

  166. 	<IO Name="Transporter1.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_EXTENDED"/> 
    167. 

  167. 	<IO Name="Transporter1.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_1"/> 
    168. 

  168. 	<IO Name="Transporter1.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_2"/> 
    169. 

  169. 	<IO Name="Transporter1.WhPresent1" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_1"/> 
    170. 

  170. 	<IO Name="Transporter1.WhPresent2" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_2"/>
    171. 

  171. 

  172. 	<IO Name="Transporter1.Lock" IOName="c_TRANSPORT1_DROP_BLOCK_LOCK"/>
    173. 

  173. 	<IO Name="Transporter1.WSHoldPresent" IOName="r_TRANSPORT1_WS_HOLD_PRESENT"/>
    174. 

  174. 	</Module>
    175. 

  175. 	<Module Name="SRD">
    176. 

  176. 	<IO Name="SRD.FluidContainment" IOName="r_SRD_FLUID_LEVEL"/> 
    177. 

  177. 	<IO Name="SRD.WaterPressure" IOName="r_SRD_SUPPLY_WATER_PRESS"/>  
    178. 

  178. 	</Module>
    179. 

  179. 	<Module Name="SRD1">
    180. 

  180. 	<IO Name="SRD1.WaterAbove" IOName="c_SRD1_Water_Above_Wafer"/>
    181. 

  181. 	<IO Name="SRD1.WaterBelow" IOName="c_SRD1_Water_Below_Wafer"/>
    182. 

  182. 	<IO Name="SRD1.ExhaustOn" IOName="c_SRD1_Exhaust_Fan_On"/>
    183. 

  183. 	<IO Name="SRD1.WaferPresence" IOName="r_SRD1_WAFER_PRESENT_anlg"/>
    184. 

  184. 

  185. 	<IO Name="SRD1.VacuumValue" IOName="r_SRD1_CHUCK_VACUUM_anlg"/>  
    186. 

  186. 	<IO Name="SRD1.DoorClose" IOName="c_SRD1_Shutter_Close"/>  
    187. 

  187. 	<IO Name="SRD1.DoorClosed" IOName="r_SRD1_SHUTTER_CLOSED"/>  
    188. 

  188. 	<IO Name="SRD1.DoorOpened" IOName="r_SRD1_SHUTTER_OPEN"/>  	
    189. 

  189. 	<IO Name="SRD1.ChuckVacuum" IOName="c_SRD1_CHUCK_VACUUM"/>
    190. 

  190. 	<IO Name="SRD1.ChuckATMOn" IOName="c_SRD1_CHUCK_ATM_ON"/>
    191. 

  191. 	<IO Name="SRD1.ChuckVacuumOK" IOName="r_SRD1_CHUCK_VAC_OK"/>	
    192. 

  192. 	<IO Name="SRD1.WaferPresent" IOName="r_SRD1_WAFER_PRESENT"/>	
    193. 

  193. 	<IO Name="SRD1.LiftUp" IOName="c_SRD1_LIFT_UP"/>
    194. 

  194. 	<IO Name="SRD1.LiftUpStatus" IOName="r_SRD1_LIFT_UP"/>
    195. 

  195. 	<IO Name="SRD1.Flipper1Out100Status" IOName="r_SRD1_100_FLIPPER1_OUT"/>
    196. 

  196. 	<IO Name="SRD1.Flipper2Out100Status" IOName="r_SRD1_100_FLIPPER2_OUT"/>
    197. 

  197. 	<IO Name="SRD1.Flipper3Out100Status" IOName="r_SRD1_100_FLIPPER3_OUT"/>
    198. 

  198. 	<IO Name="SRD1.Flipper1Out150Status" IOName="r_SRD1_150_FLIPPER1_OUT"/>
    199. 

  199. 	<IO Name="SRD1.Flipper2Out150Status" IOName="r_SRD1_150_FLIPPER2_OUT"/>
    200. 

  200. 	<IO Name="SRD1.Flipper3Out150Status" IOName="r_SRD1_150_FLIPPER3_OUT"/>
    201. 

  201. 	<IO Name="SRD1.Flipper1Out200Status" IOName="r_SRD1_200_FLIPPER1_OUT"/>
    202. 

  202. 	<IO Name="SRD1.Flipper2Out200Status" IOName="r_SRD1_200_FLIPPER2_OUT"/>
    203. 

  203. 	<IO Name="SRD1.Flipper3Out200Status" IOName="r_SRD1_200_FLIPPER3_OUT"/>
    204. 

  204. 	<IO Name="SRD1.FlippersIn100" IOName="c_SRD1_100_FLIPPERS_IN"/>
    205. 

  205. 	<IO Name="SRD1.FlippersIn150" IOName="c_SRD1_150_FLIPPERS_IN"/>
    206. 

