| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.Log;using Aitex.Core.RT.OperationCenter;using Aitex.Core.Util;using Aitex.Core.Utilities;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.WaferHolder;using CyberX8_Core;using CyberX8_RT.Devices.Rinse;using System;using System.Collections.Generic;using System.Linq;using MECF.Framework.Common.Persistent.Rinse;using MECF.Framework.Common.RecipeCenter;using Aitex.Core.RT.RecipeCenter;using CyberX8_RT.Devices.Safety;using Aitex.Core.RT.SCCore;using MECF.Framework.Common.Alarm;using MECF.Framework.Common.CommonData;using CyberX8_RT.Schedulers;using CyberX8_RT.Modules.Dryer;using MECF.Framework.Common.ProcessCell;namespace CyberX8_RT.Modules.Rinse{    public class RinseEntity : Entity, IEntity, IModuleEntity    {        #region 常量         private const string AUTO = "Auto";        private const string MANUAL = "Manual";        private const string DISABLED = "Disabled";        private const string ENGINEERING = "Engineering";        private const string PRODUCTION = "Production";        #endregion        #region 内部变量        /// <summary>        /// Rinse设备        /// </summary>        private RinseDevice _rinseDevice;        /// <summary>        /// Cycle次数        /// </summary>        private int _cycle = 0;        /// <summary>        /// 已经完成的Cycle次数        /// </summary>        private int _achievedCycle = 0;        /// <summary>        /// Manual模式下Cycle run         /// </summary>        private RinseCycleManualProcessRecipeRoutine _cycleManualProcessRoutine;        /// <summary>        /// Keepwet Routine        /// </summary>        private RinseKeepwetRoutine _keepwetRoutine;        /// <summary>        /// Recipe时长        /// </summary>        private Dictionary<string, int> _dictRecipeTime = new Dictionary<string, int>();        /// <summary>        /// 持久性对象        /// </summary>        private RinsePersistentValue _persistentValue;        /// <summary>        /// 当前Recipe        /// </summary>        private QdrRecipe _currentRecipe;        /// <summary>        /// Recipe时长        /// </summary>        private int _recipeTime;        /// <summary>        /// Runrecipe已经运行的时间        /// </summary>        private int _runrecipeElapsedTime = 0;        /// <summary>        /// run recipe start time        /// </summary>        private DateTime _runRecipeStartTime;        /// <summary>        ///  run recipe complete time        /// </summary>        private DateTime _runRecipeCompleteTime;        /// <summary>        /// 是否Retry        /// </summary>        private bool _isRetry = false;        #region 计算recipe运行时间相关的配置文件参数        /// <summary>        /// Concurrent Fill Time Seconds        /// </summary>        private int _concurrentFillTimeSeconds;        /// <summary>        /// 开始注水的偏差        /// </summary>        private double _fillingStartedDelta;        /// <summary>        /// 注满数值        /// </summary>        private int _sensorReadingFull;        /// <summary>        /// 液位为空数值        /// </summary>        private int _sensorReadingEmpty;        /// <summary>        /// 从开始排水到检测是否排空的间隔时间        /// </summary>        private int _normalDrainTimeSeconds;        /// <summary>        /// 开始注水后检测是否正常注水间隔        /// </summary>        private int _checkIsFillingTimeSeconds;        /// <summary>        /// 开始注水后检测是否注满间隔        /// </summary>        private int _checkIsFullTimeSeconds;        /// <summary>        /// Clamp Cycle开关次数        /// </summary>        private int _numberClampCyclesToComplete;        /// <summary>        /// Clamp开关等待时间        /// </summary>        private double _clampCycleTimeSeconds;        #endregion        #endregion        #region 属性        /// <summary>        /// 模块名称        /// </summary>        public ModuleName Module { get; private set; }        /// <summary>        /// 初始化状态        /// </summary>        public bool IsInit        {            get { return fsm.State == (int)RinseState.Init; }        }        /// <summary>        /// 是否完成初始化        /// </summary>        public bool IsInitialized        {            get { return fsm.State >= (int)RinseState.Initialized; }        }        /// <summary>        /// 空闲状态        /// </summary>        public bool IsIdle        {            get            {                return fsm.State == (int)RinseState.Idle;            }        }        /// <summary>        /// 是否发生错误        /// </summary>        public bool IsError        {            get { return fsm.State == (int)RinseState.Error; }        }        /// <summary>        /// 是否正在作业        /// </summary>        public bool IsBusy { get { return fsm.State > (int)RinseState.Idle; } }        /// <summary>        /// WaferHolder信息        /// </summary>        public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }        /// <summary>        /// 已完成的RunRecipeCycle次数        /// </summary>        public int AchievedCycle { get { return _achievedCycle; } }        /// <summary>        /// 当前状态机状态        /// </summary>        public int State { get { return fsm.State; } }        /// <summary>        /// Recipe时长        /// </summary>        public int RecipeTime        {            get { return _recipeTime; }         }        /// <summary>        /// 剩余时间        /// </summary>        public override int TimeToReady        {            get            {                if (_currentRecipe == null)                {                    return base.TimeToReady;                }                switch (fsm.State)                {                    case (int)RinseState.RunReciping:                        return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);                    default:                        return base.TimeToReady;                }            }        }        /// <summary>        /// 是否禁用        /// </summary>        public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }        /// <summary>        /// 自动模式        /// </summary>        public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }        /// <summary>        /// 自动模式        /// </summary>        public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }        /// <summary>        /// 是否为工程模式        /// </summary>        public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }        /// <summary>        /// 是否为产品模式        /// </summary>        public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public RinseEntity(ModuleName module)        {            Module = module;            _rinseDevice=DEVICE.GetDevice<RinseDevice>(Module.ToString());            WaferManager.Instance.SubscribeLocation(Module, 2);            //相关配置文件                       InitialFsm();        }        /// <summary>        /// 初始化        /// </summary>        /// <returns></returns>        protected override bool Init()        {            InitializeParameter();            InitializeDATA();            InitializeRoutine();            InitializeOperation();            InitializeRoutine();            return true;        }        /// <summary>        /// 初始化状态机        /// </summary>        private void InitialFsm()        {            fsm = new StateMachine<RinseEntity>(Module.ToString(), (int)RinseState.Init, 20);            fsm.EnableRepeatedMsg(true);            AnyStateTransition(RinseMsg.Error, ErrorSolution, RinseState.Error);            Transition(RinseState.Error, RinseMsg.ResumeError, (param) => { return true; }, RinseState.Init);            //Initialized            AnyStateTransition(RinseMsg.Initialize, InitializeAll, RinseState.Initialized);            //直接进入Idle            Transition(RinseState.Initialized, FSM_MSG.TIMER, NullFunc, RinseState.Idle);            //CycleRunRecipe            Transition(RinseState.Idle, RinseMsg.CycleProcessRecipe, RunRecipeProcess, RinseState.CycleManualProcessing);            Transition(RinseState.CycleManualProcessing, FSM_MSG.TIMER, RunRecipeMonitor, RinseState.Idle);            Transition(RinseState.CycleManualProcessing,RinseMsg.Abort,RunRecipeAbort, RinseState.Idle);            //RunRecipe            Transition(RinseState.Idle, RinseMsg.RunRecipe, RunRecipeProcess, RinseState.RunReciping);            Transition(RinseState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, RinseState.RunRecipeComplete);            Transition(RinseState.RunRecipeComplete, RinseMsg.RecipeComplete, NullFunc, RinseState.Idle);            Transition(RinseState.RunReciping, RinseMsg.Abort, RunRecipeAbort, RinseState.Abort);            //KeepWet            Transition(RinseState.RunRecipeComplete, RinseMsg.Keepwet, Keepwet, RinseState.KeepWeting);            Transition(RinseState.KeepWetComplete, RinseMsg.Keepwet, Keepwet, RinseState.KeepWeting);            Transition(RinseState.KeepWeting, FSM_MSG.TIMER, KeepwetMonitor, RinseState.KeepWetComplete);            Transition(RinseState.KeepWeting, RinseMsg.RecipeComplete, KeepwetingComplete, RinseState.Idle);            //Enter Init            Transition(RinseState.Idle, RinseMsg.Init, NullFunc, RinseState.Init);            //Retry            Transition(RinseState.Error, RinseMsg.Retry, NullFunc, RinseState.Retrying);            Transition(RinseState.Retrying, FSM_MSG.TIMER, RinseRetry, RinseState.Retrying);            Transition(RinseState.Retrying, RinseMsg.RunRecipe, RetryRunRecipe, RinseState.RunReciping);            EnumLoop<RinseState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });            EnumLoop<RinseMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });        }        /// <summary>        /// 初始化参数        /// </summary>        private void InitializeParameter()        {            _persistentValue = RinsePersistentManager.Instance.GetRinsePersistentValue(Module.ToString());            if (_persistentValue == null)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "Persistent Value Object is not exist");            }        }        /// <summary>        /// 初始化DATA        /// </summary>        private void InitializeDATA()        {            InitializeSvid();            DATA.Subscribe($"{Module}.FsmState", () => ((RinseState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);             DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);        }        /// <summary>        /// 初始化SVID        /// </summary>        private void InitializeSvid()        {            