RtState.cs 5.8 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace CyberX8_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. AutoAborting,
  19. ReturningCassette,
  20. Cycle,
  21. PrepareCycle,
  22. PostCycle,
  23. SetSpeed,
  24. Error,
  25. Reset,
  26. Processing,
  27. PostProcess,
  28. PauseProcess,
  29. //Maintenance,
  30. //WaferMapping,
  31. //Cycling,
  32. TMCycle,
  33. SETMCycle,
  34. SERunning,
  35. ReturnWafer,
  36. SETransfer,
  37. SEReturnWafer
  38. }
  39. public enum EFEMSTATE
  40. {
  41. Unknown, // 0
  42. Homing, // 1
  43. Idle, // 2
  44. Error, // 3
  45. Picking, // 4
  46. Placing, // 5
  47. Aligning, // 6
  48. Mapping, // 7
  49. Init, // 8
  50. Orgshing, // 9
  51. Lifting, // 10
  52. InitingAL, // 11
  53. InitingRB, // 12
  54. Extending, // 13
  55. Retracting, // 14
  56. //SettingLamp, // 15
  57. Swapping,
  58. Gotoing,
  59. Gripping,
  60. Ungripping,
  61. Fliping,
  62. Initializing,
  63. Vacuuming,
  64. Retrying,
  65. ConfirmCompleting,
  66. ErrorPicking,
  67. ErrorPlacing,
  68. RobotCycleing,
  69. ErrorInitingAL,
  70. Pause,
  71. Resumeing
  72. }
  73. public enum PUFSTATE
  74. {
  75. Unknown, // 0
  76. Homing, // 1
  77. Idle, // 2
  78. Error,
  79. Init,
  80. SwitchOning,
  81. SwitchOffing,
  82. Calibrating,
  83. Picking,
  84. Placing,
  85. Positioning,
  86. GotoRobotPositionForPlace,
  87. GotoRobotPositionForPick,
  88. WaitForRobotPlacing,
  89. WaitForRobotPlace,
  90. WaitForSwaping,
  91. WaitForSwap,
  92. Swaping,
  93. AferSwapParkStation,
  94. WaitForRobotPicking,
  95. WaitForRobotPick,
  96. BackToPackStationing,
  97. Retrying,
  98. ConfirmCompleting,
  99. Fliping
  100. }
  101. public enum LOADERSTATE
  102. {
  103. Unknown, // 0
  104. Homing, // 1
  105. Idle, // 2
  106. Error,
  107. Init,
  108. Positioning,
  109. SwitchOning,
  110. SwitchOffing,
  111. Loading,
  112. Unloading,
  113. InstallCRSing,
  114. PrepreForPlacing,
  115. WaitForUnload,
  116. WaitForLoad,
  117. WaitForPick,
  118. Retrying,
  119. ConfirmCompleting,
  120. WaitForFlip
  121. }
  122. public enum TransporterState
  123. {
  124. Unknown,
  125. Init,
  126. Initialized,
  127. Homing,
  128. Idle,
  129. Error,
  130. ErrorGantryPositioning,
  131. GantryPositioning,
  132. Positioning,
  133. SwitchOning,
  134. SwitchOffing,
  135. Parking,
  136. ElevatorUping,
  137. ElevatorLowing,
  138. PickUping,
  139. MovingTo,
  140. Placing,
  141. Transfering,
  142. PickUpMoveToing,
  143. PickUpMoveToComplete,
  144. PickUpValidating,
  145. PickUpValidateComplete,
  146. ValidateMoveTo,
  147. ValidateMoveToComplete,
  148. GantrySafeMoving,
  149. Retrying,
  150. ConfirmCompleting
  151. }
  152. public enum SRDState
  153. {
  154. Unknown,
  155. Init,
  156. Initialized,
  157. Initializing,
  158. InitializeHoming,
  159. Homing,
  160. Idle,
  161. Error,
  162. SwitchOning,
  163. SwitchOffing,
  164. Positioning,
  165. Aborting,
  166. Abort,
  167. Rotating,
  168. Stopping,
  169. PresenceTesting,
  170. ProcessReciping,
  171. ProcessError,
  172. AWCCycling,
  173. AWCHoming,
  174. Retrying,
  175. ConfirmCompleting,
  176. Loading,
  177. Unloading
  178. }
  179. public enum PrewetState
  180. {
  181. Unknown,
  182. Error,
  183. Abort,
  184. Init,
  185. Initialized,
  186. Idle,
  187. Initializing,
  188. PrepareToTransfering,
  189. ReadyForPick,
  190. KeepWeting,
  191. Linmot_Scanning,
  192. ManualProcessing,
  193. CycleManualProcessing,
  194. RunReciping,
  195. Aborting,
  196. PreparingToPick,
  197. PreparingToPlace,
  198. WaitForPick,
  199. WaitForPlace,
  200. RunRecipeComplete,
  201. DelayKeepweting,
  202. DelayKeepwetComplete
  203. }
  204. public enum DryerState
  205. {
  206. Unknown,
  207. Disable,
  208. Abort,
  209. Error,
  210. Init,
  211. Initialized,
  212. Idle,
  213. Initializing,
  214. RunReciping,
  215. CycleManualProcessing,
  216. Retrying
  217. }
  218. public enum RinseState
  219. {
  220. Unknown,
  221. Disable,
  222. Error,
  223. Init,
  224. Initialized,
  225. Idle,
  226. Initializing,
  227. CycleManualProcessing,
  228. RunReciping,
  229. RunRecipeComplete,
  230. KeepWeting,
  231. KeepWetComplete,
  232. Retrying,
  233. Aborting,
  234. Abort,
  235. }
  236. public enum MetalState
  237. {
  238. Unknown,
  239. Disable,
  240. Error,
  241. Init,
  242. Initialized,
  243. Idle,
  244. Initializing,
  245. ShortTesting,
  246. RunReciping,
  247. CurrentShortTesting,
  248. WaitCloseFlow,
  249. WaitOpenFlow,
  250. WaitForRunRecipe,
  251. Abort
  252. }
  253. public enum DummyState
  254. {
  255. Unknown,
  256. Disable,
  257. Error,
  258. Init,
  259. Initializing,
  260. Initialized,
  261. Idle
  262. }
  263. public enum ReservoirState
  264. {
  265. Unknown,
  266. Disable,
  267. Error,
  268. Init,
  269. Initializing,
  270. Initialized,
  271. Idle,
  272. }
  273. }