  206. 	<IO Name="SRD1.FlippersIn200" IOName="c_SRD1_200_FLIPPERS_IN"/>
    207. 

  207. 	<IO Name="SRD1.WaterOn" IOName="c_SRD1_WATER_ON"/>
    208. 

  208. 	<IO Name="SRD1.WaterFlow" IOName="r_SRD1_WATER_FLOW"/>
    209. 

  209. 	<IO Name="SRD1.N2On" IOName="c_SRD1_N2_FLOW_ON"/>	
    210. 

  210. 	
    211. 

  211. 	</Module>
    212. 

  212. 	<Module Name="SRD2">
    213. 

  213. 	<IO Name="SRD2.WaterAbove" IOName="c_SRD2_Water_Above_Wafer"/>
    214. 

  214. 	<IO Name="SRD2.WaterBelow" IOName="c_SRD2_Water_Below_Wafer"/>
    215. 

  215. 	<IO Name="SRD2.WaferPresence" IOName="r_SRD2_WAFER_PRESENT_anlg"/>
    216. 

  216. 	<IO Name="SRD2.ExhaustOn" IOName="c_SRD2_Exhaust_Fan_On"/>
    217. 

  217. 	<IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
    218. 

  218. 

  219. 	<IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
    220. 

  220. 	<IO Name="SRD2.DoorClose" IOName="c_SRD2_Shutter_Close"/>
    221. 

  221. 	<IO Name="SRD2.DoorClosed" IOName="r_SRD2_SHUTTER_CLOSED"/>
    222. 

  222. 	<IO Name="SRD2.DoorOpened" IOName="r_SRD2_SHUTTER_OPEN"/>
    223. 

  223. 	<IO Name="SRD2.ChuckVacuum" IOName="c_SRD2_CHUCK_VACUUM"/>
    224. 

  224. 	<IO Name="SRD2.ChuckATMOn" IOName="c_SRD2_CHUCK_ATM_ON"/>
    225. 

  225. 	<IO Name="SRD2.ChuckVacuumOK" IOName="r_SRD2_CHUCK_VAC_OK"/>
    226. 

  226. 	<IO Name="SRD2.WaferPresent" IOName="r_SRD2_WAFER_PRESENT"/>
    227. 

  227. 	<IO Name="SRD2.LiftUp" IOName="c_SRD2_LIFT_UP"/>
    228. 

  228. 	<IO Name="SRD2.LiftUpStatus" IOName="r_SRD2_LIFT_UP"/>
    229. 

  229. 	<IO Name="SRD2.Flipper1Out100Status" IOName="r_SRD2_100_FLIPPER1_OUT"/>
    230. 

  230. 	<IO Name="SRD2.Flipper2Out100Status" IOName="r_SRD2_100_FLIPPER2_OUT"/>
    231. 

  231. 	<IO Name="SRD2.Flipper3Out100Status" IOName="r_SRD2_100_FLIPPER3_OUT"/>
    232. 

  232. 	<IO Name="SRD2.Flipper1Out150Status" IOName="r_SRD2_150_FLIPPER1_OUT"/>
    233. 

  233. 	<IO Name="SRD2.Flipper2Out150Status" IOName="r_SRD2_150_FLIPPER2_OUT"/>
    234. 

  234. 	<IO Name="SRD2.Flipper3Out150Status" IOName="r_SRD2_150_FLIPPER3_OUT"/>
    235. 

  235. 	<IO Name="SRD2.Flipper1Out200Status" IOName="r_SRD2_200_FLIPPER1_OUT"/>
    236. 

  236. 	<IO Name="SRD2.Flipper2Out200Status" IOName="r_SRD2_200_FLIPPER2_OUT"/>
    237. 

  237. 	<IO Name="SRD2.Flipper3Out200Status" IOName="r_SRD2_200_FLIPPER3_OUT"/>
    238. 

  238. 	<IO Name="SRD2.FlippersIn100" IOName="c_SRD2_100_FLIPPERS_IN"/>
    239. 

  239. 	<IO Name="SRD2.FlippersIn150" IOName="c_SRD2_150_FLIPPERS_IN"/>
    240. 

  240. 	<IO Name="SRD2.FlippersIn200" IOName="c_SRD2_200_FLIPPERS_IN"/>
    241. 

  241. 	<IO Name="SRD2.WaterOn" IOName="c_SRD2_WATER_ON"/>
    242. 

  242. 	<IO Name="SRD2.WaterFlow" IOName="r_SRD2_WATER_FLOW"/>
    243. 

  243. 	<IO Name="SRD2.N2On" IOName="c_SRD2_N2_FLOW_ON"/>	
    244. 

  244. 	
    245. 

  245. 	</Module>
    246. 

  246. 	<Module Name="Dryer1">
    247. 

