| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.AXIS.CANOpen;using CyberX8_RT.Modules.PUF;using CyberX8_RT.Modules;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using MECF.Framework.Common.CommonData.Loader;using CyberX8_RT.Modules.Transporter;using MECF.Framework.Common.WaferHolder;using CyberX8_RT.Modules.Loader;using Aitex.Core.Common;namespace CyberX8_RT.Devices.Loader{    public class LoaderLoadRoutine : RoutineBase, IRoutine    {        private enum LoadStep        {            CheckPreCondition,            WSClampOn,            BernoulliN2On,            BernoulliN2OnCheck,            BernoulliBladderOff,            BernoulliBladderOffCheck,            TiltGotoFloat,            TiltGotoFloatWait,            Wait1,            BernoulliBladderOn,            BernoulliBladderOnCheck,            CRSVacuumValue,            CRSVacuumValueCheck,            TiltGotoVertical,            TiltGotoVerticalWait,            CRSGotoUnlock,            CRSGotoUnlockWait,            WSBladderOn,            WSBladderOnCheck,            ShuttleGotoCRS,            ShuttleGotoCRSWait,            CRSGotoSetUp,            CRSGotoSetUpWait,            CRSGotoLock,            CRSGotoLockWait,            BernoulliN2Off,            BernoulliN2OffCheck,            WSBladderOff,            WSBladderOffCheck,            Wait2,            CRSVacuumOff,            CRSVacuumOffCheck,            Wait3,            ShuttleGotoMID,            ShuttleGotoMIDWait,            HomingCRSAxis,            HomingCRSAxisWait,            CRSHomedGotoSetUp,            CRSHomedGotoSetUpCheck,            End         }        #region 内部变量        private string _side = "";        private int _crsVacuumReleaseDelayInMilliseconds = 250;        private int _translateOutDelayInMilliseconds = 250;        private int _waferSize = 200;        private JetAxisBase _crsAxis;        private JetAxisBase _tiltAxis;        private JetAxisBase _shuttleAxis;        private JetAxisBase _rotationAxis;        private LoaderCommonDevice _loaderCommonDevice;        private LoaderSideDevice _sideDevice;        private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;        private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;        private LoaderSideVacuumAndLevelCheckRoutineRoutine _vacuumAndLevelCheckRoutineRoutine;        private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;        private LoaderSideWhBladderRoutine _whBladderRoutine;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public LoaderLoadRoutine(string module,string side) : base(module)        {            _side = side;        }               /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("Manual Abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(LoadStep.CheckPreCondition, CheckPreCondition, _delay_1ms)                //1 WSClamp On                .Run(LoadStep.WSClampOn, WaferHolderClampOn, _delay_1ms)                //2 BernoulliN2 On                .Run(LoadStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },                    () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "BernoulliN2 On failed"))                //3 Bernoulli Bladder Off                .Run(LoadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder Off failed"))                //4 Tilt Goto Float                .Run(LoadStep.TiltGotoFloat, () => { return AxisPosition(_tiltAxis, "FLOAT"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.TiltGotoFloatWait, () => { return _tiltAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_tiltAxis))                //5 等待0.5秒                .Delay(LoadStep.Wait1, 500)                //6 BernoulliBladder On                .Run(LoadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))                //7 CRS Vacuum Check                .Run(LoadStep.CRSVacuumValue, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSVacuumValueCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },                    () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "CRS Vacuum Check failed"))                //8 Tilt Goto Vertical                .Run(LoadStep.TiltGotoVertical, () => { return AxisPosition(_tiltAxis, "VERT"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.TiltGotoVerticalWait, () => { return _tiltAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_tiltAxis))                //9 CRS Goto Unlock                .Run(LoadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_crsAxis))                //10 WS Bladder On                .Run(LoadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },                    () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))                //11 Shuttle Goto CRS                .Run(LoadStep.ShuttleGotoCRS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.ShuttleGotoCRSWait, () => { return _shuttleAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_shuttleAxis))                //12 CRS Goto SetUp                .Run(LoadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_crsAxis))                //13 CRS Goto Lock                .Run(LoadStep.CRSGotoLock, () => { return AxisPosition(_crsAxis, $"Lock{_waferSize}"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSGotoLockWait, () => { return _crsAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_crsAxis))                //.Run(LoadStep.CRSShortDistance, () => { return _crsAxis.ProfilePositionOperation(_crsAxis.MotionData.MotorPosition + _shortDistance); },_delay_1ms)                //.WaitWithStopCondition(LoadStep.CRSShortDistanceWait, () => { return _crsAxis.Status == RState.End; },                //    () => CheckAxisMotionStopStatus(_crsAxis))                //14 Bernoulli N2 Off                .Run(LoadStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },                    () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "Bernoulli N2 Off failed"))                //15 WS Bladder Off                .Run(LoadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },                    () => CheckRoutineStopStatus(_whBladderRoutine, "WS Bladder Off failed"))                //16 等待0.5秒                .Delay(LoadStep.Wait2, 500)                //17 CRS Vacuum Off                .Run(LoadStep.CRSVacuumOff, () => { return _vacuumAndLevelCheckRoutineRoutine.Start(false) == RState.Running; }, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumAndLevelCheckRoutineRoutine); },                    () => CheckRoutineStopStatus(_vacuumAndLevelCheckRoutineRoutine, "LS Vacuum Off failed"))                //18 等待0.5秒                .Delay(LoadStep.Wait3, 500)                //19 Shuttle Goto Mid                .Run(LoadStep.ShuttleGotoMID, () => { return AxisPosition(_shuttleAxis, "MID"); }, NullFun, _delay_1ms)                .WaitWithStopCondition(LoadStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_shuttleAxis))                //20 Home CRS Axis                .Run(LoadStep.HomingCRSAxis, CRSHome, _delay_1ms)                .WaitWithStopCondition(LoadStep.HomingCRSAxisWait, () => { return _crsAxis.Status == RState.End; },                    () => CheckCRSHomeStopStatus())                .Run(LoadStep.CRSHomedGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, _delay_1ms)                .WaitWithStopCondition(LoadStep.CRSHomedGotoSetUpCheck, () => { return _crsAxis.Status == RState.End; },                    () => CheckAxisMotionStopStatus(_crsAxis))                .End(LoadStep.End, UpdateWaferHolderLipCRSUsed);            return Runner.Status;         }        /// <summary>        /// 检验TranslateBladderOff异常状态        /// </summary>        /// <returns></returns>        private bool CheckRoutineStopStatus(IRoutine routine, string error)        {            bool result = CommonFunction.CheckRoutineStopState(routine);            if (result)            {                NotifyError(eEvent.ERR_LOADER, $"{error}", 0);            }            return result;        }        /// <summary>        /// Axis goto position        /// </summary>        /// <param name="axis"></param>        /// <param name="station"></param>        /// <returns></returns>        private bool AxisPosition(JetAxisBase axis, string station)        {            bool result = axis.PositionStation(station);            if (!result)            {                NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);            }            return result;        }        /// <summary>        /// 检验电机运动异常状态        /// </summary>        /// <param name="axis"></param>        /// <returns></returns>        private bool CheckAxisMotionStopStatus(JetAxisBase axis)        {            bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;            if (result)            {                NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);            }            return result;        }        /// <summary>        /// CRS Home        /// </summary>        /// <returns></returns>        private bool CRSHome()        {            bool result = _crsAxis.Home();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);            }            return result;        }        /// <summary>        /// 检验CRS home异常状态        /// </summary>        /// <returns></returns>        private bool CheckCRSHomeStopStatus()        {            bool result=_crsAxis.Status==RState.Failed||_crsAxis.Status==RState.Timeout;            if (result)            {                NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);            }            return result;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            if (SC.ContainsItem($"Loader1.{_side}WaferSize"))            {                _waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");            }            _crsAxis = GetCrsAxis();            _tiltAxis = GetTiltAxis();            _shuttleAxis= GetShuttleAxis();            _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"Loader1.Common");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");            _sideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");            _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");            _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");            _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");            _bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");            _vacuumAndLevelCheckRoutineRoutine = new LoaderSideVacuumAndLevelCheckRoutineRoutine($"{Module}.