| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.RecipeCenter;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using MECF.Framework.Common.RecipeCenter;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Facilities;using CyberX8_RT.Devices.SRD;using System;using System.Collections.Generic;using System.Linq;using System.Reflection;using System.Runtime.InteropServices;using System.Text;using System.Threading;using System.Threading.Tasks;namespace CyberX8_RT.Modules.SRD{    internal class SRDPresenceTestRoutine : RoutineBase, IRoutine    {        private enum PresenceTestStep        {            Ready,                       CloseDoor,            CheckCloseDoor,            ChuckVacuumOn,            RunWafer,            RunWaferWait,            InitialUnloadingStateMachine,            Unloading,            UnloadingWait,            End        }        #region 内部变量        /// <summary>        /// Rotation Axis        /// </summary>        private JetAxisBase _rotationAxis;        /// <summary>        /// Arm Axis        /// </summary>        private JetAxisBase _armAxis;        /// <summary>        /// SRD Common        /// </summary>        private SrdCommonDevice _srdCommon;        /// <summary>        /// recipe名称        /// </summary>        private string _recipe;        /// <summary>        /// SRD Recipe        /// </summary>        private SrdRecipe _srdRecipe;        /// <summary>        /// Module        /// </summary>        private string _module;        /// <summary>        /// Wafer Presence Test功能是否启用        /// </summary>        private bool _presenceTestEnabled;        /// <summary>        /// Run wafer Recipe Routine        /// </summary>        private SRDRunWaferRecipeRoutine _runWaferRecipRoutine;        /// <summary>        /// Unload Routine        /// </summary>        private SRDUnloadRoutine _unloadRoutine;        #endregion        #region 属性        /// <summary>        /// 当前子状态机        /// </summary>        public string CurrentStateMachine        {            get { return GetCurrentStateMachine(); }        }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public SRDPresenceTestRoutine(string module) : base(module)        {            _module = module;            _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{module}.Common");            _runWaferRecipRoutine = new SRDRunWaferRecipeRoutine(module);            _unloadRoutine = new SRDUnloadRoutine(module);        }        /// <summary>        /// Abort        /// </summary>        public void Abort()        {            if(_unloadRoutine.Monitor() == RState.Running)            {                _unloadRoutine.Abort();            }            if (_runWaferRecipRoutine.Monitor() == RState.Running)            {                _runWaferRecipRoutine.Abort();            }                      Runner.Stop("Presence Test Abort");            if (_srdCommon != null)            {                _srdCommon.EnterErrorOperation();            }        }        public RState Monitor()        {            Runner.Wait(PresenceTestStep.Ready, CheckReadyStatus, _delay_1ms)                .Run(PresenceTestStep.CloseDoor, CloseDoor, CheckDoorClosed, _delay_1s)                .Run(PresenceTestStep.ChuckVacuumOn, EngageChuckVacuum, CheckVacuum, _delay_1s)                .Run(PresenceTestStep.RunWafer, () => { return StartRunWaferRecipeRoutine(_recipe); }, _delay_1ms)                .WaitWithStopCondition(PresenceTestStep.RunWaferWait, CheckRunWaferRoutineCompleteStatus, CheckRunWaferRoutineErrorStatus)                .Run(PresenceTestStep.Unloading, () => { return StartUnloadingRoutine(); }, _delay_1ms)                .WaitWithStopCondition(PresenceTestStep.UnloadingWait, CheckUnloadingRoutineCompleteStatus, CheckUnloadingRoutineErrorStatus)                .End(PresenceTestStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _recipe = objs[0].ToString();                      _srdRecipe = RecipeFileManager.Instance.LoadGenericityRecipe<SrdRecipe>(_recipe);            if (_srdRecipe == null)            {                LOG.WriteLog(eEvent.INFO_SRD, Module.ToString(), $"Start Run Wafer State Machine, recipe[{_recipe}] is null");                return RState.Failed;            }            Runner.Start(Module, "PresenceTest");            return RState.Running;        }        private bool CheckReadyStatus()        {            //Arm是否开启,是否home            _armAxis = DEVICE.GetDevice<JetAxisBase>($"{_module}.Arm");            if (_armAxis.IsSwitchOn)            {                if (!_armAxis.IsHomed)                {                    LOG.WriteLog(eEvent.ERR_SRD, _module, "Arm is not swicth on");                    return false;                }            }            else            {                LOG.WriteLog(eEvent.ERR_SRD, _module, "Arm is not home");                return false;            }                        //Rotation是否开启,是否home            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{_module}.Rotation");            if (_rotationAxis.IsSwitchOn)            {                if (!