TransporterEntity.cs 66 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.Utilities;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.WaferHolder;
  10. using CyberX8_Core;
  11. using CyberX8_RT.Devices.AXIS;
  12. using System;
  13. using System.Collections.Generic;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using Aitex.Core.Util;
  18. using MECF.Framework.Common.Layout;
  19. using Aitex.Core.RT.SCCore;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using MECF.Framework.Common.CommonData;
  22. using MECF.Framework.Common.Alarm;
  23. using MECF.Framework.Common.Utilities;
  24. using Aitex.Core.Common;
  25. namespace CyberX8_RT.Modules.Transporter
  26. {
  27. public class TransporterEntity : Entity, IEntity, IModuleEntity
  28. {
  29. #region 常量
  30. private const string TRNPA = "TRNPA";
  31. private const string TRNPB = "TRNPB";
  32. #endregion
  33. #region 内部变量
  34. /// <summary>
  35. /// 是否完成Home
  36. /// </summary>
  37. private bool _isHomed;
  38. /// <summary>
  39. /// Gantry电机
  40. /// </summary>
  41. private JetAxisBase _gantryAxis;
  42. /// <summary>
  43. /// Elevator电机
  44. /// </summary>
  45. private JetAxisBase _elevatorAxis;
  46. /// <summary>
  47. /// 当前Routine
  48. /// </summary>
  49. private IRoutine _currentRoutine;
  50. /// <summary>
  51. /// 目标Cell(Transfer或pickupMoveto或moveto目标Cell)
  52. /// </summary>
  53. private string _targetCell;
  54. /// <summary>
  55. /// 源Cell(Transfer或pickupMoveto)
  56. /// </summary>
  57. private string _sourceCell;
  58. #endregion
  59. #region routine
  60. private TransporterHomeRoutine _homeAllRoutine;
  61. private TransporterSwitchOnRoutine _switchOnRoutine;
  62. private TransporterSwitchOffRoutine _switchOffRoutine;
  63. private TransporterPositionRoutine _positionRoutine;
  64. private TransporterGantryPositionRoutine _gantryPositionRoutine;
  65. private TransporterPickUpFromRoutine _pickUpFromRoutine;
  66. private TransporterMoveToRoutine _moveToRoutine;
  67. private TransporterPickDownToRoutine _placeRoutine;
  68. private TransporterParkRoutine _parkRoutine;
  69. private TransporterElevatorUpRoutine _elevatorUpRoutine;
  70. private TransporterElevatorLowRoutine _elevatorLowRoutine;
  71. private TransporterTransferRoutine _transferRoutine;
  72. private TransporterPickUpMoveToRoutine _pickUpMoveToRoutine;
  73. private TransporterPickUpValidateRoutine _pickUpValidateRoutine;
  74. #endregion
  75. #region 属性
  76. public ModuleName Module { get; private set; }
  77. //初始状态
  78. public bool IsInit
  79. {
  80. get { return fsm.State == (int)TransporterState.Init; }
  81. }
  82. /// <summary>
  83. ///Initialized状态(Safety)
  84. /// </summary>
  85. public bool IsInitialized { get { return fsm.State==(int)TransporterState.Initialized; } }
  86. /// <summary>
  87. /// Busy状态
  88. /// </summary>
  89. public bool IsBusy
  90. {
  91. get { return !IsInit && !IsError && !IsIdle; }
  92. }
  93. /// <summary>
  94. /// Idle状态
  95. /// </summary>
  96. public bool IsIdle
  97. {
  98. get { return fsm.State == (int)TransporterState.Idle; }
  99. }
  100. public bool IsAuto { get; } = true;
  101. /// <summary>
  102. /// 是否为工程模式
  103. /// </summary>
  104. public bool IsEngineering { get; } = false;
  105. /// <summary>
  106. /// 是否为产品模式
  107. /// </summary>
  108. public bool IsProduction { get; } = true;
  109. /// <summary>
  110. /// 错误状态
  111. /// </summary>
  112. public bool IsError
  113. {
  114. get { return fsm.State == (int)TransporterState.Error; }
  115. }
  116. /// <summary>
  117. /// Home状态
  118. /// </summary>
  119. public bool IsHomed
  120. {
  121. get { return _isHomed; }
  122. }
  123. /// <summary>
  124. /// 是否禁用
  125. /// </summary>
  126. public bool IsDisable { get; internal set; }
  127. /// <summary>
  128. /// Grantry是否SwitchOn
  129. /// </summary>
  130. public bool IsGantrySwitchOn
  131. {
  132. get { return _gantryAxis.IsSwitchOn; }
  133. }
  134. /// <summary>
  135. /// Elevator是否SwitchOn
  136. /// </summary>
  137. public bool IsElevatorSwitchOn
  138. {
  139. get { return _elevatorAxis.IsSwitchOn; }
  140. }
  141. /// <summary>
  142. /// 当前状态机状态
  143. /// </summary>
  144. public int State { get { return fsm.State; } }
  145. /// <summary>
  146. /// 目标Cell(Transfer或pickupMoveto或moveto目标Cell)
  147. /// </summary>
  148. public string TargetCell { get { return _targetCell; } }
  149. /// <summary>
  150. /// 源Cell(Transfer或pickupMoveto)
  151. /// </summary>
  152. public string SourceCell { get { return _sourceCell; } }
  153. /// <summary>
  154. /// WaferHolder信息
  155. /// </summary>
  156. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  157. #endregion
  158. /// <summary>
  159. /// 构造函数
  160. /// </summary>
  161. /// <param name="module"></param>
  162. public TransporterEntity(ModuleName module)
  163. {
  164. this.Module = module;
  165. _elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.Elevator");
  166. _gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Gantry");
  167. WaferManager.Instance.SubscribeLocation(Module, 2);
  168. InitialFsm();
  169. }
  170. /// <summary>
  171. /// 初始化
  172. /// </summary>
  173. /// <returns></returns>
  174. protected override bool Init()
  175. {
  176. InitialOperation();
  177. InitialDATA();
  178. InitialRoutine();
  179. return true;
  180. }
  181. /// <summary>
  182. /// 初始化状态机
  183. /// </summary>
  184. private void InitialFsm()
  185. {
  186. fsm = new StateMachine<TransporterEntity>(Module.ToString(), (int)TransporterState.Init, 100);
