| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Loader;using CyberX8_RT.Devices.PUF;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Aitex.Core.Common;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using CyberX8_RT.Modules.Loader;namespace CyberX8_RT.Modules.PUF{    public class PufOnlyPlaceToLoaderRoutine : RoutineBase, IRoutine    {        private enum PlaceStep        {            LipSealGotoUnlock,            LipSealGotoUnlockWait,            VacuumLevelCheck,            SideConditionRoutine,            SideConditionRoutineWait,            RotationGotoLoaderPlaceDown,            RotationGotoLoaderPlaceDownWait,            FirstPlaceVacuumCheck,            FirstPlaceVacuumCheckWait,            SecondPlaceVacuumCheck,            SecondPlaceVacuumCheckWait,            VacuumOff,            End        }        #region 常量         private const string SideA = "SideA";        private const string SideB = "SideB";        private const string WAFER_ABSENT = "WaferAbsent";        #endregion        #region 内部变量        private bool _isSecondPlaceVacuumCheck = false;        private string _pufSide;        private string _loaderSide;        private JetAxisBase _flipAxis;        private JetAxisBase _rotationAxis;        private PufVacuum _vacuum;        private JetAxisBase _loaderCrsAxis;        private PufWaferPickSubRoutine _pufWaferPickSubRoutine;        private PufPlaceVacuumCheckRoutine _pufPlaceVacuumCheckRoutine;        private int _waferSize = 200;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public PufOnlyPlaceToLoaderRoutine(string module) : base(module)        {            _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(module);        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            if (_pufWaferPickSubRoutine != null)            {                _pufWaferPickSubRoutine.Abort();            }            _flipAxis.StopPositionOperation();            _rotationAxis.StopPositionOperation();            Runner.Stop("Manual Abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(PlaceStep.LipSealGotoUnlock, LipSealGotoUnlock, _delay_1ms)               .WaitWithStopCondition(PlaceStep.LipSealGotoUnlockWait, CheckLipSealEndStatus, CheckLipSealStopStatus)               .Run(PlaceStep.VacuumLevelCheck, CheckWaferPresent, _delay_1ms)               .RunConditionSubRoutine(PlaceStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _pufSide })               .WaitConditionSubRoutine(PlaceStep.SideConditionRoutineWait)               .Run(PlaceStep.RotationGotoLoaderPlaceDown, () => _rotationAxis.PositionStation("LoaderPutDown"), _delay_1ms)               .WaitWithStopCondition(PlaceStep.RotationGotoLoaderPlaceDownWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)               .Run(PlaceStep.FirstPlaceVacuumCheck, () => StartPlaceVacuumCheckRoutine(false, 1), _delay_1ms)               .WaitWithStopCondition(PlaceStep.FirstPlaceVacuumCheckWait, CheckFirstPlaceVacuumCheckRoutineStatus, () => { return false; })               .Run(PlaceStep.SecondPlaceVacuumCheck, StartSecondPlaceVacuumCheckRoutine, _delay_1ms)               .WaitWithStopCondition(PlaceStep.SecondPlaceVacuumCheckWait, CheckPlaceVacuumCheckRoutineEndStatus, CheckSecondPlaceVacuumCheckRoutineStopStatus)               .Run(PlaceStep.VacuumOff, VacuumOff, _delay_1ms)               .End(PlaceStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// LipSeal Goto Unlock        /// </summary>        /// <returns></returns>        private bool LipSealGotoUnlock()        {            if (ModuleHelper.IsInstalled(ModuleName.Loader1))            {                return _loaderCrsAxis.PositionStation($"Unlock{_waferSize}");            }            else            {                return true;            }        }        /// <summary>        /// 检验Lip Seal完成状态        /// </summary>        /// <returns></returns>        private bool CheckLipSealEndStatus()        {            if (ModuleHelper.IsInstalled(ModuleName.Loader1))            {                return _loaderCrsAxis.Status == RState.End;            }            else            {                return true;            }        }        /// <summary>        /// 检验Lip Seal完成状态        /// </summary>        /// <returns></returns>        private bool CheckLipSealStopStatus()        {            if (ModuleHelper.IsInstalled(ModuleName.Loader1))            {                bool result= _loaderCrsAxis.Status == RState.Failed;                if (result)                {                    NotifyError(eEvent.ERR_PUF, $"lipsel axis goto unlock failed", 0);                }                return result;            }            else            {                return true;            }        }        /// <summary>        /// 检验是否存在Wafer        /// </summary>        /// <returns></returns>        private bool CheckWaferPresent()        {            if (_pufSide == SideA)            {                if (!