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CyberX8
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WagoControllerCfg.xml

WagoControllerCfg.xml 20 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <WagoControllerConfig>
    3. 

  3.   <WagoDeviceConfig Module="Loader" IpAddress="10.0.0.12" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1"> 
    4. 

  4. 	<Dig_In>
    5. 

  5. 		<DIGroup Name="N5">
    6. 

  6. 			<DI Name="r_Cassette_1_150" Address="0" Invert="false"/>
    7. 

  7. 			<DI Name="r_Cassette_1_100"  Address="1" Invert="false"/>
    8. 

  8. 			<DI Name="r_Cassette_1_200"  Address="2" Invert="false"/>
    9. 

  9. 			<DI Name="r_Cassette_2_150"  Address="3" Invert="false"/>
    10. 

  10. 			<DI Name="r_Cassette_2_100"  Address="4" Invert="false"/>
    11. 

  11. 			<DI Name="r_Cassette_2_200"  Address="5" Invert="false"/>
    12. 

  12. 			<DI Name="r_Cassette_3_150"  Address="6" Invert="false"/>
    13. 

  13. 			<DI Name="r_Cassette_3_100"  Address="7" Invert="false"/>
    14. 

  14. 			<DI Name="r_Cassette_3_200"  Address="8" Invert="false"/>
    15. 

  15. 			<DI Name="r_Dummy_1_150"  Address="9" Invert="false"/>
    16. 

  16. 			<DI Name="r_Dummy_1_100"  Address="10" Invert="false"/>
    17. 

  17. 			<DI Name="r_Dummy_1_200"  Address="11" Invert="false"/>
    18. 

  18. 			<DI Name="r_Dummy_2_150"  Address="12" Invert="false"/>
    19. 

  19. 			<DI Name="r_Dummy_2_100"  Address="13" Invert="false"/>
    20. 

  20. 			<DI Name="r_Dummy_2_200"  Address="14" Invert="false"/>
    21. 

  21. 			<DI Name="DI15"  Address="15" Invert="false"/>
    22. 

  22. 		</DIGroup>
    23. 

  23. 		<DIGroup Name="N6">
    24. 

  24. 			<DI Name="r_LoaderA_Wafer_Present"  Address="16" Invert="false"/>
    25. 

  25. 			<DI Name="r_LoaderB_Wafer_Present"  Address="17" Invert="false"/>
    26. 

  26. 			<DI Name="r_Cathode_Present"  Address="18" Invert="false"/>
    27. 

  27. 			<DI Name="DI19"  Address="19" Invert="false"/>
    28. 

  28. 			<DI Name="DI20"  Address="20" Invert="false"/>
    29. 

  29. 			<DI Name="DI21"  Address="21" Invert="false"/>
    30. 

  30. 			<DI Name="DI22"  Address="22" Invert="false"/>
    31. 

  31. 			<DI Name="DI23"  Address="23" Invert="false"/>
    32. 

  32. 			<DI Name="DI24"  Address="24" Invert="false"/>
    33. 

  33. 			<DI Name="DI25"  Address="25" Invert="false"/>
    34. 

  34. 			<DI Name="r_LOADERA_CRS_CURTAIN_1"  Address="26" Invert="false"/>
    35. 

  35. 			<DI Name="r_LOADERA_CRS_CURTAIN_2"  Address="27" Invert="false"/>
    36. 

  36. 			<DI Name="r_LOADERA_CRS_CURTAIN_3"  Address="28" Invert="false"/>
    37. 

  37. 			<DI Name="r_LOADERA_CRS_CURTAIN_4"  Address="29" Invert="false"/>
    38. 

  38. 			<DI Name="r_LOADERA_CRS_CURTAIN_5"  Address="30" Invert="false"/>
    39. 

  39. 			<DI Name="r_LOADERA_CRS_CURTAIN_6"  Address="31" Invert="false"/>
    40. 

  40. 		</DIGroup>
    41. 

  41. 	</Dig_In>
    42. 

  42. 	<Dig_Out>
    43. 

  43. 		<DOGroup Name="N7">
    44. 

  44. 			<DO Name="c_System_Alarm"  Address="512" Invert="false"/>
    45. 