  187. fsm.EnableRepeatedMsg(true);
  188. AnyStateTransition(TransporterMSG.Error, EnterError, TransporterState.Error);
  189. AnyStateTransition(TransporterMSG.Abort, Abort, TransporterState.Init);
  190. AnyStateTransition(TransporterMSG.ReturnIdle, NullFunc, TransporterState.Idle);
  191. AnyStateTransition(TransporterMSG.HomeAll, HomeAll, TransporterState.Homing);
  192. Transition(TransporterState.Error, TransporterMSG.ResumeError,ResumeError, TransporterState.Init);
  193. //SwitchOn
  194. Transition(TransporterState.Init, TransporterMSG.SwitchOn, SwitchOnAll, TransporterState.SwitchOning);
  195. Transition(TransporterState.Idle, TransporterMSG.SwitchOn, SwitchOnAll, TransporterState.SwitchOning);
  196. Transition(TransporterState.Error, TransporterMSG.SwitchOn, SwitchOnAll, TransporterState.SwitchOning);
  197. Transition(TransporterState.SwitchOning, FSM_MSG.TIMER, SwitchOnTimeout, TransporterState.Init);
  198. //SwitchOff
  199. Transition(TransporterState.Init, TransporterMSG.SwitchOff, SwitchOffAll, TransporterState.SwitchOffing);
  200. Transition(TransporterState.Idle, TransporterMSG.SwitchOff, SwitchOffAll, TransporterState.SwitchOffing);
  201. Transition(TransporterState.Error, TransporterMSG.SwitchOff, SwitchOffAll, TransporterState.SwitchOffing);
  202. Transition(TransporterState.SwitchOffing, FSM_MSG.TIMER, SwitchOffTimeout, TransporterState.Init);
  203. // Home
  204. Transition(TransporterState.Homing, FSM_MSG.TIMER, HomingTimeout, TransporterState.Idle);
  205. //Gantry Save Move
  206. Transition(TransporterState.Idle, TransporterMSG.GantrySafeMove, GantrySafeMove, TransporterState.GantrySafeMoving);
  207. Transition(TransporterState.GantrySafeMoving, FSM_MSG.TIMER, GantrySafeMoveMonitor, TransporterState.Idle);
  208. //GantryGoToSavedPosition
  209. Transition(TransporterState.Error, TransporterMSG.GantryGoToSavedPosition, ManualGantryGotoPosition, TransporterState.ErrorGantryPositioning);
  210. Transition(TransporterState.ErrorGantryPositioning, FSM_MSG.TIMER, ManualGantryGotoPositionTimeout, TransporterState.Error);
  211. Transition(TransporterState.Idle,TransporterMSG.GantryGoToSavedPosition, ManualGantryGotoPosition, TransporterState.GantryPositioning);
  212. Transition(TransporterState.GantryPositioning, FSM_MSG.TIMER, ManualGantryGotoPositionTimeout, TransporterState.Idle);
  213. //Pickup
  214. Transition(TransporterState.Idle, TransporterMSG.PickUpFrom, PickUp, TransporterState.PickUping);
  215. Transition(TransporterState.PickUping, FSM_MSG.TIMER, PickUpFromTimeout, TransporterState.Idle);
  216. //MoveTo
  217. Transition(TransporterState.Idle, TransporterMSG.MoveTo, MoveTo, TransporterState.MovingTo);
  218. Transition(TransporterState.MovingTo, FSM_MSG.TIMER, MoveToTimeout, TransporterState.Idle);
  219. //Place
  220. Transition(TransporterState.Idle, TransporterMSG.Place, Place, TransporterState.Placing);
  221. Transition(TransporterState.Placing, FSM_MSG.TIMER, PlaceTimeout, TransporterState.Idle);
  222. //Park
  223. Transition(TransporterState.Idle, TransporterMSG.Park, Park, TransporterState.Parking);
  224. Transition(TransporterState.Parking, FSM_MSG.TIMER, ParkTimeout, TransporterState.Idle);
  225. //Elevator Up
  226. Transition(TransporterState.Idle, TransporterMSG.ElevatorUp, ElevatorUp, TransporterState.ElevatorUping);
  227. Transition(TransporterState.ElevatorUping, FSM_MSG.TIMER, ElevatorUpTimeout, TransporterState.Idle);
  228. //Elevator Low
  229. Transition(TransporterState.Idle, TransporterMSG.ElevatorLow, ElevatorLow, TransporterState.ElevatorLowing);
  230. Transition(TransporterState.ElevatorLowing, FSM_MSG.TIMER, ElevatorLowTimeout, TransporterState.Idle);
  231. //Transfer
  232. Transition(TransporterState.Idle, TransporterMSG.Transfer, Transfer, TransporterState.Transfering);
  233. Transition(TransporterState.Transfering, FSM_MSG.TIMER, TransferTimeout, TransporterState.Idle);
  234. //PickUpMoveTo
  235. Transition(TransporterState.Idle, TransporterMSG.PickUpMoveTo, PickUpMoveTo, TransporterState.PickUpMoveToing);
  236. Transition(TransporterState.PickUpMoveToing, FSM_MSG.TIMER, PickUpMoveToTimeout, TransporterState.PickUpMoveToComplete);
  237. Transition(TransporterState.PickUpMoveToComplete,TransporterMSG.Place, Place, TransporterState.Placing);
  238. Transition(TransporterState.Placing, FSM_MSG.TIMER, PlaceTimeout, TransporterState.Idle);
  239. //PickUpValidate
  240. Transition(TransporterState.Idle, TransporterMSG.PickUpValidate, PickUpValidate, TransporterState.PickUpValidating);
  241. Transition(TransporterState.PickUpValidating, FSM_MSG.TIMER, PickUpValidateTimeout, TransporterState.PickUpValidateComplete);
  242. Transition(TransporterState.PickUpValidateComplete, TransporterMSG.MoveTo, MoveTo, TransporterState.ValidateMoveTo);
  243. Transition(TransporterState.ValidateMoveTo, FSM_MSG.TIMER, MoveToTimeout, TransporterState.ValidateMoveToComplete);
  244. Transition(TransporterState.ValidateMoveToComplete, TransporterMSG.Place, Place, TransporterState.Placing);
  245. //Retry
  246. Transition(TransporterState.Error, TransporterMSG.Retry, NullFunc, TransporterState.Retrying);
  247. Transition(TransporterState.Retrying, FSM_MSG.TIMER, TransporterRetry, TransporterState.Retrying);
  248. Transition(TransporterState.Retrying, TransporterMSG.Transfer, RetryTransfer, TransporterState.Transfering);
  249. Transition(TransporterState.Retrying, TransporterMSG.PickUpMoveTo, RetryPickUpMoveTo, TransporterState.PickUpMoveToing);
