| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Facilities;using CyberX8_RT.Devices.SRD;using MECF.Framework.Common.Beckhoff.AxisProvider;using MECF.Framework.Common.RecipeCenter;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using System;namespace CyberX8_RT.Modules.SRD{    public class SRDRunRecipeRoutine : RoutineBase, IRoutine    {        private enum SRDRunRecipeStep        {            RunRecipe_CloseDoor,            RunRecipe_CheckOtherSRD,            RunRecipe_CheckWaterPressure,            RunRecipe_WaterOn,            RunRecipe_CheckWaterFlow,            RunRecipe_StartRotation,            RunRecipe_MonitorWaterFlow,            RunRecipe_WashingFinished,            RunRecipe_ChangeDrySpeed,            RunRecipe_Drying,            RunRecipe_StopRotation,            RunRecipe_CheckRotationStopped,            RunRecipe_CheckRotationHomed,            End        }        #region 常量         /// <summary>        /// 旋转增加时长        /// </summary>        private const int ROTATION_PLUS_TIME = 10;        /// <summary>        /// ROTATION电机转速比例        /// </summary>        private const int SPEED_RATIO = 1;        #endregion        #region 内部变量        /// <summary>        /// Rotation Axis        /// </summary>        private JetAxisBase _rotationAxis;        /// <summary>        /// SRD Common        /// </summary>        private SrdCommonDevice _srdCommon;        /// <summary>        /// Total SRD        /// </summary>        private TotalSRDDevice _totalSRDDevice;        /// <summary>        /// 另外SRD实例         /// </summary>        private SRDEntity _otherSrdEntity;        /// <summary>        /// Loader Common        /// </summary>        private SystemFacilities _systemFacilities;        /// <summary>        /// 是否正在用水        /// </summary>        private bool _isUsingWater;        /// <summary>        /// Recipe        /// </summary>        private SrdRecipe _srdRecipe;        /// <summary>        /// SRD rotation Provider对象        /// </summary>        private BeckhoffProviderAxis _rotationProviderAxis;        /// <summary>        /// enterTime        /// </summary>        private int _enterTime;        /// <summary>        /// 转换增加的时间        /// </summary>        private int _rotationPlusSecond = ROTATION_PLUS_TIME;        /// <summary>        /// Dry速度        /// </summary>        private int _drySpeed;        #endregion        #region 属性        /// <summary>        /// 是否正在用水        /// </summary>        public bool IsUsingWater { get { return _isUsingWater; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public SRDRunRecipeRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("SRD Run Recipe Abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(SRDRunRecipeStep.RunRecipe_CloseDoor, CloseDoor, CheckDoorClosedEndStatus, CheckDoorClosedStopStatus)                .Wait(SRDRunRecipeStep.RunRecipe_CheckOtherSRD, CheckOtherSRD, _delay_60s)                .Run(SRDRunRecipeStep.RunRecipe_CheckWaterPressure, CheckWaterPressure, _delay_1ms)                .Run(SRDRunRecipeStep.RunRecipe_WaterOn, WaterOn, _delay_1ms)                .WaitWithStopCondition(SRDRunRecipeStep.RunRecipe_CheckWaterFlow, CheckFlowEndStatus, CheckFlowStopStatus)                .Run(SRDRunRecipeStep.RunRecipe_StartRotation, StartRotation, _delay_1ms)                .WaitWithStopCondition(SRDRunRecipeStep.RunRecipe_MonitorWaterFlow, MonitorWaterFlowEndStatus, MonitorWaterFlowStopStatus)                .Run(SRDRunRecipeStep.RunRecipe_WashingFinished, WashingFinished, _delay_1ms)                .Run(SRDRunRecipeStep.RunRecipe_ChangeDrySpeed, ChangeSpeed, _delay_1ms)                .Delay(SRDRunRecipeStep.RunRecipe_Drying, _srdRecipe.DryTime * 1000)                .Run(SRDRunRecipeStep.RunRecipe_StopRotation, StopRotation, _delay_1ms)                .Wait(SRDRunRecipeStep.RunRecipe_CheckRotationStopped, CheckRotationStopEndStatus, _delay_10s)                .WaitWithStopCondition(SRDRunRecipeStep.RunRecipe_CheckRotationHomed, CheckRotationHomeEndStatus, CheckRotationHomedStopStatus)                .End(SRDRunRecipeStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _srdRecipe = (SrdRecipe)objs[0];            if (_srdRecipe == null)            {                NotifyError(eEvent.ERR_SRD, "srd recipe is null", 0);                return RState.Failed;            }            