  45. 			<DO Name="c_Pole_Red"  Address="513" Invert="false"/>
    46. 

  46. 			<DO Name="c_Pole_Amber"  Address="514" Invert="false"/>
    47. 

  47. 			<DO Name="c_Pole_Green"  Address="515" Invert="false"/>
    48. 

  48. 			<DO Name="c_Pole_Blue"  Address="516" Invert="false"/>
    49. 

  49. 			<DO Name="c_System_Alarm2"  Address="517" Invert="false"/>
    50. 

  50. 			<DO Name="c_VACUUM_TEST"  Address="518" Invert="false"/>
    51. 

  51. 			<DO Name="DO7"  Address="519" Invert="false"/>
    52. 

  52. 			<DO Name="DO8"  Address="520" Invert="false"/>
    53. 

  53. 			<DO Name="DO9"  Address="521" Invert="false"/>
    54. 

  54. 			<DO Name="DO10"  Address="522" Invert="false"/>
    55. 

  55. 			<DO Name="DO11"  Address="523" Invert="false"/>
    56. 

  56. 			<DO Name="DO12"  Address="524" Invert="false"/>
    57. 

  57. 			<DO Name="DO13"  Address="525" Invert="false"/>
    58. 

  58. 			<DO Name="DO14"  Address="526" Invert="false"/>
    59. 

  59. 			<DO Name="DO15"  Address="527" Invert="false"/>
    60. 

  60. 		</DOGroup>
    61. 

  61. 		<DOGroup Name="N9">
    62. 

  62. 			<DO Name="DO16"  Address="527" Invert="false"/>
    63. 

  63. 			<DO Name="DO17"  Address="528" Invert="false"/>			
    64. 

  64. 		</DOGroup>
    65. 

  65. 		<DOGroup Name="N10">
    66. 

  66. 			<DO Name="DO18"  Address="529" Invert="false"/>
    67. 

  67. 			<DO Name="DO9"  Address="530" Invert="false"/>			
    68. 

  68. 		</DOGroup>
    69. 

  69. 		<DOGroup Name="N11">
    70. 

  70. 			<DO Name="DO20"  Address="531" Invert="false"/>
    71. 

  71. 			<DO Name="DO21"  Address="532" Invert="false"/>			
    72. 

  72. 		</DOGroup>
    73. 

  73. 	</Dig_Out>
    74. 

  74. 	<Ano_In>
    75. 

  75. 		<AIGroup Name="N1">
    76. 

  76. 			<AI Name="AI1"  Address="0" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    77. 

  77. 			<AI Name="AI2"  Address="1" DataType="short"/>
    78. 

  78. 			<AI Name="AI3"  Address="2" DataType="short"/>
    79. 

  79. 			<AI Name="AI4"  Address="3" DataType="short"/>
    80. 

  80. 			<AI Name="r_LoaderA_LS_Vacuum_anlg"  Address="4" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    81. 

  81. 			<AI Name="r_LoaderB_LS_Vacuum_anlg"  Address="5" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    82. 

  82. 			<AI Name="AI6"  Address="6" DataType="short"/>
    83. 

  83. 			<AI Name="r_LOADER_GasFlowSensor_FLOW"  Address="7" Scaling="0=3370, 500=17000" DataType="short"/>
    84. 

  84. 		</AIGroup>
    85. 

  85. 		<AIGroup Name="N2">
    86. 

  86. 			<AI Name="r_LOADERA_BERNOULLI_PRESSURE"  Address="8" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    87. 

  87. 			<AI Name="r_LOADERB_BERNOULLI_PRESSURE"  Address="9" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    88. 

  88. 			<AI Name="r_LOADERA_CHUCK_BLADDER"  Address="10" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    89. 

  89. 			<AI Name="r_LOADERB_CHUCK_BLADDER"  Address="11" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    90. 

  90. 			<AI Name="r_LOADERA_WS_BLADDER_PRESSURE"  Address="12" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    91. 

  91. 			<AI Name="r_LOADERB_WS_BLADDER_PRESSURE"  Address="13" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    92. 