  250. Transition(TransporterState.Retrying, TransporterMSG.PickUpValidate, RetryPickUpValidate, TransporterState.PickUpValidating);
  251. Transition(TransporterState.Retrying, TransporterMSG.Place, RetryPlace, TransporterState.Placing);
  252. //ConfirmComplete
  253. Transition(TransporterState.Init, TransporterMSG.ConfirmComplete, ClearModuleAlarm, TransporterState.Init);
  254. Transition(TransporterState.Idle, TransporterMSG.ConfirmComplete, ClearModuleAlarm, TransporterState.Idle);
  255. Transition(TransporterState.Error, TransporterMSG.ConfirmComplete, NullFunc, TransporterState.ConfirmCompleting);
  256. Transition(TransporterState.ConfirmCompleting, FSM_MSG.TIMER, ConfirmComplete, TransporterState.ConfirmCompleting);
  257. Transition(TransporterState.ConfirmCompleting, TransporterMSG.Transfer, ConfirmTransfer, TransporterState.Idle);
  258. Transition(TransporterState.ConfirmCompleting, TransporterMSG.PickUpValidate, ConfirmPickupValidate, TransporterState.PickUpValidateComplete);
  259. Transition(TransporterState.ConfirmCompleting, TransporterMSG.PickUpMoveTo, ConfirmPickupMoveto, TransporterState.PickUpMoveToComplete);
  260. Transition(TransporterState.ConfirmCompleting, TransporterMSG.Place, ConfirmPlace, TransporterState.Idle);
  261. EnumLoop<TransporterState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  262. EnumLoop<TransporterMSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  263. }
  264. /// <summary>
  265. /// 初始化操作
  266. /// </summary>
  267. private void InitialOperation()
  268. {
  269. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Abort); });
  270. OP.Subscribe($"{Module}.ClearError", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.ResumeError); });
  271. OP.Subscribe($"{Module}.HomeAll", (cmd, args) => { return CheckToPostMessage<TransporterState,TransporterMSG>(eEvent.ERR_TRANSPORTER,Module.ToString(),(int)TransporterMSG.HomeAll); });
  272. OP.Subscribe($"{Module}.Gantry.GantryGotoSavedPosition", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.GantryGoToSavedPosition, "Gantry", args); });
  273. //OP.Subscribe($"{Module}.Elevator.GotoSavedPosition", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.GoToSavedPosition, "Elevator", args); });
  274. OP.Subscribe($"{Module}.PickUpFrom", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpFrom,args); });
  275. OP.Subscribe($"{Module}.MoveTo", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.MoveTo, args); });
  276. OP.Subscribe($"{Module}.PutDownTo", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Place, args); });
  277. OP.Subscribe($"{Module}.Park", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Park, args); });
  278. OP.Subscribe($"{Module}.ElevatorUp", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.ElevatorUp, args); });
  279. OP.Subscribe($"{Module}.ElevatorLow", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.ElevatorLow, args); });
  280. OP.Subscribe($"{Module}.SwitchOn", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.SwitchOn, args); });
  281. OP.Subscribe($"{Module}.SwitchOff", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.SwitchOff, args); });
  282. OP.Subscribe($"{Module}.Transfer", (cmd, args) => { return CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer, args); });
  283. }
  284. /// <summary>
  285. /// 初始化数据
  286. /// </summary>
  287. private void InitialDATA()
  288. {
  289. InitializeSvid();
  290. DATA.Subscribe($"{Module}.FsmState", () => ((TransporterState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  291. DATA.Subscribe($"{Module}.IsHomed", () => _isHomed, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  292. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  293. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  294. }
  295. /// <summary>
  296. /// 初始化SVID
  297. /// </summary>
  298. private void InitializeSvid()
  299. {
  300. DATA.Subscribe($"{Module}.State", () => ((TransporterState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  301. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  302. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  303. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  304. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  305. DATA.Subscribe($"{Module}.SequenceRecipe", () => WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  306. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  307. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  308. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  309. }
  310. /// <summary>
  311. /// 初始化Routine
  312. /// </summary>
  313. private void InitialRoutine()
  314. {
  315. _homeAllRoutine = new TransporterHomeRoutine(Module.ToString());
  316. _switchOnRoutine = new TransporterSwitchOnRoutine(Module.ToString());
  317. _switchOffRoutine=new TransporterSwitchOffRoutine(Module.ToString());
  318. _positionRoutine = new TransporterPositionRoutine(Module.ToString());
  319. _gantryPositionRoutine = new TransporterGantryPositionRoutine(Module.ToString());
  320. _pickUpFromRoutine = new TransporterPickUpFromRoutine(Module.ToString());
  321. _moveToRoutine=new TransporterMoveToRoutine(Module.ToString());
  322. _placeRoutine=new TransporterPickDownToRoutine(Module.ToString());
  323. _parkRoutine=new TransporterParkRoutine(Module.ToString());
  324. _elevatorUpRoutine=new TransporterElevatorUpRoutine(Module.ToString());
  325. _elevatorLowRoutine = new TransporterElevatorLowRoutine(Module.ToString());
