CyberX8/CyberX8_RT/Devices/Loader/LoaderInstallCRSRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.CommonData.Loader;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using CyberX8_RT.Modules.Transporter;
using Aitex.Core.RT.SCCore;

namespace CyberX8_RT.Devices.Loader
{
    public class LoaderInstallCRSRoutine : RoutineBase, IRoutine
    {
        private enum InstallStep
        {
            CheckPreCondition,
            TiltGotoVertical,
            TiltGotoVerticalCheck,
            LSGotoUnlock,
            LSGotoUnlockWait,
            ShuttleGotoIN,
            ShuttleGotoINWait,
            BernoulliBladderOn,
            BernoulliBladderOnCheck,
            BernoulliN2On,
            BernoulliN2OnCheck,
            WSBladderOn,
            WSBladderOnCheck,
            LSVacuumOn,
            LSVacuumOnCheck,
            VacuumLevelCheck,
            VacuumLevelCheckWait,
            ShuttleGotoLS,
            ShuttleGotoLSWait,
            LSGotoLock,
            LSGotoLockWait,
            BernoulliN2Off,
            BernoulliN2OffCheck,
            WSBladderOff,
            WSBladderOffCheck,
            Wait500MS,
            LSVacuumOff,
            LSVacuumOffCheck,
            ReWait500MS,
            ShuttleGotoMID,
            ShuttleGotoMIDWait,
            HomingLSAxis,
            HomingLSAxisWait,
            End
        }

        #region 内部变量
        private string _side = "";
        private JetAxisBase _lsAxis;
        private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
        private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;
        private LoaderSideVacuumRoutine _vacuumRoutine;
        private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
        private LoaderSideWhBladderRoutine _whBladderRoutine;
        private JetAxisBase _shuttleAxis;
        private JetAxisBase _tiltAxis;
        private JetAxisBase _rotationAxis;
        private LoaderCommonDevice _loaderCommonDevice;
        private LoaderSideDevice _sideDevice;
        /// <summary>
        /// WaferSize
        /// </summary>
        private int _waferSize;
        #endregion

        /// <summary>
        /// 构造函数
        /// </summary>
        /// <param name="module"></param>
        public LoaderInstallCRSRoutine(string module,string side) : base(module)
        {
           _side = side;
        }
        /// <summary>
        /// 中止
        /// </summary>
        public void Abort()
        {
            Runner.Stop("Manual Abort");
        }
        /// <summary>
        /// 监控
        /// </summary>
        /// <returns></returns>
        public RState Monitor()
        {
            Runner.Run(InstallStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
                //1. Tilt Goto Vertical
                .Run(InstallStep.TiltGotoVertical, () => { return _tiltAxis.PositionStation("VERT",false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; }, () => { return _tiltAxis.Status == RState.Failed; })
                //2. LS Goto Unlock
                .Run(InstallStep.LSGotoUnlock, () => { return _lsAxis.PositionStation($"Unlock{_waferSize}", false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
                //3. Shuttle Goto IN
                .Run(InstallStep.ShuttleGotoIN, () => { return _shuttleAxis.PositionStation("IN", false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
                //4. BernoulliBladder On
                .Run(InstallStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliBladderRoutine); })
                //5. Bernoulli N2 On
                .Run(InstallStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
                //6. WS Bladder On
                .Run(InstallStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
                //7. LS Vacuum On
                .Run(InstallStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
                //8. LS Vacuum Level Check
                .Run(InstallStep.VacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumLevelCheckRoutine); })
                //9. Shutle Goto LS
                .Run(InstallStep.ShuttleGotoLS, () => { return _shuttleAxis.PositionStation("LS", false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
                //10. LS Goto Lock
                .Run(InstallStep.LSGotoLock, () => { return _lsAxis.PositionStation($"Lock{_waferSize}", false, 0, 0, 0, false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
                //11. Bernoulli N2 Off
                .Run(InstallStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
                //12. WS Bladder Off
                .Run(InstallStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
                //13. Wait 0.5s for WS Bladder
                .Delay(InstallStep.Wait500MS, 500)
                //14. LS Vacuum Off
                .Run(InstallStep.LSVacuumOff, () => { return _vacuumRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
                //15. Wait 0.5s 
                .Delay(InstallStep.ReWait500MS, 500)
                //16. Shuttle Goto MID
                .Run(InstallStep.ShuttleGotoMID, () => { return _shuttleAxis.PositionStation("MID", false); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
                //17. Home LS Axis
                .Run(InstallStep.HomingLSAxis, () => { return _lsAxis.Home(); }, _delay_1ms)
                .WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
                .End(InstallStep.End, NullFun, 10);
            return Runner.Status;
        }
        /// <summary>
        /// 启动
        /// </summary>
        /// <param name="objs"></param>
        /// <returns></returns>
        /// <exception cref="NotImplementedException"></exception>
        public RState Start(params object[] objs)
        {
            if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
            {
                _waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");
            }
            _shuttleAxis = GetShuttleAxis();
            _lsAxis = GetCrsAxis();
            _tiltAxis = GetTiltAxis(); 
            _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
            _sideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");
            _vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
            _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
            _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
            _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
            _bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
            if(!CheckPreCondition())
            {
                return RState.Failed;
            }
            Runner.Start(Module, "InstallCRS");
            return RState.Running;
        }
        /// <summary>
        /// 获取Shuttle轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetShuttleAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleB");
            }
        }
        /// <summary>
        /// 获取CRS轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetCrsAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSB");
            }
        }
        /// <summary>
        /// 获取Tilt轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetTiltAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltB");
            }
        }

