MetalEntity.cs 60 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. namespace CyberX8_RT.Modules.Metal
  27. {
  28. public class MetalEntity : Entity, IEntity, IModuleEntity
  29. {
  30. #region 常量
  31. private const string STRATUS = "Stratus";
  32. private const string AUTO = "Auto";
  33. private const string MANUAL = "Manual";
  34. private const string DISABLED = "Disabled";
  35. private const string ENGINEERING = "Engineering";
  36. private const string PRODUCTION = "Production";
  37. #endregion
  38. #region 内部变量
  39. /// <summary>
  40. /// 已经完成的Cycle次数
  41. /// </summary>
  42. private int _achievedCycle = 0;
  43. /// <summary>
  44. /// Metal项
  45. /// </summary>
  46. private MetalItem _metalItem;
  47. /// <summary>
  48. /// 持久化对象
  49. /// </summary>
  50. private MetalPersistentValue _persistentValue;
  51. /// <summary>
  52. /// c&m Initialize routine
  53. /// </summary>
  54. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  55. /// <summary>
  56. /// C&M Runrecipe routine
  57. /// </summary>
  58. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  59. /// <summary>
  60. /// S&H Initialize Routine
  61. /// </summary>
  62. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  63. /// <summary>
  64. /// S&H RunRecipe Routine
  65. /// </summary>
  66. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  67. /// <summary>
  68. /// Current short test routine
  69. /// </summary>
  70. private CurrentShortTestRoutine _currentShortTestRoutine;
  71. /// <summary>
  72. /// 当前Recipe
  73. /// </summary>
  74. private DepRecipe _currentRecipe = null;
  75. /// <summary>
  76. /// recipe时间
  77. /// </summary>
  78. private int _recipeTime;
  79. /// <summary>
  80. /// 循环次数
  81. /// </summary>
  82. private int _cycle = 0;
  83. /// <summary>
  84. /// 运行Recipe面
  85. /// </summary>
  86. private string _recipeSide = "";
  87. /// <summary>
  88. /// 当前RunRecipe Routine
  89. /// </summary>
  90. private RoutineBase _currentRunRecipeRoutine;
  91. /// <summary>
  92. /// Runrecipe已经运行的时间
  93. /// </summary>
  94. private int _runrecipeElapsedTime = 0;
  95. /// <summary>
  96. /// run recipe start time
  97. /// </summary>
  98. private DateTime _runRecipeStartTime;
  99. /// <summary>
  100. /// run recipe complete time
  101. /// </summary>
  102. private DateTime _runRecipeCompleteTime;
  103. #endregion
  104. #region 属性
  105. /// <summary>
  106. /// 模块名称
  107. /// </summary>
  108. public ModuleName Module { get; private set; }
  109. /// <summary>
  110. /// 初始化状态
  111. /// </summary>
  112. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  113. /// <summary>
  114. /// 空闲状态
  115. /// </summary>
  116. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  117. /// <summary>
  118. /// 是否发生错误
  119. /// </summary>
  120. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  121. /// <summary>
  122. /// 是否正在作业
  123. /// </summary>
  124. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  125. /// <summary>
  126. /// 是否初始化完成
  127. /// </summary>
  128. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  129. /// <summary>
  130. /// 是否禁用
  131. /// </summary>
  132. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  133. /// <summary>
  134. /// 自动模式
  135. /// </summary>
  136. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  137. /// <summary>
  138. /// 自动模式
  139. /// </summary>
  140. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  141. /// <summary>
  142. /// 是否为工程模式
  143. /// </summary>
  144. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  145. /// <summary>
  146. /// 是否为产品模式
  147. /// </summary>
  148. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  149. /// <summary>
  150. /// WaferHolder信息
  151. /// </summary>
  152. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  153. /// <summary>
  154. /// 已完成的RunRecipeCycle次数
  155. /// </summary>
  156. public int AchievedCycle { get { return _achievedCycle; } }
  157. /// <summary>
  158. /// 当前状态机状态
  159. /// </summary>
  160. public int State { get { return fsm.State; } }
  161. /// <summary>
  162. /// 当前Metal设置的WaferSize
  163. /// </summary>
  164. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  165. /// <summary>
  166. /// recipe时长
  167. /// </summary>
  168. public int RecipeTime { get { return _recipeTime; } }
  169. /// <summary>
  170. /// 剩余时间
  171. /// </summary>
  172. public override int TimeToReady
  173. {
  174. get
  175. {
  176. if (IsIdle)
  177. {
  178. return 0;
  179. }
  180. switch (fsm.State)
  181. {
  182. case (int)MetalState.RunReciping:
  183. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  184. default:
  185. return 0;
  186. }
  187. }
  188. }
  189. /// <summary>
  190. /// 用量
  191. /// </summary>
  192. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  193. #endregion
  194. /// <summary>
  195. /// 构造函数
  196. /// </summary>
  197. /// <param name="moduleName"></param>
  198. public MetalEntity(ModuleName moduleName)
  199. {
  200. this.Module = moduleName;
  201. WaferManager.Instance.SubscribeLocation(Module, 2);
  202. InitialFsm();
  203. }
  204. /// <summary>
  205. /// 初始化
  206. /// </summary>
  207. /// <returns></returns>
  208. protected override bool Init()
  209. {
  210. InitializeDATA();
  211. InitializeParameter();
  212. InitializeRoutine();
  213. InitializeOperation();
  214. return true;
  215. }
  216. /// <summary>
  217. /// 初始化参数
  218. /// </summary>
  219. private void InitializeParameter()
  220. {
