PufPlaceVacuumCheckRoutine.cs 6.1 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using MECF.Framework.Common.Routine;
  5. using CyberX8_Core;
  6. using CyberX8_RT.Devices.AXIS;
  7. using CyberX8_RT.Devices.PUF;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Linq;
  11. using System.Text;
  12. using System.Threading.Tasks;
  13. namespace CyberX8_RT.Modules.PUF
  14. {
  15. public class PufPlaceVacuumCheckRoutine : RoutineBase, IRoutine
  16. {
  17. private enum PlaceVacuumStep
  18. {
  19. VerticalGotoLoaderPlaceDown,
  20. VerticalGotoLoaderPlaceDownWait,
  21. VacuumOff,
  22. StickDistance,
  23. StickDistanceWait,
  24. VacuumOn,
  25. Delay,
  26. VacuumCheck,
  27. End
  28. }
  29. #region 常量
  30. private const string SideA = "SideA";
  31. private const string SideB = "SideB";
  32. private const string WAFER_ABSENT = "WaferAbsent";
  33. #endregion
  34. #region 内部变量
  35. private JetAxisBase _verticalAxis;
  36. private PufDistanceSensor _distanceSensor;
  37. private PufVacuum _vacuum;
  38. private string _side = "SideA";
  39. /// <summary>
  40. /// 是否显示Routine错误
  41. /// </summary>
  42. private bool _showError = true;
  43. /// <summary>
  44. /// 第几次
  45. /// </summary>
  46. private int _times=1;
  47. /// <summary>
  48. /// 延迟时间
  49. /// </summary>
  50. private int _chuckValveSwitchingTimeDelayInMilliSeconds = 100;
  51. /// <summary>
  52. /// 是否处于模拟器
  53. /// </summary>
  54. private bool _isSimulator = false;
  55. #endregion
  56. /// <summary>
  57. /// 构造函数
  58. /// </summary>
  59. /// <param name="module"></param>
  60. public PufPlaceVacuumCheckRoutine(string module) : base(module)
  61. {
  62. _isSimulator = SC.GetValue<bool>("System.IsSimulatorMode");
  63. }
  64. /// <summary>
  65. /// 中止
  66. /// </summary>
  67. public void Abort()
  68. {
  69. Runner.Stop("Manual abort");
  70. }
  71. /// <summary>
  72. /// 监控
  73. /// </summary>
  74. /// <returns></returns>
  75. public RState Monitor()
  76. {
  77. Runner.Run(PlaceVacuumStep.VerticalGotoLoaderPlaceDown, () => _verticalAxis.PositionStation("LoaderPutDown"), _delay_1ms)
  78. .WaitWithStopCondition(PlaceVacuumStep.VerticalGotoLoaderPlaceDownWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
  79. .Run(PlaceVacuumStep.VacuumOff, VacuumOff, _delay_1ms)
  80. .Run(PlaceVacuumStep.StickDistance, StickDistance, 100)
  81. .WaitWithStopCondition(PlaceVacuumStep.StickDistanceWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
  82. .Run(PlaceVacuumStep.VacuumOn, VacuumOn, _delay_1ms)
  83. .Delay(PlaceVacuumStep.Delay, _chuckValveSwitchingTimeDelayInMilliSeconds)
  84. .Run(PlaceVacuumStep.VacuumCheck, CheckWaferPresent,NullFun, _delay_1ms,_showError)
  85. .End(PlaceVacuumStep.End, NullFun, _delay_1ms);
  86. return Runner.Status;
  87. }
  88. /// <summary>
  89. /// Stick Distance
  90. /// </summary>
  91. /// <returns></returns>
  92. private bool StickDistance()
  93. {
  94. return _distanceSensor.GotoStickDistance();
  95. }
  96. /// <summary>
  97. /// 检验Vertical移动状态
  98. /// </summary>
  99. /// <returns></returns>
  100. private bool CheckVerticalPositionStatus()
  101. {
  102. return _verticalAxis.Status == RState.End;
  103. }
  104. /// <summary>
  105. /// 检验Vertical是否还在运动
  106. /// </summary>
  107. /// <returns></returns>
  108. private bool CheckVerticalPositionRunStop()
  109. {
  110. return _verticalAxis.Status == RState.Failed;
  111. }
  112. /// <summary>
  113. /// 关闭Vacuum
  114. /// </summary>
  115. /// <returns></returns>
  116. private bool VacuumOff()
  117. {
  118. if (_side == SideA)
  119. {
  120. return _vacuum.VacuumAOff();
  121. }
  122. else if (_side == SideB)
  123. {
  124. return _vacuum.VacuumBOff();
  125. }
  126. return false;
  127. }
  128. /// <summary>
  129. /// 打开Vacuum
  130. /// </summary>
  131. /// <returns></returns>
  132. private bool VacuumOn()
  133. {
  134. if (_side == SideA)
  135. {
  136. return _vacuum.VacuumAOn();
  137. }
  138. else if (_side == SideB)
  139. {
  140. return _vacuum.VacuumBOn();
  141. }
  142. return false;
  143. }
  144. /// <summary>
  145. /// 检验存在Wafer
  146. /// </summary>
  147. /// <returns></returns>
  148. private bool CheckWaferPresent()
  149. {
  150. if(_isSimulator)
  151. {
  152. return true;
  153. }
  154. if (_side == SideA)
  155. {
  156. return _vacuum.ChuckAVacuumStatus == WAFER_ABSENT;
  157. }
  158. else if (_side == SideB)
  159. {
  160. return _vacuum.ChuckBVacuumStatus == WAFER_ABSENT;
  161. }
  162. else
  163. {
  164. return false;
  165. }
  166. }
  167. /// <summary>
  168. /// 启动
  169. /// </summary>
  170. /// <param name="objs"></param>
  171. /// <returns></returns>
  172. public RState Start(params object[] objs)
  173. {
  174. _side = objs[0].ToString();
  175. _showError = objs.Length > 1 ? (bool)objs[1] : true;
  176. _times = objs.Length > 2 ? (int)objs[2] : 1;
  177. _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
  178. _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  179. _distanceSensor = DEVICE.GetDevice<PufDistanceSensor>($"{Module}.DistanceSensor");
  180. _chuckValveSwitchingTimeDelayInMilliSeconds = SC.GetValue<int>($"{Module}.ChuckValveSwitchingTimeDelayInMilliSeconds");
  181. return Runner.Start(Module, $"Start {_times} Place Vacuum Check");
  182. }
  183. }
  184. }