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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.WaferHolder;
- using System;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.Persistent.Reservoirs;
- using Aitex.Core.RT.OperationCenter;
- using MECF.Framework.Common.RecipeCenter;
- using Aitex.Core.RT.RecipeCenter;
- using MECF.Framework.Common.SubstrateTrackings;
- using Aitex.Core.RT.Device;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.ProcessCell;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Alarm;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Metal;
- using CyberX8_RT.Devices.Reservoir;
- using CyberX8_RT.Modules.Metal;
- using CyberX8_RT.Modules.Reservoir;
- using CyberX8_RT.Modules;
- using CyberX8_RT.Modules.EFEM;
- using static Mono.Security.X509.X520;
- namespace CyberX8_RT.Modules.Metal
- {
- public class MetalEntity : Entity, IEntity, IModuleEntity
- {
- #region 常量
- private const string STRATUS = "Stratus";
- private const string AUTO = "Auto";
- private const string MANUAL = "Manual";
- private const string DISABLED = "Disabled";
- private const string ENGINEERING = "Engineering";
- private const string PRODUCTION = "Production";
- #endregion
- #region 内部变量
- /// <summary>
- /// 已经完成的Cycle次数
- /// </summary>
- private int _achievedCycle = 0;
- /// <summary>
- /// Metal项
- /// </summary>
- private MetalItem _metalItem;
- /// <summary>
- /// 持久化对象
- /// </summary>
- private MetalPersistentValue _persistentValue;
- /// <summary>
- /// c&m Initialize routine
- /// </summary>
- private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
- /// <summary>
- /// C&M Runrecipe routine
- /// </summary>
- private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
- /// <summary>
- /// S&H Initialize Routine
- /// </summary>
- private StandardHotInitializeRoutine _standardHotInitializeRoutine;
- /// <summary>
- /// S&H RunRecipe Routine
- /// </summary>
- private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
- /// <summary>
- /// Current short test routine
- /// </summary>
- private CurrentShortTestRoutine _currentShortTestRoutine;
- /// <summary>
- /// 当前Recipe
- /// </summary>
- private DepRecipe _currentRecipe = null;
- /// <summary>
- /// recipe时间
- /// </summary>
- private int _recipeTime;
- /// <summary>
- /// 循环次数
- /// </summary>
- private int _cycle = 0;
- /// <summary>
- /// 运行Recipe面
- /// </summary>
- private string _recipeSide = "";
- /// <summary>
- /// 当前RunRecipe Routine
- /// </summary>
- private RoutineBase _currentRunRecipeRoutine;
- /// <summary>
- /// Runrecipe已经运行的时间
- /// </summary>
- private int _runrecipeElapsedTime = 0;
- /// <summary>
- /// run recipe start time
- /// </summary>
- private DateTime _runRecipeStartTime;
- /// <summary>
- /// run recipe complete time
- /// </summary>
- private DateTime _runRecipeCompleteTime;
- /// <summary>
- /// 所在reservoir
- /// </summary>
- private StandardHotReservoirDevice _reservoirDevice;
- /// <summary>
- /// 所在reservoir名字
- /// </summary>
- private string _reservoirName;
- /// <summary>
- /// 当前完成recipe次数
- /// </summary>
- private int _currentCycleTimes;
- #endregion
- #region 属性
- /// <summary>
- /// 模块名称
- /// </summary>
- public ModuleName Module { get; private set; }
- /// <summary>
- /// 初始化状态
- /// </summary>
- public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
- /// <summary>
- /// 空闲状态
- /// </summary>
- public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
- /// <summary>
- /// 是否发生错误
- /// </summary>
- public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
- /// <summary>
- /// 是否正在作业
- /// </summary>
- public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
- /// <summary>
- /// 是否初始化完成
- /// </summary>
- public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
- /// <summary>
- /// 是否禁用
- /// </summary>
- public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
- /// <summary>
- /// 自动模式
- /// </summary>
- public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
- /// <summary>
- /// 自动模式
- /// </summary>
- public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
- /// <summary>
- /// 是否为工程模式
- /// </summary>
- public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
- /// <summary>
- /// 是否为产品模式
- /// </summary>
- public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
- /// <summary>
- /// WaferHolder信息
- /// </summary>
- public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
- /// <summary>
- /// 已完成的RunRecipeCycle次数
- /// </summary>
- public int AchievedCycle { get { return _achievedCycle; } }
- /// <summary>
- /// 当前状态机状态
- /// </summary>
- public int State { get { return fsm.State; } }
- /// <summary>
- /// 当前Metal设置的WaferSize
- /// </summary>
- public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
- /// <summary>
- /// recipe时长
- /// </summary>
- public int RecipeTime { get { return _recipeTime; } }
- /// <summary>
- /// 剩余时间
- /// </summary>
- public override int TimeToReady
- {
- get
- {
- if (IsIdle)
- {
- return 0;
- }
- switch (fsm.State)
- {
- case (int)MetalState.RunReciping:
- return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
- default:
- return 0;
- }
- }
- }
- /// <summary>
- /// 用量
- /// </summary>
- public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="moduleName"></param>
- public MetalEntity(ModuleName moduleName)
- {
- this.Module = moduleName;
- WaferManager.Instance.SubscribeLocation(Module, 2);
- InitialFsm();
- }
- /// <summary>
- /// 初始化
- /// </summary>
- /// <returns></returns>
- protected override bool Init()
- {
- InitializeDATA();
- InitializeParameter();
- InitializeRoutine();
- InitializeOperation();
- return true;
- }
- /// <summary>