  221. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  222. if (_persistentValue == null)
  223. {
  224. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  225. }
  226. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  227. }
  228. /// <summary>
  229. /// 初始化Routine
  230. /// </summary>
  231. private void InitializeRoutine()
  232. {
  233. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  234. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  235. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  236. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  237. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  238. }
  239. /// <summary>
  240. /// 初始化操作
  241. /// </summary>
  242. private void InitializeOperation()
  243. {
  244. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  245. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  246. {
  247. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  248. if (recipe == null)
  249. {
  250. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  251. return false;
  252. }
  253. object[] objects = new object[args.Length];
  254. objects[0] = recipe;
  255. for (int i = 1; i < args.Length; i++)
  256. {
  257. objects[i] = args[i];
  258. }
  259. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  260. });
  261. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  262. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  263. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  264. }
  265. /// <summary>
  266. /// EnterInit
  267. /// </summary>
  268. public void EnterInit()
  269. {
  270. if ((MetalState)fsm.State != MetalState.Idle) return;
  271. else
  272. {
  273. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  274. }
  275. }
  276. /// 初始化状态机
  277. /// </summary>
  278. private void InitialFsm()
  279. {
  280. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  281. fsm.EnableRepeatedMsg(true);
  282. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  283. //Initialize
  284. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  285. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  286. //直接进入Idle
  287. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  288. //RunRecipe
  289. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  290. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  291. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  292. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  293. //Current Short Test
  294. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  295. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  296. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  297. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  298. //Enter Init
  299. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  300. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  301. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  302. }
  303. /// <summary>
  304. /// 初始化DATA
  305. /// </summary>
  306. private void InitializeDATA()
  307. {
  308. InitializeSVID();
  309. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  310. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  311. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  312. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  313. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  314. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  315. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  316. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  317. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  318. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  319. }
  320. /// <summary>
  321. /// 初始化SVID
  322. /// </summary>
  323. private void InitializeSVID()
  324. {
  325. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  326. DATA.Subscribe($"{Module}.LotID", () => (WaferHolderInfo != null ? WaferHolderInfo.LotId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  327. DATA.Subscribe($"{Module}.WSID", () => (WaferHolderInfo != null ? WaferHolderInfo.Id : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  328. DATA.Subscribe($"{Module}.LSAID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  329. DATA.Subscribe($"{Module}.LSBID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  330. DATA.Subscribe($"{Module}.ModuleRecipe", () => (_currentRecipe != null ? _currentRecipe.Ppid : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  331. DATA.Subscribe($"{Module}.SequenceRecipe", () => (WaferHolderInfo != null ? WaferHolderInfo.SequenceId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  332. DATA.Subscribe($"{Module}.WaferAID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  333. DATA.Subscribe($"{Module}.WaferBID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  334. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  335. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  336. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo != null ? WaferHolderInfo.CurrentControlJobId : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  337. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  338. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  339. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  340. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  341. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. }
  363. /// <summary>
  364. /// 进入错误状态
  365. /// </summary>
  366. /// <param name="args"></param>
  367. /// <returns></returns>
