SunWayEfemSimulator.cs 20 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.DataCenter;
  10. using System.Linq;
  11. using MECF.Framework.Common.DataCenter;
  12. using Aitex.Core.RT.ConfigCenter;
  13. using CyberX8_Simulator.Instances;
  14. using System.Collections.Generic;
  15. namespace CyberX8_Simulator.Devices
  16. {
  17. public class SunWayEfemSimulator : SocketDeviceSimulator
  18. {
  19. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  20. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  21. private const string ACK = "ACK";
  22. private readonly char[] delimiters = { ':', '/', '>', '|', ';' };
  23. private string[] _slotMap = new string[25];
  24. private string[] _slotDummy = new string[25];
  25. private PeriodicJob _HwThread;
  26. private bool _bCommReady;
  27. private bool _isDoorOpen;
  28. private bool _isLp1Placed;
  29. private bool _isLp2Placed;
  30. private bool _isLp3Placed;
  31. private bool _isLp1Clamped;
  32. private bool _isLp2Clamped;
  33. private bool _isLp3Clamped;
  34. private bool _isLP1Docked;
  35. private bool _isLP2Docked;
  36. private bool _isLP3Docked;
  37. public int WaferSize = 200;
  38. private int _speed = 20;
  39. private string _carrier1ID = "12345678";
  40. private string _carrier2ID = "12345678";
  41. private string _carrier3ID = "12345678";
  42. private List<int> _lpStationNumber;
  43. private List<int> _dummyStationNumber;
  44. public string SlotMap
  45. {
  46. get { return string.Join("", _slotMap); }
  47. }
  48. public bool _isVacuumError { get; set; }
  49. public bool _isAirError { get; set; }
  50. public bool _isFlowError { get; set; }
  51. public bool _isLeak { get; set; }
  52. public bool _isMaintain { get; set; }
  53. public bool _isWaferPresent { get; set; }
  54. public bool _isMaintainDoorOpen { get; private set; }
  55. public bool _isProtrude1 { get; set; }
  56. public bool _isProtrude2 { get; set; }
  57. public bool _isVAC { get; set; }
  58. public bool _isAIR { get; set; }
  59. private bool _isDoorOpen1;
  60. public bool IsDoorOpen1 { get { return _isDoorOpen1; } set { _isDoorOpen1 = value; SendLP1Data(); } }
  61. private bool _isDoorOpen2;
  62. public bool IsDoorOpen2 { get { return _isDoorOpen2; } set { _isDoorOpen2 = value;SendLP2Data(); } }
  63. private bool _isDoorOpen3;
  64. public bool IsDoorOpen3
  65. {
  66. get { return _isDoorOpen3; }
  67. set { _isDoorOpen3 = value; SendLP3Data(); }
  68. }
  69. public SunWayEfemSimulator() : base(1102, -1, "\r", ' ')
  70. {
  71. for (int i = 0; i < _slotMap.Length; i++)
  72. _slotMap[i] = "0";
  73. for(int i=0; i < _slotDummy.Length; i++)
  74. {
  75. _slotDummy[i]="0";
  76. }
  77. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  78. GetStationNumber();
  79. }
  80. private bool OnSendEvent()
  81. {
  82. if (IsConnected)
  83. {
  84. }
  85. return true;
  86. }
  87. private void GetStationNumber()
  88. {
  89. _lpStationNumber = new List<int>();
  90. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete200Station"));
  91. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete150Station"));
  92. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete100Station"));
  93. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete200Station"));
  94. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete150Station"));
  95. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete100Station"));
  96. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete200Station"));
  97. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete150Station"));
  98. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete100Station"));
  99. _dummyStationNumber = new List<int>();
  100. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete200Station"));
  101. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete150Station"));
  102. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete100Station"));
  103. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete200Station"));