  247. 	<IO Name="Dryer1.ExhaustPressure" IOName="r_HVD_1_ANALOG"/>
    248. 

  248. 	<IO Name="Dryer1.PowerControl" IOName="c_HVD_1_ENABLE"/>
    249. 

  249. 	<IO Name="Dryer1.BlowerHigh" IOName="c_HVD_1_HIGH"/>
    250. 

  250. 	</Module>
    251. 

  251. 	<Module Name="Dryer2">
    252. 

  252. 	<IO Name="Dryer2.ExhaustPressure" IOName="r_HVD_2_ANALOG"/>
    253. 

  253. 	<IO Name="Dryer2.PowerControl" IOName="c_HVD_2_ENABLE"/>
    254. 

  254. 	<IO Name="Dryer2.BlowerHigh" IOName="c_HVD_2_HIGH"/>
    255. 

  255. 	</Module>
    256. 

  256. 	<Module Name="Prewet1">
    257. 

  257. 	<IO Name="Prewet1.PumpValve" IOName="c_SPW1_LEV_PUMP_VALVE"/>
    258. 

  258. 	<IO Name="Prewet1.PumpCurrent" IOName="r_SPW1_LEV_PUMP_CURRENT"/>
    259. 

  259. 	<IO Name="Prewet1.PumpEnable" IOName="c_SPW1_LEV_PUMP_ENB"/>
    260. 

  260. 	<IO Name="Prewet1.PumpStatus" IOName="r_SPW1_LEV_PUMP_STATUS"/>
    261. 

  261. 	<IO Name="Prewet1.PumpFlow" IOName="r_SPW1_LEV_PUMP_FLOW"/>
    262. 

  262. 	<IO Name="Prewet1.PumpPressure" IOName="r_SPW1_LEV_PUMP_PRES"/>
    263. 

  263. 	<IO Name="Prewet1.PumpSpeed" IOName="c_SPW1_LEV_PUMP_SPEED"/>
    264. 

  264. 	</Module>
    265. 

  265. 	<Module Name="Safety">
    266. 

  266. 	<IO Name="Safety.MainCommErr" IOName="r_Safety_ComErr"/>
    267. 

  267. 	<IO Name="Safety.LoaderPufCommErr" IOName="r_Safety_ComErr_LdrPuf"/>
    268. 

  268. 	<IO Name="Safety.SrdCommErr" IOName="r_Safety_ComErr_Srd"/>
    269. 

  269. 	<IO Name="Safety.TransportCommErr" IOName="r_Safety_ComErr_Transp"/>
    270. 

  270. 	<IO Name="Safety.MainFunctionBlockErr" IOName="r_Safety_FbErr"/>
    271. 

  271. 	<IO Name="Safety.LoaderPufFunctionBlockErr" IOName="r_Safety_FbErr_LdrPuf"/>
    272. 

  272. 	<IO Name="Safety.SrdFunctionBlockErr" IOName="r_Safety_FbErr_Srd"/>
    273. 

  273. 	<IO Name="Safety.TransporterFunctionBlockErr" IOName="r_Safety_FbErr_Transp"/>
    274. 

  274. 	<IO Name="Safety.TwincatState" IOName="r_EtherCat_State"/>
    275. 

  275. 	<IO Name="Safety.LoaderHotConnectState" IOName="r_EtherCat_State_Loader"/>
    276. 

  276. 	<IO Name="Safety.LdrHotConnectState" IOName="r_EtherCat_State_LdrTxIO"/>
    277. 

  277. 	<IO Name="Safety.PrcHotConnectState" IOName="r_EtherCat_State_PrcTxIO"/>
    278. 

  278. 	<IO Name="Safety.TransporterHotConnectState" IOName="r_EtherCat_State_Transporter"/>
    279. 

  279. 	<IO Name="Safety.PufHotConnectState" IOName="r_EtherCat_State_Puf"/>
    280. 

  280. 	<IO Name="Safety.SrdHotConnectState" IOName="r_EtherCat_State_Srd"/>
    281. 

  281. 	<IO Name="Safety.Reservoir1HotConnectState" IOName="r_EtherCat_State_Reservoir1"/>
    282. 

  282. 	<IO Name="Safety.Reservoir2HotConnectState" IOName="r_EtherCat_State_Reservoir2"/>
    283. 

  283. 	<IO Name="Safety.FFUHotConnectState" IOName="r_EtherCat_State_FFU"/>
    284. 

  284. 	<IO Name="Safety.RunStop" IOName="c_Safety_RunStop"/>
    285. 

  285. 	<IO Name="Safety.ErrAck" IOName="c_Safety_ErrAck"/>
    286. 

  286. 	<IO Name="Safety.SlsRestart" IOName="c_Safety_SLS_Restart"/>
    287. 

