SunWayEfemSimulator.cs 17 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.DataCenter;
  10. using System.Linq;
  11. using MECF.Framework.Common.DataCenter;
  12. using Aitex.Core.RT.ConfigCenter;
  13. using CyberX8_Simulator.Instances;
  14. using System.Collections.Generic;
  15. namespace CyberX8_Simulator.Devices
  16. {
  17. public class SunWayEfemSimulator : SocketDeviceSimulator
  18. {
  19. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  20. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  21. private const string ACK = "ACK";
  22. private readonly char[] delimiters = { ':', '/', '>', '|', ';' };
  23. private string[] _slotMap = new string[25];
  24. private string[] _slotDummy = new string[25];
  25. private PeriodicJob _HwThread;
  26. private bool _bCommReady;
  27. private bool _isDoorOpen;
  28. private bool _isLp1Placed;
  29. private bool _isLp2Placed;
  30. private bool _isLp3Placed;
  31. private bool _isLp1Clamped;
  32. private bool _isLp2Clamped;
  33. private bool _isLp3Clamped;
  34. private bool _isLP1Docked;
  35. private bool _isLP2Docked;
  36. private bool _isLP3Docked;
  37. public int WaferSize = 200;
  38. private int _speed = 20;
  39. private List<int> _lpStationNumber;
  40. private List<int> _dummyStationNumber;
  41. private readonly Queue<(string ack, TaskCompletionSource<bool> tcs)> _pendingAcks = new Queue<(string, TaskCompletionSource<bool>)>();
  42. private readonly object _syncRoot = new object();
  43. private bool _isPaused;
  44. public string SlotMap
  45. {
  46. get { return string.Join("", _slotMap); }
  47. }
  48. public bool _isVacuumError { get; set; }
  49. public bool _isAirError { get; set; }
  50. public bool _isFlowError { get; set; }
  51. public bool _isLeak { get; set; }
  52. public bool _isMaintain { get; set; }
  53. public bool _isWaferPresent { get; set; }
  54. public bool _isMaintainDoorOpen { get; private set; }
  55. public bool _isProtrude1 { get; set; }
  56. public bool _isProtrude2 { get; set; }
  57. public bool _isVAC { get; set; }
  58. public bool _isAIR { get; set; }
  59. private bool _isDoorOpen1;
  60. public bool IsDoorOpen1 { get { return _isDoorOpen1; } set { _isDoorOpen1 = value; SendLP1Data(); } }
  61. private bool _isDoorOpen2;
  62. public bool IsDoorOpen2 { get { return _isDoorOpen2; } set { _isDoorOpen2 = value;SendLP2Data(); } }
  63. private bool _isDoorOpen3;
  64. public bool IsDoorOpen3
  65. {
  66. get { return _isDoorOpen3; }
  67. set { _isDoorOpen3 = value; SendLP3Data(); }
  68. }
  69. public SunWayEfemSimulator() : base(1102, -1, "\r", ' ')
  70. {
  71. for (int i = 0; i < _slotMap.Length; i++)
  72. _slotMap[i] = "0";
  73. for(int i=0; i < _slotDummy.Length; i++)
  74. {
  75. _slotDummy[i]="0";
  76. }
  77. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  78. GetStationNumber();
  79. }
  80. private void Pause()
  81. {
  82. lock (_syncRoot)
  83. {
  84. _isPaused = true;
  85. }
  86. }
  87. private void Resume()
  88. {
  89. lock (_syncRoot)
  90. {
  91. _isPaused = false;
  92. // 发送所有积压的消息
  93. while (_pendingAcks.Count > 0)
  94. {
  95. var (ack, tcs) = _pendingAcks.Dequeue();
  96. OnWriteMessage(ack);
  97. tcs.TrySetResult(true);
  98. }
  99. }
  100. }
  101. private bool OnSendEvent()
  102. {
  103. if (IsConnected)
  104. {
  105. }
  106. return true;
