| .. |
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Buffer
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8c811f7802
update double wafers scheduler
|
hai 1 mes |
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Dryer
|
6497945cbe
Revise jobcreate and lottrack bugs;
|
hai 1 mes |
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Dummy
|
f7533a737b
Initialize
|
hai 3 meses |
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EFEM
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3c1628200a
update Efem Home sequence
|
hai 1 mes |
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LPs
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c695867e44
update loadport status
|
hai 1 mes |
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Loader
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da62bf186b
update WaferHolderInfo DATA
|
hai 1 mes |
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Metal
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b814ec857f
add metal usage update bug
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hai 4 semanas |
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PUF
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4648c5a74f
update efem crossed/double wafer
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hai 1 mes |
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Prewet
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ea1b590024
Modify Prewet RunRecipeRoutine and KeepWetRoutine; Revise SRD Bugs;
|
hai 1 mes |
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Reservoir
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a631c1fcf0
add reservoir Initialize error log
|
hai 3 semanas |
|
Rinse
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6497945cbe
Revise jobcreate and lottrack bugs;
|
hai 1 mes |
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SRD
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85c399073c
Modify SRDInitializeHome, SRDHome, SRDProcessError; Optimize TC simulator;
|
hai 4 semanas |
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Transporter
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4e761b030f
update async scheduler
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hai 1 mes |
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Autotransfer_LP_FA.cs
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f7533a737b
Initialize
|
hai 3 meses |
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DVIDName.cs
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f7533a737b
Initialize
|
hai 3 meses |
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EntityTaskBase.cs
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f7533a737b
Initialize
|
hai 3 meses |
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FaModuleNotifier.cs
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f7533a737b
Initialize
|
hai 3 meses |
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FaRemoteManager.cs
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371876b350
add robot map routine
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hai 2 meses |
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ManualTransfer.cs
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f7533a737b
Initialize
|
hai 3 meses |
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ModuleHomeAllRoutine.cs
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7849fa3cd1
update scheduler
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hai 1 mes |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
|
hai 3 meses |
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ResourceMonitor.cs
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f7533a737b
Initialize
|
hai 3 meses |
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RouteManager.cs
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898fe7af38
update SchedulerLoader
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hai 1 mes |
chenzk
a631c1fcf0
add reservoir Initialize error log