  326. _transferRoutine =new TransporterTransferRoutine(Module.ToString());
  327. _pickUpMoveToRoutine = new TransporterPickUpMoveToRoutine(Module.ToString());
  328. _pickUpValidateRoutine=new TransporterPickUpValidateRoutine(Module.ToString());
  329. }
  330. /// <summary>
  331. /// 进入Error状态
  332. /// </summary>
  333. /// <param name="param"></param>
  334. /// <returns></returns>
  335. private bool EnterError(object[] param)
  336. {
  337. return true;
  338. }
  339. /// <summary>
  340. /// 恢复错误
  341. /// </summary>
  342. /// <param name="param"></param>
  343. /// <returns></returns>
  344. private bool ResumeError(object[] param)
  345. {
  346. if(_isHomed)
  347. {
  348. PostMsg(TransporterMSG.ReturnIdle);
  349. return false;
  350. }
  351. return true;
  352. }
  353. #region Abort
  354. private bool Abort(object parameter)
  355. {
  356. bool preHomed = IsHomed;
  357. _gantryAxis.StopPositionOperation();
  358. _elevatorAxis.StopPositionOperation();
  359. if (_currentRoutine != null)
  360. {
  361. _currentRoutine.Abort();
  362. _currentRoutine = null;
  363. }
  364. if (preHomed)
  365. {
  366. PostMsg(TransporterMSG.ReturnIdle);
  367. return false;
  368. }
  369. return true;
  370. }
  371. #endregion
  372. #region Switch On
  373. /// <summary>
  374. /// SwitchAll
  375. /// </summary>
  376. /// <param name="param"></param>
  377. /// <returns></returns>
  378. private bool SwitchOnAll(object[] param)
  379. {
  380. return _switchOnRoutine.Start() == RState.Running;
  381. }
  382. private bool SwitchOnTimeout(object[] param)
  383. {
  384. RState ret = _switchOnRoutine.Monitor();
  385. if (ret == RState.Failed || ret == RState.Timeout)
  386. {
  387. PostMsg(TransporterMSG.Error);
  388. return false;
  389. }
  390. bool result = ret == RState.End;
  391. if (result)
  392. {
  393. _isHomed = false;
  394. }
  395. return result;
  396. }
  397. #endregion
  398. #region Switch Off
  399. /// <summary>
  400. /// SwitchAll
  401. /// </summary>
  402. /// <param name="param"></param>
  403. /// <returns></returns>
  404. private bool SwitchOffAll(object[] param)
  405. {
  406. return _switchOffRoutine.Start() == RState.Running;
  407. }
  408. private bool SwitchOffTimeout(object[] param)
  409. {
  410. RState ret = _switchOffRoutine.Monitor();
  411. if (ret == RState.Failed || ret == RState.Timeout)
  412. {
  413. PostMsg(TransporterMSG.Error);
  414. return false;
  415. }
  416. bool result = ret == RState.End;
  417. if (result)
  418. {
  419. _isHomed = false;
  420. }
  421. return result;
  422. }
  423. #endregion
  424. #region Home
  425. /// <summary>
  426. /// HomeAll
  427. /// </summary>
  428. /// <param name="param"></param>
  429. /// <returns></returns>
  430. private bool HomeAll(object[] param)
  431. {
  432. _isHomed = false;
  433. bool result= _homeAllRoutine.Start() == RState.Running;
  434. if (result)
  435. {
  436. _currentRoutine = _homeAllRoutine;
  437. }
  438. return result;
  439. }
  440. /// <summary>
  441. /// Home超时
  442. /// </summary>
  443. /// <param name="param"></param>
  444. /// <returns></returns>
  445. private bool HomingTimeout(object[] param)
  446. {
  447. RState ret = _homeAllRoutine.Monitor();
  448. if (ret == RState.Failed || ret == RState.Timeout)
  449. {
  450. _currentRoutine = null;
  451. PostMsg(TransporterMSG.Error);
  452. _isHomed = false;
  453. return false;
  454. }
  455. bool result = ret == RState.End;
  456. if (result)
  457. {
  458. _currentRoutine = null;
  459. _isHomed = true;
  460. }
  461. return result;
  462. }
  463. #endregion
  464. #region GantrySafeMove
  465. /// <summary>
  466. /// Gantry安全移动
  467. /// </summary>
  468. /// <param name="param"></param>
  469. /// <returns></returns>
  470. private bool GantrySafeMove(object[] param)
  471. {
  472. double targetPosition=(double)param[0];
  473. return _gantryAxis.ProfilePositionOperation(targetPosition);
  474. }
  475. /// <summary>
  476. /// Gantry安全移动监控
  477. /// </summary>
  478. /// <param name="param"></param>
  479. /// <returns></returns>
  480. private bool GantrySafeMoveMonitor(object[] param)
  481. {
  482. if (_gantryAxis.Status == RState.End)
  483. {
  484. return true;
  485. }
  486. if (_gantryAxis.Status == RState.Failed || _gantryAxis.Status == RState.Timeout)
  487. {
  488. PostMsg(TransporterMSG.Error);
  489. return false;
  490. }
  491. return false;
  492. }
  493. #endregion
  494. #region Manual Gantry GoToPosition
  495. /// <summary>
  496. /// Manual Gantry Go to Position
  497. /// </summary>
  498. /// <param name="param"></param>
  499. /// <returns></returns>
  500. private bool ManualGantryGotoPosition(object[] param)
  501. {
  502. string axis = param[0].ToString();
  503. object[] objs = (object[])param[1];
  504. string position = objs[1].ToString();
  505. var result = CheckGotoPositionPreCondition(axis, position);
  506. if (result.result)
  507. {
  508. bool posresult = _gantryPositionRoutine.Start(position) == RState.Running;
  509. if (posresult)
  510. {
  511. _currentRoutine = _positionRoutine;
  512. }
  513. return posresult;
  514. }
  515. else
  516. {
  517. return false;
  518. }
  519. }
  520. /// <summary>
  521. /// Manual gantry Go to Position Time Out
  522. /// </summary>
  523. /// <param name="param"></param>
  524. /// <returns></returns>
  525. private bool ManualGantryGotoPositionTimeout(object[] param)
  526. {
  527. RState ret = _gantryPositionRoutine.Monitor();