- /// 初始化参数
- /// </summary>
- private void InitializeParameter()
- {
- _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
- if (_persistentValue == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
- }
- _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
- _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
- }
- /// <summary>
- /// 初始化Routine
- /// </summary>
- private void InitializeRoutine()
- {
- _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
- _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
- _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
- _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
- _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
- }
- /// <summary>
- /// 初始化操作
- /// </summary>
- private void InitializeOperation()
- {
- OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
- OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
- {
- DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
- if (recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
- return false;
- }
- object[] objects = new object[args.Length];
- objects[0] = recipe;
- for (int i = 1; i < args.Length; i++)
- {
- objects[i] = args[i];
- }
- return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
- });
- OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
- OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
- OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
- }
- /// <summary>
- /// EnterInit
- /// </summary>
- public void EnterInit()
- {
- if ((MetalState)fsm.State != MetalState.Idle) return;
- else
- {
- CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
- }
- }
- /// 初始化状态机
- /// </summary>
- private void InitialFsm()
- {
- fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
- fsm.EnableRepeatedMsg(true);
- AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
- //Initialize
- AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
- Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
- //直接进入Idle
- Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
- //RunRecipe
- Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
- Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
- Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
- Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
- //Current Short Test
- Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
- Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
- Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
- Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
- //Enter Init
- Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
- EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
- EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
- }
- /// <summary>
- /// 初始化DATA
- /// </summary>
- private void InitializeDATA()
- {
- InitializeSVID();
- DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.subordinateReservoirPump", () => _reservoirDevice.ReservoirData.RegulatePumpSignalIn, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- /// <summary>
- /// 初始化SVID
- /// </summary>
- private void InitializeSVID()
- {
- DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- /// <summary>
- /// 进入错误状态
- /// </summary>
- /// <param name="args"></param>
- /// <returns></returns>
- private bool EnterError(object[] args)
- {
- if (State == (int)MetalState.RunReciping)
- {
- if (_metalItem.SubType == STRATUS)
- {
- _standardHotRunRecipeRoutine.Abort();
- }
- else
- {
- _compactEmbranceRunRecipeRoutine.Abort();
- }
- }
- return true;
- }
- /// <summary>
- /// UpdateMetalUsageAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool UpdateMetalUsageAction(string cmd, object[] args)
- {
- if (args.Length > 2)
- {
- MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
- LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
- }
- return true;
- }
- #region Initialize All
- /// <summary>
- /// 初始化
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool InitializeAll(object[] param)
- {
- if (fsm.State == (int)MetalState.Initializing)
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
- return false;
- }
- if (!CheckReservoirInitialized())
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
- return false;
- }
- if ("Auto".Equals(_persistentValue.OperatingMode))
- {
- if (!CheckReservoirIsAuto())
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
- return false;
- }
- }
- if (_metalItem.SubType == STRATUS)
- {
- return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
- }
- else
- {
- return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
- }
- }
- /// <summary>
- /// 检验Reservoir是否Initialized
- /// </summary>
- /// <returns></returns>
- private bool CheckReservoirInitialized()
- {
- string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
- if (reservoirEntity != null)
- {
- return reservoirEntity.IsInitialized;
- }
- return false;
- }
- /// <summary>
- /// 检验Reservoir是否Auto
- /// </summary>
- /// <returns></returns>
- private bool CheckReservoirIsAuto()
- {
- string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
- if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
- {
- return true;
- }
- return false;
- }
- /// <summary>
- /// 初始化监控
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool InitializeAllMonitor(object[] param)
- {
- RState rsstate = RState.Running;
- if (_metalItem.SubType == STRATUS)
- {
- rsstate = _standardHotInitializeRoutine.Monitor();
- }
- else
- {
- rsstate = _compactEmbranceInitializeRoutine.Monitor();
- }
- if (rsstate == RState.End)
- {
- return true;
- }
- else if (rsstate == RState.Failed || rsstate == RState.Timeout)
- {
- PostMsg(MetalMsg.Error);
- return false;
- }
- return false;
