CyberX8/CyberX8_RT/Config/Layout/ToolLayoutConfiguration.xml

<?xml version="1.0" encoding="utf-8"?>
<ToolLayoutXmlRoot xmlns:i="http://www.w3.org/2001/XMLSchema-instance">
	<ToolInfo i:type="ThunderToolInfo">
		<SerialNumber>SN 262</SerialNumber>
	</ToolInfo>
	<Items>

		<!-- RDS -->
		<Item i:type="ChemReplen">
			<ChemReplenID>1</ChemReplenID>
			<Type>RDS</Type>
			<Installed>true</Installed>
			<Pages>
				<Item i:type="Page">
					<PageID>1</PageID>
					<PageName>Catholyte</PageName>
					<Reservoirs>
						<Item i:type="ReplenReservoir">
							<Location>0</Location>
							<ReservoirID>1</ReservoirID>
							<ReservoirType>CA</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
						<Item i:type="ReplenReservoir">
							<Location>1</Location>
							<ReservoirID>2</ReservoirID>
							<ReservoirType>CA</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
						<Item i:type="ReplenReservoir">
							<Location>2</Location>
							<ReservoirID>4</ReservoirID>
							<ReservoirType>CA</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
					</Reservoirs>
					<Bottles>
						<Item i:type="Bottle">
							<Location>0</Location>
							<BottleID>1</BottleID>
							<Chemistry>Sn</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>4</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>1</Location>
							<BottleID>2</BottleID>
							<Chemistry>Ag</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>4</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>2</Location>
							<BottleID>3</BottleID>
							<Chemistry>FA</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>4</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>3</Location>
							<BottleID>4</BottleID>
							<Chemistry>AD</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs></Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>4</Location>
							<BottleID>5</BottleID>
							<Chemistry>R1</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>1,2</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>5</Location>
							<BottleID>6</BottleID>
							<Chemistry>R2</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>1,2</Reservoirs>
						</Item>
					</Bottles>
				</Item>
				<Item i:type="Page">
					<PageID>1</PageID>
					<PageName>Anolyte</PageName>
					<Reservoirs>
						<Item i:type="ReplenReservoir">
							<Location>0</Location>
							<ReservoirID>1</ReservoirID>
							<ReservoirType>AN</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
						<Item i:type="ReplenReservoir">
							<Location>1</Location>
							<ReservoirID>2</ReservoirID>
							<ReservoirType>AN</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
						<Item i:type="ReplenReservoir">
							<Location>2</Location>
							<ReservoirID>4</ReservoirID>
							<ReservoirType>AN</ReservoirType>
							<ReservoirInstalled>true</ReservoirInstalled>
						</Item>
					</Reservoirs>
					<Bottles>
						<Item i:type="Bottle">
							<Location>0</Location>
							<BottleID>1</BottleID>
							<Chemistry>Sn</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs></Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>1</Location>
							<BottleID>2</BottleID>
							<Chemistry>Ag</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs></Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>2</Location>
							<BottleID>3</BottleID>
							<Chemistry>FA</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>4</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>3</Location>
							<BottleID>4</BottleID>
							<Chemistry>AD</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs>4</Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>4</Location>
							<BottleID>5</BottleID>
							<Chemistry>R1</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs></Reservoirs>
						</Item>
						<Item i:type="Bottle">
							<Location>5</Location>
							<BottleID>6</BottleID>
							<Chemistry>R2</Chemistry>
							<BottleInstalled>true</BottleInstalled>
							<Reservoirs></Reservoirs>
						</Item>
					</Bottles>
				</Item>
			</Pages>
		</Item>

		<!-- PLATING POWER SUPPLIES -->

		
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>2</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>3</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>4</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>5</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>6</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>7</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>8</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>9</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>10</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>11</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>12</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>13</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>14</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina2ChannelCurrent</SubType>
		</Item>
		

		<!-- CMM POWER SUPPLIES -->

		<Item i:type="CMMPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>

		<!-- UPS -->

		<Item i:type="UPS">
			<Installed>false</Installed>
			<SubType>Eaton5PX</SubType>
		</Item>

		<!-- LOADER -->

		<Item i:type="Loader">
			<Installed>true</Installed>
			<LoaderID>1</LoaderID>
			<SubType>ThunderDualPUF</SubType>
			<NominalGantryPositionInMilliMeters>-326</NominalGantryPositionInMilliMeters>
			<CRSCleanType>Type1</CRSCleanType>
			<PlateOutDetectionType>NotInstalled</PlateOutDetectionType>
			<CellID>40</CellID>
		</Item>