  107. }
  108. private void GetStationNumber()
  109. {
  110. _lpStationNumber = new List<int>();
  111. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete200Station"));
  112. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete150Station"));
  113. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete100Station"));
  114. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete200Station"));
  115. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete150Station"));
  116. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete100Station"));
  117. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete200Station"));
  118. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete150Station"));
  119. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete100Station"));
  120. _dummyStationNumber = new List<int>();
  121. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete200Station"));
  122. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete150Station"));
  123. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete100Station"));
  124. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete200Station"));
  125. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete150Station"));
  126. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete100Station"));
  127. }
  128. protected override void ProcessUnsplitMessage(string str)
  129. {
  130. //OnWriteMessage(ack);
  131. // 处理INF
  132. OnWork(str);
  133. }
  134. internal void SetCassetteDoor(bool doorOpen)
  135. {
  136. _isMaintainDoorOpen = doorOpen;
  137. uint data = doorOpen ? (uint)0b0111111111000001110 : (uint)0b0111111111000001111;
  138. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  139. OnWriteMessage(msg);
  140. }
  141. internal void SetMaintain(bool maintain)
  142. {
  143. _isMaintain = maintain;
  144. uint data = maintain ? (uint)0b0111111111000011111 : (uint)0b0111111111000001111;
  145. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  146. OnWriteMessage(msg);
  147. }
  148. internal void SetProtrude1(bool protrude)
  149. {
  150. _isProtrude1 = protrude;
  151. uint data = protrude? (uint)0b0111111111000101111: (uint)0b0111111111000001111;
  152. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  153. OnWriteMessage(msg);
  154. }
  155. internal void SetProtrude2(bool protrude)
  156. {
  157. _isProtrude2 = protrude;
  158. uint data = protrude ? (uint)0b0111111111001001111 : (uint)0b0111111111000001111;
  159. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  160. OnWriteMessage(msg);
  161. }
  162. internal void SetVAC(bool VAC)
  163. {
  164. _isVAC = VAC;
  165. uint data = VAC ? (uint)0b0111111111000001101 : (uint)0b0111111111000001111;
  166. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  167. OnWriteMessage(msg);
  168. }
  169. internal void SetAIR(bool AIR)
  170. {
  171. _isAIR = AIR;
  172. uint data = AIR ? (uint)0b0111111111000001011 : (uint)0b0111111111000001111;
  173. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  174. OnWriteMessage(msg);
  175. }
  176. private async void OnWork(string str)
  177. {
  178. string ack = "";
  179. if (str.StartsWith("RQ LOAD")) //查询手指是否带片
  180. {
  181. ack = "LOAD A OFF\n_RDY";
  182. OnWriteMessage(ack);
  183. }
  184. else if (str.StartsWith("RSR")) //返回扫片结果
  185. {
  186. string[] strings = str.Split(' ').ToArray();