  287. 	<IO Name="Safety.TxStoMonRestart" IOName="c_Safety_TX_STO_MON_Restart"/>
    288. 

  288. 	<IO Name="Safety.TxSto1EstopRestart" IOName="c_Safety_TX_STO1_ESTOP_Restart"/>
    289. 

  289. 	<IO Name="Safety.TxSto2EstopRestart" IOName="c_Safety_TX_STO2_ESTOP_Restart"/>
    290. 

  290. 	<IO Name="Safety.LdrPufStoMonRestart" IOName="c_Safety_LDRPUF_STO_MON_Restart"/>
    291. 

  291. 	<IO Name="Safety.LdrPufSto1EstopRestart" IOName="c_Safety_LDRPUF_STO1_ESTOP_Restart"/>
    292. 

  292. 	<IO Name="Safety.LdrPufSto2EstopRestart" IOName="c_Safety_LDRPUF_STO2_ESTOP_Restart"/>
    293. 

  293. 	<IO Name="Safety.SrdStoEstopRestart" IOName="c_Safety_SRD_STO_ESTOP_Restart"/>
    294. 

  294. 	<IO Name="Safety.PumpStoEstopRestart" IOName="c_Safety_PUMP_STO_ESTOP_Restart"/>
    295. 

  295. 	<IO Name="Safety.FluidEstopRestart" IOName="c_Safety_FLUID_ESTOP_Restart"/>
    296. 

  296. 	<IO Name="Safety.LoaderDoorLock" IOName="c_REQUEST_LDR_DOOR_OPEN"/>
    297. 

  297. 	<IO Name="Safety.LoaderDoorLocked" IOName="r_LDR_Door_Locked"/>
    298. 

  298. 	<IO Name="Safety.BufferDoorLock" IOName="c_REQUEST_BFFR_DOOR_OPEN"/>
    299. 

  299. 	<IO Name="Safety.BufferDoorLocked" IOName="r_BFFR_Door_Locked"/>
    300. 

  300. 	<IO Name="Safety.LowerLoaderPanelRemoved" IOName="r_LWR_LDR_PNL_REMOVED"/>
    301. 

  301. 	<IO Name="Safety.LoaderPanelRemoved" IOName="r_XPRTR_LDR_PNL_REMOVED"/>	
    302. 

  302. 	<IO Name="Safety.BufferPanelRemoved" IOName="r_XPRTR_BFFR_PNL_REMOVED"/>	
    303. 

  303. 	<IO Name="Safety.ProcessDoorLock" IOName="c_REQUEST_PROC_DOORS_OPEN"/>	
    304. 

  304. 	<IO Name="Safety.ProcessDoor1Locked" IOName="r_PROC_DOOR_1_SAFE_LOCK"/>	
    305. 

  305. 	<IO Name="Safety.ProcessDoor2Locked" IOName="r_PROC_DOOR_2_SAFE_LOCK"/>	
    306. 

  306. 	<IO Name="Safety.ProcessDoor3Locked" IOName="r_PROC_DOOR_3_SAFE_LOCK"/>	
    307. 

  307. 	<IO Name="Safety.ProcessDoor4Locked" IOName="r_PROC_DOOR_4_SAFE_LOCK"/>	
    308. 

  308. 	<IO Name="Safety.ProcessUpperPanelsOn" IOName="r_PROC_DOORS_UPPR_PNLS_ON"/>		
    309. 

  309. 	<IO Name="Safety.SrdTopPanelRemoved" IOName="r_SRD_TOP_PNL_REMOVED"/>	
    310. 

  310. 	<IO Name="Safety.SrdLowerPanelRemoved" IOName="r_SRD_LWR_PNL_REMOVED"/>	
    311. 

  311. 	<IO Name="Safety.PlumbingDoorClosed" IOName="r_PLUMBING_DOORS_CLOSED"/>	
    312. 

  312. 	<IO Name="Safety.ProcessHaltButton1" IOName="r_PROCESS_HALT_BUTTON_1"/>	
    313. 

  313. 	<IO Name="Safety.ProcessHaltButton2" IOName="r_PROCESS_HALT_BUTTON_2"/>	
    314. 

  314. 	<IO Name="Safety.LoaderHaltButton" IOName="r_HALT_LDR_SECTION"/>	
    315. 

  315. 	<IO Name="Safety.ModeSelectorSwitch" IOName="r_MODE_SELECTOR_SWITCH"/>	
    316. 

  316. 	<IO Name="Safety.ModeSiren" IOName="c_MODE_SIREN"/>	
    317. 

  317. 	<IO Name="Safety.LoaderRotationSls" IOName="r_Rotate_AMP_SLS"/>	
    318. 

  318. 	<IO Name="Safety.LoaderSwingASls" IOName="r_Door_A_AMP_SLS"/>	
    319. 