  528. if (ret == RState.Failed || ret == RState.Timeout)
  529. {
  530. PostMsg(TransporterMSG.Error);
  531. _currentRoutine = null;
  532. return false;
  533. }
  534. bool result = ret == RState.End;
  535. if (result)
  536. {
  537. _currentRoutine = null;
  538. }
  539. return result;
  540. }
  541. /// <summary>
  542. /// 检验GotoPosition前置条件
  543. /// </summary>
  544. /// <param name="axis"></param>
  545. /// <param name="position"></param>
  546. /// <returns></returns>
  547. private (bool result, JetAxisBase axis) CheckGotoPositionPreCondition(string axis, string position)
  548. {
  549. switch (axis)
  550. {
  551. case "Gantry":
  552. return (_gantryAxis.CheckGotoPosition(position), _gantryAxis);
  553. case "Elevator":
  554. return (_elevatorAxis.CheckGotoPosition(position), _elevatorAxis);
  555. default:
  556. return (false, null);
  557. }
  558. }
  559. #endregion
  560. #region Pick Up
  561. /// <summary>
  562. /// Pick Up
  563. /// </summary>
  564. /// <param name="param"></param>
  565. /// <returns></returns>
  566. private bool PickUp(object[] param)
  567. {
  568. bool result= _pickUpFromRoutine.Start(param[0]) == RState.Running;
  569. if(result)
  570. {
  571. _currentRoutine = _pickUpFromRoutine;
  572. }
  573. return result;
  574. }
  575. /// <summary>
  576. /// PickUpFrom超时
  577. /// </summary>
  578. /// <param name="param"></param>
  579. /// <returns></returns>
  580. private bool PickUpFromTimeout(object[] param)
  581. {
  582. RState ret = _pickUpFromRoutine.Monitor();
  583. if (ret == RState.Failed || ret == RState.Timeout)
  584. {
  585. _currentRoutine = null;
  586. PostMsg(TransporterMSG.Error);
  587. return false;
  588. }
  589. bool result= ret == RState.End;
  590. if(result)
  591. {
  592. _currentRoutine = null;
  593. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.PickUping.ToString());
  594. }
  595. return result;
  596. }
  597. #endregion
  598. #region Move To
  599. /// <summary>
  600. /// Move To
  601. /// </summary>
  602. /// <param name="param"></param>
  603. /// <returns></returns>
  604. private bool MoveTo(object[] param)
  605. {
  606. if (!CheckOtherEntityStatus(param[0].ToString()))
  607. {
  608. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis");
  609. return false;
  610. }
  611. bool result= _moveToRoutine.Start(param[0]) == RState.Running;
  612. if(result)
  613. {
  614. _targetCell = param[0].ToString();
  615. _sourceCell = "";
  616. _currentRoutine = _moveToRoutine;
  617. }
  618. return result;
  619. }
  620. /// <summary>
  621. /// MoveTo超时
  622. /// </summary>
  623. /// <param name="param"></param>
  624. /// <returns></returns>
  625. private bool MoveToTimeout(object[] param)
  626. {
  627. RState ret = _moveToRoutine.Monitor();
  628. if (ret == RState.Failed || ret == RState.Timeout)
  629. {
  630. _targetCell = "";
  631. _currentRoutine = null;
  632. PostMsg(TransporterMSG.Error);
  633. return false;
  634. }
  635. bool result = ret == RState.End;
  636. if(result)
  637. {
  638. _targetCell = "";
  639. _currentRoutine = null;
  640. if (!string.IsNullOrEmpty(_sourceCell))
  641. {
  642. _sourceCell = "";
  643. }
  644. }
  645. return result;
  646. }
  647. #endregion
  648. #region Place
  649. /// <summary>
  650. /// Place
  651. /// </summary>
  652. /// <param name="param"></param>
  653. /// <returns></returns>
  654. private bool Place(object[] param)
  655. {
  656. _targetCell = "";
  657. bool result = _placeRoutine.Start(param[0]) == RState.Running;
  658. if(result)
  659. {
  660. _currentRoutine = _placeRoutine;
  661. _targetCell = param[0].ToString();
  662. }
  663. return result;
  664. }
  665. /// <summary>
  666. /// Retry Place
  667. /// </summary>
  668. /// <param name="param"></param>
  669. /// <returns></returns>
  670. private bool RetryPlace(object[] param)
  671. {
  672. int stepIndex = (int)param[0];
  673. bool result = _placeRoutine.Retry(stepIndex) == RState.Running;
  674. if (result)
  675. {
  676. _currentRoutine = _placeRoutine;
  677. }
  678. return result;
  679. }
  680. /// <summary>
  681. /// Place超时
  682. /// </summary>
  683. /// <param name="param"></param>
  684. /// <returns></returns>
  685. private bool PlaceTimeout(object[] param)
  686. {
  687. RState ret = _placeRoutine.Monitor();
  688. if (ret == RState.Failed || ret == RState.Timeout)
  689. {
  690. _currentRoutine = null;
  691. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  692. {
  693. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.Place,
  694. _placeRoutine.ErrorMsg, _placeRoutine.ErrorStep, (int)AlarmType.Error);
  695. AlarmListManager.Instance.AddAlarm(alarmList);
  696. }
  697. PostMsg(TransporterMSG.Error);
  698. return false;
  699. }
  700. bool result = ret == RState.End;
  701. if (result)
  702. {
  703. _currentRoutine = null;
  704. _targetCell = "";
  705. if (!string.IsNullOrEmpty(_sourceCell))
  706. {
  707. _sourceCell = "";
  708. }
  709. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.Placing.ToString());
  710. }
  711. return result;
  712. }
  713. /// <summary>
  714. /// 确认Place是否完成
  715. /// </summary>
  716. /// <param name="param"></param>
  717. /// <returns></returns>
  718. private bool ConfirmPlace(object[] param)
  719. {
  720. int stepIdex = (int)param[0];
  721. bool result = _placeRoutine.CheckCompleteCondition(stepIdex);
  722. if (!result)
  723. {
  724. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  725. {
