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PUFEntity.cs
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be3b324847
update EFEM UI;
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1 mēnesi atpakaļ |
PufBackToParkRoutine.cs
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e61eba41b9
update puf/loader scheduler
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3 mēneši atpakaļ |
PufCalibrateRoutine.cs
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0f6f0fbadc
update efem pick and place wafer size
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3 mēneši atpakaļ |
PufChuckRoutine.cs
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0aabb32d23
update galil axis
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3 mēneši atpakaļ |
PufGotoRobotForPickRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufGotoRobotForPlaceRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufHomeAllRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufOnlyPlaceToLoaderRoutine.cs
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2bf0be7542
update loader waferSize
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2 mēneši atpakaļ |
PufPickFromLoaderRoutine.cs
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6458e62756
update transporter block
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1 nedēļu atpakaļ |
PufPlaceToLoaderRoutine.cs
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0f6f0fbadc
update efem pick and place wafer size
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3 mēneši atpakaļ |
PufPlaceVacuumCheckRoutine.cs
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0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
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1 mēnesi atpakaļ |
PufReadyForRobotPickRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufReadyForRobotPlaceRoutine.cs
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e2d5bb5c5d
update galil controller inputs
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3 mēneši atpakaļ |
PufReadyForSwapRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufSwapRoutine.cs
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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1 mēnesi atpakaļ |
PufSwitchOffRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufSwitchOnRoutine.cs
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0b293c8ffb
update puf axis
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3 mēneši atpakaļ |
PufWaferPickSubRoutine.cs
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478aa5ec7f
update puf view
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3 mēneši atpakaļ |