MetalEntity.cs 60 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. namespace CyberX8_RT.Modules.Metal
  27. {
  28. public class MetalEntity : Entity, IEntity, IModuleEntity
  29. {
  30. #region 常量
  31. private const string STRATUS = "Stratus";
  32. private const string AUTO = "Auto";
  33. private const string MANUAL = "Manual";
  34. private const string DISABLED = "Disabled";
  35. private const string ENGINEERING = "Engineering";
  36. private const string PRODUCTION = "Production";
  37. #endregion
  38. #region 内部变量
  39. /// <summary>
  40. /// 已经完成的Cycle次数
  41. /// </summary>
  42. private int _achievedCycle = 0;
  43. /// <summary>
  44. /// Metal项
  45. /// </summary>
  46. private MetalItem _metalItem;
  47. /// <summary>
  48. /// 持久化对象
  49. /// </summary>
  50. private MetalPersistentValue _persistentValue;
  51. /// <summary>
  52. /// c&m Initialize routine
  53. /// </summary>
  54. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  55. /// <summary>
  56. /// C&M Runrecipe routine
  57. /// </summary>
  58. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  59. /// <summary>
  60. /// S&H Initialize Routine
  61. /// </summary>
  62. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  63. /// <summary>
  64. /// S&H RunRecipe Routine
  65. /// </summary>
  66. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  67. /// <summary>
  68. /// Current short test routine
  69. /// </summary>
  70. private CurrentShortTestRoutine _currentShortTestRoutine;
  71. /// <summary>
  72. /// 当前Recipe
  73. /// </summary>
  74. private DepRecipe _currentRecipe = null;
  75. /// <summary>
  76. /// recipe时间
  77. /// </summary>
  78. private int _recipeTime;
  79. /// <summary>
  80. /// 循环次数
  81. /// </summary>
  82. private int _cycle = 0;
  83. /// <summary>
  84. /// 运行Recipe面
  85. /// </summary>
  86. private string _recipeSide = "";
  87. /// <summary>
  88. /// 当前RunRecipe Routine
  89. /// </summary>
  90. private RoutineBase _currentRunRecipeRoutine;
  91. /// <summary>
  92. /// Runrecipe已经运行的时间
  93. /// </summary>
  94. private int _runrecipeElapsedTime = 0;
  95. /// <summary>
  96. /// run recipe start time
  97. /// </summary>
  98. private DateTime _runRecipeStartTime;
  99. /// <summary>
  100. /// run recipe complete time
  101. /// </summary>
  102. private DateTime _runRecipeCompleteTime;
  103. /// <summary>
  104. /// 所在reservoir
  105. /// </summary>
  106. private StandardHotReservoirDevice _reservoirDevice;
  107. /// <summary>
  108. /// 所在reservoir名字
  109. /// </summary>
  110. private string _reservoirName;
  111. #endregion
  112. #region 属性
  113. /// <summary>
  114. /// 模块名称
  115. /// </summary>
  116. public ModuleName Module { get; private set; }
  117. /// <summary>
  118. /// 初始化状态
  119. /// </summary>
  120. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  121. /// <summary>
  122. /// 空闲状态
  123. /// </summary>
  124. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  125. /// <summary>
  126. /// 是否发生错误
  127. /// </summary>
  128. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  129. /// <summary>
  130. /// 是否正在作业
  131. /// </summary>
  132. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  133. /// <summary>
  134. /// 是否初始化完成
  135. /// </summary>
  136. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  137. /// <summary>
  138. /// 是否禁用
  139. /// </summary>
  140. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  141. /// <summary>
  142. /// 自动模式
  143. /// </summary>
  144. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  145. /// <summary>
  146. /// 自动模式
  147. /// </summary>
  148. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  149. /// <summary>
  150. /// 是否为工程模式
  151. /// </summary>
  152. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  153. /// <summary>
  154. /// 是否为产品模式
  155. /// </summary>
  156. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  157. /// <summary>
  158. /// WaferHolder信息
  159. /// </summary>
  160. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  161. /// <summary>
  162. /// 已完成的RunRecipeCycle次数
  163. /// </summary>
  164. public int AchievedCycle { get { return _achievedCycle; } }
  165. /// <summary>
  166. /// 当前状态机状态
  167. /// </summary>
  168. public int State { get { return fsm.State; } }
  169. /// <summary>
  170. /// 当前Metal设置的WaferSize
  171. /// </summary>
  172. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  173. /// <summary>
  174. /// recipe时长
  175. /// </summary>
  176. public int RecipeTime { get { return _recipeTime; } }
  177. /// <summary>
  178. /// 剩余时间
  179. /// </summary>
  180. public override int TimeToReady
  181. {
  182. get
  183. {
  184. if (IsIdle)
  185. {
  186. return 0;
  187. }
  188. switch (fsm.State)
  189. {
  190. case (int)MetalState.RunReciping:
  191. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  192. default:
  193. return 0;
  194. }
  195. }
  196. }
  197. /// <summary>
  198. /// 用量
  199. /// </summary>
  200. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  201. #endregion
  202. /// <summary>
  203. /// 构造函数
  204. /// </summary>
  205. /// <param name="moduleName"></param>
  206. public MetalEntity(ModuleName moduleName)
  207. {
  208. this.Module = moduleName;
  209. WaferManager.Instance.SubscribeLocation(Module, 2);
  210. InitialFsm();
  211. }
  212. /// <summary>
  213. /// 初始化
  214. /// </summary>