  104. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete150Station"));
  105. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete100Station"));
  106. }
  107. protected override void ProcessUnsplitMessage(string str)
  108. {
  109. //OnWriteMessage(ack);
  110. // 处理INF
  111. OnWork(str);
  112. }
  113. internal void SetCassetteDoor(bool doorOpen)
  114. {
  115. _isMaintainDoorOpen = doorOpen;
  116. uint data = doorOpen ? (uint)0b0111111111000001110 : (uint)0b0111111111000001111;
  117. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  118. OnWriteMessage(msg);
  119. }
  120. internal void SetMaintain(bool maintain)
  121. {
  122. _isMaintain = maintain;
  123. uint data = maintain ? (uint)0b0111111111000011111 : (uint)0b0111111111000001111;
  124. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  125. OnWriteMessage(msg);
  126. }
  127. internal void SetProtrude1(bool protrude)
  128. {
  129. _isProtrude1 = protrude;
  130. uint data = protrude? (uint)0b0111111111000101111: (uint)0b0111111111000001111;
  131. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  132. OnWriteMessage(msg);
  133. }
  134. internal void SetProtrude2(bool protrude)
  135. {
  136. _isProtrude2 = protrude;
  137. uint data = protrude ? (uint)0b0111111111001001111 : (uint)0b0111111111000001111;
  138. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  139. OnWriteMessage(msg);
  140. }
  141. internal void SetVAC(bool VAC)
  142. {
  143. _isVAC = VAC;
  144. uint data = VAC ? (uint)0b0111111111000001101 : (uint)0b0111111111000001111;
  145. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  146. OnWriteMessage(msg);
  147. }
  148. internal void SetAIR(bool AIR)
  149. {
  150. _isAIR = AIR;
  151. uint data = AIR ? (uint)0b0111111111000001011 : (uint)0b0111111111000001111;
  152. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  153. OnWriteMessage(msg);
  154. }
  155. private void OnWork(string str)
  156. {
  157. string ack = "";
  158. if (str.StartsWith("RQ LOAD")) //查询手指是否带片
  159. {
  160. ack = "LOAD A OFF\n_RDY";
  161. }
  162. else if (str.StartsWith("RSR")) //返回扫片结果
  163. {
  164. string[] strings = str.Split(' ').ToArray();
  165. int stationNumber = int.Parse(strings[1]);
  166. if (_lpStationNumber.Contains(stationNumber)) //LP
  167. {
  168. string lpwafer = "";
  169. foreach (var item in _slotMap)
  170. {
  171. lpwafer += $" {item}";
  172. }
  173. ack = "MAP" + lpwafer;
  174. }
  175. else if (_dummyStationNumber.Contains(stationNumber)) //dummy
  176. {
  177. string dummywafer = "";
  178. foreach (var item in _slotDummy)
  179. {
  180. dummywafer += $" {item}";
  181. }
  182. ack = "MAP" + dummywafer;
  183. }
  184. }
  185. else if (str.StartsWith("PAUSE"))
  186. {
  187. ack = "PAUSE_RDY";
  188. }
  189. else if(str.StartsWith("RESUME"))
  190. {
  191. ack = "RESUME_RDY";
  192. _ = Task.Run(DelayAnswerResume); // 启动后台任务
  193. }
  194. else //默认回复
  195. {
  196. if (str.StartsWith("PICK") || str.StartsWith("PLACE") || str.StartsWith("MAP")
  197. || str.StartsWith("ALIGNER ALGN") || str.StartsWith("ALIGNER HOME"))
  198. {
  199. Thread.Sleep((ushort)2200);
  200. }
  201. ack = "_RDY";
  202. }
  203. OnWriteMessage(ack);
  204. //// match basic
  205. //Match m1 = Regex.Match(strACK, SCMD);
  206. //// get mock delay time
  207. //string sBasic = m1.Groups[1].Value;
  208. //if (string.IsNullOrEmpty(sBasic))
  209. // return;
  210. //EfemOperation op = EfemConstant.ToOperation(sBasic);
  211. //ushort millionSec = this.SimuOperationTime(op);
  212. //// delay
  213. ////await Task.Delay(millionSec);
  214. //Thread.Sleep(millionSec);
  215. //// build the INF string
  216. //string strINF = string.Empty;
  217. //switch (EfemConstant.ToOperation(strACK))
  218. //{
  219. // case EfemOperation.GetWaferInfo:
  220. // strINF = strACK.Replace(ACK, "INF");
  221. // strINF = strINF.TrimEnd(';');
  222. // string map1 = string.Join("", _slotMap);
