PufGotoRobotForPickRoutine.cs 9.1 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using MECF.Framework.Common.Routine;
  5. using MECF.Framework.Common.Utilities;
  6. using CyberX8_Core;
  7. using CyberX8_RT.Devices.AXIS;
  8. using CyberX8_RT.Devices.PUF;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. namespace CyberX8_RT.Modules.PUF
  15. {
  16. public class PufGotoRobotForPickRoutine : RoutineBase, IRoutine
  17. {
  18. private enum GotoRobotStep
  19. {
  20. VerticalFlip,
  21. VerticalFlipWait,
  22. RotationFlip,
  23. RotationFlipWait,
  24. FlipGotoSide,
  25. FlipGotoSideWait,
  26. VerticalGotoRobot,
  27. VerticalWait,
  28. RotationGotoRobot,
  29. RotationWait,
  30. End
  31. }
  32. #region 常量
  33. private const string WAFER_PRESENT = "WaferPresent";
  34. #endregion
  35. #region 内部变量
  36. /// <summary>
  37. /// Side
  38. /// </summary>
  39. private string _side = "";
  40. /// <summary>
  41. /// Flip Axis
  42. /// </summary>
  43. private JetAxisBase _flipAxis;
  44. /// <summary>
  45. /// Rotation Axis
  46. /// </summary>
  47. private JetAxisBase _rotationAxis;
  48. /// <summary>
  49. /// Vertical Axis
  50. /// </summary>
  51. private JetAxisBase _verticalAxis;
  52. /// <summary>
  53. /// Puf Vacuum
  54. /// </summary>
  55. private PufVacuum _pufVacuum;
  56. /// <summary>
  57. /// Flip Side
  58. /// </summary>
  59. private string _flipSide;
  60. /// <summary>
  61. /// 是否需要翻转
  62. /// </summary>
  63. private bool _needFlip;
  64. #endregion
  65. /// <summary>
  66. /// 构造函数
  67. /// </summary>
  68. /// <param name="module"></param>
  69. public PufGotoRobotForPickRoutine(string module) : base(module)
  70. {
  71. }
  72. /// <summary>
  73. /// 中止
  74. /// </summary>
  75. public void Abort()
  76. {
  77. Runner.Stop("Manual Abort");
  78. }
  79. /// <summary>
  80. /// 监控
  81. /// </summary>
  82. /// <returns></returns>
  83. public RState Monitor()
  84. {
  85. Runner.Run(GotoRobotStep.VerticalFlip, () => { return _verticalAxis.PositionStation("Flip", false); }, _delay_1ms)
  86. .WaitWithStopCondition(GotoRobotStep.VerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
  87. .Run(GotoRobotStep.RotationFlip, RotationGotoFlip, _delay_1ms)
  88. .WaitWithStopCondition(GotoRobotStep.RotationFlipWait, CheckRotationGotoFlipStatus, CheckRotationGotoFlipStopStatus)
  89. .Run(GotoRobotStep.VerticalGotoRobot, () => { return _verticalAxis.PositionStation("Robot",false); }, _delay_1ms)
  90. .Run(GotoRobotStep.FlipGotoSide, () => { return _flipAxis.PositionStation(_flipSide, false); }, _delay_1ms)
  91. .Run(GotoRobotStep.VerticalGotoRobot, () => { return _verticalAxis.PositionStation("Robot",false); }, _delay_1ms)
  92. .WaitWithStopCondition(GotoRobotStep.VerticalWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
  93. .Run(GotoRobotStep.RotationGotoRobot, () => { return _rotationAxis.PositionStation("Robot", false); }, _delay_1ms)
  94. .WaitWithStopCondition(GotoRobotStep.RotationWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
  95. .Run(GotoRobotStep.FlipGotoSide, () => { return _flipAxis.PositionStation(_flipSide,false); }, _delay_1ms)
  96. .WaitWithStopCondition(GotoRobotStep.FlipGotoSideWait, CheckFlipPositionStatus, CheckFlipPositionRunStop)
  97. .End(GotoRobotStep.End, NullFun, _delay_1ms);
  98. return Runner.Status;
  99. }
  100. /// <summary>
  101. /// Rotation Goto Flip
  102. /// </summary>
  103. /// <returns></returns>
  104. private bool RotationGotoFlip()
  105. {
  106. if (_needFlip)
  107. {
  108. return _rotationAxis.PositionStation("Flip", false);
  109. }
  110. else
  111. {
  112. return true;
  113. }
  114. }
  115. /// <summary>
  116. /// 检验Rotation Goto Flip状态
  117. /// </summary>
  118. /// <returns></returns>
  119. private bool CheckRotationGotoFlipStatus()
  120. {
  121. if (_needFlip)