  726. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.Place,
  727. _placeRoutine.ErrorMsg, _placeRoutine.ErrorStep, (int)AlarmType.Error);
  728. AlarmListManager.Instance.AddAlarm(alarmList);
  729. }
  730. PostMsg(TransporterMSG.Error);
  731. }
  732. else
  733. {
  734. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  735. {
  736. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.Placing.ToString());
  737. }
  738. }
  739. return result;
  740. }
  741. #endregion
  742. #region Park
  743. /// <summary>
  744. /// Park
  745. /// </summary>
  746. /// <param name="param"></param>
  747. /// <returns></returns>
  748. private bool Park(object[] param)
  749. {
  750. bool result = _parkRoutine.Start() == RState.Running;
  751. if (result)
  752. {
  753. _currentRoutine = _parkRoutine;
  754. }
  755. return result;
  756. }
  757. /// <summary>
  758. /// Park超时
  759. /// </summary>
  760. /// <param name="param"></param>
  761. /// <returns></returns>
  762. private bool ParkTimeout(object[] param)
  763. {
  764. RState ret = _parkRoutine.Monitor();
  765. if (ret == RState.Failed || ret == RState.Timeout)
  766. {
  767. _currentRoutine = null;
  768. PostMsg(TransporterMSG.Error);
  769. return false;
  770. }
  771. bool result = ret == RState.End;
  772. if (result)
  773. {
  774. _currentRoutine = null;
  775. }
  776. return result;
  777. }
  778. #endregion
  779. #region Elevator Up
  780. /// <summary>
  781. /// Elevator Up
  782. /// </summary>
  783. /// <param name="param"></param>
  784. /// <returns></returns>
  785. private bool ElevatorUp(object[] param)
  786. {
  787. bool result = _elevatorUpRoutine.Start() == RState.Running;
  788. if (result)
  789. {
  790. _currentRoutine = _elevatorUpRoutine;
  791. }
  792. return result;
  793. }
  794. /// <summary>
  795. /// Elevator Up超时
  796. /// </summary>
  797. /// <param name="param"></param>
  798. /// <returns></returns>
  799. private bool ElevatorUpTimeout(object[] param)
  800. {
  801. RState ret = _elevatorUpRoutine.Monitor();
  802. if (ret == RState.Failed || ret == RState.Timeout)
  803. {
  804. _currentRoutine = null;
  805. PostMsg(TransporterMSG.Error);
  806. return false;
  807. }
  808. bool result = ret == RState.End;
  809. if (result)
  810. {
  811. _currentRoutine = null;
  812. }
  813. return result;
  814. }
  815. #endregion
  816. #region Elevator Low
  817. /// <summary>
  818. /// Elevator Low
  819. /// </summary>
  820. /// <param name="param"></param>
  821. /// <returns></returns>
  822. private bool ElevatorLow(object[] param)
  823. {
  824. bool result= _elevatorLowRoutine.Start() == RState.Running;
  825. if (result)
  826. {
  827. _currentRoutine = _elevatorLowRoutine;
  828. }
  829. return result;
  830. }
  831. /// <summary>
  832. /// Elevator Low超时
  833. /// </summary>
  834. /// <param name="param"></param>
  835. /// <returns></returns>
  836. private bool ElevatorLowTimeout(object[] param)
  837. {
  838. RState ret = _elevatorLowRoutine.Monitor();
  839. if (ret == RState.Failed || ret == RState.Timeout)
  840. {
  841. _currentRoutine = null;
  842. PostMsg(TransporterMSG.Error);
  843. return false;
  844. }
  845. bool result = ret == RState.End;
  846. if (result)
  847. {
  848. _currentRoutine = null;
  849. }
  850. return result;
  851. }
  852. #endregion
  853. #region Transfer
  854. /// <summary>
  855. /// Transfer
  856. /// </summary>
  857. /// <param name="param"></param>
  858. /// <returns></returns>
  859. private bool Transfer(object[] param)
  860. {
  861. if (!CheckOtherEntityStatus(param[0].ToString()))
  862. {
  863. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {param[0]}");
  864. return false;
  865. }
  866. if (!CheckOtherEntityStatus(param[1].ToString()))
  867. {
  868. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis to {param[1]}");
  869. return false;
  870. }
  871. bool result = _transferRoutine.Start(param) == RState.Running;
  872. if (result)
  873. {
  874. _sourceCell=param[0].ToString();
  875. _targetCell = param[1].ToString();
  876. _currentRoutine = _transferRoutine;
  877. }
  878. return result;
  879. }
  880. /// <summary>
  881. /// Retry Transfer
  882. /// </summary>
  883. /// <param name="param"></param>
  884. /// <returns></returns>
  885. private bool RetryTransfer(object[] param)
  886. {
  887. if (!CheckOtherEntityStatus(_sourceCell))
  888. {
  889. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {_sourceCell}");
  890. return false;
  891. }
  892. if (!CheckOtherEntityStatus(_targetCell))
  893. {
  894. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis to {_targetCell}");
  895. return false;
  896. }
  897. int stepIndex = (int)param[0];
  898. bool result = _transferRoutine.Retry(stepIndex) == RState.Running;
  899. if (result)
  900. {
  901. _currentRoutine = _transferRoutine;
  902. }
  903. return result;
  904. }
  905. /// <summary>
  906. /// Transfer超时
  907. /// </summary>
  908. /// <param name="param"></param>
  909. /// <returns></returns>
  910. private bool TransferTimeout(object[] param)
  911. {
  912. RState ret = _transferRoutine.Monitor();
  913. if (ret == RState.Failed || ret == RState.Timeout)
  914. {
  915. _targetCell = "";
  916. _sourceCell = "";
  917. _currentRoutine = null;
  918. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  919. {
  920. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.Transfer,
  921. _transferRoutine.ErrorMsg, _transferRoutine.ErrorStep, (int)AlarmType.Error);