  319. 	<IO Name="Safety.LoaderSwingBSls" IOName="r_Door_B_AMP_SLS"/>	
    320. 

  320. 	<IO Name="Safety.LoaderTiltASls" IOName="r_SUP_A_AMP_SLS"/>	
    321. 

  321. 	<IO Name="Safety.LoaderTiltBSls" IOName="r_SUP_B_AMP_SLS"/>	
    322. 

  322. 	<IO Name="Safety.Puf1VerticalSls" IOName="r_DPUF_A_VERT_SAFE_SLS"/>	
    323. 

  323. 	<IO Name="Safety.Puf2VerticalSls" IOName="r_DPUF_B_VERT_SAFE_SLS"/>	
    324. 

  324. 	<IO Name="Safety.LoaderGantrySls" IOName="r_Gantry_Zone_Safe_SLS_1"/>	
    325. 

  325. 	<IO Name="Safety.LoaderElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_2"/>	
    326. 

  326. 	<IO Name="Safety.ProcessGantrySls" IOName="r_Gantry_Zone_Safe_SLS_3"/>	
    327. 

  327. 	<IO Name="Safety.ProcessElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_4"/>	
    328. 

  328. 	<IO Name="Safety.PufVerticalDisable" IOName="r_DPUF_VERT_SAFE_Disable"/>	
    329. 

  329. 	<IO Name="Safety.Puf1FlipRotationDisable" IOName="r_DPUF_A_PIVSUP_Disable"/>	
    330. 

  330. 	<IO Name="Safety.Puf2FlipRotationDisable" IOName="r_DPUF_B_PIVSUP_Disable"/>	
    331. 

  331. 	<IO Name="Safety.LoaderDisable" IOName="r_Loader_Zone_Safe_Disable"/>	
    332. 

  332. 	<IO Name="Safety.TransporterDisable" IOName="r_Gantry_Zone_Safe_Disable"/>	
    333. 

  333. 	<IO Name="Safety.SrdArmDisable" IOName="r_SRD_WASH_ARMS_Disable"/>	
    334. 

  334. 	<IO Name="Safety.SrdRotationDisable" IOName="r_SRD_ROTATE_Disable"/>	
    335. 

  335. 	<IO Name="Safety.TransporterSafeSls" IOName="r_Gantry_Zone_Safe_SLS"/>	
    336. 

  336. 	<IO Name="Safety.LoaderSafeSls" IOName="r_Loader_Zone_Safe_SLS"/>	
    337. 

  337. 	<IO Name="Safety.PufVerticalSafeSls" IOName="r_DPUF_VERT_SAFE_SLS"/>	
    338. 

  338. 	<IO Name="Safety.LoaderSafeSto" IOName="r_Loader_Zone_Safe_STO"/>	
    339. 

  339. 	<IO Name="Safety.PufVerticalSafeSto" IOName="r_DPUF_VERT_SAFE_STO"/>	
    340. 

  340. 	<IO Name="Safety.Puf1FlipRotationSafeSto" IOName="r_DPUF_A_PIVSUP_STO"/>	
    341. 

  341. 	<IO Name="Safety.Puf2FlipRotationSafeSto" IOName="r_DPUF_B_PIVSUP_STO"/>	
    342. 

  342. 	<IO Name="Safety.TransporterSafeSto" IOName="r_Gantry_Zone_Safe_STO"/>	
    343. 

  343. 	<IO Name="Safety.SrdArmSafeSto" IOName="r_SRD_WASH_STO"/>		
    344. 

  344. 	<IO Name="Safety.SrdRotationSafeSto" IOName="r_SRD_ROTATE_STO"/>		
    345. 

  345. 	<IO Name="Safety.PumpEdm" IOName="r_PUMP_EDM"/>		
    346. 

  346. 	<IO Name="Safety.ReservoirHighLevel" IOName="r_SAFETY_HIGH_LEVEL"/>		
    347. 

  347. 	<IO Name="Safety.FluidEnableEdm" IOName="r_EXT_FLUID_ENABLE_EDM"/>
    348. 

  348. 	<IO Name="Safety.SRDArmReset" IOName="c_Safety_SRD_Arm_Reset"/>
    349. 

  349. 	</Module>
    350. 

  350. 	<Module Name="Rinse1">
    351. 

  351. 	<IO Name="Rinse1.WaterLevel" IOName="r_QDRD1_WATER_LEVEL"/>
    352. 

  352. 	<IO Name="Rinse1.WaferHolderClamp" IOName="c_QDRD1_WH_CLAMP"/>
    353. 

  353. 	<IO Name="Rinse1.N2Valve" IOName="c_QDRD1_LO_PRESSURE"/>
    354. 

  354. 	<IO Name="Rinse1.FillValve" IOName="c_QDRD1_DI_FILL"/>
    355. 

