CycleRobotCycleNewRoutine.cs 13 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.Util;
  6. using CyberX8_Core;
  7. using CyberX8_RT.Devices.AXIS;
  8. using CyberX8_RT.Devices.EFEM;
  9. using CyberX8_RT.Modules.LPs;
  10. using CyberX8_RT.Modules.Rinse;
  11. using MECF.Framework.Common.Equipment;
  12. using MECF.Framework.Common.Routine;
  13. using MECF.Framework.Common.Schedulers;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using MECF.Framework.Common.Utilities;
  16. using System;
  17. using System.Collections.Generic;
  18. using System.Linq;
  19. using System.Text;
  20. using System.Threading.Tasks;
  21. using static Mono.Security.X509.X520;
  22. namespace CyberX8_RT.Modules.EFEM
  23. {
  24. public class CycleRobotCycleNewRoutine : ModuleRoutineBase, IRoutine
  25. {
  26. private enum CycleRobotCycleStep
  27. {
  28. LoopStart,
  29. LoopRunRobotCycle,
  30. LoopRunRobotCycleWait,
  31. LoopEnd,
  32. End
  33. }
  34. /// <summary>
  35. /// Cycle次数
  36. /// </summary>
  37. private int _cycleTimes;
  38. /// <summary>
  39. /// 当前处于第几次Cycle
  40. /// </summary>
  41. private int _currentCycle;
  42. private object[] param;
  43. private RobotCycleMoveRoutine _cycleMoveRoutine;
  44. private List<ModuleName> _sequences;
  45. private int _alignerAngle;
  46. private List<EfemCycleAction> _actions;
  47. private int _dummySlotNumber = 25; //当前cycle中的dummy slot 数量
  48. public CycleRobotCycleNewRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  49. {
  50. _cycleMoveRoutine = new RobotCycleMoveRoutine(efem);
  51. }
  52. public RState Start(params object[] objs)
  53. {
  54. string str = objs[0].ToString();
  55. _sequences = new List<ModuleName>();
  56. foreach(string item in str.Split('-'))
  57. {
  58. _sequences.Add((ModuleName)Enum.Parse(typeof(ModuleName), item));
  59. }
  60. if(!CheckRobotCyclePreCondiction(_sequences))
  61. {
  62. return RState.Failed;
  63. }
  64. _cycleTimes=(int)objs[1];
  65. _alignerAngle = (int)objs[2];
  66. _actions = new List<EfemCycleAction>();
  67. GenerateCycleAction();
  68. if (_cycleTimes < 1)
  69. {
  70. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Input Robot Cycle Times{_cycleTimes} error");
  71. return RState.Failed;
  72. }
  73. return Runner.Start(Module, "Start CycleRobotCycleRoutine");
  74. }
  75. private void GenerateCycleAction()
  76. {
  77. if (!ModuleHelper.IsLoadPort(_sequences[0]))
  78. {
  79. return;
  80. }
  81. WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(_sequences[0]);
  82. int count = 0;
  83. foreach (WaferInfo item in waferInfos)
  84. {
  85. if (item.IsEmpty)
  86. {
  87. continue;
  88. }
  89. _actions.AddRange(GenerateCycle(_sequences[0], item.Slot, _sequences[1], ModuleHelper.IsDummy(_sequences[1]) ? count : 0));
  90. for (int i = 1; i < _sequences.Count; i++)
  91. {
  92. if (i == 1)
  93. {
  94. _actions.AddRange(GenerateCycle(_sequences[i], ModuleHelper.IsDummy(_sequences[i]) ? count : 0, _sequences[i + 1],
  95. ModuleHelper.IsDummy(_sequences[i + 1]) ? count : 0));
  96. }
  97. else if (i == _sequences.Count - 1)
  98. {
  99. _actions.AddRange(GenerateCycle(_sequences[i], ModuleHelper.IsDummy(_sequences[i]) ? count : 0, _sequences[0],
  100. item.Slot));
  101. }
  102. if (ModuleHelper.IsDummy(_sequences[i]))
  103. {
  104. WaferInfo[] dummywaferInfos = WaferManager.Instance.GetWafers(_sequences[i]);
  105. if (dummywaferInfos != null)
  106. {
  107. _dummySlotNumber = dummywaferInfos.Length;
  108. }
  109. }
  110. }
  111. count++;
  112. if(count >= _dummySlotNumber)
  113. {
  114. count = 0;
  115. }
  116. }
  117. }