  922. AlarmListManager.Instance.AddAlarm(alarmList);
  923. }
  924. PostMsg(TransporterMSG.Error);
  925. return false;
  926. }
  927. bool result = ret == RState.End;
  928. if (result)
  929. {
  930. _targetCell = "";
  931. _sourceCell = "";
  932. _currentRoutine = null;
  933. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.Transfering.ToString());
  934. }
  935. return result;
  936. }
  937. /// <summary>
  938. /// 确认Transfer是否完成
  939. /// </summary>
  940. /// <param name="param"></param>
  941. /// <returns></returns>
  942. private bool ConfirmTransfer(object[] param)
  943. {
  944. int stepIdex = (int)param[0];
  945. bool result = _transferRoutine.CheckCompleteCondition(stepIdex);
  946. if (!result)
  947. {
  948. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  949. {
  950. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.Transfer,
  951. _transferRoutine.ErrorMsg, _transferRoutine.ErrorStep, (int)AlarmType.Error);
  952. AlarmListManager.Instance.AddAlarm(alarmList);
  953. }
  954. PostMsg(TransporterMSG.Error);
  955. }
  956. else
  957. {
  958. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  959. {
  960. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.Transfering.ToString());
  961. }
  962. }
  963. return result;
  964. }
  965. /// <summary>
  966. /// 检验另一个Axis状态
  967. /// </summary>
  968. /// <returns></returns>
  969. public bool CheckOtherEntityStatus(string targetCell)
  970. {
  971. bool positive = false;
  972. TransporterEntity otherEntity=null;
  973. string otherModule = "";
  974. if (Module == ModuleName.Transporter2)
  975. {
  976. otherModule = ModuleName.Transporter1.ToString();
  977. otherEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter1.ToString());
  978. positive = true;
  979. }
  980. else
  981. {
  982. otherModule = ModuleName.Transporter2.ToString();
  983. otherEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
  984. }
  985. if(otherEntity==null)
  986. {
  987. return true;
  988. }
  989. if (otherEntity.IsIdle)
  990. {
  991. return true;
  992. }
  993. if (otherEntity.IsError)
  994. {
  995. return false;
  996. }
  997. if(otherEntity.State==(int)TransporterState.Transfering||otherEntity.State==(int)TransporterState.PickUpMoveToing
  998. ||otherEntity.State==(int)TransporterState.MovingTo||otherEntity.State==(int)TransporterState.PickUpValidating
  999. ||otherEntity.State==(int)TransporterState.PickUpValidateComplete||otherEntity.State==(int)TransporterState.ValidateMoveTo)
  1000. {
  1001. bool conflict= CheckModuleWithOtherModuleConflict(otherEntity,otherModule,positive,targetCell);
  1002. if(conflict)
  1003. {
  1004. return false;
  1005. }
  1006. else
  1007. {
  1008. return true;
  1009. }
  1010. }
  1011. else
  1012. {
  1013. return true;
  1014. }
  1015. }
  1016. /// <summary>
  1017. /// 分析目标cell的位置
  1018. /// </summary>
  1019. /// <param name="otherModule"></param>
  1020. /// <param name="targetCell"></param>
  1021. /// <returns></returns>
  1022. private (bool result,double targetPosition) AnalyseTargetCellPosition(string otherModule,string targetCell)
  1023. {
  1024. ProcessLayoutCellItem _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(targetCell);
  1025. string stationName = targetCell;
  1026. if (_cellItem != null)
  1027. {
  1028. if (targetCell.ToLower() != "loader" && targetCell.ToLower() != "park")
  1029. {
  1030. stationName = $"Cell{_cellItem.CellId}";
  1031. }
  1032. }
  1033. else
  1034. {
  1035. LOG.WriteLog(eEvent.ERR_TRANSPORTER, Module.ToString(), $"{targetCell} not in layout");
  1036. return (false,0);
  1037. }
  1038. JetAxisBase otherGantryAxis = DEVICE.GetDevice<JetAxisBase>($"{otherModule}.Gantry");
  1039. var result = otherGantryAxis.GetPositionByStation(stationName);
  1040. if(result.success)
  1041. {
  1042. return (true,result.position);
  1043. }
  1044. return (false,0);
  1045. }
  1046. /// <summary>
  1047. /// 检验当前模块与另一个模块是否存在冲突
  1048. /// </summary>
  1049. /// <returns></returns>
  1050. private bool CheckModuleWithOtherModuleConflict(TransporterEntity otherEntity,string otherModule,bool positive,string targetCell)
  1051. {
  1052. int transporterMinimumDistance = SC.GetValue<int>("Transporter.TransporterMinimumDistance");
  1053. double motorPosition = _gantryAxis.MotionData.MotorPosition;
  1054. if(targetCell==ModuleName.Loader1.ToString())
  1055. {
  1056. targetCell = "Loader";
  1057. }
  1058. var result = AnalyseTargetCellPosition(Module.ToString(), targetCell);
  1059. if(!result.result)
  1060. {
  1061. return false;
  1062. }
  1063. double targetPosition=result.targetPosition;
  1064. JetAxisBase otherGantryAxis = DEVICE.GetDevice<JetAxisBase>($"{otherModule}.Gantry");
  1065. if(otherGantryAxis==null)
  1066. {
  1067. return false;
  1068. }
  1069. double otherPosition = otherGantryAxis.MotionData.MotorPosition;
  1070. if (!string.IsNullOrEmpty(otherEntity.TargetCell))
  1071. {
  1072. return CheckOtherModuleCellConflict(otherModule, otherEntity.TargetCell,otherPosition, positive, targetPosition);
  1073. }
  1074. if(!string.IsNullOrEmpty(otherEntity.SourceCell))
  1075. {
  1076. bool conflict= CheckOtherModuleCellConflict(otherModule, otherEntity.SourceCell,otherPosition, positive, targetPosition);
  1077. if (conflict)
  1078. {
  1079. //另一个Entity已经到达了目标位置
  1080. if (!string.IsNullOrEmpty(otherEntity.TargetCell)&&CheckOtherEntityAlreadyInTargetCell(otherEntity, otherEntity.TargetCell))
  1081. {
  1082. return false;
  1083. }
  1084. }