DATA.Subscribe($"{Module}.State", () => ((RinseState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.ModuleRecipe", () =>  _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.SequenceRecipe", () => WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 ? (_recipeTime - Math.Round((double)_cycleManualProcessRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);         }        /// <summary>        /// 初始化Routine        /// </summary>        private void InitializeRoutine()        {            _cycleManualProcessRoutine = new RinseCycleManualProcessRecipeRoutine(Module.ToString());            _keepwetRoutine = new RinseKeepwetRoutine(Module.ToString());        }        /// <summary>        /// 初始化操作        /// </summary>        private void InitializeOperation()        {            OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Initialize); });            OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>             {                QdrRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<QdrRecipe>(args[0].ToString());                if (recipe == null)                {                    LOG.WriteLog(eEvent.ERR_RINSE, Module.ToString(), $"{args[0]} recipe is null");                    return false;                }                object[] objects = new object[args.Length];                objects[0] = recipe;                for (int i = 1; i < args.Length; i++)                {                    objects[i] = args[i];                }                return CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.CycleProcessRecipe, objects);            });            OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<RinseState, RinseMsg>(Aitex.Core.RT.Log.eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Abort); });                    }        /// <summary>        /// EnterInit        /// </summary>        public void EnterInit()        {            if ((RinseState)fsm.State != RinseState.Idle) return;            else            {                CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Init);            }        }        #region Initialized        /// <summary>        /// Initialize        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool InitializeAll(object[] param)        {            if (fsm.State == (int)RinseState.Initializing)            {                LOG.WriteLog(eEvent.WARN_RINSE, Module.ToString(), "state is Initializing,cannot do initialize");                return false;            }            _rinseDevice.UpdateStateMachine("Idle");            _rinseDevice.UpdateStatus("Idle");            if (!_rinseDevice.IOInitialized)            {                return false;            }            return _rinseDevice.IOInitialized;        }        #endregion        private bool ErrorSolution(object[] param)        {            bool result = _rinseDevice.FillValveOff();            if (!result)            {                LOG.WriteLog(eEvent.ERR_RINSE, "Close Fill Valve error");                        }            result = _rinseDevice.N2ValveOff();            if (!result)            {                LOG.WriteLog(eEvent.ERR_RINSE, "Close N2 Valve error");            }            return true;        }        #region RunRecipe        /// <summary>        /// Run Recipe        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool RunRecipeProcess(object[] param)        {            _concurrentFillTimeSeconds = SC.GetValue<int>("QDR.ConcurrentFillTimeSeconds");            _fillingStartedDelta = SC.GetValue<double>("QDR.FillingStartedDelta");            _sensorReadingFull = SC.GetValue<int>("QDR.SensorReadingFull");            _sensorReadingEmpty = SC.GetValue<int>("QDR.SensorReadingEmpty");            _normalDrainTimeSeconds = SC.GetValue<int>("QDR.NominalDrainTimeSeconds");            _checkIsFillingTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillWaterTimeSeconds");            _checkIsFullTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillFullTimeSeconds");            _numberClampCyclesToComplete = SC.GetValue<int>("QDR.NumberClampCyclesToComplete");            _clampCycleTimeSeconds = SC.GetValue<double>("QDR.ClampCycleTimeSeconds");                        _cycle = (int)param[1];            QdrRecipe recipe = param[0] as QdrRecipe;            bool result = _cycleManualProcessRoutine.Start(param) == RState.Running;            _runrecipeElapsedTime = 0;            if (result)            {                //_recipeTime = 0;                _isRetry = false;                _recipeTime = CalculateRunRecipeTime(recipe, _cycle);                _currentRecipe = recipe;                _runRecipeStartTime = DateTime.Now;                if (WaferHolderInfo != null && _currentRecipe != null)                {                    FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);                }            }            return result;        }        private int CalculateRunRecipeTime(QdrRecipe _recipe, int cycle)        {            int totaltime = 0;            Dictionary<string, int> processTimeDic = new Dictionary<string, int>();            processTimeDic.Add("RinseFirstStep.WaitDrianEmpty", _recipe.DumpTimeSeconds);            if (_recipe.Step1N2BubbleOn)            {                processTimeDic.Add("RinseFirstStep.N2BubbleOnDelay", _recipe.N2ChargeTimeSeconds);            }            processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step1NumberOfRinse);            processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitDwell", _recipe.Step1DwellTimeSeconds * _recipe.Step1NumberOfRinse);            processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step1NumberOfRinse);            if (!