  122. {
  123. return _rotationAxis.Status == RState.End;
  124. }
  125. else
  126. {
  127. return true;
  128. }
  129. }
  130. /// <summary>
  131. /// 检验Rotation Goto Flip停止状态
  132. /// </summary>
  133. /// <returns></returns>
  134. private bool CheckRotationGotoFlipStopStatus()
  135. {
  136. if (_needFlip)
  137. {
  138. return _rotationAxis.Status == RState.End;
  139. }
  140. else
  141. {
  142. return false;
  143. }
  144. }
  145. /// <summary>
  146. /// 检验Rotation移动状态
  147. /// </summary>
  148. /// <returns></returns>
  149. private bool CheckRotationPositionStatus()
  150. {
  151. return _rotationAxis.Status == RState.End;
  152. }
  153. /// <summary>
  154. /// 检验Rotation是否还在运动
  155. /// </summary>
  156. /// <returns></returns>
  157. private bool CheckRotationPositionRunStop()
  158. {
  159. return _rotationAxis.Status == RState.Failed;
  160. }
  161. /// <summary>
  162. /// 检验Vertical移动状态
  163. /// </summary>
  164. /// <returns></returns>
  165. private bool CheckVerticalPositionStatus()
  166. {
  167. return _verticalAxis.Status == RState.End;
  168. }
  169. /// <summary>
  170. /// 检验Vertical是否还在运动
  171. /// </summary>
  172. /// <returns></returns>
  173. private bool CheckVerticalPositionRunStop()
  174. {
  175. return _verticalAxis.Status == RState.Failed;
  176. }
  177. /// <summary>
  178. /// 检验Flip移动状态
  179. /// </summary>
  180. /// <returns></returns>
  181. private bool CheckFlipPositionStatus()
  182. {
  183. return _flipAxis.Status == RState.End;
  184. }
  185. /// <summary>
  186. /// 检验Flip是否还在运动
  187. /// </summary>
  188. /// <returns></returns>
  189. private bool CheckFlipPositionRunStop()
  190. {
  191. return _flipAxis.Status == RState.Failed;
  192. }
  193. /// <summary>
  194. /// 启动
  195. /// </summary>
  196. /// <param name="objs"></param>
  197. /// <returns></returns>
  198. public RState Start(params object[] objs)
  199. {
  200. _side = objs[0].ToString();
  201. if(_side=="SideA")
  202. {
  203. _flipSide = "SideB";//Flip 运动至Side相反位置,即使用SideA,则Flip运动至SideB
  204. }
  205. else
  206. {
  207. _flipSide = "SideA";
  208. }
  209. _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
  210. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  211. _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
  212. _pufVacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  213. _needFlip = !_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _flipSide);
  214. if (!CheckPreCondition())
  215. {
  216. return RState.Failed;
  217. }
  218. return Runner.Start(Module, "Go to Robot");
  219. }
  220. /// <summary>
  221. /// 前置条件
  222. /// </summary>
  223. /// <returns></returns>
  224. private bool CheckPreCondition()
  225. {
  226. if(!_flipAxis.IsHomed)
  227. {
  228. LOG.WriteLog(eEvent.ERR_PUF, Module, "Flip Axis is not homed");
  229. return false;
  230. }
  231. if (!_rotationAxis.IsHomed)
  232. {
  233. LOG.WriteLog(eEvent.ERR_PUF, Module, "Rotation Axis is not homed");
  234. return false;
  235. }
  236. if (!_verticalAxis.IsHomed)
  237. {
  238. LOG.WriteLog(eEvent.ERR_PUF, Module, "Vertical Axis is not homed");
  239. return false;
  240. }
  241. if (_side == "SideA")
  242. {
  243. if(_pufVacuum.ChuckAVacuumStatus!=WAFER_PRESENT)
  244. {
  245. LOG.WriteLog(eEvent.ERR_PUF, Module, "Side A is not wafer present");
  246. return false;
  247. }
  248. }
  249. else if(_side=="SideB")
  250. {
  251. if (_pufVacuum.ChuckBVacuumStatus != WAFER_PRESENT)
  252. {
  253. LOG.WriteLog(eEvent.ERR_PUF, Module, "Side B is not wafer present");
  254. return false;
  255. }
  256. }
  257. if(!_verticalAxis.CheckGotoPosition("Robot"))
  258. {
  259. return false;
  260. }
  261. if(!_rotationAxis.CheckGotoPosition("Robot"))
  262. {
  263. return false;
  264. }
  265. return true;
  266. }
  267. }
  268. }