_rotationAxis.IsHomed)                {                    LOG.WriteLog(eEvent.ERR_SRD, _module, "Rotation is not homed");                    return false;                }            }            else            {                                LOG.WriteLog(eEvent.ERR_SRD, _module, "Rotation is not switched on ");                return false;                            }            //检查N2与CDA            SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");            var result = systemFacilities.CheckCDAN2();            if (!result.result)            {                LOG.WriteLog(eEvent.ERR_SRD, _module, $"CheckCDAN2 is failed");                return false;            }                     //Wafer Presence Test功能是否开启            if (SC.ContainsItem($"SRD.{_module}EnablePresenceCheckvalue"))            {                _presenceTestEnabled = SC.GetValue<bool>($"SRD.{_module}EnablePresenceCheckvalue");                if (!_presenceTestEnabled)                {                    LOG.WriteLog(eEvent.ERR_SRD, _module, $"{_module}EnablePresenceCheckvalue is unable");                    return false;                }            }            else            {                LOG.WriteLog(eEvent.ERR_SRD, _module, $"Config dosen't have EnablePresenceCheckvalue");                return false;            }            return true;        }        /// <summary>        /// Close Door        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CloseDoor()        {            bool result = _srdCommon.DoorCloseAction("", null);            if (!result)            {                return false;            }            return result;        }        /// <summary>        /// 检验DoorClosed        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckDoorClosed()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                               return false;            }            return _srdCommon.Status == RState.End && _srdCommon.CommonData.DoorClosed;        }        /// <summary>        /// Chuck Vacuum On        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool EngageChuckVacuum()        {            bool result = _srdCommon.ChuckVacuumOnAction("", null);            if (!result)            {                return false;            }            return result;        }        /// <summary>        /// 检查真空状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckVacuum()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                return false;            }            return _srdCommon.Status == RState.End && !_srdCommon.CommonData.ChuckVacuum;        }        #region SRD RunWaferRecipeRoutine        /// <summary>        /// 启动RunWaferRecipeRoutine        /// </summary>        /// <param name="recipe"></param>        /// <returns></returns>        private bool StartRunWaferRecipeRoutine(string recipe)        {            bool presenceTestFlag = true;            return _runWaferRecipRoutine.Start(_srdRecipe, presenceTestFlag) == RState.Running;        }        /// <summary>        /// 检验RunWaferRecipeRoutine是否完成        /// </summary>        /// <returns></returns>        private bool CheckRunWaferRoutineCompleteStatus()        {            return CommonFunction.CheckRoutineEndState(_runWaferRecipRoutine);        }        /// <summary>        /// 检验RunWaferRecipeRoutine是否出错        /// </summary>        /// <returns></returns>        private bool CheckRunWaferRoutineErrorStatus()        {            bool result = CommonFunction.CheckRoutineStopState(_runWaferRecipRoutine);            if (result && _srdCommon != null)            {                _srdCommon.EnterErrorOperation();            }            return result;        }        #endregion        #region SRD UnloadingRoutine        /// <summary>        /// 启动UnloadingRoutine        /// </summary>        /// <param name="recipe"></param>        /// <returns></returns>        private bool StartUnloadingRoutine()        {            return _unloadRoutine.Start() == RState.Running;        }        /// <summary>        /// 检验UnloadingRoutine是否完成        /// </summary>        /// <returns></returns>        private bool CheckUnloadingRoutineCompleteStatus()        {            return CommonFunction.CheckRoutineEndState(_unloadRoutine);        }        /// <summary>        /// 检验UnloadingRoutine是否出错        /// </summary>        /// <returns></returns>        private bool CheckUnloadingRoutineErrorStatus()        {            return CommonFunction.CheckRoutineStopState(_unloadRoutine);        }                #endregion        /// <summary>        /// 获取当前子状态机        /// </summary>        private string GetCurrentStateMachine()        {            string result;            if (Runner.CurrentStep.ToString() == "Ready")            {                result = "Ready";            }            else if (Runner.CurrentStep.ToString().Contains("RunWafer"))            {                result = _runWaferRecipRoutine.CurrentStep;            }            else if (Runner.CurrentStep.ToString().Contains("Unloading"))            {                result = _unloadRoutine.CurrentStep;            }            else            {                result = "End";            }            return result;        }    }}
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