- }
- #endregion
- #region RunRecipe
- /// <summary>
- /// Run Recipe
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RunRecipe(object[] param)
- {
- MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
- string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- if (_metalItem.SubType == STRATUS)
- {
- StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
- resDevice.ReservoirUsageMonitor();
- }
- DepRecipe recipe = param[0] as DepRecipe;
- _recipeSide = param[1].ToString();
- _cycle = (int)param[2];
- _runrecipeElapsedTime = 0;
- bool result = false;
- if (_metalItem.SubType == STRATUS)
- {
- _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
- result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
- }
- else
- {
- _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
- result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
- }
- if (result)
- {
- if (WaferHolderInfo != null)
- {
- WaferHolderInfo.MetalModuleName = Module;
- }
- _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
- _currentRecipe = recipe;
- if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
- {
- LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
- }
- _runRecipeStartTime = DateTime.Now;
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
- }
- }
- return result;
- }
- /// <summary>
- /// RunRecipe监控
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RunRecipeMonitor(object[] param)
- {
- RState rsstate = RState.Running;
- if (_metalItem.SubType == STRATUS)
- {
- rsstate = _standardHotRunRecipeRoutine.Monitor();
- if (rsstate == RState.Running)
- {
- StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
- if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
- rsstate = RState.Failed;
- }
- }
- _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
- }
- else
- {
- rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
- if (rsstate == RState.Running)
- {
- CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
- if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
- rsstate = RState.Failed;
- }
- if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
- rsstate = RState.Failed;
- }
- if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
- rsstate = RState.Failed;
- }
- }
- }
- if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
- {
- _runrecipeElapsedTime = TimeToReady;
- LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
- }
- if (rsstate == RState.End)
- {
- _recipeTime = 0;
- if (WaferHolderInfo != null)
- {
- double anodeAUsage = GetAnodeAUsage();
- double anodeBUsage = GetAnodeBUsage();
- MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
- MetalUsageMointor(); //检查PMCounter消耗
- //CMM Usage
- string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- if (_metalItem.SubType == STRATUS)
- {
- StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
- resDevice.ReservoirUsageMonitor();
- resDevice.SetExportCMMUsage();
- }
- WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
- }
- _runrecipeElapsedTime = 0;
- //记录LotTrack
- _runRecipeCompleteTime = DateTime.Now;
- int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
- if (_metalItem.SubType == STRATUS)
- {
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- else
- {
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
- }
- return true;
- }
- else if (rsstate == RState.Failed || rsstate == RState.Timeout)
- {
- _recipeTime = 0;
- if (WaferHolderInfo != null)
- {
- double anodeAUsage = GetAnodeAUsage();
- double anodeBUsage = GetAnodeBUsage();
- MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
- MetalUsageMointor(); //失败了也要检查PMCounter消耗
- //CMMUsage
- string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- if (_metalItem.SubType == STRATUS)
- {
- StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
- resDevice.ReservoirUsageMonitor();
- resDevice.SetExportCMMUsage();
- }
- }
- _runrecipeElapsedTime = 0;
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
- }
- PostMsg(MetalMsg.Error);
- //记录LotTrack
- _runRecipeCompleteTime = DateTime.Now;
- if (_metalItem.SubType == STRATUS)
- {
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- else
- {
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
- }
- return false;
- }
- return false;
- }
- /// <summary>
- /// 监控 PM Counter Metal用量
- /// </summary>
- private void MetalUsageMointor()
- {
- MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
- if (metalUsage != null)
- {
- //TotalAUsage
- if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
- {
- if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.TotalUsage",
- $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.TotalUsage",
- $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
- }
- }
- //AnodeAUsage
- if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
- {
- if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeAUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeAUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
- }
- }
- //AnodeBUsage
- if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
- {
- if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
- }
- }
- //MembraneAUsage
- if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
- {
- if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.MembraneAUsage",
- $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.MembraneAUsage",
- $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
- }
- }
- //MembraneBUsage
- if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
- {
- if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.MembraneBUsage",
- $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.MembraneBUsage",
- $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