  368. private bool EnterError(object[] args)
  369. {
  370. if (State == (int)MetalState.RunReciping)
  371. {
  372. if (_metalItem.SubType == STRATUS)
  373. {
  374. _standardHotRunRecipeRoutine.Abort();
  375. }
  376. else
  377. {
  378. _compactEmbranceRunRecipeRoutine.Abort();
  379. }
  380. }
  381. return true;
  382. }
  383. /// <summary>
  384. /// UpdateMetalUsageAction
  385. /// </summary>
  386. /// <param name="cmd"></param>
  387. /// <param name="param"></param>
  388. /// <returns></returns>
  389. private bool UpdateMetalUsageAction(string cmd, object[] args)
  390. {
  391. if (args.Length > 2)
  392. {
  393. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  394. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  395. }
  396. return true;
  397. }
  398. #region Initialize All
  399. /// <summary>
  400. /// 初始化
  401. /// </summary>
  402. /// <param name="param"></param>
  403. /// <returns></returns>
  404. private bool InitializeAll(object[] param)
  405. {
  406. if (fsm.State == (int)MetalState.Initializing)
  407. {
  408. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  409. return false;
  410. }
  411. if (!CheckReservoirInitialized())
  412. {
  413. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  414. return false;
  415. }
  416. if ("Auto".Equals(_persistentValue.OperatingMode))
  417. {
  418. if (!CheckReservoirIsAuto())
  419. {
  420. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  421. return false;
  422. }
  423. }
  424. if (_metalItem.SubType == STRATUS)
  425. {
  426. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  427. }
  428. else
  429. {
  430. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  431. }
  432. }
  433. /// <summary>
  434. /// 检验Reservoir是否Initialized
  435. /// </summary>
  436. /// <returns></returns>
  437. private bool CheckReservoirInitialized()
  438. {
  439. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  440. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  441. if (reservoirEntity != null)
  442. {
  443. return reservoirEntity.IsInitialized;
  444. }
  445. return false;
  446. }
  447. /// <summary>
  448. /// 检验Reservoir是否Auto
  449. /// </summary>
  450. /// <returns></returns>
  451. private bool CheckReservoirIsAuto()
  452. {
  453. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  454. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  455. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  456. {
  457. return true;
  458. }
  459. return false;
  460. }
  461. /// <summary>
  462. /// 初始化监控
  463. /// </summary>
  464. /// <param name="param"></param>
  465. /// <returns></returns>
  466. private bool InitializeAllMonitor(object[] param)
  467. {
  468. RState rsstate = RState.Running;
  469. if (_metalItem.SubType == STRATUS)
  470. {
  471. rsstate = _standardHotInitializeRoutine.Monitor();
  472. }
  473. else
  474. {
  475. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  476. }
  477. if (rsstate == RState.End)
  478. {
  479. return true;
  480. }
  481. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  482. {
  483. PostMsg(MetalMsg.Error);
  484. return false;
  485. }
  486. return false;
  487. }
  488. #endregion
  489. #region RunRecipe
  490. /// <summary>
  491. /// Run Recipe
  492. /// </summary>
  493. /// <param name="param"></param>
  494. /// <returns></returns>
  495. private bool RunRecipe(object[] param)
  496. {
  497. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  498. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  499. if (_metalItem.SubType == STRATUS)
  500. {
  501. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  502. resDevice.ReservoirUsageMonitor();
  503. }
  504. DepRecipe recipe = param[0] as DepRecipe;
  505. _recipeSide = param[1].ToString();
  506. _cycle = (int)param[2];
  507. _runrecipeElapsedTime = 0;
  508. bool result = false;
  509. if (_metalItem.SubType == STRATUS)
  510. {
  511. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  512. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide) == RState.Running;
  513. }
  514. else
  515. {
  516. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  517. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide) == RState.Running;
  518. }
  519. if (result)
  520. {
  521. if (WaferHolderInfo != null)
  522. {
  523. WaferHolderInfo.MetalModuleName = Module;
  524. }
  525. _recipeTime = recipe.CalculateRecipeTotalTime();
  526. _currentRecipe = recipe;
  527. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  528. {
  529. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  530. }
  531. _runRecipeStartTime = DateTime.Now;
  532. if (WaferHolderInfo != null && _currentRecipe != null)
  533. {
  534. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  535. }
  536. }
  537. return result;
  538. }
  539. /// <summary>
  540. /// RunRecipe监控
  541. /// </summary>
  542. /// <param name="param"></param>
  543. /// <returns></returns>
  544. private bool RunRecipeMonitor(object[] param)
  545. {
  546. RState rsstate = RState.Running;
  547. if (_metalItem.SubType == STRATUS)
  548. {
  549. rsstate = _standardHotRunRecipeRoutine.Monitor();
  550. if (rsstate == RState.Running)
  551. {
  552. StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  553. if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
  554. {
  555. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  556. rsstate = RState.Failed;
  557. }
  558. }
  559. }
  560. else
  561. {