  215. /// <returns></returns>
  216. protected override bool Init()
  217. {
  218. InitializeDATA();
  219. InitializeParameter();
  220. InitializeRoutine();
  221. InitializeOperation();
  222. return true;
  223. }
  224. /// <summary>
  225. /// 初始化参数
  226. /// </summary>
  227. private void InitializeParameter()
  228. {
  229. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  230. if (_persistentValue == null)
  231. {
  232. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  233. }
  234. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  235. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  236. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  237. }
  238. /// <summary>
  239. /// 初始化Routine
  240. /// </summary>
  241. private void InitializeRoutine()
  242. {
  243. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  244. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  245. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  246. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  247. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  248. }
  249. /// <summary>
  250. /// 初始化操作
  251. /// </summary>
  252. private void InitializeOperation()
  253. {
  254. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  255. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  256. {
  257. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  258. if (recipe == null)
  259. {
  260. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  261. return false;
  262. }
  263. object[] objects = new object[args.Length];
  264. objects[0] = recipe;
  265. for (int i = 1; i < args.Length; i++)
  266. {
  267. objects[i] = args[i];
  268. }
  269. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  270. });
  271. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  272. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  273. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  274. }
  275. /// <summary>
  276. /// EnterInit
  277. /// </summary>
  278. public void EnterInit()
  279. {
  280. if ((MetalState)fsm.State != MetalState.Idle) return;
  281. else
  282. {
  283. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  284. }
  285. }
  286. /// 初始化状态机
  287. /// </summary>
  288. private void InitialFsm()
  289. {
  290. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  291. fsm.EnableRepeatedMsg(true);
  292. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  293. //Initialize
  294. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  295. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  296. //直接进入Idle
  297. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  298. //RunRecipe
  299. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  300. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  301. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  302. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  303. //Current Short Test
  304. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  305. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  306. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  307. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  308. //Enter Init
  309. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  310. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  311. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  312. }
  313. /// <summary>
  314. /// 初始化DATA
  315. /// </summary>
  316. private void InitializeDATA()
  317. {
  318. InitializeSVID();
  319. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  320. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  321. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  322. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  323. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  324. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  325. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  326. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  327. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  328. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  329. DATA.Subscribe($"{Module}.subordinateReservoirPump", () => _reservoirDevice.ReservoirData.RegulatePumpSignalIn, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  330. }
  331. /// <summary>
  332. /// 初始化SVID
  333. /// </summary>
  334. private void InitializeSVID()
  335. {
  336. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  337. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  338. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  339. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  340. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  341. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  363. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  364. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. }
  374. /// <summary>
  375. /// 进入错误状态
  376. /// </summary>
  377. /// <param name="args"></param>
  378. /// <returns></returns>
  379. private bool EnterError(object[] args)
  380. {
  381. if (State == (int)MetalState.RunReciping)
  382. {
  383. if (_metalItem.SubType == STRATUS)
  384. {
  385. _standardHotRunRecipeRoutine.Abort();
  386. }
  387. else
  388. {
  389. _compactEmbranceRunRecipeRoutine.Abort();
  390. }
  391. }
  392. return true;
  393. }
  394. /// <summary>
  395. /// UpdateMetalUsageAction
  396. /// </summary>