  92. 			<AI Name="r_SPUF_VAC"  Address="14" Scaling="1=0,5=-757.5" DataType="short"/>
    93. 

  93. 			<AI Name="r_LOADER_GasFlowSensor_VACUUM"  Address="15" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    94. 

  94. 		</AIGroup>
    95. 

  95. 	</Ano_In>
    96. 

  96. 	<Ano_Out>
    97. 

  97. 		<AOGroup Name="N3">
    98. 

  98. 			<AO Name="AO1"  Address="512" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    99. 

  99. 			<AO Name="AO2"  Address="513" DataType="short"/>
    100. 

  100. 			<AO Name="AO3"  Address="514" DataType="short"/>
    101. 

  101. 			<AO Name="AO4"  Address="515" DataType="short"/>
    102. 

  102. 			<AO Name="AO5"  Address="516" DataType="short"/>
    103. 

  103. 			<AO Name="AO6"  Address="517" DataType="short"/>
    104. 

  104. 			<AO Name="AO7"  Address="518" DataType="short"/>
    105. 

  105. 			<AO Name="AO8"  Address="519" DataType="short"/>
    106. 

  106. 		</AOGroup>
    107. 

  107. 		<AOGroup Name="N4">
    108. 

  108. 			<AO Name="AO9"  Address="520" DataType="short"/>
    109. 

  109. 			<AO Name="AO10"  Address="521" DataType="short"/>
    110. 

  110. 			<AO Name="AO11"  Address="522" DataType="short"/>
    111. 

  111. 			<AO Name="AO12"  Address="523" DataType="short"/>
    112. 

  112. 			<AO Name="AO13"  Address="524" DataType="short"/>
    113. 

  113. 			<AO Name="AO14"  Address="525" DataType="short"/>
    114. 

  114. 			<AO Name="AO15"  Address="526" DataType="short"/>
    115. 

  115. 			<AO Name="AO16"  Address="527" DataType="ushort"/>
    116. 

  116. 		</AOGroup>		
    117. 

  117. 	</Ano_Out>
    118. 

  118.   </WagoDeviceConfig>
    119. 

  119.    <WagoDeviceConfig Module="PUF" IpAddress="10.0.0.13" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1"> 
    120. 

  120. 	<Dig_In>
    121. 

  121. 		<DIGroup Name="N61">
    122. 

  122. 			<DI Name="r_PUF_A_CHUCK_OUT"  Address="0" Invert="false"/>
    123. 

  123. 			<DI Name="r_PUF_A_CHUCK_IN"  Address="1" Invert="false"/>
    124. 

  124. 			<DI Name="r_PUF_B_CHUCK_OUT"  Address="2" Invert="false"/>
    125. 

  125. 			<DI Name="r_PUF_B_CHUCK_IN"  Address="3" Invert="false"/>
    126. 

  126. 			<DI Name="DI4"  Address="4" Invert="false"/>
    127. 

  127. 			<DI Name="DI5"  Address="5" Invert="false"/>
    128. 

  128. 			<DI Name="DI6"  Address="6" Invert="false"/>
    129. 

  129. 			<DI Name="DI7"  Address="7" Invert="false"/>
    130. 

  130. 		</DIGroup>
    131. 

  131. 	</Dig_In>
    132. 

  132. 	<Dig_Out>
    133. 

  133. 		<DOGroup Name="N62">
    134. 

  134. 			<DO Name="c_PUF_CHUCK"  Address="512" Invert="false"/>
    135. 

  135. 			<DO Name="D01"  Address="513" Invert="false"/>
    136. 

  136. 			<DO Name="D02"  Address="514" Invert="false"/>
    137. 

  137. 			<DO Name="D03"  Address="515" Invert="false"/>
    138. 

  138. 			<DO Name="D04"  Address="516" Invert="false"/>
    139. 

  139. 			<DO Name="D05"  Address="517" Invert="false"/>
    140. 

  140. 			<DO Name="D06"  Address="518" Invert="false"/>
    141. 

  141. 			<DO Name="D07"  Address="519" Invert="false"/>
    142. 

  142. 		</DOGroup>
    143. 

  143. 	</Dig_Out>
    144. 

  144. 	<Ano_In>
    145. 