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");                       _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{Module}.Common");            _totalSRDDevice = DEVICE.GetDevice<TotalSRDDevice>("SRD");            _systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");            string otherSRD = Module == "SRD1" ? "SRD2" : "SRD1";            _otherSrdEntity = Singleton<RouteManager>.Instance.GetModule<SRDEntity>(otherSRD);                        _rotationProviderAxis = BeckhoffAxisProviderManager.Instance.GetAxisProvider($"{Module}.Rotation");            if (_rotationProviderAxis == null)            {                NotifyError(eEvent.ERR_SRD, $"{Module}.Rotation Provider is not exist", 0);                return RState.Failed;            }            if (!CheckPreCondition())            {                return RState.Failed;            }            return Runner.Start(Module, "SRD Run Recipe Start");        }        /// <summary>        /// Check Pre Condition        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            //Check Rotation Home            if (!_rotationAxis.IsHomed)            {                NotifyError(eEvent.ERR_SRD, "Rotation is not homed", 0);                return false;            }            //Check LiftUp            if (_srdCommon.CommonData.LiftUp)            {                NotifyError(eEvent.ERR_SRD, "LiftUp is on", 0);                return false;            }            //Check LiftUp Status            if (_srdCommon.CommonData.LiftUpStatus)            {                NotifyError(eEvent.ERR_SRD, "LiftUp sensor is on", 0);                return false;            }            //Check Wafer Present            if (!_srdCommon.CommonData.WaferPresent)            {                NotifyError(eEvent.ERR_SRD, "WaferPresent sensor is off", 0);                return false;            }            //Check LoaderDI            if (!_systemFacilities.LoaderDiEnable)            {                NotifyError(eEvent.ERR_SRD, "Load DI Is Disable", 0);                return false;            }            //Check Vacuum            int vacuumOnLimit = SC.GetValue<int>("SRD.ChuckVacuumOnLimit");            if (!_srdCommon.CommonData.ChuckVacuum)            {                if (_srdCommon.CommonData.VacuumValue >= vacuumOnLimit)                {                    LOG.WriteLog(eEvent.ERR_SRD, Module, $"VacuumValue:{_srdCommon.CommonData.VacuumValue}, VacuumOn Limit:{vacuumOnLimit}");                    return false;                }            }            else            {                LOG.WriteLog(eEvent.ERR_SRD, Module, $"Chuck Vacuum is off");                return false;            }            //Check Flippers            if (_srdCommon.CommonData.FlippersIn150 || _srdCommon.CommonData.FlippersIn200) //|| _srdCommon.CommonData.FlippersIn100            {                NotifyError(eEvent.ERR_SRD, "FlippersIn is on", 0);                return false;            }            if (!_srdCommon.CommonData.Flipper1Out150Status || !_srdCommon.CommonData.Flipper2Out150Status || !_srdCommon.CommonData.Flipper3Out150Status                || !_srdCommon.CommonData.Flipper1Out200Status || !_srdCommon.CommonData.Flipper2Out200Status || !_srdCommon.CommonData.Flipper3Out200Status)            //|| !_srdCommon.CommonData.Flipper1Out100Status || !_srdCommon.CommonData.Flipper2Out100Status || !_srdCommon.CommonData.Flipper3Out100Status            {                NotifyError(eEvent.ERR_SRD, "Flippers are at In position", 0);                return false;            }            return true;        }        /// <summary>        /// Close Door        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CloseDoor()        {            if (_srdCommon.CommonData.DoorOpened)            {                bool result = _srdCommon.DoorCloseAction("", null);                if (!result)                {                    NotifyError(eEvent.ERR_SRD, "Door Close Action is failed", 0);                    return result;                }            }            return true;        }        /// <summary>        /// 检验DoorClosed结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckDoorClosedEndStatus()        {            return _srdCommon.Status == RState.End && _srdCommon.CommonData.DoorClosed;        }        /// <summary>        /// 检验DoorClosed结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckDoorClosedStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check Door Closed is failed", 0);                return true;            }            return false;        }        /// <summary>        /// 检验另外一个SRD是否在用水        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckOtherSRD()        {            return (_otherSrdEntity == null || !