  397. /// <param name="cmd"></param>
  398. /// <param name="param"></param>
  399. /// <returns></returns>
  400. private bool UpdateMetalUsageAction(string cmd, object[] args)
  401. {
  402. if (args.Length > 2)
  403. {
  404. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  405. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  406. }
  407. return true;
  408. }
  409. #region Initialize All
  410. /// <summary>
  411. /// 初始化
  412. /// </summary>
  413. /// <param name="param"></param>
  414. /// <returns></returns>
  415. private bool InitializeAll(object[] param)
  416. {
  417. if (fsm.State == (int)MetalState.Initializing)
  418. {
  419. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  420. return false;
  421. }
  422. if (!CheckReservoirInitialized())
  423. {
  424. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  425. return false;
  426. }
  427. if ("Auto".Equals(_persistentValue.OperatingMode))
  428. {
  429. if (!CheckReservoirIsAuto())
  430. {
  431. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  432. return false;
  433. }
  434. }
  435. if (_metalItem.SubType == STRATUS)
  436. {
  437. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  438. }
  439. else
  440. {
  441. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  442. }
  443. }
  444. /// <summary>
  445. /// 检验Reservoir是否Initialized
  446. /// </summary>
  447. /// <returns></returns>
  448. private bool CheckReservoirInitialized()
  449. {
  450. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  451. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  452. if (reservoirEntity != null)
  453. {
  454. return reservoirEntity.IsInitialized;
  455. }
  456. return false;
  457. }
  458. /// <summary>
  459. /// 检验Reservoir是否Auto
  460. /// </summary>
  461. /// <returns></returns>
  462. private bool CheckReservoirIsAuto()
  463. {
  464. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  465. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  466. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  467. {
  468. return true;
  469. }
  470. return false;
  471. }
  472. /// <summary>
  473. /// 初始化监控
  474. /// </summary>
  475. /// <param name="param"></param>
  476. /// <returns></returns>
  477. private bool InitializeAllMonitor(object[] param)
  478. {
  479. RState rsstate = RState.Running;
  480. if (_metalItem.SubType == STRATUS)
  481. {
  482. rsstate = _standardHotInitializeRoutine.Monitor();
  483. }
  484. else
  485. {
  486. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  487. }
  488. if (rsstate == RState.End)
  489. {
  490. return true;
  491. }
  492. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  493. {
  494. PostMsg(MetalMsg.Error);
  495. return false;
  496. }
  497. return false;
  498. }
  499. #endregion
  500. #region RunRecipe
  501. /// <summary>
  502. /// Run Recipe
  503. /// </summary>
  504. /// <param name="param"></param>
  505. /// <returns></returns>
  506. private bool RunRecipe(object[] param)
  507. {
  508. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  509. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  510. if (_metalItem.SubType == STRATUS)
  511. {
  512. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  513. resDevice.ReservoirUsageMonitor();
  514. }
  515. DepRecipe recipe = param[0] as DepRecipe;
  516. _recipeSide = param[1].ToString();
  517. _cycle = (int)param[2];
  518. _runrecipeElapsedTime = 0;
  519. bool result = false;
  520. if (_metalItem.SubType == STRATUS)
  521. {
  522. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  523. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide) == RState.Running;
  524. }
  525. else
  526. {
  527. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  528. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide) == RState.Running;
  529. }
  530. if (result)
  531. {
  532. if (WaferHolderInfo != null)
  533. {
  534. WaferHolderInfo.MetalModuleName = Module;
  535. }
  536. _recipeTime = recipe.CalculateRecipeTotalTime();
  537. _currentRecipe = recipe;
  538. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  539. {
  540. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  541. }
  542. _runRecipeStartTime = DateTime.Now;
  543. if (WaferHolderInfo != null && _currentRecipe != null)
  544. {
  545. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  546. }
  547. }
  548. return result;
  549. }
  550. /// <summary>
  551. /// RunRecipe监控
  552. /// </summary>
  553. /// <param name="param"></param>
  554. /// <returns></returns>
  555. private bool RunRecipeMonitor(object[] param)
  556. {
  557. RState rsstate = RState.Running;
  558. if (_metalItem.SubType == STRATUS)
  559. {
  560. rsstate = _standardHotRunRecipeRoutine.Monitor();
  561. if (rsstate == RState.Running)
  562. {
  563. StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  564. if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
  565. {
  566. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  567. rsstate = RState.Failed;
  568. }
  569. }
  570. }
  571. else
  572. {
  573. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  574. if (rsstate == RState.Running)
  575. {
  576. CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  577. if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
  578. {
  579. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  580. rsstate = RState.Failed;