{_side}");            if (SC.ContainsItem("Loader1.LSVacuumReleaseDelayInMilliseconds"))            {                _crsVacuumReleaseDelayInMilliseconds = SC.GetValue<int>("Loader1.LSVacuumReleaseDelayInMilliseconds");            }            if (SC.ContainsItem("Loader1.TranslateOutDelayInMilliseconds"))            {                _translateOutDelayInMilliseconds = SC.GetValue<int>("Loader1.TranslateOutDelayInMilliseconds");            }            Runner.Start(Module, "Load");            return RState.Running;        }        /// <summary>        /// 获取Shuttle轴对象        /// </summary>        /// <returns></returns>        private JetAxisBase GetShuttleAxis()        {            switch (_side)            {                case "SideA":                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleA");                default:                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleB");            }        }        /// <summary>        /// 获取CRS轴对象        /// </summary>        /// <returns></returns>        private JetAxisBase GetCrsAxis()        {            switch(_side)            {                case "SideA":                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSA");                default:                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSB");            }        }        /// <summary>        /// 获取Tilt轴对象        /// </summary>        /// <returns></returns>        private JetAxisBase GetTiltAxis()        {            switch (_side)            {                case "SideA":                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltA");                default:                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltB");            }        }        /// <summary>        /// 检验前置条件        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            if(!CheckHomeCondition())            {                return false;            }            if(!CheckAxisCondition())            {                return false;            }            if(!StatusCheck())            {                return false;            }            if(!CRSVacuumCheck())            {                return false;            }            return true;        }        /// <summary>        /// 检验Home条件        /// </summary>        /// <returns></returns>        private bool CheckHomeCondition()        {            //检验PUF、Loader Transporter,Robot均Homed            if (ModuleHelper.IsInstalled(ModuleName.PUF1))            {                PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());                if (!puf1Entity.IsHomed)                {                    NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);                    return false;                }            }            if (ModuleHelper.IsInstalled(ModuleName.Loader1))            {                LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());                if (!loaderEntity.IsHomed)                {                    NotifyError(eEvent.ERR_LOADER, "Loader is not homed", -1);                    return false;                }            }            if (ModuleHelper.IsInstalled(ModuleName.Transporter2))            {                TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());                if (!loaderTransportEntity.IsHomed)                {                    NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);                    return false;                }            }            return true;        }        /// <summary>        /// 检验Axis位置        /// </summary>        /// <param name="side"></param>        /// <returns></returns>        private bool CheckAxisCondition()        {            if(!_rotationAxis.IsHomed)            {                NotifyError(eEvent.ERR_LOADER,  $"rotation is not homed",-1);                return false;            }            if (!_shuttleAxis.IsHomed)            {                NotifyError(eEvent.ERR_LOADER,  $"{_shuttleAxis.Name} is not homed",-1);                return false;            }            if (!_tiltAxis.IsHomed)            {                NotifyError(eEvent.ERR_LOADER,  $"{_tiltAxis.Name} is not homed", -1);                return false;            }            if (!