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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.Loader;
- using CyberX8_RT.Devices.PUF;
- using CyberX8_RT.Devices.TransPorter;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.PUF
- {
- public class PufPickFromLoaderRoutine : RoutineBase,IRoutine
- {
- #region 常量
- private const string SideA = "SideA";
- private const string SideB = "SideB";
- private const string CURRENT_STATION_LIST = "CurrentStationList";
- #endregion
- #region 内部变量
- private string _side;
- private JetAxisBase _flipAxis;
- private JetAxisBase _rotationAxis;
- private JetAxisBase _verticalAxis;
- private JetAxisBase _gantryAxis;
- private LoaderSideDevice _loaderSide;
- private PufVacuum _vacuum;
- private IRoutine _routine;
- private PufNoWaferPickRoutine _noWaferPickRoutine;
- private PufWaferPickRoutine _pufWaferPickRoutine;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- /// <param name="pufEntity"></param>
- public PufPickFromLoaderRoutine(string module) : base(module)
- {
- _noWaferPickRoutine =new PufNoWaferPickRoutine(module);
- _pufWaferPickRoutine=new PufWaferPickRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- _routine.Abort();
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- return _routine.Monitor();
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _side = objs[0].ToString();
- _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
- _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
- _gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter2}.Gantry");
- GetLoaderSide();
- if (CheckCondition())
- {
- if (CheckReverseWafer())
- {
- _routine = _pufWaferPickRoutine;
- }
- else
- {
- _routine = _noWaferPickRoutine;
- }
- _routine.Start(_side);
- return RState.Running;
- }
- else
- {
- return RState.Failed;
- }
- }
- /// <summary>
- /// 检验条件
- /// </summary>
- /// <returns></returns>
- private bool CheckCondition()
- {
- //Loader1.Rotation 在LOADA
- bool isLoaderInstall = ModuleHelper.IsInstalled(ModuleName.Loader1);
- if (isLoaderInstall)
- {
- JetAxisBase loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
- double loaderRotationPosition = loaderRotationAxis.MotionData.MotorPosition;
- if (!loaderRotationAxis.CheckPositionIsInStation(loaderRotationPosition, "LOADA"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader Rotation {loaderRotationPosition} is not in LOADA");
- return false;
- }
- if (Module == ModuleName.PUF1.ToString())
- {
- //Loader1.SwingA 在Open
- JetAxisBase loaderShuttleAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.ShuttleA");
- double loaderShuttleAPosition = loaderShuttleAAxis.MotionData.MotorPosition;
- if (!loaderShuttleAAxis.CheckPositionIsInStation(loaderShuttleAPosition, "OPEN"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader ShuttleA {loaderShuttleAPosition} is not in OPEN");
- return false;
- }
- //Loader1.TiltA 在HORI
- JetAxisBase loaderTiltAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.TiltA");
- double loaderTiltAPosition = loaderTiltAAxis.MotionData.MotorPosition;
- if (!loaderTiltAAxis.CheckPositionIsInStation(loaderTiltAPosition, "HORI"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader TiltA {loaderTiltAPosition} is not in HORI");
- return false;
- }
- }
- if (Module == ModuleName.PUF2.ToString())
- {
- //Loader1.ShuttleB 在Open
- JetAxisBase loaderShuttleBAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.ShuttleB");
- double loaderShuttleBPosition = loaderShuttleBAxis.MotionData.MotorPosition;
- if (!loaderShuttleBAxis.CheckPositionIsInStation(loaderShuttleBPosition, "OPEN"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader ShuttleB {loaderShuttleBPosition} is not in OPEN");
- return false;
- }
- //Loader1.TiltB 在HORI
- JetAxisBase loaderTiltBAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.TiltB");
- double loaderTiltBPosition = loaderTiltBAxis.MotionData.MotorPosition;
- if (!loaderTiltBAxis.CheckPositionIsInStation(loaderTiltBPosition, "HORI"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader TiltB {loaderTiltBPosition} is not in HORI");
- return false;
- }
- }
- //Loader Handle Wafer状态确认
- // Lip Seal Vacuum "ON"
- if (!_loaderSide.SideData.CRSVacuum)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 LS Vacuum is off");
- return false;
- }
- //Bernoulli Bladder "ON",Retracted Green Light
- if (!_loaderSide.SideData.BernoulliBladder)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Bernoulli Bladder is off");
- return false;
- }
- if (_loaderSide.SideData.BernoulliExtended)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Bernoulli Retracted is off");
- return false;
- }
- //其他SideA/B均为OFF
- if (_loaderSide.SideData.BernoulliN2)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Bernoulli N2 is on");
- return false;
- }
- if (!_loaderSide.SideData.DoorUnlock)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Door is Locked");
- return false;
- }
- if (_loaderSide.SideData.WHBladder)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 WS Bladder is on");
- return false;
- }
- if (_loaderSide.SideData.TransBladder)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Translate Bladder is on");
- return false;
- }
- if (_loaderSide.SideData.TransHigh)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Translate High Pre is on");
- return false;
- }
- }
- //Loader Transporter在Loader右侧
- bool loaderTransporterInstalled = ModuleHelper.IsInstalled(ModuleName.Transporter2);
- if (loaderTransporterInstalled && !_gantryAxis.JudgeCompareTargetStation("Loader", "Right"))
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader Transporter is not in Loader right position");
- return false;
- }
- double verticalPosition = _verticalAxis.MotionData.MotorPosition;
- if (!_verticalAxis.CheckPositionIsInStation(verticalPosition,"Park"))
- {
- LOG.WriteLog(eEvent.ERR_PUF,Module, $"vertical axis {verticalPosition} is not at Park Station");
- return false;
- }
- double rotationPosition = _rotationAxis.MotionData.MotorPosition;
- if(_rotationAxis.CheckPositionIsEmpty(rotationPosition))
- {
- LOG.WriteLog(eEvent.ERR_PUF,Module, $"rotation axis {rotationPosition} is not at Station");
- return false;
- }
- double flipPosition = _flipAxis.MotionData.MotorPosition;
- if(_flipAxis.CheckPositionIsEmpty(flipPosition))
- {
- LOG.WriteLog( eEvent.ERR_PUF,Module, $"flip axis {flipPosition} is not at Station");
- return false;
- }
-
- return true;
- }
- /// <summary>
- /// 检验反面Wafer Present
- /// </summary>
- /// <returns></returns>
- private bool CheckReverseWafer()
- {
- if(_side == SideA)
- {
- return _vacuum.ChuckBWaferPresent;
- }
- else if(_side == SideB)
- {
- return _vacuum.ChuckAWaferPresent;
- }
- else
- {
- return false;
- }
- }
- /// <summary>
- /// 获取LoaderSide
- /// </summary>
- private void GetLoaderSide()
- {
- if( Module == ModuleName.PUF1.ToString())
- {
- _loaderSide= DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.SideA");
- }
- else
- {
- _loaderSide = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.SideB");
- }
- }
- }
- }
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