  355. 	<IO Name="Rinse1.DrainValve" IOName="c_QDRD1_DUMP"/>
    356. 

  356. 	<IO Name="Rinse1.WasteValve" IOName="c_QDRD1_MDRAIN"/>
    357. 

  357. 	</Module>  
    358. 

  358. 	<Module Name="Rinse2">
    359. 

  359. 	<IO Name="Rinse2.WaterLevel" IOName="r_QDRD2_WATER_LEVEL"/>
    360. 

  360. 	<IO Name="Rinse2.WaferHolderClamp" IOName="c_QDRD2_WH_CLAMP"/>
    361. 

  361. 	<IO Name="Rinse2.N2Valve" IOName="c_QDRD2_LO_PRESSURE"/>
    362. 

  362. 	<IO Name="Rinse2.FillValve" IOName="c_QDRD2_DI_FILL"/>
    363. 

  363. 	<IO Name="Rinse2.DrainValve" IOName="c_QDRD2_DUMP"/>
    364. 

  364. 	<IO Name="Rinse2.WasteValve" IOName="c_QDRD2_MDRAIN"/>
    365. 

  365. 	</Module>
    366. 

  366.   
    367. 

  367. 	<Module Name="Rinse3">
    368. 

  368. 	<IO Name="Rinse3.WaterLevel" IOName="r_QDRD3_WATER_LEVEL"/>
    369. 

  369. 	<IO Name="Rinse3.WaferHolderClamp" IOName="c_QDRD3_WH_CLAMP"/>
    370. 

  370. 	<IO Name="Rinse3.N2Valve" IOName="c_QDRD3_LO_PRESSURE"/>
    371. 

  371. 	<IO Name="Rinse3.FillValve" IOName="c_QDRD3_DI_FILL"/>
    372. 

  372. 	<IO Name="Rinse3.DrainValve" IOName="c_QDRD3_DUMP"/>
    373. 

  373. 	<IO Name="Rinse3.WasteValve" IOName="c_QDRD3_MDRAIN"/>
    374. 

  374. 	</Module>
    375. 

  375.   
    376. 

  376. 	<Module Name="Rinse4">
    377. 

  377. 	<IO Name="Rinse4.WaterLevel" IOName="r_QDRD4_WATER_LEVEL"/>
    378. 

  378. 	<IO Name="Rinse4.WaferHolderClamp" IOName="c_QDRD4_WH_CLAMP"/>
    379. 

  379. 	<IO Name="Rinse4.N2Valve" IOName="c_QDRD4_LO_PRESSURE"/>
    380. 

  380. 	<IO Name="Rinse4.FillValve" IOName="c_QDRD4_DI_FILL"/>
    381. 

  381. 	<IO Name="Rinse4.DrainValve" IOName="c_QDRD4_DUMP"/>
    382. 

  382. 	<IO Name="Rinse4.WasteValve" IOName="c_QDRD4_MDRAIN"/>
    383. 

  383. 	</Module>
    384. 

  384.   
    385. 

  385. 	<Module Name="Rinse5">
    386. 

  386. 	<IO Name="Rinse5.WaterLevel" IOName="r_QDRD5_WATER_LEVEL"/>
    387. 

  387. 	<IO Name="Rinse5.WaferHolderClamp" IOName="c_QDRD5_WH_CLAMP"/>
    388. 

  388. 	<IO Name="Rinse5.N2Valve" IOName="c_QDRD5_LO_PRESSURE"/>
    389. 

  389. 	<IO Name="Rinse5.FillValve" IOName="c_QDRD5_DI_FILL"/>
    390. 

  390. 	<IO Name="Rinse5.DrainValve" IOName="c_QDRD5_DUMP"/>
    391. 

  391. 	<IO Name="Rinse5.WasteValve" IOName="c_QDRD5_MDRAIN"/>
    392. 

  392. 	</Module>
    393. 

  393.   
    394. 

  394. 	<Module Name="Rinse6">
    395. 

  395. 	<IO Name="Rinse6.WaterLevel" IOName="r_QDRD6_WATER_LEVEL"/>
    396. 

  396. 	<IO Name="Rinse6.WaferHolderClamp" IOName="c_QDRD6_WH_CLAMP"/>
    397. 

  397. 	<IO Name="Rinse6.N2Valve" IOName="c_QDRD6_LO_PRESSURE"/>
    398. 

  398. 	<IO Name="Rinse6.FillValve" IOName="c_QDRD6_DI_FILL"/>
    399. 

  399. 	<IO Name="Rinse6.DrainValve" IOName="c_QDRD6_DUMP"/>
    400. 

  400. 	<IO Name="Rinse6.WasteValve" IOName="c_QDRD6_MDRAIN"/>
    401. 