  145. 		<AIGroup Name="N60">
    146. 

  146. 			<AI Name="r_DPUF_A_CHUCK_A_VAC"  Address="0" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    147. 

  147. 			<AI Name="r_DPUF_A_CHUCK_B_VAC"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    148. 

  148. 			<AI Name="r_DIST_FRONT"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
    149. 

  149. 			<AI Name="r_DIST_REAR"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
    150. 

  150. 		</AIGroup>
    151. 

  151. 	</Ano_In>
    152. 

  152. 	<Ano_Out>
    153. 

  153. 	</Ano_Out>
    154. 

  154.   </WagoDeviceConfig>
    155. 

  155. 	<WagoDeviceConfig Module="Wago2" IpAddress="10.0.0.10" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
    156. 

  156. 		<Dig_In>
    157. 

  157. 			<DIGroup Name="20">
    158. 

  158. 				<DI Name="DI0"  Address="0" Invert="false"/>
    159. 

  159. 				<DI Name="DI1"  Address="1" Invert="false"/>
    160. 

  160. 				<DI Name="DI2"  Address="2" Invert="false"/>
    161. 

  161. 				<DI Name="DI3"  Address="3" Invert="false"/>
    162. 

  162. 				<DI Name="DI4"  Address="4" Invert="false"/>
    163. 

  163. 				<DI Name="DI5"  Address="5" Invert="false"/>
    164. 

  164. 				<DI Name="DI6"  Address="6" Invert="false"/>
    165. 

  165. 				<DI Name="DI7"  Address="7" Invert="false"/>
    166. 

  166. 				<DI Name="DI8"  Address="8" Invert="false"/>
    167. 

  167. 				<DI Name="DI9"  Address="9" Invert="false"/>
    168. 

  168. 				<DI Name="DI10"  Address="10" Invert="false"/>
    169. 

  169. 				<DI Name="DI11"  Address="11" Invert="false"/>
    170. 

  170. 				<DI Name="DI12"  Address="12" Invert="false"/>
    171. 

  171. 				<DI Name="DI13"  Address="13" Invert="false"/>
    172. 

  172. 				<DI Name="DI14"  Address="14" Invert="false"/>
    173. 

  173. 				<DI Name="DI15"  Address="15" Invert="false"/>
    174. 

  174. 			</DIGroup>
    175. 

  175. 			<DIGroup Name="21">
    176. 

  176. 				<DI Name="DI16"  Address="16" Invert="false"/>
    177. 

  177. 				<DI Name="DI17"  Address="17" Invert="false"/>
    178. 

  178. 				<DI Name="DI18"  Address="18" Invert="false"/>
    179. 

  179. 				<DI Name="DI19"  Address="19" Invert="false"/>
    180. 

  180. 				<DI Name="DI20"  Address="20" Invert="false"/>
    181. 

  181. 				<DI Name="DI21"  Address="21" Invert="false"/>
    182. 

  182. 				<DI Name="r_CONTAINMENT_FLUID"  Address="22" Invert="true"/>
    183. 

  183. 				<DI Name="r_DOOR_INLK_OK"  Address="23" Invert="false"/>
    184. 

  184. 				<DI Name="DI24"  Address="24" Invert="false"/>
    185. 

  185. 				<DI Name="DI25"  Address="25" Invert="false"/>
    186. 

  186. 				<DI Name="DI26"  Address="26" Invert="false"/>
    187. 

  187. 				<DI Name="DI27"  Address="27" Invert="false"/>
    188. 

  188. 				<DI Name="r_REAR_DOOR_INTLK"  Address="28" Invert="false"/>
    189. 

  189. 				<DI Name="r_SAMPLE_SYS_FLUID_NOT_PRESENT"  Address="29" Invert="false"/>
    190. 

  190. 				<DI Name="DI28"  Address="30" Invert="false"/>
    191. 

  191. 				<DI Name="DI29"  Address="31" Invert="false"/>
    192. 

  192. 			</DIGroup>
    193. 

  193. 			<DIGroup Name="22">
    194. 

  194. 				<DI Name="r_RES1_HI_LEVEL"  Address="32" Invert="false"/>
    195. 