  562. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  563. if (rsstate == RState.Running)
  564. {
  565. CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  566. if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
  567. {
  568. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  569. rsstate = RState.Failed;
  570. }
  571. if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
  572. {
  573. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
  574. rsstate = RState.Failed;
  575. }
  576. if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
  577. {
  578. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
  579. rsstate = RState.Failed;
  580. }
  581. }
  582. }
  583. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  584. {
  585. _runrecipeElapsedTime = TimeToReady;
  586. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  587. }
  588. if (rsstate == RState.End)
  589. {
  590. _recipeTime = 0;
  591. if (WaferHolderInfo != null)
  592. {
  593. double anodeAUsage = GetAnodeAUsage();
  594. double anodeBUsage = GetAnodeBUsage();
  595. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  596. MetalUsageMointor(); //检查PMCounter消耗
  597. //CMM Usage
  598. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  599. if (_metalItem.SubType == STRATUS)
  600. {
  601. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  602. resDevice.ReservoirUsageMonitor();
  603. resDevice.SetExportCMMUsage();
  604. }
  605. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  606. }
  607. _runrecipeElapsedTime = 0;
  608. //记录LotTrack
  609. _runRecipeCompleteTime = DateTime.Now;
  610. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  611. if (_metalItem.SubType == STRATUS)
  612. {
  613. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  614. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  615. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  616. }
  617. else
  618. {
  619. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  620. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  621. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  622. }
  623. if (WaferHolderInfo != null && _currentRecipe != null)
  624. {
  625. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  626. }
  627. return true;
  628. }
  629. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  630. {
  631. _recipeTime = 0;
  632. if (WaferHolderInfo != null)
  633. {
  634. double anodeAUsage = GetAnodeAUsage();
  635. double anodeBUsage = GetAnodeBUsage();
  636. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  637. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  638. //CMMUsage
  639. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  640. if (_metalItem.SubType == STRATUS)
  641. {
  642. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  643. resDevice.ReservoirUsageMonitor();
  644. resDevice.SetExportCMMUsage();
  645. }
  646. }
  647. _runrecipeElapsedTime = 0;
  648. if (WaferHolderInfo != null && _currentRecipe != null)
  649. {
  650. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  651. }
  652. PostMsg(MetalMsg.Error);
  653. //记录LotTrack
  654. _runRecipeCompleteTime = DateTime.Now;
  655. if (_metalItem.SubType == STRATUS)
  656. {
  657. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  658. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  659. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  660. }
  661. else
  662. {
  663. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  664. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  665. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  666. }
  667. if (WaferHolderInfo != null && _currentRecipe != null)
  668. {
  669. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  670. }
  671. return false;
  672. }
  673. return false;
  674. }
  675. /// <summary>
  676. /// 监控 PM Counter Metal用量
  677. /// </summary>
  678. private void MetalUsageMointor()
  679. {
  680. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  681. if (metalUsage != null)
  682. {
  683. //TotalAUsage
  684. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  685. {
  686. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  687. {
  688. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  689. PostMsg(MetalMsg.Error);
  690. AlarmListManager.Instance.AddDataError(Module.ToString(),
  691. $"{Module.ToString()}.metalUsage.TotalUsage",
  692. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  693. }
  694. else
  695. {
  696. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  697. AlarmListManager.Instance.AddWarn(Module.ToString(),
  698. $"{Module.ToString()}.metalUsage.TotalUsage",
  699. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  700. }
  701. }
  702. //AnodeAUsage
  703. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  704. {
  705. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  706. {
  707. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  708. PostMsg(MetalMsg.Error);
  709. AlarmListManager.Instance.AddDataError(Module.ToString(),
  710. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  711. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  712. }
  713. else
  714. {
  715. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  716. AlarmListManager.Instance.AddWarn(Module.ToString(),
  717. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  718. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  719. }
  720. }
  721. //AnodeBUsage
