| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.Log;using Aitex.Core.Util;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Modules;using CyberX8_RT.Modules.Loader;using CyberX8_RT.Modules.Metal;using CyberX8_RT.Modules.Prewet;using CyberX8_RT.Modules.Transporter;using CyberX8_RT.Schedulers.EfemRobot;using MECF.Framework.Common.CommonData;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.RecipeCenter;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.WaferHolder;using MECF.Framework.RT.Core.Equipments;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using System.Windows.Markup;namespace CyberX8_RT.Schedulers.Transporter{    public class SchedulerProcessTransporter : SchedulerModule    {        #region 内部变量        /// <summary>        /// Process Transporter        /// </summary>        private TransporterEntity _processTransporterEntity;        /// <summary>        /// Loader transporterEntity        /// </summary>        private TransporterEntity _loaderTransporterEntity;        /// <summary>        /// 调度发送消息        /// </summary>        private SchedulerPostMsg _schedulerPostMsg=new SchedulerPostMsg();        /// <summary>        /// 推送消息结果        /// </summary>        private bool _postMsgResult = false;        #endregion        #region 属性        /// <summary>        /// 是否空闲        /// </summary>        public override bool IsIdle        {            get { return _state == RState.End; }        }        /// <summary>        /// 是否错误        /// </summary>        public override bool IsError        {            get { return _state == RState.Failed || _state == RState.Timeout; }        }        public bool IsBusy        {            get { return _state == RState.Running; }        }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public SchedulerProcessTransporter(ModuleName module) : base(module.ToString())        {            _processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(module.ToString());            _loaderTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());        }        /// <summary>        /// 执行        /// </summary>        /// <param name="parameter"></param>        /// <returns></returns>        public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)        {            if (parameter == null || !(parameter is TransporterAction))            {                return false;            }            TransporterAction action = (TransporterAction)parameter;            WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)action.Parameter;            if (waferHolderMoveItem.SourceModule != ModuleName.Unknown && waferHolderMoveItem.DestModule != ModuleName.Unknown)            {                SchedulerLoaderTransporter schedulerLoaderTransporter = (SchedulerLoaderTransporter)SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);                if (schedulerLoaderTransporter.IsBusy && _loaderTransporterEntity.IsIdle)                {                    return false;                }                if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.SourceModule.ToString()))                {                    return false;                }                if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.DestModule.ToString()))                {                    return false;                }                if (!WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.SourceModule.ToString()))                {                    return false;                }                if (WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.DestModule.ToString()))                {                    return false;                }                return TransferWaferHolderNonLoader(waferHolderMoveItem);            }            return true;        }        /// <summary>        /// 传输WaferHolder(无WaferHolder)        /// </summary>        /// <param name="waferHolderMoveItem"></param>        private bool TransferWaferHolderNonLoader(WaferHolderMoveItem waferHolderMoveItem)        {            IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(waferHolderMoveItem.DestModule.ToString());            if (moduleEntity != null)            {                if (waferHolderMoveItem.SourceModule == ModuleName.Unknown || waferHolderMoveItem.DestModule == ModuleName.Unknown)                {                    return false;                }                bool result = false;                if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)                {                    result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,                        Module.ToString(), (int)TransporterMSG.Transfer, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());                                    }                else                {                    result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,                        Module.ToString(), (int)TransporterMSG.PickUpMoveTo, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());                }                if (result)                {                    _state = RState.Running;                    _postMsgResult = false;                    _schedulerPostMsg.Reset();                }                return result;            }            return false;        }        /// <summary>        /// 监控执行        /// </summary>        /// <returns></returns>        public override bool MonitorProcess(SchedulerSequence schedulerSequence,bool hasMatchWafer)        {            TransporterAction transporterAction = (TransporterAction)schedulerSequence.Parameters;            WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)transporterAction.Parameter;            //检验PostMsg的结果            if (!_postMsgResult)            {                if (_processTransporterEntity.IsError)                {                    return false;                }                _postMsgResult = CheckPostMsg(waferHolderMoveItem);                if (!_postMsgResult)                {                    return false;                }            }            if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)            {                if (_processTransporterEntity.IsIdle)                {                    if (_processTransporterEntity.WaferHolderInfo != null)                    {                        return false;                    }                    if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)                    {                        PrewetPickComplete();                    }                    _state = RState.End;                }            }            else            {                if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)                {                    if (_processTransporterEntity.WaferHolderInfo != null)                    {                        PrewetPickComplete();                    }                }                //ProcessTransporter完成PickUp和MoveTo                if (_processTransporterEntity.State == (int)TransporterState.PickUpMoveToComplete)                {                    MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());                    if (metalEntity != null)                    {                        //关闭FlowValve                        if (metalEntity.State == (int)MetalState.WaitCloseFlow)                        {                            metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),                                (int)MetalMsg.CloseFlowValve);                        }                        //完成FlowValve关闭后状态变更为等待打开FlowValve,执行Place                        else if (metalEntity.State == (int)MetalState.WaitOpenFlow)                        {                                                        _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER, Module.ToString(),                                (int)TransporterMSG.Place, waferHolderMoveItem.DestModule.ToString());                        }                    }                }                //Transporter完成Place后                else if (_processTransporterEntity.IsIdle)                {                    if(_processTransporterEntity.WaferHolderInfo!