  195. 				<DI Name="r_RES1_LOW_LEVEL"  Address="33" Invert="true"/>
    196. 

  196. 				<DI Name="r_RES2_HIGH_LEVEL"  Address="34" Invert="false"/>
    197. 

  197. 				<DI Name="r_RES2_LOW_LEVEL"  Address="35" Invert="true"/>
    198. 

  198. 				<DI Name="r_RES3_HIGH_LEVEL"  Address="36" Invert="false"/>
    199. 

  199. 				<DI Name="r_RES3_LOW_LEVEL"  Address="37" Invert="true"/>
    200. 

  200. 				<DI Name="r_RES4_HIGH_LEVEL"  Address="38" Invert="false"/>
    201. 

  201. 				<DI Name="r_RES4_LOW_LEVEL"  Address="39" Invert="true"/>
    202. 

  202. 				<DI Name="DI38"  Address="40" Invert="false"/>
    203. 

  203. 				<DI Name="DI39"  Address="41" Invert="false"/>
    204. 

  204. 				<DI Name="DI40"  Address="42" Invert="false"/>
    205. 

  205. 				<DI Name="DI41"  Address="43" Invert="false"/>
    206. 

  206. 				<DI Name="DI42"  Address="44" Invert="false"/>
    207. 

  207. 				<DI Name="DI43"  Address="45" Invert="false"/>
    208. 

  208. 				<DI Name="DI44"  Address="46" Invert="false"/>
    209. 

  209. 				<DI Name="DI45"  Address="47" Invert="false"/>
    210. 

  210. 			</DIGroup>
    211. 

  211. 			<DIGroup Name="30">
    212. 

  212. 				<DI Name="DI46"  Address="48" Invert="false"/>
    213. 

  213. 				<DI Name="DI47"  Address="49" Invert="false"/>
    214. 

  214. 			</DIGroup>
    215. 

  215. 		</Dig_In>
    216. 

  216. 		<Dig_Out>
    217. 

  217. 			<DOGroup Name="23">
    218. 

  218. 				<DO Name="c_CDA_ENABLE"  Address="512" Invert="false"/>
    219. 

  219. 				<DO Name="c_DI_ENABLE"  Address="513" Invert="false"/>
    220. 

  220. 				<DO Name="c_DI_FILL_ENABLE"  Address="514" Invert="false"/>
    221. 

  221. 				<DO Name="c_DI_REPLEN_ENABLE"  Address="515" Invert="false"/>
    222. 

  222. 				<DO Name="c_EXTERNAL_CDA_ENABLE"  Address="516" Invert="false"/>
    223. 

  223. 				<DO Name="c_HCW_ENABLE"  Address="517" Invert="false"/>
    224. 

  224. 				<DO Name="DO6"  Address="518" Invert="false"/>
    225. 

  225. 				<DO Name="c_N2_ENABLEc_QDRD1_LO_PRESSURE"  Address="519" Invert="false"/>
    226. 

  226. 				<DO Name="c_QDRD1_LO_PRESSURE"  Address="520" Invert="false"/>
    227. 

  227. 				<DO Name="c_QDRD2_LO_PRESSURE"  Address="521" Invert="false"/>
    228. 

  228. 				<DO Name="c_QDRD3_LO_PRESSURE"  Address="522" Invert="false"/>
    229. 

  229. 				<DO Name="c_QDRD4_LO_PRESSURE"  Address="523" Invert="false"/>
    230. 

  230. 				<DO Name="DO12"  Address="524" Invert="false"/>
    231. 

  231. 				<DO Name="DO13"  Address="525" Invert="false"/>
    232. 

  232. 				<DO Name="DO14"  Address="526" Invert="false"/>
    233. 

  233. 				<DO Name="DO15"  Address="527" Invert="false"/>
    234. 

  234. 			</DOGroup>
    235. 

  235. 			<DOGroup Name="24">
    236. 

  236. 				<DO Name="DO16"  Address="528" Invert="false"/>
    237. 

  237. 				<DO Name="DO17"  Address="529" Invert="false"/>
    238. 

  238. 				<DO Name="DO18"  Address="530" Invert="false"/>
    239. 