  187. int stationNumber = int.Parse(strings[1]);
  188. if (_lpStationNumber.Contains(stationNumber)) //LP
  189. {
  190. string lpwafer = "";
  191. foreach (var item in _slotMap)
  192. {
  193. lpwafer += $" {item}";
  194. }
  195. ack = "MAP" + lpwafer;
  196. }
  197. else if (_dummyStationNumber.Contains(stationNumber)) //dummy
  198. {
  199. string dummywafer = "";
  200. foreach (var item in _slotDummy)
  201. {
  202. dummywafer += $" {item}";
  203. }
  204. ack = "MAP" + dummywafer;
  205. }
  206. OnWriteMessage(ack);
  207. }
  208. else if (str.StartsWith("PAUSE"))
  209. {
  210. Pause();
  211. ack = "PAUSE_RDY";
  212. OnWriteMessage(ack);
  213. }
  214. else if(str.StartsWith("RESUME"))
  215. {
  216. Resume();
  217. ack = "RESUME_RDY";
  218. OnWriteMessage(ack);
  219. _ = Task.Run(DelayAnswerResume); // 启动后台任务
  220. }
  221. else //默认回复
  222. {
  223. ack = "_RDY";
  224. if (str.StartsWith("PICK") || str.StartsWith("PLACE") || str.StartsWith("MAP")
  225. || str.StartsWith("ALIGNER ALGN") || str.StartsWith("ALIGNER HOME"))
  226. {
  227. var tcs = new TaskCompletionSource<bool>();
  228. lock (_syncRoot)
  229. {
  230. // 如果已经暂停,直接加入队列
  231. if (_isPaused)
  232. {
  233. _pendingAcks.Enqueue((ack, tcs));
  234. return;
  235. }
  236. }
  237. // 启动延迟任务
  238. var delayTask = Task.Delay(3200);
  239. // 创建监控任务
  240. var monitorTask = Task.Run(async () =>
  241. {
  242. while (!delayTask.IsCompleted)
  243. {
  244. await Task.Delay(100);
  245. lock (_syncRoot)
  246. {
  247. if (_isPaused)
  248. {
  249. _pendingAcks.Enqueue((ack, tcs));
  250. return;
  251. }
  252. }
  253. }
  254. // 延迟完成且未被暂停
  255. OnWriteMessage(ack);
  256. tcs.SetResult(true);
  257. });
  258. await monitorTask;
  259. }
  260. else
  261. {
  262. OnWriteMessage(ack);
  263. }
  264. }
  265. }
  266. private void DelayAnswerResume()
  267. {
  268. Thread.Sleep((ushort)3000);
  269. OnWriteMessage("ACTION_RDY");
  270. }
  271. private void UpdateLocked(string lpNumber,bool locked)
  272. {
  273. if (lpNumber== "1")
  274. {
  275. _isLP1Docked = locked;
  276. SendLP1Data();
  277. }
  278. else if (lpNumber == "2")
  279. {
  280. _isLP2Docked = locked;
  281. SendLP2Data();
  282. }
  283. else if (lpNumber == "3")
  284. {
  285. _isLP3Docked = locked;
  286. SendLP3Data();
  287. }
  288. }
  289. private void UpdateClamped(string lpNumber, bool clamped)
  290. {
  291. if (lpNumber == "1")
  292. {
  293. _isLp1Clamped = clamped;
  294. SendLP1Data();
  295. }
  296. else if (lpNumber == "2")
  297. {
  298. _isLp2Clamped = clamped;
  299. SendLP2Data();
  300. }
  301. else if (lpNumber == "3")
  302. {
  303. _isLp3Clamped = clamped;
  304. SendLP3Data();
  305. }
  306. }
  307. private void SendLP1Data()
  308. {
  309. uint data = GetLP1Data1();
  310. string msg = $"EVT:SIGSTAT/LP1/{data:X8}/0000;";
  311. OnWriteMessage(msg);
  312. }
  313. private void SendLP2Data()
  314. {
  315. uint data = GetLP2Data1();
  316. string msg = $"EVT:SIGSTAT/LP2/{data:X8}/0000;";
  317. OnWriteMessage(msg);
  318. }
  319. private void SendLP3Data()
  320. {
  321. uint data = GetLP3Data1();
  322. string msg = $"EVT:SIGSTAT/LP3/{data:X8}/0000;";
  323. OnWriteMessage(msg);
  324. }
  325. private void SendAlignData()
  326. {
  327. string msg = $"EVT:ALIGN/ALN1/0;";