  223. // strINF += $"/{map1};";
  224. // break;
  225. // case EfemOperation.Home:
  226. // int data1 = 0b011111111010100000;
  227. // string s1 = $"EVT:SIGSTAT/LP1/00000000/00000003;\rEVT:SIGSTAT/LP2/0000000/00000003;\rEVT:SIGSTAT/LP3/000000/00000003;\rEVT:SIGSTAT/System/{data1}/00000;\r";
  228. // strINF = s1 + strACK.Replace(ACK, "INF");
  229. // SendSystemData();
  230. // SendLP1Data();
  231. // SendLP2Data();
  232. // SendLP3Data();
  233. // SendAlignData();
  234. // OnWriteMessage(strACK.Replace(ACK, "INF"));
  235. // return;
  236. // case EfemOperation.Map:
  237. // if(strACK.Contains("BF"))
  238. // {
  239. // string map = string.Join("", _slotDummy);
  240. // string strEVT = strACK.Replace(ACK,"EVT");
  241. // strEVT = strEVT.Replace("WAFSH","MAPDT");
  242. // strEVT = strEVT.TrimEnd(';');
  243. // string str = $"{strEVT}/{map};";
  244. // OnWriteMessage(str);
  245. // }
  246. // else if (strACK.Contains("LP"))
  247. // {
  248. // string map = string.Join("", _slotMap);
  249. // string strEVT = strACK.Replace(ACK, "EVT");
  250. // strEVT = strEVT.Replace("WAFSH", "MAPDT");
  251. // strEVT = strEVT.TrimEnd(';');
  252. // string str = $"{strEVT}/{map};";
  253. // OnWriteMessage(str);
  254. // }
  255. // strINF = strACK.Replace(ACK, "INF");
  256. // break;
  257. // case EfemOperation.Load:
  258. // strINF = strACK.Replace(ACK, "INF");
  259. // break;
  260. // case EfemOperation.StateTrack:
  261. // strINF = "INF:STATE/TRACK/NONE/NONE;";
  262. // break;
  263. // case EfemOperation.CarrierId:
  264. // break;
  265. // case EfemOperation.Size:
  266. // break;
  267. // case EfemOperation.Dock:
  268. // Match mDock = Regex.Match(strACK, SFOUP);
  269. // if (mDock.Success)
  270. // {
  271. // UpdateLocked(mDock.Groups[1].Value, true);
  272. // }
  273. // strINF = strACK.Replace(ACK, "INF");
  274. // break;
  275. // case EfemOperation.Undock:
  276. // Match mUnDock = Regex.Match(strACK, SFOUP);
  277. // if (mUnDock.Success)
  278. // {
  279. // UpdateLocked(mUnDock.Groups[1].Value, false);
  280. // }
  281. // strINF = strACK.Replace(ACK, "INF");
  282. // break;
  283. // case EfemOperation.Clamp:
  284. // Match mClamp= Regex.Match(strACK, SFOUP);
  285. // if (mClamp.Success)
  286. // {
  287. // UpdateClamped(mClamp.Groups[1].Value, true);
  288. // }
  289. // strINF = strACK.Replace(ACK, "INF");
  290. // break;
  291. // case EfemOperation.Unclamp:
  292. // Match mUnClamp = Regex.Match(strACK, SFOUP);
  293. // if (mUnClamp.Success)
  294. // {
  295. // UpdateClamped(mUnClamp.Groups[1].Value, false);
  296. // }
  297. // strINF = strACK.Replace(ACK, "INF");
  298. // break;
  299. // case EfemOperation.Speed:
  300. // break;
  301. // case EfemOperation.Align:
  302. // case EfemOperation.Pick:
  303. // case EfemOperation.Place:
  304. // case EfemOperation.Orgsh:
  305. // case EfemOperation.Light:
  306. // case EfemOperation.SigStatus:
  307. // default:
  308. // strINF = strACK.Replace(ACK, "INF");
  309. // break;
  310. //}
  311. //OnWriteMessage(strINF);
  312. }
  313. private void DelayAnswerResume()
  314. {
  315. Thread.Sleep((ushort)3000);
  316. OnWriteMessage("ACTION_RDY");
  317. }
  318. private void UpdateLocked(string lpNumber,bool locked)
  319. {
  320. if (lpNumber== "1")
  321. {
  322. _isLP1Docked = locked;
  323. SendLP1Data();
  324. }
  325. else if (lpNumber == "2")
  326. {
  327. _isLP2Docked = locked;
  328. SendLP2Data();
  329. }
  330. else if (lpNumber == "3")
  331. {
  332. _isLP3Docked = locked;
  333. SendLP3Data();
  334. }
  335. }
  336. private void UpdateClamped(string lpNumber, bool clamped)
  337. {
  338. if (lpNumber == "1")
  339. {
  340. _isLp1Clamped = clamped;
  341. SendLP1Data();
  342. }
  343. else if (lpNumber == "2")
  344. {
  345. _isLp2Clamped = clamped;
  346. SendLP2Data();
  347. }
  348. else if (lpNumber == "3")
  349. {
  350. _isLp3Clamped = clamped;
  351. SendLP3Data();