		<!-- HEDs -->

		<Item i:type="TempControl">
			<Installed>true</Installed>
			<Count>4</Count>
			<TCID>1</TCID>
			<SubType>SMC</SubType>
		</Item>

		<!-- RESISTIVITY PROBES -->

		<Item i:type="ResistivityProbe">
			<Installed>true</Installed>
			<Count>4</Count>
			<ResistivityProbeID>1</ResistivityProbeID>
			<SubType>STDThornton</SubType>
		</Item>

		<Item i:type="ResistivityProbe">
			<Installed>true</Installed>
			<Count>1</Count>
			<ResistivityProbeID>2</ResistivityProbeID>
			<SubType>STDThornton</SubType>
		</Item>
		
		<!-- BarcodeReader -->
		<Item i:type="BarcodeReader">
			<Installed>true</Installed>
			<Count>1</Count>
			<BarcodeReaderID>1</BarcodeReaderID>
		</Item>
		
		<Item i:type="BarcodeReader">
			<Installed>true</Installed>
			<Count>1</Count>
			<BarcodeReaderID>2</BarcodeReaderID>
		</Item>

		<!-- FFU -->

		<Item i:type="FFU">
			<Installed>true</Installed>
			<FFUID>1</FFUID>
			<SubType>FFUType2</SubType>
		</Item>

		<!-- LINMOTS -->

		<Item i:type="Linmot">
			<Installed>true</Installed>
			<Count>4</Count>
			<LinmotID>1</LinmotID>
			<ResetSwitchOff>0</ResetSwitchOff>
			<SubType>STDLinmot</SubType>
		</Item>
		<Item i:type="Linmot">
			<Installed>true</Installed>
			<Count>3</Count>
			<LinmotID>2</LinmotID>
			<ResetSwitchOff>0</ResetSwitchOff>
			<SubType>STDLinmot</SubType>
		</Item>
		<Item i:type="Linmot">
			<Installed>true</Installed>
			<Count>1</Count>
			<LinmotID>3</LinmotID>
			<ResetSwitchOff>1</ResetSwitchOff>
			<SubType>STDLinmot</SubType>
		</Item>

		<!-- PUFs -->

		<Item i:type="PUF">
			<Installed>false</Installed>
			<PufID>1</PufID>
			<SubType>DualPUF_WithDistanceSensors</SubType>
		</Item>

		<!-- TRANSPORTERS -->

		<Item i:type="Transporter">
			<Installed>false</Installed>
			<TransporterID>1</TransporterID>
			<SubType>HighSpeedThunder</SubType>
			<DripTrayType>NoDripTray</DripTrayType>
			<DropBlockType>GuidePin</DropBlockType>
			<BarcodeReader>BR1</BarcodeReader>
			
		</Item>
		<Item i:type="Transporter">
			<Installed>false</Installed>
			<TransporterID>2</TransporterID>
			<SubType>HighSpeedThunder</SubType>
			<DripTrayType>NoDripTray</DripTrayType>
			<DropBlockType>GuidePin</DropBlockType>
			<BarcodeReader>BR2</BarcodeReader>
		</Item>

		<!-- TOOL CONFIGURATION -->

		<Item i:type="Rinse">
			<Installed>true</Installed>
			<CellID>1</CellID>
			<NominalGantryPositionInMilliMeters>4088</NominalGantryPositionInMilliMeters>
			<RinseID>1</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP1-1</ResistivityID>
		</Item>

