| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340 | using Aitex.Core.Common;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.Util;using MECF.Framework.Common.DBCore;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.Utilities;using MECF.Framework.Common.WaferHolder;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Loader;using CyberX8_RT.Devices.PUF;using CyberX8_RT.Modules.Loader;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace CyberX8_RT.Modules.PUF{    public class PufPlaceToLoaderRoutine : RoutineBase, IRoutine    {        private enum PlaceStep        {            OnlyPlaceToLoader,            OnlyPlaceToLoaderWait,            SwitchWaferHolder,            LastRotationHomeStation,            LastRotationHomeStationWait,            End        }        #region 常量        private const string CURRENT_STATION_LIST = "CurrentStationList";        private const string SIDE_A = "SideA";        private const string SIDE_B = "SideB";        #endregion        #region 内部变量        private string _loaderSide;        private string _pufSide = "";        private LoaderEntity _loaderEntity;        private JetAxisBase _flipAxis;        private JetAxisBase _rotationAxis;        private PufVacuum _vacuum;        private LoaderSideDevice _loaderSideDevice;        private JetAxisBase _loaderCrsAxis;        private JetAxisBase _gantryAxis;        private PufOnlyPlaceToLoaderRoutine _onlyPlaceToLoaderRoutine;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public PufPlaceToLoaderRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            if (_onlyPlaceToLoaderRoutine != null)            {                _onlyPlaceToLoaderRoutine.Abort();            }            _flipAxis.StopPositionOperation();            _rotationAxis.StopPositionOperation();            Runner.Stop("Manual Abort");                    }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(PlaceStep.OnlyPlaceToLoader,StartOnlyPlaceToLoader,_delay_1ms)                .WaitWithStopCondition(PlaceStep.OnlyPlaceToLoaderWait,CheckPlaceEndStatus,CheckPlaceStopStatus)                .Run(PlaceStep.SwitchWaferHolder,SwitchWaferHolderSideWafer,_delay_1ms)                .Run(PlaceStep.LastRotationHomeStation, () => _rotationAxis.PositionStation("Home"), _delay_1ms)                .WaitWithStopCondition(PlaceStep.LastRotationHomeStationWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)                .End(PlaceStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 执行放片至Loader        /// </summary>        /// <returns></returns>        private bool StartOnlyPlaceToLoader()        {            return _onlyPlaceToLoaderRoutine.Start(_pufSide,_loaderSide) == RState.Running;        }        /// <summary>        /// 检验放片状态         /// </summary>        /// <returns></returns>        private bool CheckPlaceEndStatus()        {            return _onlyPlaceToLoaderRoutine.Monitor() ==RState.End;        }        /// <summary>        /// 检验放片停止状态        /// </summary>        /// <returns></returns>        private bool CheckPlaceStopStatus()        {            RState state = _onlyPlaceToLoaderRoutine.Monitor();            if(state==RState.Failed||state==RState.Timeout)            {                NotifyError(eEvent.ERR_PUF, "puf place wafer failed", 0);                return true;            }            return false;        }        /// <summary>        /// WaferHolder交换片        /// </summary>        /// <returns></returns>        private bool SwitchWaferHolderSideWafer()        {            WaferHolderInfo waferHolderInfo = _loaderEntity.WaferHolderInfo;            if (waferHolderInfo != null)            {                if (_loaderSide==SIDE_A)                {                    WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), 1, ModuleName.Loader1, 0);                    WaferInfo loaderWaferInfo = WaferManager.Instance.GetWafer(ModuleName.Loader1, 0);                    waferHolderInfo.WaferAId = loaderWaferInfo.WaferID;                    waferHolderInfo.WaferAType = (int)loaderWaferInfo.WaferType;                    WaferHolderDataRecorder.UpdateWaferHolderData(waferHolderInfo.Id, waferHolderInfo);                    MaterialTrackerManager.Instance.UpdateModuleMaterial(ModuleName.Loader1.ToString());                }                else                {                    WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), 1, ModuleName.Loader1, 1);                    WaferInfo loaderWaferInfo = WaferManager.Instance.GetWafer(ModuleName.Loader1, 1);                    waferHolderInfo.WaferBId = loaderWaferInfo.WaferID;                    waferHolderInfo.WaferBType = (int)loaderWaferInfo.WaferType;                    WaferHolderDataRecorder.UpdateWaferHolderData(waferHolderInfo.Id, waferHolderInfo);                    MaterialTrackerManager.Instance.UpdateModuleMaterial(ModuleName.Loader1.ToString());                }            }            return true;        }        /// <summary>        /// 检验Rotation移动状态        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionStatus()        {            return _rotationAxis.Status == RState.End;        }        /// <summary>        /// 检验Rotation是否还在运动        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionRunStop()        {            bool result= _rotationAxis.Status == RState.Failed;            if (result)            {                NotifyError(eEvent.ERR_PUF, "rotation axis goto home failed", 0);            }            return result;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _pufSide = objs[0].ToString();            _loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());            _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");            _gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter2}.Gantry");            if (!CheckPreCondition())            {                return RState.Failed;            }            GetCrsAxis();            _onlyPlaceToLoaderRoutine = new PufOnlyPlaceToLoaderRoutine(Module.ToString());            return Runner.Start(Module, "Place To Loader");        }        /// <summary>        /// 检验是否存在Wafer        /// </summary>        /// <returns></returns>        private bool CheckWaferPresent()        {            if (_pufSide == "SideA")            {                if (!