  352. }
  353. }
  354. private void SendLP1Data()
  355. {
  356. uint data = GetLP1Data1();
  357. string msg = $"EVT:SIGSTAT/LP1/{data:X8}/0000;";
  358. OnWriteMessage(msg);
  359. }
  360. private void SendLP2Data()
  361. {
  362. uint data = GetLP2Data1();
  363. string msg = $"EVT:SIGSTAT/LP2/{data:X8}/0000;";
  364. OnWriteMessage(msg);
  365. }
  366. private void SendLP3Data()
  367. {
  368. uint data = GetLP3Data1();
  369. string msg = $"EVT:SIGSTAT/LP3/{data:X8}/0000;";
  370. OnWriteMessage(msg);
  371. }
  372. private void SendAlignData()
  373. {
  374. string msg = $"EVT:ALIGN/ALN1/0;";
  375. OnWriteMessage(msg);
  376. }
  377. private void SendDummyMapData(string dummy)
  378. {
  379. string s2 = $"EVT:MAPDT/{dummy}/{_slotDummy};\r";
  380. OnWriteMessage(s2);
  381. }
  382. private void SendSystemData()
  383. {
  384. uint data = 0b0111111111000001111;
  385. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  386. OnWriteMessage(msg);
  387. }
  388. private ushort SimuOperationTime(EfemOperation op)
  389. {
  390. ushort sec = 0;
  391. switch (op)
  392. {
  393. case EfemOperation.Map:
  394. case EfemOperation.GetWaferInfo:
  395. case EfemOperation.Align:
  396. sec = 2200;
  397. break;
  398. case EfemOperation.Pick:
  399. case EfemOperation.Place:
  400. case EfemOperation.Orgsh:
  401. sec = 2200;
  402. break;
  403. case EfemOperation.Light:
  404. case EfemOperation.SigStatus:
  405. sec = 0;
  406. break;
  407. default:
  408. sec = 100;
  409. break;
  410. }
  411. return sec;
  412. }
  413. public void PlaceCarrier1()
  414. {
  415. _isLp1Placed = true;
  416. SendLP1Data();
  417. }
  418. public void RemoveCarrier1()
  419. {
  420. _isLp1Placed = false;
  421. SendLP1Data();
  422. }
  423. public void PlaceCarrier2()
  424. {
  425. _isLp2Placed = true;
  426. SendLP2Data();
  427. }
  428. public void RemoveCarrier2()
  429. {
  430. _isLp2Placed = false;
  431. SendLP2Data();
  432. }
  433. public void PlaceCarrier3()
  434. {
  435. _isLp3Placed = true;
  436. SendLP3Data();
  437. }
  438. public void RemoveCarrier3()
  439. {
  440. _isLp3Placed = false;
  441. SendLP3Data();
  442. }
  443. public void ClearWafer()
  444. {
  445. for (int i = 0; i < _slotMap.Length; i++)
  446. {
  447. _slotMap[i] = "0";
  448. }
  449. for (int i = 0; i < _slotDummy.Length; i++)
  450. {
  451. _slotDummy[i] = "0";
  452. }
  453. }
  454. public void SetAllWafer()
  455. {
  456. for (int i = 0; i < _slotMap.Length; i++)
  457. {
  458. _slotMap[i] = "1";
  459. }
  460. }
  461. public void RandomWafer()
  462. {
  463. Random _rd = new Random();
  464. for (int i = 0; i < _slotMap.Length; i++)
  465. {
  466. //_slotMap[i] = (i % 9).ToString();
  467. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  468. }
  469. }
  470. public void RandomDummyWafer()
  471. {
  472. Random _rdDummy = new Random();
  473. for (int i = 0; i < _slotDummy.Length; i++)
  474. {
  475. _slotDummy[i] = _rdDummy.Next(0, 10) < 6 ? "0" : "1";
  476. }
  477. }
  478. private uint GetLP1Data1()
  479. {
  480. uint data1 = 0x0u;
  481. data1 |= (_isLp1Placed ? 0x00000001u : 0x0);
  482. data1 |= (_isLp1Clamped ? 0x00000002u : 0x0);
  483. data1 |= (_isLP1Docked ? 0x00000004u : 0x0);
  484. data1 |= (_isDoorOpen1 ? 0x00000020u : 0x0);
  485. return data1;
  486. }
  487. private uint GetLP2Data1()
  488. {
  489. uint data1 = 0x0u;
  490. data1 |= (_isLp2Placed ? 0x00000001u : 0x0);
  491. data1 |= (_isLp2Clamped ? 0x00000002u : 0x0);
  492. data1 |= (_isLP2Docked ? 0x00000004u : 0x0);
  493. data1 |= (_isDoorOpen2 ? 0x00000020u : 0x0);
  494. return data1;
  495. }
  496. private uint GetLP3Data1()
  497. {
  498. uint data1 = 0x0u;
  499. data1 |= (_isLp3Placed ? 0x00000001u : 0x0);
  500. data1 |= (_isLp3Clamped ? 0x00000002u : 0x0);
  501. data1 |= (_isLP3Docked ? 0x00000004u : 0x0);
  502. data1 |= (_isDoorOpen3 ? 0x00000020u : 0x0);
  503. return data1;
  504. }
  505. }
  506. }