		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>1</ReservoirID>
			<Size>3</Size>
			<TCID>TC1-1</TCID>
			<SubType>Gen3ChemEXx</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<MetalCells>
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>2</CellID>
					<NominalGantryPositionInMilliMeters>3930</NominalGantryPositionInMilliMeters>
					<MetalID>1</MetalID>
					<PlatingPowerSupplyAID>Power1-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power2-1</PlatingPowerSupplyBID>
					<LinmotID>LNM1-1</LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>		
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>3</CellID>
					<NominalGantryPositionInMilliMeters>3772</NominalGantryPositionInMilliMeters>
					<MetalID>2</MetalID>
					<PlatingPowerSupplyAID>Power3-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power4-1</PlatingPowerSupplyBID>
					<LinmotID>LNM1-2</LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>	
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>4</CellID>
					<NominalGantryPositionInMilliMeters>3607</NominalGantryPositionInMilliMeters>
					<MetalID>3</MetalID>
					<PlatingPowerSupplyAID>Power5-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power6-1</PlatingPowerSupplyBID>
					<LinmotID>LNM1-3</LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>	
			</MetalCells>
			<CellPosition>2</CellPosition>
			<PositionInMilliMeters>3410</PositionInMilliMeters>
			<LengthInMilliMeters>610</LengthInMilliMeters>	  
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>None</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>RDS</ChemReplenType>
			<ChemReplenPumps>0</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>RDS</SlipstreamType>
			<CMMType>None</CMMType>
			<CMMSupplyID>None</CMMSupplyID>
			<EvaporatorType>STD</EvaporatorType>
		</Item>

		<Item i:type="Rinse">
			<Installed>true</Installed>
			<CellID>6</CellID>
			<NominalGantryPositionInMilliMeters>3292</NominalGantryPositionInMilliMeters>
			<RinseID>2</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP1-2</ResistivityID>
		</Item>
		
		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>2</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-2</TCID>
			<SubType>Stratus</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Ni</PlannedInitialChemistry>
			<MetalCells>
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>7</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<MetalID>4</MetalID>
					<PlatingPowerSupplyAID>Power7-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power8-1</PlatingPowerSupplyBID>
					<LinmotID>LNM1-4</LinmotID>
					<SubType>Stratus</SubType>
				</Item>
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>8</CellID>
					<NominalGantryPositionInMilliMeters>2029</NominalGantryPositionInMilliMeters>
					<MetalID>5</MetalID>
					<PlatingPowerSupplyAID>Power9-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power10-1</PlatingPowerSupplyBID>
					<LinmotID>LNM2-1</LinmotID>
					<SubType>Stratus</SubType>
				</Item>
			</MetalCells>
			<CellPosition>13</CellPosition>
			<PositionInMilliMeters>2000</PositionInMilliMeters>
			<LengthInMilliMeters>340</LengthInMilliMeters>	  
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>Standard</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>Peristaltic</ChemReplenType>
			<ChemReplenPumps>2</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>None</SlipstreamType>
			<CMMType>Standard</CMMType>
			<CMMSupplyID>CMMPower1-1</CMMSupplyID>
			<EvaporatorType>STD</EvaporatorType>
		</Item>
		
		<Item i:type="Rinse">
			<Installed>true</Installed>
			<CellID>9</CellID>
			<NominalGantryPositionInMilliMeters>3185</NominalGantryPositionInMilliMeters>
			<RinseID>3</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP1-3</ResistivityID>
		</Item>

		<Item i:type="Rinse">
			<Installed>true</Installed>
			<CellID>10</CellID>
			<NominalGantryPositionInMilliMeters>2390</NominalGantryPositionInMilliMeters>
			<RinseID>4</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP1-4</ResistivityID>
		</Item>

		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>3</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-3</TCID>
			<SubType>Gen3ChemEXx</SubType>
			<PHProbeChannelNumber>2</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<MetalCells>
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>11</CellID>
					<NominalGantryPositionInMilliMeters>3028</NominalGantryPositionInMilliMeters>
					<MetalID>6</MetalID>
					<PlatingPowerSupplyAID>Power11-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power12-1</PlatingPowerSupplyBID>
					<LinmotID>LNM2-1</LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>		
				<Item i:type="Metal">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>12</CellID>
					<NominalGantryPositionInMilliMeters>2869</NominalGantryPositionInMilliMeters>
					<MetalID>7</MetalID>
					<PlatingPowerSupplyAID>Power13-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power14-1</PlatingPowerSupplyBID>
					<LinmotID>LNM2-2</LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>	
			</MetalCells>
			<CellPosition>8</CellPosition>
			<PositionInMilliMeters>2480</PositionInMilliMeters>
			<LengthInMilliMeters>630</LengthInMilliMeters>	  
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>None</PHProbeType>
			<CrossDoseType>true</CrossDoseType>
			<ChemReplenType>RDS</ChemReplenType>
			<ChemReplenPumps>0</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>RDS</SlipstreamType>
			<CMMType>None</CMMType>
			<CMMSupplyID>None</CMMSupplyID>
			<EvaporatorType></EvaporatorType>
		</Item>