_otherSrdEntity.IsUsingWater);        }        /// <summary>        /// CheckWaterPressure        /// </summary>        /// <returns></returns>        private bool CheckWaterPressure()        {            if (_srdRecipe.MinWaterPressure == 0 && _srdRecipe.MaxWaterPressure == 0) return true;            if (_srdCommon.CommonData.WaterPressure < _srdRecipe.MinWaterPressure)            {                NotifyError(eEvent.ERR_SRD, $"Water Pressure {_srdCommon.CommonData.WaterPressure} is less than recipe's MinWaterPressure {_srdRecipe.MinWaterPressure}", 0);                return false;            }            else if(_srdCommon.CommonData.WaterPressure > _srdRecipe.MaxWaterPressure)            {                NotifyError(eEvent.ERR_SRD, $"Water Pressure {_srdCommon.CommonData.WaterPressure} is over recipe's MaxWaterPressure {_srdRecipe.MaxWaterPressure}", 0);                return false;            }            return true;        }        /// <summary>        /// Water On        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool WaterOn()        {            if (_srdRecipe.RinseTime > 0)            {                if (!_srdCommon.CommonData.WaterOn)                {                    bool result = _srdCommon.WaterOn();                    if (result)                    {                        LOG.WriteLog(eEvent.INFO_SRD, Module, "Water On");                        _isUsingWater = true;                        _enterTime = Environment.TickCount;                    }                    else                    {                        NotifyError(eEvent.ERR_SRD, "Water On is failed", 0);                    }                    return result;                }                return true;            }            return true;        }        /// <summary>        /// Check Flow End        /// </summary>        /// <returns></returns>        private bool CheckFlowEndStatus()        {            if (_srdRecipe.FlowCheckDelay == 0)            {                return true;            }            int ticks = Environment.TickCount - _enterTime;            if (ticks >= _srdRecipe.FlowCheckDelay * 1000)            {                if (WaterFlowCheck()) return true;            }            return false;        }        /// <summary>        /// Check Flow Stop        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlowStopStatus()        {            int ticks = Environment.TickCount - _enterTime;            if (ticks >= _srdRecipe.FlowCheckDelay * 1000)            {                if (!WaterFlowCheck()) return true;            }            return false;        }        /// <summary>        /// WaterFlow检测        /// </summary>        /// <returns></returns>        private bool WaterFlowCheck()        {            if (_srdRecipe.MaxSRDWaterFlow == 0 && _srdRecipe.MinSRDWaterFlow == 0) return true;            if (_srdCommon.CommonData.WaterFlow > _srdRecipe.MaxSRDWaterFlow)            {                NotifyError(eEvent.ERR_SRD, $"{Module} Water Flow:{_srdCommon.CommonData.WaterFlow} is over recipe's MaxSRDWaterFlow:{_srdRecipe.MaxSRDWaterFlow}", 0);                return false;            }            else if (_srdCommon.CommonData.WaterFlow < _srdRecipe.MinSRDWaterFlow)            {                NotifyError(eEvent.ERR_SRD, $"{Module} Water Flow:{_srdCommon.CommonData.WaterFlow} is less than recipe's MinSRDWaterFlow:{_srdRecipe.MinSRDWaterFlow}", 0);                return false;            }            return true;        }        /// <summary>        /// 开始旋转        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool StartRotation()        {            if (!