EfemVacuumRoutine.cs 2.6 KB

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  1. using Aitex.Core.Common;
  2. using MECF.Framework.Common.Equipment;
  3. using CyberX8_RT.Devices.EFEM;
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.RT.Routine;
  11. using Aitex.Sorter.Common;
  12. using MECF.Framework.Common.Schedulers;
  13. using MECF.Framework.Common.SubstrateTrackings;
  14. using System.Diagnostics;
  15. using CyberX8_Core;
  16. using Aitex.Core.RT.SCCore;
  17. using System.Threading;
  18. namespace CyberX8_RT.Modules.EFEM
  19. {
  20. public class EfemVacuumRoutine : ModuleRoutineBase, IRoutine
  21. {
  22. private string _vacuumStatus;
  23. private ModuleName _vacuumModule;
  24. private enum VacuumStep
  25. {
  26. VacuumAction,
  27. End,
  28. }
  29. EfemBase _efem;
  30. /// <summary>
  31. /// 构造函数
  32. /// </summary>
  33. /// <param name="efem"></param>
  34. public EfemVacuumRoutine(EfemBase efem) : base(ModuleName.EFEM)
  35. {
  36. _efem = efem;
  37. }
  38. /// <summary>
  39. /// 启动
  40. /// </summary>
  41. /// <param name="objs"></param>
  42. /// <returns></returns>
  43. public RState Start(params object[] objs)
  44. {
  45. _vacuumModule = (ModuleName)objs[0];
  46. if ((bool)objs[1] == true)
  47. {
  48. _vacuumStatus = "ON";
  49. }
  50. else
  51. {
  52. _vacuumStatus = "OFF";
  53. }
  54. return Runner.Start(Module, "Vacumm");
  55. }
  56. /// <summary>
  57. /// 监控
  58. /// </summary>
  59. /// <returns></returns>
  60. public RState Monitor()
  61. {
  62. Runner.Run(VacuumStep.VacuumAction, ()=> { return Vacuum(_vacuumModule, _vacuumStatus);}, CheckVacuumDone, 30000)
  63. .End(VacuumStep.End, NullFun, 0);
  64. return Runner.Status;
  65. }
  66. /// <summary>
  67. /// Vacuum功能
  68. /// </summary>
  69. /// <returns></returns>
  70. private bool Vacuum(ModuleName moduleName,string VacuumState)
  71. {
  72. return _efem.Vacuum(moduleName,VacuumState);
  73. }
  74. private bool CheckVacuumDone()
  75. {
  76. if (_efem.Status == RState.End)
  77. {
  78. return true;
  79. }
  80. else if (_efem.Status == RState.Failed)
  81. {
  82. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem Vacuum failed: {_efem.Status}");
  83. return true;
  84. }
  85. return false;
  86. }
  87. public void Abort()
  88. {
  89. Runner.Stop("Manual Abort");
  90. }
  91. }
  92. }