_vacuum.ChuckAWaferPresent)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_pufSide} has no Wafer");                    return false;                }            }            else            {                if (!_vacuum.ChuckBWaferPresent)                {                    LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_pufSide} has no Wafer");                    return false;                }            }            return true;        }        /// <summary>        /// Side条件获取SubRoutine索引        /// </summary>        /// <returns></returns>        private int SideConditionIndex()        {            if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _pufSide))            {                return 1;            }            else            {                return 0;            }        }        /// <summary>        /// 检验Rotation移动状态        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionStatus()        {            return _rotationAxis.Status == RState.End;        }        /// <summary>        /// 检验Rotation是否还在运动        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionRunStop()        {            return _rotationAxis.Status == RState.Failed;        }        /// <summary>        /// 启动Place Vacuum Check routine        /// </summary>        /// <returns></returns>        private bool StartPlaceVacuumCheckRoutine(bool showError, int times)        {            return _pufPlaceVacuumCheckRoutine.Start(_pufSide, showError, times) == RState.Running;        }        /// <summary>        ///  检验第一次Place Vacuum Check routine运行情况        /// </summary>        /// <returns></returns>        private bool CheckFirstPlaceVacuumCheckRoutineStatus()        {            RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();            if (rsState == RState.End)            {                return true;            }            if (rsState == RState.Failed || rsState == RState.Timeout)            {                _isSecondPlaceVacuumCheck = true;                return true;            }            return false;        }        /// <summary>        /// 启动Place Vacuum Check routine完成状态        /// </summary>        /// <returns></returns>        private bool CheckPlaceVacuumCheckRoutineEndStatus()        {            RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();            return rsState == RState.End;        }        /// <summary>        /// 启动第二次Place Vacuum Check routine        /// </summary>        /// <returns></returns>        private bool StartSecondPlaceVacuumCheckRoutine()        {            if (_isSecondPlaceVacuumCheck)            {                return StartPlaceVacuumCheckRoutine(true, 2);            }            else            {                return true;            }        }        /// <summary>        /// 检验第二次Place Vacuum Check routine错误状态        /// </summary>        /// <returns></returns>        private bool CheckSecondPlaceVacuumCheckRoutineStopStatus()        {            RState rState = _pufPlaceVacuumCheckRoutine.Monitor();            if (rState == RState.Failed || rState == RState.Timeout)            {                return true;            }            return false;        }        /// <summary>        /// 关闭Vacuum        /// </summary>        /// <returns></returns>        private bool VacuumOff()        {            if (_pufSide == "SideA")            {                return _vacuum.VacuumAOff();            }            else if (_pufSide == "SideB")            {                return _vacuum.VacuumBOff();            }            return false;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _pufSide = objs[0].ToString();            _loaderSide = objs[1].ToString();            _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");            GetCrsAxis();            _isSecondPlaceVacuumCheck = false;            _pufPlaceVacuumCheckRoutine = new PufPlaceVacuumCheckRoutine(Module);            LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());            if (_loaderSide == SideA)            {                _waferSize = loaderEntity.SideAWaferSize;            }            else            {                _waferSize = loaderEntity.SideBWaferSize;            }            return Runner.Start(Module, "Start Place To Loader");        }        /// <summary>        /// 获取lipseal Axis        /// </summary>        private void GetCrsAxis()        {            if (_loaderSide==SideA)            {                _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");            }            else            {                _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");            }        }    }}
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