  581. }
  582. if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
  583. {
  584. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
  585. rsstate = RState.Failed;
  586. }
  587. if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
  588. {
  589. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
  590. rsstate = RState.Failed;
  591. }
  592. }
  593. }
  594. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  595. {
  596. _runrecipeElapsedTime = TimeToReady;
  597. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  598. }
  599. if (rsstate == RState.End)
  600. {
  601. _recipeTime = 0;
  602. if (WaferHolderInfo != null)
  603. {
  604. double anodeAUsage = GetAnodeAUsage();
  605. double anodeBUsage = GetAnodeBUsage();
  606. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  607. MetalUsageMointor(); //检查PMCounter消耗
  608. //CMM Usage
  609. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  610. if (_metalItem.SubType == STRATUS)
  611. {
  612. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  613. resDevice.ReservoirUsageMonitor();
  614. resDevice.SetExportCMMUsage();
  615. }
  616. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  617. }
  618. _runrecipeElapsedTime = 0;
  619. //记录LotTrack
  620. _runRecipeCompleteTime = DateTime.Now;
  621. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  622. if (_metalItem.SubType == STRATUS)
  623. {
  624. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  625. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  626. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  627. }
  628. else
  629. {
  630. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  631. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  632. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  633. }
  634. if (WaferHolderInfo != null && _currentRecipe != null)
  635. {
  636. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  637. }
  638. return true;
  639. }
  640. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  641. {
  642. _recipeTime = 0;
  643. if (WaferHolderInfo != null)
  644. {
  645. double anodeAUsage = GetAnodeAUsage();
  646. double anodeBUsage = GetAnodeBUsage();
  647. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  648. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  649. //CMMUsage
  650. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  651. if (_metalItem.SubType == STRATUS)
  652. {
  653. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  654. resDevice.ReservoirUsageMonitor();
  655. resDevice.SetExportCMMUsage();
  656. }
  657. }
  658. _runrecipeElapsedTime = 0;
  659. if (WaferHolderInfo != null && _currentRecipe != null)
  660. {
  661. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  662. }
  663. PostMsg(MetalMsg.Error);
  664. //记录LotTrack
  665. _runRecipeCompleteTime = DateTime.Now;
  666. if (_metalItem.SubType == STRATUS)
  667. {
  668. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  669. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  670. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  671. }
  672. else
  673. {
  674. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  675. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  676. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  677. }
  678. if (WaferHolderInfo != null && _currentRecipe != null)
  679. {
  680. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  681. }
  682. return false;
  683. }
  684. return false;
  685. }
  686. /// <summary>
  687. /// 监控 PM Counter Metal用量
  688. /// </summary>
  689. private void MetalUsageMointor()
  690. {
  691. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  692. if (metalUsage != null)
  693. {
  694. //TotalAUsage
  695. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  696. {
  697. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  698. {
  699. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  700. PostMsg(MetalMsg.Error);
  701. AlarmListManager.Instance.AddDataError(Module.ToString(),
  702. $"{Module.ToString()}.metalUsage.TotalUsage",
  703. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  704. }
  705. else
  706. {
  707. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  708. AlarmListManager.Instance.AddWarn(Module.ToString(),
  709. $"{Module.ToString()}.metalUsage.TotalUsage",
  710. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  711. }
  712. }
  713. //AnodeAUsage
  714. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  715. {
  716. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  717. {
  718. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  719. PostMsg(MetalMsg.Error);
  720. AlarmListManager.Instance.AddDataError(Module.ToString(),
  721. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  722. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  723. }
  724. else
  725. {
  726. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  727. AlarmListManager.Instance.AddWarn(Module.ToString(),
  728. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  729. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  730. }
  731. }
  732. //AnodeBUsage
  733. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  734. {
  735. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  736. {
  737. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  738. PostMsg(MetalMsg.Error);