		<Item i:type="Rinse">
			<Installed>true</Installed>
			<CellID>14</CellID>
			<NominalGantryPositionInMilliMeters>1866</NominalGantryPositionInMilliMeters>
			<RinseID>5</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP2-1</ResistivityID>
		</Item>
		
		<Item i:type="Rinse">
			<Installed>false</Installed>
			<CellID>19</CellID>
			<NominalGantryPositionInMilliMeters>1244</NominalGantryPositionInMilliMeters>
			<RinseID>6</RinseID>
			<SubType>QDR</SubType>
			<ResistivityID>RP2-2</ResistivityID>
		</Item>

		<Item i:type="Reservoir">
			<Installed>false</Installed>
			<ReservoirID>4</ReservoirID>
			<Size>5</Size>
			<TCID>TC1-4</TCID>
			<SubType>Gen3ChemEXx</SubType>
			<PHProbeChannelNumber>2</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<MetalCells>
				<Item i:type="Metal">
					<Installed>false</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>10</CellID>
					<NominalGantryPositionInMilliMeters>3028</NominalGantryPositionInMilliMeters>
					<MetalID>8</MetalID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<LinmotID></LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>
				<Item i:type="Metal">
					<Installed>false</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>11</CellID>
					<NominalGantryPositionInMilliMeters>2869</NominalGantryPositionInMilliMeters>
					<MetalID>9</MetalID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<LinmotID></LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>
				<Item i:type="Metal">
					<Installed>false</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>12</CellID>
					<NominalGantryPositionInMilliMeters>2869</NominalGantryPositionInMilliMeters>
					<MetalID>10</MetalID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<LinmotID></LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>
				<Item i:type="Metal">
					<Installed>false</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>13</CellID>
					<NominalGantryPositionInMilliMeters>2869</NominalGantryPositionInMilliMeters>
					<MetalID>11</MetalID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<LinmotID></LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>
				<Item i:type="Metal">
					<Installed>false</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>14</CellID>
					<NominalGantryPositionInMilliMeters>2869</NominalGantryPositionInMilliMeters>
					<MetalID>12</MetalID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<LinmotID></LinmotID>
					<SubType>Gen3ChemEXx</SubType>
				</Item>
			</MetalCells>
			<CellPosition>8</CellPosition>
			<PositionInMilliMeters>2480</PositionInMilliMeters>
			<LengthInMilliMeters>630</LengthInMilliMeters>
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>None</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>RDS</ChemReplenType>
			<ChemReplenPumps>0</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>RDS</SlipstreamType>
			<CMMType>None</CMMType>
			<CMMSupplyID>None</CMMSupplyID>
			<EvaporatorType>STD</EvaporatorType>
		</Item>
		
		<!-- PREWET -->

		<Item i:type="Prewet">
			<Installed>true</Installed>
			<CellID>20</CellID>
			<NominalGantryPositionInMilliMeters>1135</NominalGantryPositionInMilliMeters>
			<PrewetID>1</PrewetID>
			<SubType>Scanning</SubType>
			<LinmotID>LNM3-1</LinmotID>
		</Item>

		<!-- DRYERs -->

		<Item i:type="Dryer">
			<Installed>true</Installed>
			<CellID>21</CellID>
			<NominalGantryPositionInMilliMeters>957</NominalGantryPositionInMilliMeters>
			<DryerID>1</DryerID>
			<SubType>HVDHSIndependent</SubType>
		</Item>
		<Item i:type="Dryer">
			<Installed>true</Installed>
			<CellID>22</CellID>
			<NominalGantryPositionInMilliMeters>873</NominalGantryPositionInMilliMeters>
			<DryerID>2</DryerID>
			<SubType>HVDHSIndependent</SubType>
		</Item>
		
		<Item i:type="Dryer">
			<Installed>false</Installed>
			<CellID>23</CellID>
			<NominalGantryPositionInMilliMeters>873</NominalGantryPositionInMilliMeters>
			<DryerID>3</DryerID>
			<SubType>HVDHSIndependent</SubType>
		</Item>