        /// <summary>
        /// 检验前置条件
        /// </summary>
        /// <returns></returns>
        private bool CheckPreCondition()
        {
            if (!CheckHomeCondition())
            {
                return false;
            }
            if (!CheckInstallCRSAxisCondition())
            {
                return false;
            }
            if (!InstallCRSStatusCheck())
            {
                return false;
            }
            return true;
        }
        /// <summary>
        /// 检验Home条件
        /// </summary>
        /// <returns></returns>
        private bool CheckHomeCondition()
        {
            //检验PUF、Loader Transporter,Robot均Homed
            //Efem Home
            if (ModuleHelper.IsInstalled(ModuleName.EFEM))
            {
                EfemEntity efemEntity = Singleton<RouteManager>.Instance.GetModule<EfemEntity>(ModuleName.EFEM.ToString());
                if (!efemEntity.IsHomed)
                {
                    LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition");
                    return false;
                }
            }
            if (ModuleHelper.IsInstalled(ModuleName.PUF1))
            {
                PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
                if (!puf1Entity.IsHomed)
                {
                    NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed", -1);
                    return false;
                }
            }
            if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
            {
                TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
                if (!loaderTransportEntity.IsHomed)
                {
                    NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed", -1);
                    return false;
                }
            }
            return true;
        }
        /// <summary>
        /// 检验Axis条件
        /// </summary>
        /// <param name="side"></param>
        /// <returns></returns>
        private bool CheckInstallCRSAxisCondition()
        {
            if (!_rotationAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"Rotation is not homed", -1);
                return false;
            }
            if (!_shuttleAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1);
                return false;
            }
            if (!_tiltAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed", -1);
                return false;
            }
            if (!_lsAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_lsAxis.Name} is not homed", -1);
                return false;
            }
            //LS已经运动到 Setup 位
            double crsPosition = _lsAxis.MotionData.MotorPosition;
            if (!_lsAxis.CheckPositionIsInStation(crsPosition, $"Setup{_waferSize}"))
            {
                NotifyError(eEvent.ERR_LOADER, $"LS {crsPosition} not in Setup{_waferSize}", -1);
                return false;
            }
            //Rotation已经运动到 loaderA 位（sideA 下片时）或 loaderB 位（sideB 下片时）
            double rotationPosition = _rotationAxis.MotionData.MotorPosition;
            if (_side == "SideA")
            {

                if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADA{_waferSize}"))
                {
                    NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADA{_waferSize}", -1);
                    return false;
                }
            }
            else
            {
                if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADB{_waferSize}"))
                {
                    NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADB{_waferSize}", -1);
                    return false;
                }
            }
            //Shuttle已经运动到除 IN 外任何位置
            double shuttlePosition = _shuttleAxis.MotionData.MotorPosition;
            if (_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "IN"))
            {
                NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in IN", -1);
                return false;
            }           
            
            return true;
        }
        /// <summary>
        /// 检验Status条件
        /// </summary>
        /// <param name="side"></param>
        /// <returns></returns>
        private bool InstallCRSStatusCheck()
        {
            LoaderSideData sideData = _sideDevice.SideData;
            LoaderCommonData commonData = _loaderCommonDevice.CommonData;
            //Bernoulli Bladder(WS Bladder on)
            if (!sideData.BernoulliBladder)
            {
                NotifyError(eEvent.ERR_LOADER, "Bernoulli Bladder is off", -1);
                return false;
            }
            //Bernoulli N2(BernoulliN2 off)
            if (sideData.BernoulliN2)
            {
                NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on", -1);
                return false;
            }
            //CRS Vacuum检验(Vacuum off)
            if (sideData.CRSVacuum)
            {
                LOG.WriteLog(eEvent.ERR_LOADER, Module, "LS Vacuum is on");
                return false;
            }
            //Wafer Shuttle Present
            if (!commonData.WaferHolderPresent)
            {
                LOG.WriteLog(eEvent.ERR_LOADER, Module, "Wafer Shuttle is absent");
                return false;
            }
            //WS Clamp On
            if (!commonData.WaferHolderClamp)
            {
                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1);
                return false;
            }
            //WS Bladder off
            if (sideData.WHBladder)
            {
                LOG.WriteLog(eEvent.ERR_LOADER, Module, "WS Bladder is on");
                return false;
            }
            //Drip Tray Fluid(正常)
            if (commonData.DripTrayFluid)
            {
                LOG.WriteLog(eEvent.ERR_LOADER, Module, "Drip Tray Fluid is on");
                return false;
            }
            return true;
        }
    }
}