  739. AlarmListManager.Instance.AddDataError(Module.ToString(),
  740. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  741. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  742. }
  743. else
  744. {
  745. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  746. AlarmListManager.Instance.AddWarn(Module.ToString(),
  747. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  748. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  749. }
  750. }
  751. //MembraneAUsage
  752. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  753. {
  754. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  755. {
  756. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  757. PostMsg(MetalMsg.Error);
  758. AlarmListManager.Instance.AddDataError(Module.ToString(),
  759. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  760. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  761. }
  762. else
  763. {
  764. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  765. AlarmListManager.Instance.AddWarn(Module.ToString(),
  766. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  767. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  768. }
  769. }
  770. //MembraneBUsage
  771. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  772. {
  773. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  774. {
  775. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  776. PostMsg(MetalMsg.Error);
  777. AlarmListManager.Instance.AddDataError(Module.ToString(),
  778. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  779. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  780. }
  781. else
  782. {
  783. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  784. AlarmListManager.Instance.AddWarn(Module.ToString(),
  785. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  786. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  787. }
  788. }
  789. //TotalWafer
  790. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  791. {
  792. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  793. {
  794. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  795. PostMsg(MetalMsg.Error);
  796. AlarmListManager.Instance.AddDataError(Module.ToString(),
  797. $"{Module.ToString()}.metalUsage.TotalWafers",
  798. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  799. }
  800. else
  801. {
  802. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  803. AlarmListManager.Instance.AddWarn(Module.ToString(),
  804. $"{Module.ToString()}.metalUsage.TotalWafers",
  805. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  806. }
  807. }
  808. //AnodeAWafer
  809. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  810. {
  811. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  812. {
  813. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  814. PostMsg(MetalMsg.Error);
  815. AlarmListManager.Instance.AddDataError(Module.ToString(),
  816. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  817. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  818. }
  819. else
  820. {
  821. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  822. AlarmListManager.Instance.AddWarn(Module.ToString(),
  823. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  824. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  825. }
  826. }
  827. //AnodeBWafer
  828. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  829. {
  830. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  831. {
  832. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  833. PostMsg(MetalMsg.Error);
  834. AlarmListManager.Instance.AddDataError(Module.ToString(),
  835. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  836. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  837. }
  838. else
  839. {
  840. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  841. AlarmListManager.Instance.AddWarn(Module.ToString(),
  842. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  843. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  844. }
  845. }
  846. //AnodeAbathUsage
  847. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  848. {
  849. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  850. {
  851. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  852. PostMsg(MetalMsg.Error);
  853. AlarmListManager.Instance.AddDataError(Module.ToString(),
  854. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  855. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  856. }
  857. else
  858. {
  859. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  860. AlarmListManager.Instance.AddWarn(Module.ToString(),
  861. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  862. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  863. }
  864. }
  865. //AnodeBbathUsage
  866. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  867. {
  868. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  869. {
  870. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  871. PostMsg(MetalMsg.Error);
  872. AlarmListManager.Instance.AddDataError(Module.ToString(),
  873. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  874. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  875. }
  876. else
  877. {
  878. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  879. AlarmListManager.Instance.AddWarn(Module.ToString(),
  880. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  881. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  882. }