  118. private List<EfemCycleAction> GenerateCycle(ModuleName source,int sourceSlot,ModuleName destModule,int destSlot)
  119. {
  120. List<EfemCycleAction> actions = new List<EfemCycleAction>();
  121. if (source == ModuleName.Aligner1)
  122. {
  123. EfemCycleAction action = new EfemCycleAction();
  124. action.Action = "Align";
  125. action.Parameter = _alignerAngle;
  126. actions.Add(action);
  127. }
  128. EfemCycleAction pick = new EfemCycleAction();
  129. MoveItem pickMoveItem = new MoveItem();
  130. pickMoveItem.SourceModule = source;
  131. pickMoveItem.SourceSlot = sourceSlot;
  132. pick.Parameter = pickMoveItem;
  133. pick.Action = "Pick";
  134. actions.Add(pick);
  135. EfemCycleAction place = new EfemCycleAction();
  136. MoveItem placeMoveItem = new MoveItem();
  137. placeMoveItem.DestinationModule = destModule;
  138. placeMoveItem.DestinationSlot = destSlot;
  139. place.Parameter = placeMoveItem;
  140. place.Action = "Place";
  141. actions.Add(place);
  142. return actions;
  143. }
  144. public RState Monitor()
  145. {
  146. Runner.LoopStart(CycleRobotCycleStep.LoopStart, "Loop StartCycleRobotCycleRoutine", _cycleTimes, NullFun, _delay_1ms)
  147. .LoopRun(CycleRobotCycleStep.LoopRunRobotCycle, () => _cycleMoveRoutine.Start(_actions) == RState.Running,_delay_1ms)
  148. .LoopRunWithStopStatus(CycleRobotCycleStep.LoopRunRobotCycleWait, () => { return CommonFunction.CheckRoutineEndState(_cycleMoveRoutine); },
  149. () => CheckRoutineStopStatus(_cycleMoveRoutine, "CycleRobotCycleRoutine failed"))
  150. .LoopEnd(CycleRobotCycleStep.LoopEnd, UpdateCycleCount, _delay_1ms)
  151. .End(CycleRobotCycleStep.End, AchievedCycleCount, _delay_1ms);
  152. return Runner.Status;
  153. }
  154. private bool CheckRoutineStopStatus(IRoutine routine, string error)
  155. {
  156. bool result = CommonFunction.CheckRoutineStopState(routine);
  157. if (result)
  158. {
  159. Stop($"{error}");
  160. }
  161. return result;
  162. }
  163. /// <summary>
  164. /// Abort
  165. /// </summary>
  166. public void Abort()
  167. {
  168. Runner.Stop("CycleRobotCycleRoutine Abort");
  169. }
  170. /// <summary>
  171. /// 统计完成的Cycle次数
  172. /// </summary>
  173. /// <returns></returns>
  174. private bool UpdateCycleCount()
  175. {
  176. _currentCycle += 1;
  177. return true;
  178. }
  179. /// <summary>
  180. ///
  181. /// </summary>
  182. /// <returns></returns>
  183. private bool AchievedCycleCount()
  184. {
  185. _currentCycle -= 1;
  186. return true;
  187. }
  188. /// <summary>
  189. /// 获取当前Cycle次数
  190. /// </summary>
  191. /// <returns></returns>
  192. public int GetCurrentCycle()
  193. {
  194. return _currentCycle;
  195. }
  196. private bool CheckRobotCyclePreCondiction(List<ModuleName> lists)
  197. {
  198. bool result = true;
  199. //Robot
  200. if (!CheckRobotStatus())
  201. {
  202. return false;
  203. }
  204. //LP
  205. if(lists.Contains(ModuleName.LP1))
  206. {
  207. if (!CheckLoadPortStatus(ModuleName.LP1))
  208. {
  209. return false;
  210. };
  211. }
  212. else if (lists.Contains(ModuleName.LP2))
  213. {
  214. if (!CheckLoadPortStatus(ModuleName.LP2))
  215. {
  216. return false;
  217. };
  218. }
  219. else
  220. {
  221. if (!CheckLoadPortStatus(ModuleName.LP2))
  222. {
  223. return false;
  224. };
  225. }
  226. //Dummy
  227. if (lists.Contains(ModuleName.Dummy1))
  228. {
  229. if (!CheckDummyStatus(ModuleName.Dummy1))
  230. {
  231. return false;
  232. };
  233. }
  234. else if(lists.Contains(ModuleName.Dummy2))
  235. {
  236. if (!CheckDummyStatus(ModuleName.Dummy2))
  237. {
  238. return false;