  239. 				<DO Name="DO19"  Address="531" Invert="false"/>
    240. 

  240. 				<DO Name="DO20"  Address="532" Invert="false"/>
    241. 

  241. 				<DO Name="DO21"  Address="533" Invert="false"/>
    242. 

  242. 				<DO Name="DO22"  Address="534" Invert="false"/>
    243. 

  243. 				<DO Name="DO23"  Address="535" Invert="false"/>
    244. 

  244. 				<DO Name="DO24"  Address="536" Invert="false"/>
    245. 

  245. 				<DO Name="DO25"  Address="537" Invert="false"/>
    246. 

  246. 				<DO Name="DO26"  Address="538" Invert="false"/>
    247. 

  247. 				<DO Name="DO27"  Address="539" Invert="false"/>
    248. 

  248. 				<DO Name="DO28"  Address="540" Invert="false"/>
    249. 

  249. 				<DO Name="DO29"  Address="541" Invert="false"/>
    250. 

  250. 				<DO Name="DO30"  Address="542" Invert="false"/>
    251. 

  251. 				<DO Name="DO31"  Address="543" Invert="false"/>
    252. 

  252. 			</DOGroup>
    253. 

  253. 			<DOGroup Name="25">
    254. 

  254. 				<DO Name="c_METAL1_PUMP_ON"  Address="544" Invert="false"/>
    255. 

  255. 				<DO Name="DO33"  Address="545" Invert="false"/>
    256. 

  256. 			</DOGroup>
    257. 

  257. 			<DOGroup Name="26">
    258. 

  258. 				<DO Name="c_METAL2_PUMP_ON"  Address="546" Invert="false"/>
    259. 

  259. 				<DO Name="c_HED1_POWER_ON"  Address="547" Invert="false"/>
    260. 

  260. 			</DOGroup>
    261. 

  261. 			<DOGroup Name="27">
    262. 

  262. 				<DO Name="c_HED2_POWER_ON"  Address="548" Invert="false"/>
    263. 

  263. 				<DO Name="DO37"  Address="549" Invert="false"/>
    264. 

  264. 			</DOGroup>
    265. 

  265. 			<DOGroup Name="28">
    266. 

  266. 				<DO Name="c_METAL3_PUMP_ON"  Address="550" Invert="false"/>
    267. 

  267. 				<DO Name="DO39"  Address="551" Invert="false"/>
    268. 

  268. 			</DOGroup>
    269. 

  269. 			<DOGroup Name="29">
    270. 

  270. 				<DO Name="c_RES3_POWER_ON"  Address="552" Invert="false"/>
    271. 

  271. 				<DO Name="DO41"  Address="553" Invert="false"/>
    272. 

  272. 			</DOGroup>
    273. 

  273. 		</Dig_Out>
    274. 

  274. 		<Ano_In>
    275. 

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    276. 

  276. 				<AI Name="r_pH2"  Address="0" Scaling="0=3276.7,14=32767" DataType="short"/>
    277. 

  277. 				<AI Name="AI1"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    278. 

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    279. 

  279. 				<AI Name="AI3"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
    280. 

  280. 			</AIGroup>
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    282. 

  282. 				<AI Name="AI4"  Address="4" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    283. 

  283. 				<AI Name="AI5"  Address="5" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
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  284. 				<AI Name="r_PREWET_DI_PRESS"  Address="6" Scaling="0=3276.7,100=32767" DataType="short"/>
    285. 

  285. 				<AI Name="AI7"  Address="7" Scaling="13=0,150=32767" DataType="short"/>
    286. 

  286. 			</AIGroup>
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    288. 

  288. 				<AI Name="AI8"  Address="8" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    289. 

  289. 				<AI Name="AI9"  Address="9" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    290. 

  290. 				<AI Name="r_PREWET_FLOW"  Address="10" Scaling="0=3276.7,40=32767" DataType="short"/>
    291. 

  291. 				<AI Name="r_DI_WATER_PRESSURE"  Address="11" Scaling="0=3276.7,100=32767" DataType="short"/>
    292. 

  292. 			</AIGroup>
    293. 

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    294. 