  883. }
  884. }
  885. }
  886. /// <summary>
  887. /// 获取A面使用的电量
  888. /// </summary>
  889. /// <returns></returns>
  890. private double GetAnodeAUsage()
  891. {
  892. if (_metalItem.SubType == STRATUS)
  893. {
  894. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  895. }
  896. else
  897. {
  898. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  899. }
  900. }
  901. /// <summary>
  902. /// 获取B面使用的电量
  903. /// </summary>
  904. /// <returns></returns>
  905. private double GetAnodeBUsage()
  906. {
  907. if (_metalItem.SubType == STRATUS)
  908. {
  909. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  910. }
  911. else
  912. {
  913. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  914. }
  915. }
  916. /// <summary>
  917. /// Abort Recipe
  918. /// </summary>
  919. /// <param name="param"></param>
  920. /// <returns></returns>
  921. public bool AbortRecipe(object[] param)
  922. {
  923. _runRecipeCompleteTime = DateTime.Now;
  924. if (_metalItem.SubType == STRATUS)
  925. {
  926. _standardHotRunRecipeRoutine.Abort();
  927. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  928. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  929. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  930. }
  931. else
  932. {
  933. _compactEmbranceRunRecipeRoutine.Abort();
  934. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  935. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  936. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  937. }
  938. return true;
  939. }
  940. #endregion
  941. #region Current Short Test
  942. /// <summary>
  943. /// Current Short Test
  944. /// </summary>
  945. /// <param name="param"></param>
  946. /// <returns></returns>
  947. private bool CurrentShortTest(object[] param)
  948. {
  949. return _currentShortTestRoutine.Start() == RState.Running;
  950. }
  951. /// <summary>
  952. /// Current Short test监控
  953. /// </summary>
  954. /// <param name="param"></param>
  955. /// <returns></returns>
  956. private bool CurrentShortTestMonitor(object[] param)
  957. {
  958. RState rsstate = _currentShortTestRoutine.Monitor();
  959. if (rsstate == RState.End)
  960. {
  961. return true;
  962. }
  963. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  964. {
  965. PostMsg(MetalMsg.Error);
  966. return false;
  967. }
  968. return false;
  969. }
  970. #endregion
  971. #region Close Flow Valve
  972. /// <summary>
  973. /// 关闭Flow Valve
  974. /// </summary>
  975. /// <param name="param"></param>
  976. /// <returns></returns>
  977. private bool CloseFlowValve(object[] param)
  978. {
  979. if (_metalItem.SubType == STRATUS)
  980. {
  981. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  982. if (device != null)
  983. {
  984. return device.SwitchToBypass("", null);
  985. }
  986. return false;
  987. }
  988. else
  989. {
  990. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  991. if (device != null)
  992. {
  993. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  994. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  995. if (reservoirDevice != null)
  996. {
  997. bool result = reservoirDevice.CAByPassOn("", null);
  998. if (result)
  999. {
  1000. return device.CellFlowValveOff("", null);
  1001. }
  1002. }
  1003. }
  1004. return false;
  1005. }
  1006. }
  1007. #endregion
  1008. #region Open Flow Valve
  1009. /// <summary>
  1010. /// 打开Flow Valve
  1011. /// </summary>
  1012. /// <param name="param"></param>
  1013. /// <returns></returns>
  1014. private bool OpenFlowValve(object[] param)
  1015. {
  1016. if (_metalItem.SubType == STRATUS)
  1017. {
  1018. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1019. if (device != null)
  1020. {
  1021. bool result = device.SwitchToFlow("", null);
  1022. if (result)
  1023. {
  1024. return device.OpenPump("", null);
  1025. }
  1026. }
  1027. return false;
  1028. }
  1029. else
  1030. {
  1031. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1032. if (device != null)
  1033. {
  1034. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1035. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1036. if (reservoirDevice != null)
  1037. {
  1038. bool result = reservoirDevice.CAByPassOff("", null);
  1039. if (result)
  1040. {
  1041. return device.CellFlowValveOn("", null);
  1042. }
  1043. }
  1044. }
  1045. return false;
  1046. }
  1047. }
  1048. #endregion
  1049. public bool Check(int msg, out string reason, params object[] args)
  1050. {
  1051. reason = "";
  1052. return true;
  1053. }
  1054. public bool CheckAcked(int msg)
  1055. {
  1056. return true;
  1057. }
  1058. public int Invoke(string function, params object[] args)
  1059. {
  1060. switch (function)
  1061. {
  1062. case "HomeAll":
  1063. if (IsIdle)
  1064. {
  1065. return (int)FSM_MSG.NONE;
  1066. }
  1067. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1068. {
  1069. return (int)MetalMsg.Initialize;
  1070. }
  1071. else
  1072. {
  1073. return (int)FSM_MSG.NONE;
  1074. }
  1075. }
  1076. return (int)FSM_MSG.NONE;
  1077. }
  1078. }
  1079. public enum MetalMsg
  1080. {
  1081. NONE,
  1082. Error,
  1083. ResumeError,
  1084. Initialize,
  1085. Manual,
  1086. Auto,
  1087. CurrentShortTest,
  1088. CloseFlowValve,
  1089. OpenFlowValve,
  1090. RunRecipe,
  1091. Abort,
  1092. Init
  1093. }
  1094. }