_crsAxis.IsHomed)            {                NotifyError(eEvent.ERR_LOADER,  $"{_crsAxis.Name} is not homed",-1);                return false;            }            double rotationPosition = _rotationAxis.MotionData.MotorPosition; //校验rotation是否再load位置            if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOAD{_side.Substring(_side.Length- 1)}{_waferSize}"))            {                NotifyError(eEvent.ERR_LOADER,  $"rotation {rotationPosition} not in LOAD{_side.Substring(_side.Length - 1)}{_waferSize}", -1);                return false;            }            double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;//校验shuttle位置是否再out位置            if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, $"OUT{_waferSize}"))            {                NotifyError(eEvent.ERR_LOADER,  $"shuttle {shuttlePosition} not in $OUT{_waferSize}",-1);                return false;            }            double tiltPosition = _tiltAxis.MotionData.MotorPosition;//校验tilt是否在hori位置            if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI"))            {                NotifyError(eEvent.ERR_LOADER,  $"tilt {tiltPosition} not in HORI", -1);                return false;            }            double crsPosition=_crsAxis.MotionData.MotorPosition;//校验crs是否在setup位置            if (_crsAxis.CheckPositionIsInStation(tiltPosition, $"Setup{_waferSize}"))            {                NotifyError(eEvent.ERR_LOADER,  $"crs {crsPosition} not at Setup{_waferSize}",-1);                return false;            }            return true;        }        /// <summary>        /// Wafer Holder Clamp On        /// </summary>        /// <returns></returns>        private bool WaferHolderClampOn()        {            bool result = _loaderCommonDevice.WaferHolderClampOnAction();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0);            }            return result;        }        /// <summary>        /// Status Check        /// </summary>        /// <param name="side"></param>        /// <returns></returns>        private bool StatusCheck()        {            //判断是否放置wafershuttle            if (!_loaderCommonDevice.CommonData.WaferHolderPresent)            {                NotifyError(eEvent.ERR_LOADER, "There is no wafer shuttle, can not do load", -1);                return false;            }            return true;        }        /// <summary>        /// CRS Vacuum Check        /// </summary>        /// <param name="side"></param>        /// <returns></returns>        private bool CRSVacuumCheck()        {            LoaderSideData sideData = _sideDevice.SideData;            LoaderCommonData commonData = _loaderCommonDevice.CommonData;            //Bernoulli Bladder            if (!sideData.BernoulliBladder)            {                NotifyError(eEvent.ERR_LOADER, "BernoulliBladder is off", -1);                return false;            }            if (sideData.BernoulliExtended)            {                NotifyError(eEvent.ERR_LOADER, "Bernoulli is Extended", -1);                return false;            }            //Bernoulli N2            if (sideData.BernoulliN2)            {                NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is On", -1);                return false;            }            //CRS Vacuum检验            if (!sideData.CRSVacuum)            {                NotifyError(eEvent.ERR_LOADER,  "LS Vacuum is off",-1);                return false;            }            if (SC.ContainsItem($"{Module}.LSVacuumHighLimit"))  //真空值要大于最小设定值            {                double crsVacuumHighLimit = SC.GetValue<double>($"{Module}.LSVacuumHighLimit");                if (sideData.CRSVacuumValue >= crsVacuumHighLimit || sideData.CRSVacuumValue >= 0)                {                    NotifyError(eEvent.ERR_LOADER,  "LS Vacuum value is invalid", -1);                    return false;                }            }            //WS Clamp            if (!commonData.WaferHolderClamp)            {                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1);                return false;            }            //WS Bladder            if (sideData.WHBladder)            {                NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1);                return false;            }            //Drip Tray Fluid            if (commonData.DripTrayFluid)            {                NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1);                return false;            }            //Wafer Shuttle Present            if (!commonData.WaferHolderPresent)            {                NotifyError(eEvent.ERR_LOADER,  "Wafer Shuttle is absent",-1);                return false;            }            return true;        }        /// <summary>        /// 更新WaferHolder LipCRS用量        /// </summary>        /// <returns></returns>        private bool UpdateWaferHolderLipCRSUsed()        {            WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader");            if (waferHolderInfo != null)            {                if (!string.IsNullOrEmpty(waferHolderInfo.CrsAId)&&_side=="SideA")                {                    waferHolderInfo.CrsATotalUses++;                    WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);                }                if (!string.IsNullOrEmpty(waferHolderInfo.CrsBId) && _side == "SideB")                {                    waferHolderInfo.CrsBTotalUses++;                    WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);                }            }            return true;        }    }}
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