- }
- }
- //TotalWafer
- if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
- {
- if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.TotalWafers",
- $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.TotalWafers",
- $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
- }
- }
- //AnodeAWafer
- if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
- {
- if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeAWafers",
- $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeAWafers",
- $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
- }
- }
- //AnodeBWafer
- if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
- {
- if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBWafers",
- $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBWafers",
- $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
- }
- }
- //AnodeAbathUsage
- if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
- {
- if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeABathUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeABathUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
- }
- }
- //AnodeBbathUsage
- if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
- {
- if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
- PostMsg(MetalMsg.Error);
- AlarmListManager.Instance.AddDataError(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
- }
- else
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
- AlarmListManager.Instance.AddWarn(Module.ToString(),
- $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
- $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
- }
- }
- }
- }
- /// <summary>
- /// 获取A面使用的电量
- /// </summary>
- /// <returns></returns>
- private double GetAnodeAUsage()
- {
- if (_metalItem.SubType == STRATUS)
- {
- return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
- }
- else
- {
- return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
- }
- }
- /// <summary>
- /// 获取B面使用的电量
- /// </summary>
- /// <returns></returns>
- private double GetAnodeBUsage()
- {
- if (_metalItem.SubType == STRATUS)
- {
- return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
- }
- else
- {
- return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
- }
- }
- /// <summary>
- /// Abort Recipe
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- public bool AbortRecipe(object[] param)
- {
- _runRecipeCompleteTime = DateTime.Now;
- if (_metalItem.SubType == STRATUS)
- {
- _standardHotRunRecipeRoutine.Abort();
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
- _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- else
- {
- _compactEmbranceRunRecipeRoutine.Abort();
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
- _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
- }
- return true;
- }
- #endregion
- #region Current Short Test
- /// <summary>
- /// Current Short Test
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CurrentShortTest(object[] param)
- {
- return _currentShortTestRoutine.Start() == RState.Running;
- }
- /// <summary>
- /// Current Short test监控
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CurrentShortTestMonitor(object[] param)
- {
- RState rsstate = _currentShortTestRoutine.Monitor();
- if (rsstate == RState.End)
- {
- return true;
- }
- else if (rsstate == RState.Failed || rsstate == RState.Timeout)
- {
- PostMsg(MetalMsg.Error);
- return false;
- }
- return false;
- }
- #endregion
- #region Close Flow Valve
- /// <summary>
- /// 关闭Flow Valve
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CloseFlowValve(object[] param)
- {
- if (_metalItem.SubType == STRATUS)
- {
- StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
- if (device != null)
- {
- return device.SwitchToBypass("", null);
- }
- return false;
- }
- else
- {
- CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
- if (device != null)
- {
- string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
- if (reservoirDevice != null)
- {
- bool result = reservoirDevice.CAByPassOn("", null);
- if (result)
- {
- return device.CellFlowValveOff("", null);
- }
- }
- }
- return false;
- }
- }
- #endregion
- #region Open Flow Valve
- /// <summary>
- /// 打开Flow Valve
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool OpenFlowValve(object[] param)
- {
- if (_metalItem.SubType == STRATUS)
- {
- StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
- if (device != null)
- {
- bool result = device.SwitchToFlow("", null);
- if (result)
- {
- return device.OpenPump("", null);
- }
- }
- return false;
- }
- else
- {
- CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
- if (device != null)
- {
- string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
- CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
- if (reservoirDevice != null)
- {
- bool result = reservoirDevice.CAByPassOff("", null);
- if (result)
- {
- return device.CellFlowValveOn("", null);
- }
- }
- }
- return false;
- }
- }
- #endregion
- public bool Check(int msg, out string reason, params object[] args)
- {
- reason = "";
- return true;
- }
- public bool CheckAcked(int msg)
- {
- return true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "HomeAll":
- if (IsIdle)
- {
- return (int)FSM_MSG.NONE;
- }
- if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
- {
- return (int)MetalMsg.Initialize;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- }
- return (int)FSM_MSG.NONE;
- }
- }
- public enum MetalMsg
- {
- NONE,
- Error,
- ResumeError,
- Initialize,
- Manual,
- Auto,
- CurrentShortTest,
- CloseFlowValve,
- OpenFlowValve,
- RunRecipe,
- Abort,
- Init
- }
- }
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