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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.PUF;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.PUF
- {
- public class PufNoWaferPickRoutine : RoutineBase, IRoutine
- {
- private enum PufPickStep
- {
- VacuumLevelCheck,
- RotationLoaderPickup,
- RotationLoaderPickupWait,
- VerticalFlip,
- VerticalFlipWait,
- FlipSide,
- FlipSideWait,
- VerticalLoaderPickup,
- VerticalLoaderPickupWait,
- VacuumOn,
- StickDistance,
- StickDistanceWait,
- StickDistanceCheck,
- ReVerticalFlip,
- ReVerticalFlipWait,
- VerticalPark,
- VerticalParkWait,
- RotationPark,
- RotationParkWait,
- End
- }
- #region 常量
- private const string SideA = "SideA";
- private const string SideB = "SideB";
- private const string VACUUM_OFF= "VacuumOff";
- private const string WAFER_PRESENT = "WaferPresent";
- #endregion
- #region 内部变量
- private JetAxisBase _flipAxis;
- private JetAxisBase _rotationAxis;
- private JetAxisBase _verticalAxis;
- private PufDistanceSensor _distanceSensor;
- private PufVacuum _vacuum;
-
- private string _side;
- private bool _enableCheckStickDistanceStatus = false;
- #endregion
- public PufNoWaferPickRoutine(string module) : base(module)
- {
- _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.Flip");
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.Rotation");
- _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.Vertical");
- _vacuum = DEVICE.GetDevice<PufVacuum>($"{module}.Vacuum");
- _distanceSensor = DEVICE.GetDevice<PufDistanceSensor>($"{module}.DistanceSensor");
- }
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- public RState Monitor()
- {
- Runner.Run(PufPickStep.VacuumLevelCheck, CheckVacuumLevel, 100)
- .Run(PufPickStep.RotationLoaderPickup,()=> { return _rotationAxis.PositionStation("LoaderPickup"); },NullFun,100)
- .WaitWithStopCondition(PufPickStep.RotationLoaderPickupWait,CheckRotationPositionStatus,CheckRotationPositionRunStop)
- .Run(PufPickStep.VerticalFlip, () => { return _verticalAxis.PositionStation("Flip"); },NullFun,100)
- .WaitWithStopCondition(PufPickStep.VerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- .Run(PufPickStep.FlipSide, () => { return _flipAxis.PositionStation(_side); }, NullFun, 100)
- .WaitWithStopCondition(PufPickStep.FlipSideWait, CheckFlipPositionStatus, CheckFlipPositionRunStop)
- .Run(PufPickStep.VerticalLoaderPickup, () => { return _verticalAxis.PositionStation("LoaderPickup"); }, NullFun, 100)
- .WaitWithStopCondition(PufPickStep.VerticalLoaderPickupWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- .Run(PufPickStep.VacuumOn,VacuumOn,CheckWaferPresent,5000)
- .Run(PufPickStep.StickDistance,StickDistance,100)
- .WaitWithStopCondition(PufPickStep.StickDistanceWait,CheckVerticalPositionStatus,CheckVerticalPositionRunStop)
- .Wait(PufPickStep.StickDistanceCheck,CheckStickDistanceStatus,1000)
- .Run(PufPickStep.ReVerticalFlip, () => { return _verticalAxis.PositionStation("Flip"); }, NullFun, 100)
- .WaitWithStopCondition(PufPickStep.ReVerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- .Run(PufPickStep.VerticalPark, () => { return _verticalAxis.PositionStation("Park"); }, NullFun, 100)
- .WaitWithStopCondition(PufPickStep.VerticalParkWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- .Run(PufPickStep.RotationPark, () => { return _rotationAxis.PositionStation("Park"); }, NullFun, 100)
- .WaitWithStopCondition(PufPickStep.RotationParkWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
- .End(PufPickStep.End, NullFun);
- return Runner.Status;
- }
- /// <summary>
- /// 检验VacuumLevel
- /// </summary>
- /// <returns></returns>
- private bool CheckVacuumLevel()
- {
- if (_side == SideA)
- {
- return _vacuum.ChuckAVacuumStatus == VACUUM_OFF;
- }
- else if (_side == SideB)
- {
- return _vacuum.ChuckBVacuumStatus == VACUUM_OFF;
- }
- else
- {
- return false;
- }
- }
- /// <summary>
- /// 检验存在Wafer
- /// </summary>
- /// <returns></returns>
- private bool CheckWaferPresent()
- {
- if (_side == SideA)
- {
- return _vacuum.ChuckAVacuumStatus==WAFER_PRESENT;
- }
- else if (_side == SideB)
- {
- return _vacuum.ChuckBVacuumStatus==WAFER_PRESENT;
- }
- else
- {
- return false;
- }
- }
- /// <summary>
- /// 检验Rotation移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionStatus()
- {
- return _rotationAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Rotation是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionRunStop()
- {
- return _rotationAxis.Status == RState.Failed;
- }
- /// <summary>
- /// 检验Vertical移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionStatus()
- {
- return _verticalAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Vertical是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionRunStop()
- {
- return _verticalAxis.Status == RState.Failed;
- }
- /// <summary>
- /// 检验Flip移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckFlipPositionStatus()
- {
- return _flipAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Flip是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckFlipPositionRunStop()
- {
- return _flipAxis.Status == RState.Failed;
- }
- /// <summary>
- /// 打开Vacuum
- /// </summary>
- /// <returns></returns>
- private bool VacuumOn()
- {
- if(_side==SideA)
- {
- return _vacuum.VacuumAOn();
- }
- else if(_side==SideB)
- {
- return _vacuum.VacuumBOn();
- }
- return false;
- }
- /// <summary>
- /// Stick Distance
- /// </summary>
- /// <returns></returns>
- private bool StickDistance()
- {
- return _distanceSensor.GotoStickDistance();
- }
- /// <summary>
- /// Stick Distance检验结果
- /// </summary>
- /// <returns></returns>
- private bool CheckStickDistanceStatus()
- {
- if (_enableCheckStickDistanceStatus)
- {
- if (_side == "SideA")
- {
- return _distanceSensor.CheckStickDistanceStatus();
- }
- else
- {
- return true;
- }
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _side = objs[0].ToString();
- _enableCheckStickDistanceStatus = SC.GetValue<bool>($"{Module}.EnableCheckStickDistanceStatus");
- Runner.Start(Module, "NoWaferPick");
- return RState.Running;
- }
- }
- }
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