  239. };
  240. }
  241. //Puf
  242. if (lists.Contains(ModuleName.PUF1) && !CheckPufStatus(ModuleName.PUF1))
  243. {
  244. return false ;
  245. }
  246. //Srd
  247. if (lists.Contains(ModuleName.SRD1))
  248. {
  249. if (!CheckSrdStatus(ModuleName.SRD1))
  250. {
  251. return false;
  252. };
  253. }
  254. else if(lists.Contains(ModuleName.SRD2))
  255. {
  256. if (!CheckSrdStatus(ModuleName.SRD2))
  257. {
  258. return false;
  259. };
  260. }
  261. return result;
  262. }
  263. //检查robot状态
  264. private bool CheckRobotStatus()
  265. {
  266. bool result = true;
  267. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  268. {
  269. Stop($"Efem robot arm already has a wafer, cannot do the RobotCycle action");
  270. result = false;
  271. }
  272. return result;
  273. }
  274. //检查loadport状态
  275. private bool CheckLoadPortStatus(ModuleName loadpoartName)
  276. {
  277. bool result = true;
  278. if (ModuleHelper.IsInstalled(loadpoartName))
  279. {
  280. Loadport loadPort = GetLoadPort(loadpoartName);
  281. if (loadPort == null)
  282. {
  283. Stop($"{loadpoartName} is null");
  284. return false;
  285. }
  286. WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(loadpoartName);
  287. if (waferInfos.Length < 1)
  288. {
  289. Stop($"there is no wafer in {loadpoartName}");
  290. return false;
  291. }
  292. }
  293. else
  294. {
  295. Stop($"{loadpoartName} is not installed");
  296. return false;
  297. }
  298. return result;
  299. }
  300. private Loadport GetLoadPort(ModuleName station)
  301. {
  302. LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);
  303. return loadPortModule.LPDevice;
  304. }
  305. //Dummy状态判断
  306. private bool CheckDummyStatus(ModuleName dummyName)
  307. {
  308. bool result = true;
  309. if (!ModuleHelper.IsInstalled(dummyName))
  310. {
  311. Stop($"{dummyName} is not installed");
  312. return false;
  313. }
  314. //若dummy存在wafer,需要人工处理
  315. DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(dummyName - ModuleName.Dummy1);
  316. if (dummyDevice != null)
  317. {
  318. if (!dummyDevice.HasCassette)
  319. {
  320. Stop($"{dummyName} dose not have cassette");
  321. return false;
  322. }
  323. WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(dummyName);
  324. if (waferInfos.Length > 0)
  325. {
  326. foreach (var item in waferInfos)
  327. {
  328. if (item != null && !item.IsEmpty)
  329. {
  330. Stop($"There are wafers inside the {dummyName},cannot do the RobotCycle action");
  331. return false;
  332. }
  333. }
  334. }
  335. }
  336. return result;
  337. }
  338. //检查puf
  339. private bool CheckPufStatus(ModuleName pufName)
  340. {
  341. bool result = true;
  342. if (!ModuleHelper.IsInstalled(pufName))
  343. {
  344. Stop($"{pufName} is not install");
  345. return false;
  346. }
  347. JetAxisBase puf1RotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.PUF1}.Rotation");
  348. if (puf1RotationAxis == null)
  349. {
  350. Stop("Puf1 Rotation Axis is null");
  351. return false;
  352. }
  353. double puf1RotationPosition = puf1RotationAxis.MotionData.MotorPosition;
  354. if ( !puf1RotationAxis.CheckPositionIsInStation(puf1RotationPosition, "Robot"))
  355. {
  356. Stop($"PUF1 Rotation {puf1RotationPosition} is not in Robot");
  357. return false;
  358. }
  359. return result;
  360. }
  361. //检查srd
  362. private bool CheckSrdStatus(ModuleName SrdName)
  363. {
  364. bool result = true;
  365. if (!ModuleHelper.IsInstalled(SrdName))
  366. {
  367. Stop($"{SrdName} is not install");
  368. return false;
  369. }
  370. return result;
  371. }
  372. }
  373. }