  722. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  723. {
  724. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  725. {
  726. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  727. PostMsg(MetalMsg.Error);
  728. AlarmListManager.Instance.AddDataError(Module.ToString(),
  729. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  730. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  731. }
  732. else
  733. {
  734. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  735. AlarmListManager.Instance.AddWarn(Module.ToString(),
  736. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  737. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  738. }
  739. }
  740. //MembraneAUsage
  741. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  742. {
  743. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  744. {
  745. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  746. PostMsg(MetalMsg.Error);
  747. AlarmListManager.Instance.AddDataError(Module.ToString(),
  748. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  749. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  750. }
  751. else
  752. {
  753. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  754. AlarmListManager.Instance.AddWarn(Module.ToString(),
  755. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  756. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  757. }
  758. }
  759. //MembraneBUsage
  760. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  761. {
  762. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  763. {
  764. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  765. PostMsg(MetalMsg.Error);
  766. AlarmListManager.Instance.AddDataError(Module.ToString(),
  767. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  768. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  769. }
  770. else
  771. {
  772. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  773. AlarmListManager.Instance.AddWarn(Module.ToString(),
  774. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  775. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  776. }
  777. }
  778. //TotalWafer
  779. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  780. {
  781. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  782. {
  783. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  784. PostMsg(MetalMsg.Error);
  785. AlarmListManager.Instance.AddDataError(Module.ToString(),
  786. $"{Module.ToString()}.metalUsage.TotalWafers",
  787. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  788. }
  789. else
  790. {
  791. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  792. AlarmListManager.Instance.AddWarn(Module.ToString(),
  793. $"{Module.ToString()}.metalUsage.TotalWafers",
  794. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  795. }
  796. }
  797. //AnodeAWafer
  798. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  799. {
  800. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  801. {
  802. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  803. PostMsg(MetalMsg.Error);
  804. AlarmListManager.Instance.AddDataError(Module.ToString(),
  805. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  806. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  807. }
  808. else
  809. {
  810. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  811. AlarmListManager.Instance.AddWarn(Module.ToString(),
  812. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  813. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  814. }
  815. }
  816. //AnodeBWafer
  817. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  818. {
  819. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  820. {
  821. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  822. PostMsg(MetalMsg.Error);
  823. AlarmListManager.Instance.AddDataError(Module.ToString(),
  824. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  825. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  826. }
  827. else
  828. {
  829. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  830. AlarmListManager.Instance.AddWarn(Module.ToString(),
  831. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  832. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  833. }
  834. }
  835. //AnodeAbathUsage
  836. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  837. {
  838. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  839. {
  840. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  841. PostMsg(MetalMsg.Error);
  842. AlarmListManager.Instance.AddDataError(Module.ToString(),
  843. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  844. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  845. }
  846. else
  847. {
  848. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  849. AlarmListManager.Instance.AddWarn(Module.ToString(),
  850. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  851. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  852. }
  853. }
  854. //AnodeBbathUsage
  855. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  856. {
  857. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  858. {
  859. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  860. PostMsg(MetalMsg.Error);
  861. AlarmListManager.Instance.AddDataError(Module.ToString(),
  862. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  863. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  864. }
  865. else
  866. {
  867. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  868. AlarmListManager.Instance.AddWarn(Module.ToString(),