_recipe.FinalRinseDry) //没有第三步rinse            {                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step2NumberOfRinse);                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDwell", _recipe.Step2DwellTimeSeconds * (_recipe.Step2NumberOfRinse - 1));                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step2NumberOfRinse);                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitResistivityStart", _recipe.ResistivityStartTimeSeconds);                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleResistivityAveraging", _recipe.ResistivityDurationSeconds);            }            else  //有第三步rinse            {                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step2NumberOfRinse);                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDwell", _recipe.Step2DwellTimeSeconds * _recipe.Step2NumberOfRinse);                processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step2NumberOfRinse);                processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseWaitEndFillTime", _concurrentFillTimeSeconds);                processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseCycleWaitSlowDrainTime", _recipe.FinalRinseSlowDrainTime);                processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds);            }            totaltime = processTimeDic.Sum(x => x.Value);            return totaltime * cycle;        }        /// <summary>        /// Retry RunRecipe        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool RetryRunRecipe(object[] param)        {            int stepIndex = (int)param[0];            bool result = _cycleManualProcessRoutine.Retry(stepIndex) == RState.Running;            if (result)            {                _isRetry = true;                if (_currentRecipe != null)                {                    _recipeTime = CalculateRunRecipeTime(_currentRecipe, _cycle);                }            }            return result;        }        /// <summary>        /// 监控        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool RunRecipeMonitor(object[] param)        {            RState state = _cycleManualProcessRoutine.Monitor();            if (Singleton<RouteManager>.Instance.IsAutoRunning&&_runrecipeElapsedTime!=TimeToReady)            {                _runrecipeElapsedTime =TimeToReady;                LOG.WriteLog(eEvent.INFO_RINSE, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {_recipeTime-fsm.ElapsedTime/1000}s.");            }            if (state == RState.Failed || state == RState.Timeout)            {                if (Singleton<RouteManager>.Instance.IsAutoRunning)                {                    //不存在其他可用的Rinse                    if (!CheckOtherRinseAvaible())                    {                        AlarmList alarmList = new AlarmList(Module.ToString(), ((RinseState)fsm.State).ToString(), (int)RinseMsg.RunRecipe,                        _cycleManualProcessRoutine.ErrorMsg, _cycleManualProcessRoutine.ErrorStep, (int)AlarmType.Error);                        AlarmListManager.Instance.AddAlarm(alarmList);                    }                }                PostMsg(RinseMsg.Error);                _rinseDevice.UpdateStateMachine("Error");                _rinseDevice.UpdateStatus("Error");                _runrecipeElapsedTime = 0;                //记录LotTrack                _runRecipeCompleteTime = DateTime.Now;                _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");                RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,                    _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);                if (WaferHolderInfo != null && _currentRecipe != null)                {                    FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);                }                return false;            }            _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle();            bool result = state == RState.End;            if (result)            {                _runrecipeElapsedTime = 0;                if (Singleton<RouteManager>.Instance.IsAutoRunning)                {                    AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), RinseState.RunReciping.ToString());                }                //记录LotTrack                _runRecipeCompleteTime = DateTime.Now;                int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;                _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");                RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,                    _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);                if (WaferHolderInfo != null && _currentRecipe != null)                {                    FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);                }            }            return result;        }        /// <summary>        /// 校验其他rinse是否可用        /// </summary>        /// <returns></returns>        private bool CheckOtherRinseAvaible()        {            ModuleName metalName = WaferHolderInfo.MetalModuleName;            if (metalName!