_vacuum.ChuckAWaferPresent)                {                    NotifyError(eEvent.ERR_PUF, $"{_pufSide} has no Wafer", -1);                    return false;                }            }            else            {                if (!_vacuum.ChuckBWaferPresent)                {                    NotifyError(eEvent.ERR_PUF, $"{_pufSide} has no Wafer",-1);                    return false;                }            }            return true;        }        /// <summary>        /// 检验前置条件        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            if(!CheckWaferPresent())            {                return false;            }            bool isLoaderInstall = ModuleHelper.IsInstalled(ModuleName.Loader1);            if (isLoaderInstall)            {                JetAxisBase loaderRotationaxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");                               if (loaderRotationaxis != null)                {                    double loaderRotationPosition = loaderRotationaxis.MotionData.MotorPosition;                    if (!loaderRotationaxis.CheckPositionInStationIgnoreWaferSize(loaderRotationPosition, "LOAD"))                    {                        NotifyError(eEvent.ERR_PUF, $"Loader Rotation {loaderRotationPosition} is not in LOAD", -1);                        return false;                    }                    bool isLoadA = loaderRotationaxis.CheckPositionInStationIgnoreWaferSize(loaderRotationPosition, "LOADA");                    bool isLoadB = loaderRotationaxis.CheckPositionInStationIgnoreWaferSize(loaderRotationPosition, "LOADB");                    _loaderSide = isLoadA ? SIDE_A : SIDE_B;                }                 string side = _loaderSide == SIDE_A ? "A" : "B";                GetLoaderSide();                if (_loaderSideDevice.SideData.WaferPresent)                {                    NotifyError(eEvent.ERR_PUF, $"{_loaderSideDevice.Module}.{_loaderSideDevice.Name} wafer present sensor is true", -1);                    return false;                }                //Loader1.SwingA 在Open                JetAxisBase loaderShuttleAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Shuttle{side}");                if (loaderShuttleAAxis != null)                {                    double loaderShuttleAPosition = loaderShuttleAAxis.MotionData.MotorPosition;                    if (!loaderShuttleAAxis.CheckPositionInStationIgnoreWaferSize(loaderShuttleAPosition, "OUT"))                    {                        NotifyError(eEvent.ERR_PUF, $"Loader Shuttle{side} {loaderShuttleAPosition} is not in OUT", -1);                        return false;                    }                }                //Loader1.TiltA 在HORI                JetAxisBase loaderTiltAAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Tilt{side}");                if (loaderTiltAAxis != null)                {                    double loaderTiltAPosition = loaderTiltAAxis.MotionData.MotorPosition;                    if (!loaderTiltAAxis.CheckPositionIsInStation(loaderTiltAPosition, "HORI"))                    {                        NotifyError(eEvent.ERR_PUF, $"Loader Tilt{side} {loaderTiltAPosition} is not in HORI", -1);                        return false;                    }                }                //Loader Handle Wafer状态确认                // Lip Seal Vacuum "ON"                if (!_loaderSideDevice.SideData.CRSVacuum)                {                    NotifyError(eEvent.ERR_PUF, "Loader1 LS Vacuum is off", -1);                    return false;                }                //Bernoulli Bladder "ON",Retracted Green Light                if (!_loaderSideDevice.SideData.BernoulliBladder)                {                    NotifyError(eEvent.ERR_PUF, "Loader1 Bernoulli Bladder is off",-1);                    return false;                }                //其他SideA/B均为OFF                if (_loaderSideDevice.SideData.BernoulliN2)                {                    NotifyError(eEvent.ERR_PUF, "Loader1 Bernoulli N2 is on",-1);                    return false;                }            }            double rotationPosition = _rotationAxis.MotionData.MotorPosition;            if (_rotationAxis.CheckPositionIsEmpty(rotationPosition))            {                LOG.WriteLog(eEvent.ERR_PUF, Module, $"rotation axis {rotationPosition} is not at Station");                return false;            }            double flipPosition = _flipAxis.MotionData.MotorPosition;            if (_flipAxis.CheckPositionIsEmpty(flipPosition))            {                LOG.WriteLog(eEvent.ERR_PUF, Module, $"flip axis {flipPosition} is not at Station");                return false;            }            return true;        }        /// <summary>        /// 获取LoaderSide        /// </summary>        private void GetLoaderSide()        {            if (_loaderSide==SIDE_A)            {                _loaderSideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.SideA");            }            else            {                _loaderSideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.SideB");            }        }        /// <summary>        /// 获取lipseal Axis        /// </summary>        private void GetCrsAxis()        {            if(_loaderSide==SIDE_A)            {                _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");            }            else            {                _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");            }        }    }}
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