  869. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  870. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  871. }
  872. }
  873. }
  874. }
  875. /// <summary>
  876. /// 获取A面使用的电量
  877. /// </summary>
  878. /// <returns></returns>
  879. private double GetAnodeAUsage()
  880. {
  881. if (_metalItem.SubType == STRATUS)
  882. {
  883. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  884. }
  885. else
  886. {
  887. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  888. }
  889. }
  890. /// <summary>
  891. /// 获取B面使用的电量
  892. /// </summary>
  893. /// <returns></returns>
  894. private double GetAnodeBUsage()
  895. {
  896. if (_metalItem.SubType == STRATUS)
  897. {
  898. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  899. }
  900. else
  901. {
  902. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  903. }
  904. }
  905. /// <summary>
  906. /// Abort Recipe
  907. /// </summary>
  908. /// <param name="param"></param>
  909. /// <returns></returns>
  910. public bool AbortRecipe(object[] param)
  911. {
  912. _runRecipeCompleteTime = DateTime.Now;
  913. if (_metalItem.SubType == STRATUS)
  914. {
  915. _standardHotRunRecipeRoutine.Abort();
  916. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  917. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  918. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  919. }
  920. else
  921. {
  922. _compactEmbranceRunRecipeRoutine.Abort();
  923. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  924. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  925. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  926. }
  927. return true;
  928. }
  929. #endregion
  930. #region Current Short Test
  931. /// <summary>
  932. /// Current Short Test
  933. /// </summary>
  934. /// <param name="param"></param>
  935. /// <returns></returns>
  936. private bool CurrentShortTest(object[] param)
  937. {
  938. return _currentShortTestRoutine.Start() == RState.Running;
  939. }
  940. /// <summary>
  941. /// Current Short test监控
  942. /// </summary>
  943. /// <param name="param"></param>
  944. /// <returns></returns>
  945. private bool CurrentShortTestMonitor(object[] param)
  946. {
  947. RState rsstate = _currentShortTestRoutine.Monitor();
  948. if (rsstate == RState.End)
  949. {
  950. return true;
  951. }
  952. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  953. {
  954. PostMsg(MetalMsg.Error);
  955. return false;
  956. }
  957. return false;
  958. }
  959. #endregion
  960. #region Close Flow Valve
  961. /// <summary>
  962. /// 关闭Flow Valve
  963. /// </summary>
  964. /// <param name="param"></param>
  965. /// <returns></returns>
  966. private bool CloseFlowValve(object[] param)
  967. {
  968. if (_metalItem.SubType == STRATUS)
  969. {
  970. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  971. if (device != null)
  972. {
  973. return device.SwitchToBypass("", null);
  974. }
  975. return false;
  976. }
  977. else
  978. {
  979. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  980. if (device != null)
  981. {
  982. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  983. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  984. if (reservoirDevice != null)
  985. {
  986. bool result = reservoirDevice.CAByPassOn("", null);
  987. if (result)
  988. {
  989. return device.CellFlowValveOff("", null);
  990. }
  991. }
  992. }
  993. return false;
  994. }
  995. }
  996. #endregion
  997. #region Open Flow Valve
  998. /// <summary>
  999. /// 打开Flow Valve
  1000. /// </summary>
  1001. /// <param name="param"></param>
  1002. /// <returns></returns>
  1003. private bool OpenFlowValve(object[] param)
  1004. {
  1005. if (_metalItem.SubType == STRATUS)
  1006. {
  1007. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1008. if (device != null)
  1009. {
  1010. bool result = device.SwitchToFlow("", null);
  1011. if (result)
  1012. {
  1013. return device.PumpOnOperation("", null);
  1014. }
  1015. }
  1016. return false;
  1017. }
  1018. else
  1019. {
  1020. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1021. if (device != null)
  1022. {
  1023. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1024. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1025. if (reservoirDevice != null)
  1026. {
  1027. bool result = reservoirDevice.CAByPassOff("", null);
  1028. if (result)
  1029. {
  1030. return device.CellFlowValveOn("", null);
  1031. }
  1032. }
  1033. }
  1034. return false;
  1035. }
  1036. }
  1037. #endregion
  1038. public bool Check(int msg, out string reason, params object[] args)
  1039. {
  1040. reason = "";
  1041. return true;
  1042. }
  1043. public bool CheckAcked(int msg)
  1044. {
  1045. return true;
  1046. }
  1047. public int Invoke(string function, params object[] args)
  1048. {
  1049. switch (function)
  1050. {
  1051. case "HomeAll":
  1052. if (IsIdle)
  1053. {
  1054. return (int)FSM_MSG.NONE;
  1055. }
  1056. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1057. {
  1058. return (int)MetalMsg.Initialize;
  1059. }
  1060. else
  1061. {
  1062. return (int)FSM_MSG.NONE;
  1063. }
  1064. }
  1065. return (int)FSM_MSG.NONE;
  1066. }
  1067. }
  1068. public enum MetalMsg
  1069. {
  1070. NONE,
  1071. Error,
  1072. ResumeError,
  1073. Initialize,
  1074. Manual,
  1075. Auto,
  1076. CurrentShortTest,
  1077. CloseFlowValve,
  1078. OpenFlowValve,
  1079. RunRecipe,
  1080. Abort,
  1081. Init
  1082. }
  1083. }