_srdCommon.RotationInterLock())            {                return false;            }            double _scale = _rotationProviderAxis.ScaleFactor;            //rinse 目标位置             double rinsePosition = _srdRecipe.RinseTime * BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(_srdRecipe.RinseSpeed);            //dry目标位置            double dryPosition = BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(_srdRecipe.DrySpeed) * _srdRecipe.DryTime;            //为了让 rotation 不停止,增加了旋转时间(覆盖Arm运动时间)            double plusPosition = BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(_srdRecipe.DrySpeed) * _rotationPlusSecond;            int targetPosition = (int)Math.Round((rinsePosition + dryPosition + plusPosition) * _scale, 0);            int rotationSpeed = (int)Math.Round(_scale * BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(_srdRecipe.RinseSpeed), 0);            _drySpeed = (int)Math.Round(_scale * BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(_srdRecipe.DrySpeed * SPEED_RATIO), 0);            bool result = _rotationAxis.ProfilePosition(targetPosition, rotationSpeed * SPEED_RATIO, 0, 0);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "Start Rotation is failed", 0);                return false;            }            LOG.WriteLog(eEvent.INFO_SRD, Module, "Start Rotation");            //Rinse开始时间            _enterTime = Environment.TickCount;            return true;        }        /// <summary>        /// WaterFlow End Monitor        /// </summary>        /// <returns></returns>        private bool MonitorWaterFlowEndStatus()        {            int ticks = Environment.TickCount - _enterTime;            if (ticks >= _srdRecipe.RinseTime * 1000)            {                return true;            }            return false;        }        /// <summary>        /// WaterFlow Stop Monitor        /// </summary>        /// <returns></returns>        private bool MonitorWaterFlowStopStatus()        {            int ticks = Environment.TickCount - _enterTime;            if (ticks < _srdRecipe.RinseTime * 1000)            {                if (!WaterFlowCheck()) return true;            }            return false;        }        /// <summary>        /// Washing Finished        /// </summary>        /// <returns></returns>        private bool WashingFinished()        {            if (_srdCommon.CommonData.WaterOn)            {                if (!_srdCommon.WaterOff())                {                    NotifyError(eEvent.ERR_SRD, "Water Off is failed", 0);                    return false;                }            }            _isUsingWater = false;            return true;        }        /// <summary>        /// change Dry speed        /// </summary>        /// <returns></returns>        private bool ChangeSpeed()        {            //调整速度为 drySpeed            bool result = _rotationAxis.WriteSpeed(_drySpeed);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "Change Speed to Dry Speed is failed", 0);                return false;            }            return true;        }        /// <summary>        /// 停止旋转        /// </summary>        /// <returns></returns>        private bool StopRotation()        {            bool result = _rotationAxis.StopPositionOperation();            LOG.WriteLog(eEvent.INFO_SRD, Module, "Stop Rotation is done");            return result;        }        /// <summary>        /// 检验Rotation是否停止        /// </summary>        /// <returns></returns>        private bool CheckRotationStopEndStatus()        {            if (!_rotationAxis.IsRun && _rotationAxis.Status == RState.End)            {                bool homeResult = _rotationAxis.Home();                if (!homeResult)                {                    NotifyError(eEvent.ERR_SRD, $"{Module}.Rotation home action is failed", 0);                    return false;                }                return true;            }            return false;        }        /// <summary>        /// 检验RotationHome是否完成        /// </summary>        /// <returns></returns>        private bool CheckRotationHomeEndStatus()        {            if (_rotationAxis.IsHomed && _rotationAxis.Status == RState.End)            {                                return true;            }            return false;        }        /// <summary>        /// 检验Rotation Home 停止状态        /// </summary>        /// <returns></returns>        private bool CheckRotationHomedStopStatus()        {            if(_rotationAxis.Status == RState.Failed || _rotationAxis.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, $"{Module}.Rotation home is failed", 0);                return true;            }            return false;        }            }    }
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