		<!-- BUFFER CELLS -->

		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>24</CellID>
			<NominalGantryPositionInMilliMeters>619</NominalGantryPositionInMilliMeters>
			<BufferID>1</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>25</CellID>
			<NominalGantryPositionInMilliMeters>584</NominalGantryPositionInMilliMeters>
			<BufferID>2</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>26</CellID>
			<NominalGantryPositionInMilliMeters>549</NominalGantryPositionInMilliMeters>
			<BufferID>3</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>27</CellID>
			<NominalGantryPositionInMilliMeters>514</NominalGantryPositionInMilliMeters>
			<BufferID>4</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>28</CellID>
			<NominalGantryPositionInMilliMeters>480</NominalGantryPositionInMilliMeters>
			<BufferID>5</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>29</CellID>
			<NominalGantryPositionInMilliMeters>445</NominalGantryPositionInMilliMeters>
			<BufferID>6</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>30</CellID>
			<NominalGantryPositionInMilliMeters>410</NominalGantryPositionInMilliMeters>
			<BufferID>7</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>31</CellID>
			<NominalGantryPositionInMilliMeters>375</NominalGantryPositionInMilliMeters>
			<BufferID>8</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>32</CellID>
			<NominalGantryPositionInMilliMeters>341</NominalGantryPositionInMilliMeters>
			<BufferID>9</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>33</CellID>
			<NominalGantryPositionInMilliMeters>305</NominalGantryPositionInMilliMeters>
			<BufferID>10</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>34</CellID>
			<NominalGantryPositionInMilliMeters>275</NominalGantryPositionInMilliMeters>
			<BufferID>11</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>35</CellID>
			<NominalGantryPositionInMilliMeters>240</NominalGantryPositionInMilliMeters>
			<BufferID>12</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>36</CellID>
			<NominalGantryPositionInMilliMeters>206</NominalGantryPositionInMilliMeters>
			<BufferID>13</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>37</CellID>
			<NominalGantryPositionInMilliMeters>169</NominalGantryPositionInMilliMeters>
			<BufferID>14</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>38</CellID>
			<NominalGantryPositionInMilliMeters>135</NominalGantryPositionInMilliMeters>
			<BufferID>15</BufferID>
			<SubType>Standard</SubType>
		</Item>
		<Item i:type="Buffer">
			<Installed>true</Installed>
			<CellID>39</CellID>
			<NominalGantryPositionInMilliMeters>100</NominalGantryPositionInMilliMeters>
			<BufferID>16</BufferID>
			<SubType>Standard</SubType>
		</Item>

		<Item i:type="EFEM">
			<Installed>true</Installed>
			<Type>EFEM</Type>
		</Item>
		<!-- LOAD PORTS -->

		<Item i:type="LoadPort">
			<Installed>true</Installed>
			<Type>LoadPort</Type>
			<PortID>1</PortID>
			<SubType>BrooksVision</SubType>
		</Item>
		<Item i:type="LoadPort">
			<Installed>true</Installed>
			<Type>LoadPort</Type>
			<PortID>2</PortID>
			<SubType>BrooksVision</SubType>
		</Item>
		<Item i:type="LoadPort">
			<Installed>true</Installed>
			<Type>LoadPort</Type>
			<PortID>3</PortID>
			<SubType>BrooksVision</SubType>
		</Item>

		<!-- SRDs -->

		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
			<ResourceID>SRD1</ResourceID>
			<Type>SRD</Type>
			<SRDID>1</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>
		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
			<ResourceID>SRD2</ResourceID>
			<Type>SRD</Type>
			<SRDID>2</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>

		<!-- SYSTEM FACILITIES -->

		<Item i:type="SystemFacilities">
			<Installed>true</Installed>
			<Type>SystemFacilities</Type>
			<ExternalPumpBox>false</ExternalPumpBox>	  	 
			<SampleStation1Installed>true</SampleStation1Installed>
			<SampleStation2Installed>false</SampleStation2Installed>
			<SlipstreamInterfaceInstalled>true</SlipstreamInterfaceInstalled>
			<RecirculationFlowPressure>false</RecirculationFlowPressure>
		</Item>

		<!-- SAFETY -->

		<Item i:type="SystemSafety">
			<Installed>true</Installed>
			<Type>SystemSafety</Type>
			<ReservoirOverflowSensor>true</ReservoirOverflowSensor>
		</Item>

		<!-- DUMMYs -->

		<Item i:type="DummyCassette">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>Dummy1</ResourceID>
			<Type>Dummy</Type>
			<MaxNumberOfSlots>16</MaxNumberOfSlots>
			<DummyCassetteID>1</DummyCassetteID>
		</Item>

	</Items>

</ToolLayoutXmlRoot>