=ModuleName.Unknown)            {                return SchedulerSequenceManager.Instance.GetAvaibleModuleCell(_persistentValue.RecipeOperatingMode,ModuleType.Rinse, metalName)!=ModuleName.Unknown;            }            else            {                return false;            }        }        private bool RunRecipeAbort(object[] param)        {            _cycleManualProcessRoutine.Abort();            _rinseDevice.UpdateStateMachine("Abort");            _rinseDevice.UpdateStatus("Abort");            //记录LotTrack            _runRecipeCompleteTime = DateTime.Now;            _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");            RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,                _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);            return true;        }        #endregion        #region Keepwet        /// <summary>        /// keepwet        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool Keepwet(object[] param)        {            return _keepwetRoutine.Start(param) == RState.Running;        }        /// <summary>        /// 停止Keepwet        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool KeepwetingComplete(object[] param)        {        //    _keepwetRoutine.Abort();            return true;        }        /// <summary>        /// keepwet        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool KeepwetMonitor(object[] param)        {            RState ret = _keepwetRoutine.Monitor();            if (ret == RState.End)            {                //导出lotTrack数据                LotTrackFileHeaderCommonData headerCommonData = new LotTrackFileHeaderCommonData();                if (SC.ContainsItem("System.ToolID")) headerCommonData.ToolID = SC.GetStringValue("System.ToolID");                headerCommonData.SoftWareVersion = System.Reflection.Assembly.GetExecutingAssembly().GetName().Version.ToString();                RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _keepwetRoutine.RinseLotTrackDatas,                    headerCommonData, IsAuto, false);                return true;            }            if (ret == RState.Failed || ret == RState.Timeout)            {                //导出lotTrack数据                LotTrackFileHeaderCommonData headerCommonData = new LotTrackFileHeaderCommonData();                if (SC.ContainsItem("System.ToolID")) headerCommonData.ToolID = SC.GetStringValue("System.ToolID");                headerCommonData.SoftWareVersion = System.Reflection.Assembly.GetExecutingAssembly().GetName().Version.ToString();                RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _keepwetRoutine.RinseLotTrackDatas,                    headerCommonData, IsAuto, false);                PostMsg(RinseMsg.Error);            }            return false;        }        #endregion        #region RinseRetry        /// <summary>        /// Retry        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool RinseRetry(object[] param)        {            AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());            if (alarmList != null)            {                CheckToPostMessage<RinseState, RinseMsg>(eEvent.WARN_RINSE, Module.ToString(), alarmList.ModuleCmd,                    alarmList.ModuleStep);            }            return false;        }        #endregion        public bool Check(int msg, out string reason, params object[] args)        {            reason = "";            return true;        }        public bool CheckAcked(int msg)        {            return true;        }        public int Invoke(string function, params object[] args)        {            switch (function)            {                case "HomeAll":                    if (IsIdle)                    {                        return (int)FSM_MSG.NONE;                    }                    if (CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Initialize))                    {                        return (int)RinseMsg.Initialize;                    }                    else                    {                        return (int)FSM_MSG.NONE;                    }                case "Retry":                    if (CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Retry))                    {                        return (int)RinseMsg.Retry;                    }                    else                    {                        return (int)FSM_MSG.NONE;                    }            }            return (int)FSM_MSG.NONE;        }    }    public enum RinseMsg    {        Error,        Initialize,        ResumeError,        CycleProcessRecipe,        RunRecipe,        Abort,        Keepwet,        RecipeComplete,        Init,        Retry    }}
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