=null)                    {                        return false;                    }                    MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());                    if (metalEntity != null)                    {                        //打开FlowValve,完成传输任务                        if (metalEntity.State == (int)MetalState.WaitOpenFlow)                        {                            bool result= metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),                                (int)MetalMsg.OpenFlowValve);                            if(result)                            {                                _state = RState.End;                            }                        }                                            }                }            }            return true;        }        /// <summary>        /// 检验PostMsg的结果        /// </summary>        /// <param name="waferHolderMoveItem"></param>        /// <returns></returns>        private bool CheckPostMsg(WaferHolderMoveItem waferHolderMoveItem)        {            if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)            {                return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,                    eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpMoveTo,                    (int)TransporterState.PickUpMoveToing, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());            }            else            {                return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,                    eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer,                    (int)TransporterState.Transfering, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());            }        }        /// <summary>        /// PrewetPick完成事件        /// </summary>        private void PrewetPickComplete()        {            PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());            if (prewetEntity.State == (int)PrewetState.WaitForPick)            {                prewetEntity.CheckToPostMessage<PrewetState, PrewetMsg>(eEvent.WARN_PREWET, ModuleName.Prewet1.ToString(),                    (int)PrewetMsg.PickComplete);            }        }        /// <summary>        /// 检验前置条件        /// </summary>        /// <param name="sequenceIndex"></param>        /// <param name="parameter"></param>        /// <returns></returns>        public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter, string materialId,ref string reason)        {            if (!(parameter is TransporterAction))            {                reason = "parameter is not TransporterAction";                return false;            }            TransporterAction transporterAction= (TransporterAction)parameter;            if (_state == RState.Running)            {                reason = "scheduler module is already running";                return false;            }            if (_processTransporterEntity.WaferHolderInfo != null)            {                reason = "process transporter has wafer shuttle";                return false;            }            //电机是否还在执行动作            JetAxisBase gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Gantry");            if(gantryAxis==null)            {                reason = "process transporter gantry is null";                return false;            }            if (gantryAxis.Status == RState.Running)            {                reason = "process transporter gantry is running";                return false;            }            JetAxisBase elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Elevator");            if (elevatorAxis == null)            {                reason = "process transporter elevator is null";                return false;            }            if (elevatorAxis.Status == RState.Running)            {                reason = "process transporter elevator is running";                return false;            }            if (_processTransporterEntity.IsBusy)            {                reason = "process transporter entity is busy";                return false;            }            WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)transporterAction.Parameter;            bool result = false;            //更新未知源模块            UpdateUnkownSourceModule(schedulerSequences, waferHolderMoveItem, sequenceIndex);            //源为Prewet            if (waferHolderMoveItem.SourceModule == ModuleName.Prewet1)            {                result= CheckSourcePrewetCondition();                if(!result)                {                    reason = "process transporter sourcemodule prewet condition is not avaible";                    return false;                }            }            bool existEnableCell = false;            //更新未知目标模块            result = UpdateUnkownTargetModule(schedulerSequences, waferHolderMoveItem, sequenceIndex,materialId,ref existEnableCell);            if (!result)            {                reason = "process transporter moveitem target module is unknown";                return false;            }            if (waferHolderMoveItem.DestModuleType==ModuleType.Metal)            {                if(!ModuleHelper.IsMetal(waferHolderMoveItem.DestModule))                {                    reason = "process transporter target module is not metal";                    return false;                }                UpdateNextMetalScheduler(schedulerSequences, sequenceIndex, waferHolderMoveItem.DestModule);                                result= CheckTargetMetalCondition(waferHolderMoveItem.DestModule.ToString(),waferHolderMoveItem, schedulerSequences, sequenceIndex);                if(!result)                {                    reason = $"process transporter target module {waferHolderMoveItem.DestModule} condition is false";                    return false;                }            }            return true;        }        /// <summary>        /// 更新下一块Metal        /// </summary>        /// <param name="schedulerSequences"></param>        /// <param name="sequenceIndex"></param>        private void UpdateNextMetalScheduler(List<SchedulerSequence> schedulerSequences,int sequenceIndex,ModuleName metalName)        {            if(sequenceIndex+1<schedulerSequences.Count)            {                SchedulerSequence nextSchedulerSequence=schedulerSequences[sequenceIndex+1];                if(nextSchedulerSequence.SchedulerModule==null)                {                    nextSchedulerSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(metalName);                    nextSchedulerSequence.ModuleName = metalName;                }            }        }        /// <summary>        /// 更新未知目标模块        /// </summary>        private bool UpdateUnkownTargetModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex,string materialId,ref bool existEnableCell)        {            if (waferHolderMoveItem.DestModule == ModuleName.Unknown)            {                if (sequenceIndex + 1 < schedulerSequences.Count)                {                    SchedulerSequence sequence = schedulerSequences[sequenceIndex + 1];                    ModuleName moduleName = ModuleName.Unknown;                    if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)                    {                        if (sequence.Recipe != null && sequence.Recipe is DepRecipe)                        {                            //获取可用的Metal以及Rinse                            DepRecipe depRecipe = (DepRecipe)sequence.Recipe;                            ModuleName tmpName = SchedulerSequenceManager.Instance.CalculateAvaibleMetalCellByChemistry(depRecipe.Chemistry,                                 waferHolderMoveItem.SourceModule.ToString(),sequence.SequenceType,sequence.WaferSize,ref existEnableCell);                            if (tmpName != ModuleName.Unknown)                            {                                IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(tmpName.ToString());                                if (SchedulerSequenceManager.Instance.CheckMetalCellRecipeTimeAvaible(moduleEntity, depRecipe))                                {                                    moduleName = tmpName;                                }                            }                        }                    }                    else if(waferHolderMoveItem.DestModuleType==ModuleType.Rinse)                    {                        if (waferHolderMoveItem.SourceModuleType == ModuleType.Metal)                        {                            moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);                        }                        else                        {                            for(int i = sequenceIndex - 1; i >= 0; i--)                            {                                SchedulerSequence tmp=schedulerSequences[i];                                if (tmp.ModuleType == ModuleType.Metal&&ModuleHelper.IsMetal(tmp.ModuleName))                                {                                    moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,tmp.SequenceType, tmp.ModuleName);                                    break;                                }                            }                        }                    }                    else                    {                        moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);                    }                    if (moduleName == ModuleName.Unknown)                    {                        return false;                    }                    else                    {                        LOG.WriteLog(eEvent.EV_SCHEDULER, Module.ToString(), $"{materialId} ProcessTransporter Confirm Next Cell {moduleName}");                        waferHolderMoveItem.DestModule = moduleName;                        if (sequence.SchedulerModule == null)                        {                            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(moduleName);                            sequence.ModuleName = moduleName;                        }                    }                }            }            return true;        }        /// <summary>        /// 更新未知源模块        /// </summary>        private void UpdateUnkownSourceModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex)        {            if (waferHolderMoveItem.SourceModule != ModuleName.Unknown)            {                return;            }            for (int i = sequenceIndex - 1; i >= 0; i--)            {                SchedulerSequence preSchedulerSequence = schedulerSequences[i];                if (preSchedulerSequence.State != RState.End)                {                    continue;                }                if (i == sequenceIndex - 1)                {                    if (preSchedulerSequence != null && preSchedulerSequence.SchedulerModule != null)                    {                        waferHolderMoveItem.SourceModule = preSchedulerSequence.SchedulerModule.Module;                        break;                    }                }                else                {                    //用于Metal出错后跳过了几个步骤,transporter源模块取至前面跳过的transporter1的目标模块                    if(preSchedulerSequence.ModuleName==ModuleName.Transporter1)                    {                        TransporterAction transporterAction = preSchedulerSequence.Parameters as TransporterAction;                        if (transporterAction.ActionMsg != TransporterMSG.Transfer)                        {                            continue;                        }                        WaferHolderMoveItem preWaferHolderMoveItem = transporterAction.Parameter as WaferHolderMoveItem;                        if (preSchedulerSequence != null && preWaferHolderMoveItem.DestModule != ModuleName.Unknown)                        {                            waferHolderMoveItem.SourceModule = preWaferHolderMoveItem.DestModule;                            break;                        }                    }                }            }        }        /// <summary>        /// 检验源Prewet前置条件        /// </summary>        /// <returns></returns>        private bool CheckSourcePrewetCondition()        {            PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());            if (prewetEntity.State == (int)PrewetState.WaitForPick)            {                return true;            }            return false;        }        /// <summary>        /// 检验目标Metal前置条件        /// </summary>        /// <returns></returns>        private bool CheckTargetMetalCondition(string metalName,WaferHolderMoveItem waferHolderMoveItem,List<SchedulerSequence> schedulerSequences,int sequenceIndex)        {            MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metalName);            if (metalEntity.IsIdle)            {                metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, metalName,                    (int)MetalMsg.CurrentShortTest);            }            else if (metalEntity.State == (int)MetalState.WaitCloseFlow)            {                return true;            }            else if (metalEntity.IsError)            {                waferHolderMoveItem.DestModule = ModuleName.Unknown;                SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];                if (nextSequence != null)                {                    nextSequence.SchedulerModule = null;                    nextSequence.ModuleName = ModuleName.Unknown;                }            }            return false;        }        public override void ResetTask()        {            base.ResetTask();            _schedulerPostMsg.Reset();            _postMsgResult = false;        }    }}
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