  294. 				<AI Name="r_PUMP1_FLOW"  Address="12" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    295. 

  295. 				<AI Name="AI13"  Address="13" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    296. 

  296. 				<AI Name="r_PUMP2_FLOW"  Address="14" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    297. 

  297. 				<AI Name="AI15"  Address="15" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    298. 

  298. 			</AIGroup>
    299. 

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    300. 

  300. 				<AI Name="r_PUMP3_FLOW"  Address="16" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    301. 

  301. 				<AI Name="AI17"  Address="17" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    302. 

  302. 				<AI Name="r_PUMP4_FLOW"  Address="18" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    303. 

  303. 				<AI Name="AI19"  Address="19" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    304. 

  304. 			</AIGroup>
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  305. 			<AIGroup Name="6">
    306. 

  306. 				<AI Name="AI20"  Address="20" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    307. 

  307. 				<AI Name="AI21"  Address="21" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    308. 

  308. 				<AI Name="AI22"  Address="22" Scaling="13=0,150=32767" DataType="short"/>
    309. 

  309. 				<AI Name="AI23"  Address="23" Scaling="13=0,150=32767" DataType="short"/>
    310. 

  310. 			</AIGroup>
    311. 

  311. 			<AIGroup Name="7">
    312. 

  312. 				<AI Name="AI24"  Address="24" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    313. 

  313. 				<AI Name="AI25"  Address="25" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    314. 

  314. 				<AI Name="AI26"  Address="26" Scaling="13=0,150=32767" DataType="short"/>
    315. 

  315. 				<AI Name="AI27"  Address="27" Scaling="13=0,150=32767" DataType="short"/>
    316. 

  316. 			</AIGroup>
    317. 

  317. 			<AIGroup Name="8">
    318. 

  318. 				<AI Name="r_QDRD1_WATER_LEVEL"  Address="28" Scaling="0=3276.7,100=32767" DataType="short"/>
    319. 

  319. 				<AI Name="r_QDRD2_WATER_LEVEL"  Address="29" Scaling="0=3276.7,100=32767" DataType="short"/>
    320. 

  320. 				<AI Name="r_QDRD3_WATER_LEVEL"  Address="30" Scaling="0=3276.7,100=32767" DataType="short"/>
    321. 

  321. 				<AI Name="r_QDRD4_WATER_LEVEL"  Address="31" Scaling="0=3276.7,100=32767" DataType="short"/>
    322. 

  322. 			</AIGroup>
    323. 

  323. 			<AIGroup Name="9">
    324. 

  324. 				<AI Name="AI32"  Address="32" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    325. 

  325. 				<AI Name="AI33"  Address="33" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    326. 

  326. 				<AI Name="AI34"  Address="34" Scaling="13=0,150=32767" DataType="short"/>
    327. 

  327. 				<AI Name="AI35"  Address="35" Scaling="13=0,150=32767" DataType="short"/>
    328. 

  328. 			</AIGroup>
    329. 

  329. 			<AIGroup Name="10">
    330. 

  330. 				<AI Name="r_RES_LEVEL_1_raw"  Address="36" Scaling="0=3276.7,100=32767" DataType="short"/>
    331. 

  331. 				<AI Name="r_RES_LEVEL_2_raw"  Address="37" Scaling="0=3276.7,100=32767" DataType="short"/>
    332. 

  332. 				<AI Name="r_RES_LEVEL_3_raw"  Address="38" Scaling="0=3276.7,100=32767" DataType="short"/>
    333. 

  333. 				<AI Name="r_RES_LEVEL_4_raw"  Address="39" Scaling="0=3276.7,100=32767" DataType="short"/>
    334. 

  334. 			</AIGroup>
    335. 

  335. 			<AIGroup Name="11">
    336. 

  336. 				<AI Name="AI40"  Address="40" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    337. 

  337. 				<AI Name="AI41"  Address="41" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    338. 

  338. 				<AI Name="AI42"  Address="42" Scaling="13=0,150=32767" DataType="short"/>
    339. 

  339. 				<AI Name="r_HCW_FLOW"  Address="43" Scaling="0=3276.7,40=32767" DataType="short"/>
    340. 