  401. 	</Module>
    402. 

  402. 	<Module Name="Reservoir">
    403. 

  403. 	<IO Name="Reservoir.DiReplenFlow" IOName="r_DIREPLEN_FLOW"/>
    404. 

  404. 	<IO Name="Reservoir.HighLevel" IOName="r_RES_HIGH_LEVEL"/>
    405. 

  405. 	
    406. 

  406. 	</Module>
    407. 

  407.   
    408. 

  408. 	<Module Name="Reservoir1">
    409. 

  409. 	<IO Name="Reservoir1.Flow" IOName="r_MBS1_FLOW"/>
    410. 

  410. 	<IO Name="Reservoir1.DiReplen" IOName="c_RES1_DI_REPLEN"/>
    411. 

  411. 	<IO Name="Reservoir1.PHFlowValve" IOName="c_PH1_FLOW_VALVE"/>
    412. 

  412. 	<IO Name="Reservoir1.WaterLevel" IOName="r_RES1_LEVEL_raw"/>
    413. 

  413. 	<IO Name="Reservoir1.LowLevel" IOName="r_RES1_LOW_LEVEL"/>
    414. 

  414. 	<IO Name="Reservoir1.SafetyHighLevel" IOName="r_RES1_HIGH_LEVEL"/>
    415. 

  415. 	<IO Name="Reservoir1.HedFlow" IOName="r_RES1_HED_FLOW"/>
    416. 

  416.     <IO Name="Reservoir1.ResPowerOn" IOName="c_RES1_POWER_ON"/>
    417. 

  417. 	<IO Name="Reservoir1.PHValue" IOName="r_pH1"/>
    418. 

  418. 	<IO Name="Reservoir1.HedPowerOn" IOName="c_HED1_POWER_ON"/>
    419. 

  419. 	</Module>
    420. 

  420. 	<Module Name="Reservoir2">
    421. 

  421. 	<IO Name="Reservoir2.Flow" IOName="r_MBS2_FLOW"/>
    422. 

  422. 	<IO Name="Reservoir2.DiReplen" IOName="c_RES2_DI_REPLEN"/>
    423. 

  423. 	<IO Name="Reservoir2.WaterLevel" IOName="r_RES2_LEVEL_raw"/>
    424. 

  424. 	<IO Name="Reservoir2.LowLevel" IOName="r_RES2_LOW_LEVEL"/>
    425. 

  425.     <IO Name="Reservoir2.SafetyHighLevel" IOName="r_RES2_HIGH_LEVEL"/>
    426. 

  426. 	<IO Name="Reservoir2.HedFlow" IOName="r_RES2_HED_FLOW"/>
    427. 

  427. 	<IO Name="Reservoir2.HedPowerOn" IOName="c_HED2_POWER_ON"/>
    428. 

  428. 	<IO Name="Reservoir2.ResPowerOn" IOName=""/>
    429. 

  429. 	<IO Name="Reservoir2.PHValue" IOName="r_pH2"/>
    430. 

  430. 	<IO Name="Reservoir2.ResPowerOn" IOName="c_RES2_POWER_ON"/>
    431. 

  431. 	</Module>
    432. 

  432. 	<Module Name="Reservoir3">
    433. 

  433. 	<IO Name="Reservoir3.Flow" IOName="r_MBS3_FLOW"/>
    434. 

  434. 	<IO Name="Reservoir3.DiReplen" IOName="c_RES3_DI_REPLEN"/>
    435. 

  435. 	<IO Name="Reservoir3.WaterLevel" IOName="r_RES3_LEVEL_raw"/>
    436. 

  436. 	<IO Name="Reservoir3.LowLevel" IOName="r_RES3_LOW_LEVEL"/>
    437. 

  437. 	<IO Name="Reservoir3.SafetyHighLevel" IOName="r_RES3_HIGH_LEVEL"/>
    438. 

  438. 	<IO Name="Reservoir3.HedFlow" IOName="r_RES3_HED_FLOW"/>
    439. 

  439. 	<IO Name="Reservoir3.HedPowerOn" IOName="c_HED3_POWER_ON"/>
    440. 

  440. 	<IO Name="Reservoir3.ResPowerOn" IOName=""/>
    441. 

  441. 	<IO Name="Reservoir3.PHValue" IOName="r_pH3"/>
    442. 

  442. 	<IO Name="Reservoir3.ResPowerOn" IOName="c_RES3_POWER_ON"/>
    443. 

  443. 	</Module>
    444. 

  444.     <Module Name="Reservoir4">
    445. 

  445. 	<IO Name="Reservoir4.Flow" IOName="r_MBS4_FLOW"/>
    446. 

  446. 	<IO Name="Reservoir4.DiReplen" IOName="c_RES4_DI_REPLEN"/>
    447. 

