| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Event;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Loader;using CyberX8_RT.Devices.PUF;using CyberX8_RT.Devices.TransPorter;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Aitex.Core.RT.SCCore;namespace CyberX8_RT.Modules.PUF{    public class PufPickFromLoaderRoutine : RoutineBase,IRoutine    {        #region 常量        private const string SideA = "SideA";        private const string SideB = "SideB";        private const string CURRENT_STATION_LIST = "CurrentStationList";        private const string WAFER_PRESENT = "WaferPresent";        #endregion        private enum PufPickStep        {            SideConditionRoutine,            SideConditionRoutineWait,            RotationLoaderPickup,            RotationLoaderPickupWait,            ChuckOut,            CheckChuckOut,            VacuumOn,            ChuckIn,            CheckChuckIn,            StickDistanceCheck,            RotationHomeStation,            RotationHomeStationWait,            End        }        #region 内部变量        private string _side;        private JetAxisBase _flipAxis;        private JetAxisBase _rotationAxis;        private JetAxisBase _gantryAxis;        private LoaderSideDevice _loaderSide;        private PufVacuum _vacuum;        private PufWaferPickSubRoutine _pufWaferPickSubRoutine;        private PufChuckRoutine _chuckRoutine;        private PufDistanceSensor _distanceSensor;        private bool _enableCheckStickDistanceStatus = false;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        /// <param name="pufEntity"></param>        public PufPickFromLoaderRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("Manual Abort");        }        public RState Monitor()        {            Runner.RunConditionSubRoutine(PufPickStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _side })                .WaitConditionSubRoutine(PufPickStep.SideConditionRoutineWait)                .Run(PufPickStep.RotationLoaderPickup, () => { return _rotationAxis.PositionStation("LoaderPickup"); }, NullFun, 100)                .WaitWithStopCondition(PufPickStep.RotationLoaderPickupWait, () => { return _rotationAxis.Status == RState.End; }, () => { return _rotationAxis.Status == RState.Failed; })                .Run(PufPickStep.ChuckOut, () => { return _chuckRoutine.Start(true) == RState.Running; }, NullFun, 100)                .WaitWithStopCondition(PufPickStep.CheckChuckOut, () => CommonFunction.CheckRoutineEndState(_chuckRoutine), () => CommonFunction.CheckRoutineStopState(_chuckRoutine))                .Run(PufPickStep.VacuumOn, VacuumOn, CheckWaferPresent, 5000)                .Run(PufPickStep.ChuckIn, () => { return _chuckRoutine.Start(false) == RState.Running; }, NullFun, 100)                .WaitWithStopCondition(PufPickStep.CheckChuckIn, () => CommonFunction.CheckRoutineEndState(_chuckRoutine), () => CommonFunction.CheckRoutineStopState(_chuckRoutine))                .Wait(PufPickStep.StickDistanceCheck, CheckStickDistanceStatus, 1000)                .Run(PufPickStep.RotationHomeStation, () => { return _rotationAxis.PositionStation("Home"); }, NullFun, 100)                .WaitWithStopCondition(PufPickStep.RotationHomeStationWait, () => { return _rotationAxis.Status == RState.End; }, () => { return _rotationAxis.Status == RState.Failed; })                .End(PufPickStep.End, NullFun);            return Runner.Status;        }        /// <summary>        /// Side条件获取SubRoutine索引        /// </summary>        /// <returns></returns>        private int SideConditionIndex()        {            if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _side))            {                return 1;            }            else            {                return 0;            }        }        /// <summary>        /// 检验VacuumLevel        /// </summary>        /// <returns></returns>        private bool CheckVacuumLevel()        {            if (_side == SideA)            {                return _vacuum.ChuckBVacuumStatus == WAFER_PRESENT;            }            else if (_side == SideB)            {                return _vacuum.ChuckAVacuumStatus == WAFER_PRESENT;            }            else            {                return false;            }        }        /// <summary>        /// 检验存在Wafer        /// </summary>        /// <returns></returns>        private bool CheckWaferPresent()        {            if (_side == SideA)            {                return _vacuum.ChuckAVacuumStatus == WAFER_PRESENT;            }            else if (_side == SideB)            {                return _vacuum.ChuckBVacuumStatus == WAFER_PRESENT;            }            else            {                return false;            }        }        /// <summary>        /// 打开Vacuum        /// </summary>        /// <returns></returns>        private bool VacuumOn()        {            if (_side == SideA)            {                _vacuum.VacuumAOn();                