  340. 			</AIGroup>
    341. 

  341. 			<AIGroup Name="12">
    342. 

  342. 				<AI Name="r_CDA_EXTERNAL_PRESSURE"  Address="44" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    343. 

  343. 				<AI Name="r_CDA_HIGH_PRESSURE"  Address="45" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    344. 

  344. 				<AI Name="r_CDA_LOW_PRESSURE"  Address="46" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    345. 

  345. 				<AI Name="AI47"  Address="47" Scaling="13=0,150=32767" DataType="short"/>
    346. 

  346. 			</AIGroup>
    347. 

  347. 			<AIGroup Name="13">
    348. 

  348. 				<AI Name="AI48"  Address="48" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    349. 

  349. 				<AI Name="r_N2_1_LOW_PRESSURE"  Address="49" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    350. 

  350. 				<AI Name="r_N2_1_PRESSURE"  Address="50" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    351. 

  351. 				<AI Name="r_N2_2_LOW_PRESSURE"  Address="51" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    352. 

  352. 			</AIGroup>
    353. 

  353. 			<AIGroup Name="14">
    354. 

  354. 				<AI Name="r_N2_2_PRESSURE"  Address="52" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    355. 

  355. 				<AI Name="r_PROC_BALANCE_PRESSURE"  Address="53" Scaling="0=3276.7,14.5=16383.5" DataType="short"/>
    356. 

  356. 				<AI Name="r_SYSTEM_VACUUM"  Address="54" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    357. 

  357. 				<AI Name="AI55"  Address="55" Scaling="13=0,150=32767" DataType="short"/>
    358. 

  358. 			</AIGroup>
    359. 

  359. 		</Ano_In>
    360. 

  360. 		<Ano_Out>
    361. 

  361. 			<AOGroup Name="15">
    362. 

  362. 				<AO Name="AO1"  Address="512" DataType="short"/>
    363. 

  363. 				<AO Name="AO2"  Address="513" DataType="short"/>
    364. 

  364. 				<AO Name="AO3"  Address="514" DataType="short"/>
    365. 

  365. 				<AO Name="AO4"  Address="515" DataType="short"/>
    366. 

  366. 			</AOGroup>
    367. 

  367. 			<AOGroup Name="16">
    368. 

  368. 				<AO Name="AO5"  Address="516" DataType="short"/>
    369. 

  369. 				<AO Name="AO6"  Address="517" DataType="short"/>
    370. 

  370. 				<AO Name="AO7"  Address="518" DataType="short"/>
    371. 

  371. 				<AO Name="AO8"  Address="519" DataType="short"/>
    372. 

  372. 			</AOGroup>
    373. 

  373. 			<AOGroup Name="17">
    374. 

  374. 				<AO Name="AO9"  Address="516" DataType="short"/>
    375. 

  375. 				<AO Name="AO10"  Address="517" DataType="short"/>
    376. 

  376. 				<AO Name="AO11"  Address="518" DataType="short"/>
    377. 

  377. 				<AO Name="AO8"  Address="519" DataType="short"/>
    378. 

  378. 			</AOGroup>
    379. 

  379. 			<AOGroup Name="18">
    380. 

  380. 				<AO Name="AO12"  Address="516" DataType="short"/>
    381. 

  381. 				<AO Name="AO13"  Address="517" DataType="short"/>
    382. 

  382. 				<AO Name="AO14"  Address="518" DataType="short"/>
    383. 

  383. 				<AO Name="AO15"  Address="519" DataType="short"/>
    384. 

  384. 			</AOGroup>
    385. 

  385. 			<AOGroup Name="19">
    386. 

  386. 				<AO Name="AO16"  Address="516" DataType="short"/>
    387. 

  387. 				<AO Name="AO17"  Address="517" DataType="short"/>
    388. 

  388. 				<AO Name="AO18"  Address="518" DataType="short"/>
    389. 

  389. 				<AO Name="AO19"  Address="519" DataType="short"/>
    390. 

  390. 			</AOGroup>
    391. 

  391. 		</Ano_Out>
    392. 

  392. 	</WagoDeviceConfig>
    393. 

  393. </WagoControllerConfig>
    394.