  328. OnWriteMessage(msg);
  329. }
  330. private void SendDummyMapData(string dummy)
  331. {
  332. string s2 = $"EVT:MAPDT/{dummy}/{_slotDummy};\r";
  333. OnWriteMessage(s2);
  334. }
  335. private void SendSystemData()
  336. {
  337. uint data = 0b0111111111000001111;
  338. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  339. OnWriteMessage(msg);
  340. }
  341. private ushort SimuOperationTime(EfemOperation op)
  342. {
  343. ushort sec = 0;
  344. switch (op)
  345. {
  346. case EfemOperation.Map:
  347. case EfemOperation.GetWaferInfo:
  348. case EfemOperation.Align:
  349. sec = 2200;
  350. break;
  351. case EfemOperation.Pick:
  352. case EfemOperation.Place:
  353. case EfemOperation.Orgsh:
  354. sec = 2200;
  355. break;
  356. case EfemOperation.Light:
  357. case EfemOperation.SigStatus:
  358. sec = 0;
  359. break;
  360. default:
  361. sec = 100;
  362. break;
  363. }
  364. return sec;
  365. }
  366. public void PlaceCarrier1()
  367. {
  368. _isLp1Placed = true;
  369. SendLP1Data();
  370. }
  371. public void RemoveCarrier1()
  372. {
  373. _isLp1Placed = false;
  374. SendLP1Data();
  375. }
  376. public void PlaceCarrier2()
  377. {
  378. _isLp2Placed = true;
  379. SendLP2Data();
  380. }
  381. public void RemoveCarrier2()
  382. {
  383. _isLp2Placed = false;
  384. SendLP2Data();
  385. }
  386. public void PlaceCarrier3()
  387. {
  388. _isLp3Placed = true;
  389. SendLP3Data();
  390. }
  391. public void RemoveCarrier3()
  392. {
  393. _isLp3Placed = false;
  394. SendLP3Data();
  395. }
  396. public void ClearWafer()
  397. {
  398. for (int i = 0; i < _slotMap.Length; i++)
  399. {
  400. _slotMap[i] = "0";
  401. }
  402. for (int i = 0; i < _slotDummy.Length; i++)
  403. {
  404. _slotDummy[i] = "0";
  405. }
  406. }
  407. public void SetAllWafer()
  408. {
  409. for (int i = 0; i < _slotMap.Length; i++)
  410. {
  411. _slotMap[i] = "1";
  412. }
  413. }
  414. public void RandomWafer()
  415. {
  416. Random _rd = new Random();
  417. for (int i = 0; i < _slotMap.Length; i++)
  418. {
  419. //_slotMap[i] = (i % 9).ToString();
  420. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  421. }
  422. }
  423. public void RandomDummyWafer()
  424. {
  425. Random _rdDummy = new Random();
  426. for (int i = 0; i < _slotDummy.Length; i++)
  427. {
  428. _slotDummy[i] = _rdDummy.Next(0, 10) < 6 ? "0" : "1";
  429. }
  430. }
  431. private uint GetLP1Data1()
  432. {
  433. uint data1 = 0x0u;
  434. data1 |= (_isLp1Placed ? 0x00000001u : 0x0);
  435. data1 |= (_isLp1Clamped ? 0x00000002u : 0x0);
  436. data1 |= (_isLP1Docked ? 0x00000004u : 0x0);
  437. data1 |= (_isDoorOpen1 ? 0x00000020u : 0x0);
  438. return data1;
  439. }
  440. private uint GetLP2Data1()
  441. {
  442. uint data1 = 0x0u;
  443. data1 |= (_isLp2Placed ? 0x00000001u : 0x0);
  444. data1 |= (_isLp2Clamped ? 0x00000002u : 0x0);
  445. data1 |= (_isLP2Docked ? 0x00000004u : 0x0);
  446. data1 |= (_isDoorOpen2 ? 0x00000020u : 0x0);
  447. return data1;
  448. }
  449. private uint GetLP3Data1()
  450. {
  451. uint data1 = 0x0u;
  452. data1 |= (_isLp3Placed ? 0x00000001u : 0x0);
  453. data1 |= (_isLp3Clamped ? 0x00000002u : 0x0);
  454. data1 |= (_isLP3Docked ? 0x00000004u : 0x0);
  455. data1 |= (_isDoorOpen3 ? 0x00000020u : 0x0);
  456. return data1;
  457. }
  458. }
  459. }