return true;            }            else if (_side == SideB)            {                _vacuum.VacuumBOn();                return true;            }            return false;        }        /// <summary>        /// Stick Distance检验结果        /// </summary>        /// <returns></returns>        private bool CheckStickDistanceStatus()        {            if (_enableCheckStickDistanceStatus)            {                return _distanceSensor.CheckStickDistanceStatus();            }            else            {                return true;            }        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _side = objs[0].ToString();            _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");            _gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter2}.Gantry");            _distanceSensor = DEVICE.GetDevice<PufDistanceSensor>($"{Module}.DistanceSensor");            _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(Module);            _enableCheckStickDistanceStatus = SC.GetValue<bool>($"{Module}.EnableCheckStickDistanceStatus");            _chuckRoutine = new PufChuckRoutine(Module);            _loaderSide = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.{_side}");            if (CheckCondition())            {                return Runner.Start(Module, "PickFrom Loader");            }            else            {                return RState.Failed;            }        }        /// <summary>        /// 检验条件        /// </summary>        /// <returns></returns>        private bool CheckCondition()        {            //Loader1.Rotation 在LOADA            bool isLoaderInstall = ModuleHelper.IsInstalled(ModuleName.Loader1);            if (isLoaderInstall)            {                JetAxisBase loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");                double loaderRotationPosition = loaderRotationAxis.MotionData.MotorPosition;                string loadStation = _side == SideA ? "LOADA" : "LOADB";                if (!loaderRotationAxis.CheckPositionInStationIgnoreWaferSize(loaderRotationPosition, loadStation))                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader Rotation {loaderRotationPosition} is not in {loadStation}");                    return false;                }                string side = _side==SideA ? "A" : "B";                //Loader1.SwingA 在Open                JetAxisBase loaderShuttleAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Shuttle{side}");                double loaderShuttleAPosition = loaderShuttleAAxis.MotionData.MotorPosition;                if (!loaderShuttleAAxis.CheckPositionInStationIgnoreWaferSize(loaderShuttleAPosition, "OUT"))                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader ShuttleA {loaderShuttleAPosition} is not in OUT");                    return false;                }                //Loader1.TiltA 在HORI                JetAxisBase loaderTiltAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Tilt{side}");                double loaderTiltAPosition = loaderTiltAAxis.MotionData.MotorPosition;                if (!loaderTiltAAxis.CheckPositionIsInStation(loaderTiltAPosition, "HORI"))                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader Tilt{side} {loaderTiltAPosition} is not in HORI");                    return false;                }                //Loader Handle Wafer状态确认                // Lip Seal Vacuum "ON"                if (!_loaderSide.SideData.CRSVacuum)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 LS Vacuum is off");                    return false;                }                //Bernoulli Bladder "ON",Retracted Green Light                if (!_loaderSide.SideData.BernoulliBladder)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Bernoulli Bladder is off");                    return false;                }                //其他SideA/B均为OFF                if (_loaderSide.SideData.BernoulliN2)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 Bernoulli N2 is on");                    return false;                }                if (_loaderSide.SideData.WHBladder)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, "Loader1 WS Bladder is on");                    return false;                }            }            double rotationPosition = _rotationAxis.MotionData.MotorPosition;            if(_rotationAxis.CheckPositionIsEmpty(rotationPosition))            {                LOG.WriteLog(eEvent.ERR_PUF,Module, $"rotation axis {rotationPosition} is not at Station");                return false;            }            double flipPosition = _flipAxis.MotionData.MotorPosition;            if(_flipAxis.CheckPositionIsEmpty(flipPosition))            {                LOG.WriteLog( eEvent.ERR_PUF,Module, $"flip axis {flipPosition} is not at Station");                return false;            }                        return true;        }    }}
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