  447. 	<IO Name="Reservoir4.WaterLevel" IOName="r_RES4_LEVEL_raw"/>
    448. 

  448. 	<IO Name="Reservoir4.LowLevel" IOName="r_RES4_LOW_LEVEL"/>
    449. 

  449. 	<IO Name="Reservoir4.SafetyHighLevel" IOName="r_RES4_HIGH_LEVEL"/>
    450. 

  450. 	<IO Name="Reservoir4.HedFlow" IOName="r_RES4_HED_FLOW"/>
    451. 

  451. 	<IO Name="Reservoir4.HedPowerOn" IOName="c_HED4_POWER_ON"/>
    452. 

  452. 	<IO Name="Reservoir4.ResPowerOn" IOName=""/>
    453. 

  453. 	<IO Name="Reservoir4.PHValue" IOName="r_pH4"/>
    454. 

  454. 	<IO Name="Reservoir4.ResPowerOn" IOName="c_RES4_POWER_ON"/>
    455. 

  455. 	</Module>
    456. 

  456.   
    457. 

  457. 	<Module Name="Metal1">
    458. 

  458. 	<IO Name="Metal1.CellFlow" IOName="r_PUMP1_FLOW"/>
    459. 

  459. 	<IO Name="Metal1.CellPump" IOName=""/>
    460. 

  460. 	<IO Name="Metal1.RegulatPump" IOName="c_METAL1_PUMP_ON"/>
    461. 

  461. 	<IO Name="Metal1.Circulation" IOName="c_METAL1_CIRCULATION"/>
    462. 

  462. 	<IO Name="Metal1.WaferHolderClamp" IOName="c_METAL1_WH_CLAMP"/>
    463. 

  463. 	<IO Name="Metal1.RegulatePumpSignalIn" IOName="r_METAL1_PUMP_ON"/>
    464. 

  464. 	<IO Name="Metal1.RegulatePumpSpeed" IOName="c_METAL1_PUMP_ON_SPEED"/>
    465. 

  465. 	</Module>
    466. 

  466. 	<Module Name="Metal2">
    467. 

  467. 	<IO Name="Metal2.CellFlow" IOName="r_PUMP2_FLOW"/>
    468. 

  468. 	<IO Name="Metal2.CellPump" IOName="c_METAL2_PUMP_ON"/>
    469. 

  469. 	<IO Name="Metal2.RegulatPump" IOName=""/>
    470. 

  470. 	<IO Name="Metal2.Circulation" IOName="c_METAL2_CIRCULATION"/>
    471. 

  471. 	<IO Name="Metal2.WaferHolderClamp" IOName="c_METAL2_WH_CLAMP"/>
    472. 

  472. 	<IO Name="Metal2.RegulatePumpSignalIn" IOName=""/>
    473. 

  473. 	<IO Name="Metal2.RegulatePumpSpeed" IOName=""/>
    474. 

  474. 	</Module>
    475. 

  475. 	<Module Name="Metal3">
    476. 

  476. 	<IO Name="Metal3.CellFlow" IOName="r_PUMP3_FLOW"/>
    477. 

  477. 	<IO Name="Metal3.CellPump" IOName="c_METAL3_PUMP_ON"/>
    478. 

  478. 	<IO Name="Metal3.RegulatPump" IOName=""/>
    479. 

  479. 	<IO Name="Metal3.Circulation" IOName="c_METAL3_CIRCULATION"/>
    480. 

  480. 	<IO Name="Metal3.WaferHolderClamp" IOName="c_METAL3_WH_CLAMP"/>
    481. 

  481. 	<IO Name="Metal3.RegulatePumpSignalIn" IOName=""/>
    482. 

  482. 	<IO Name="Metal3.RegulatePumpSpeed" IOName=""/>
    483. 

  483. 	</Module>
    484. 

  484. 	<Module Name="Metal4">
    485. 

  485. 	<IO Name="Metal4.CellFlow" IOName="r_PUMP4_FLOW"/>
    486. 

  486. 	<IO Name="Metal4.CellPump" IOName="c_METAL4_PUMP_ON"/>
    487. 

  487. 	<IO Name="Metal4.RegulatPump" IOName=""/>
    488. 

  488. 	<IO Name="Metal4.Circulation" IOName="c_METAL4_CIRCULATION"/>
    489. 

  489. 	<IO Name="Metal4.WaferHolderClamp" IOName="c_METAL4_WH_CLAMP"/>
    490. 

  490. 	<IO Name="Metal4.RegulatePumpSignalIn" IOName=""/>
    491. 

  491. 	<IO Name="Metal4.RegulatePumpSpeed" IOName=""/>
    492. 

  492. 	
    493. 

  493. 	</Module>
    494. 

  494. </BeckhoffModuleIOCfg>
    495.