  1085. return conflict;
  1086. }
  1087. else
  1088. {
  1089. return false;
  1090. }
  1091. }
  1092. /// <summary>
  1093. /// 检验其他TransporterEntity已经到达目标cell
  1094. /// </summary>
  1095. /// <param name="otherEntity"></param>
  1096. /// <param name="targetCell"></param>
  1097. /// <returns></returns>
  1098. private bool CheckOtherEntityAlreadyInTargetCell(TransporterEntity otherEntity,string targetCell)
  1099. {
  1100. //另一个Transporter已经取走了WaferHolder,同时gantry已经到达了目标cell
  1101. if (otherEntity.WaferHolderInfo != null)
  1102. {
  1103. JetAxisBase jetAxisBase = DEVICE.GetDevice<JetAxisBase>($"{otherEntity.Module}.Gantry");
  1104. if (jetAxisBase != null && jetAxisBase.CheckPositionIsInStation(jetAxisBase.MotionData.MotorPosition, targetCell))
  1105. {
  1106. return true;
  1107. }
  1108. }
  1109. return false;
  1110. }
  1111. /// <summary>
  1112. /// 检验另一个模块Cell是否存在冲突
  1113. /// </summary>
  1114. /// <param name="otherModule"></param>
  1115. /// <param name="cell"></param>
  1116. /// <param name="positive"></param>
  1117. /// <param name="motorPosition"></param>
  1118. /// <param name="targetPosition"></param>
  1119. /// <returns></returns>
  1120. private bool CheckOtherModuleCellConflict(string otherModule, string cell,double otherPosition, bool positive,double targetPosition)
  1121. {
  1122. int transporterMinimumDistance = SC.GetValue<int>("Transporter.TransporterMinimumDistance");
  1123. var result = AnalyseTargetCellPosition(otherModule, cell);
  1124. if (!result.result)
  1125. {
  1126. return false;
  1127. }
  1128. else
  1129. {
  1130. if (positive)
  1131. {
  1132. // if (result.targetPosition - transporterMinimumDistance <= motorPosition)
  1133. // {
  1134. // return true;
  1135. // }
  1136. if (result.targetPosition - transporterMinimumDistance <= targetPosition)
  1137. {
  1138. return true;
  1139. }
  1140. if(otherPosition - transporterMinimumDistance <= targetPosition)
  1141. {
  1142. return true;
  1143. }
  1144. return false;
  1145. }
  1146. else
  1147. {
  1148. //if (result.targetPosition + transporterMinimumDistance >= motorPosition)
  1149. //{
  1150. // return true;
  1151. //}
  1152. if (result.targetPosition + transporterMinimumDistance >= targetPosition)
  1153. {
  1154. return true;
  1155. }
  1156. if(otherPosition + transporterMinimumDistance >= targetPosition)
  1157. {
  1158. return true;
  1159. }
  1160. return false;
  1161. }
  1162. }
  1163. }
  1164. #endregion
  1165. #region PickUpMoveTo
  1166. /// <summary>
  1167. /// PickUpMoveTo
  1168. /// </summary>
  1169. /// <param name="param"></param>
  1170. /// <returns></returns>
  1171. private bool PickUpMoveTo(object[] param)
  1172. {
  1173. if (!CheckOtherEntityStatus(param[0].ToString()))
  1174. {
  1175. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {param[0]}");
  1176. return false;
  1177. }
  1178. if (!CheckOtherEntityStatus(param[1].ToString()))
  1179. {
  1180. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis to {param[1]}");
  1181. return false;
  1182. }
  1183. bool result = _pickUpMoveToRoutine.Start(param) == RState.Running;
  1184. if (result)
  1185. {
  1186. _sourceCell = param[0].ToString();
  1187. _targetCell = param[1].ToString();
  1188. _currentRoutine = _pickUpMoveToRoutine;
  1189. }
  1190. return result;
  1191. }
  1192. /// <summary>
  1193. /// Retry PickUpMoveTo
  1194. /// </summary>
  1195. /// <param name="param"></param>
  1196. /// <returns></returns>
  1197. private bool RetryPickUpMoveTo(object[] param)
  1198. {
  1199. if (!CheckOtherEntityStatus(_sourceCell))
  1200. {
  1201. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {_sourceCell}");
  1202. return false;
  1203. }
  1204. if (!CheckOtherEntityStatus(_targetCell))
  1205. {
  1206. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis to {_targetCell}");
  1207. return false;
  1208. }
  1209. int stepIndex = (int)param[0];
  1210. bool result = _pickUpMoveToRoutine.Retry(stepIndex) == RState.Running;
  1211. if (result)
  1212. {
  1213. _currentRoutine = _pickUpMoveToRoutine;
  1214. }
  1215. return result;
  1216. }
  1217. /// <summary>
  1218. /// PickUpMoveTo超时
  1219. /// </summary>
  1220. /// <param name="param"></param>
  1221. /// <returns></returns>
  1222. private bool PickUpMoveToTimeout(object[] param)
  1223. {
  1224. RState ret = _pickUpMoveToRoutine.Monitor();
  1225. if (ret == RState.Failed || ret == RState.Timeout)
  1226. {
  1227. _targetCell = "";
  1228. _sourceCell = "";
  1229. _currentRoutine = null;
  1230. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1231. {
  1232. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.PickUpMoveTo,
  1233. _pickUpMoveToRoutine.ErrorMsg, _pickUpMoveToRoutine.ErrorStep, (int)AlarmType.Error);
  1234. AlarmListManager.Instance.AddAlarm(alarmList);
  1235. }
  1236. PostMsg(TransporterMSG.Error);
  1237. return false;
  1238. }
  1239. bool result = ret == RState.End;
  1240. if (result)
  1241. {
  1242. _targetCell = "";
  1243. _sourceCell = "";
  1244. _currentRoutine = null;
  1245. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.PickUpMoveToing.ToString());
  1246. }
  1247. return result;
  1248. }
  1249. /// <summary>
  1250. /// 确认PickupMoveto是否完成
  1251. /// </summary>
  1252. /// <param name="param"></param>
  1253. /// <returns></returns>
  1254. private bool ConfirmPickupMoveto(object[] param)
  1255. {
  1256. int stepIdex = (int)param[0];
  1257. bool result = _pickUpMoveToRoutine.CheckCompleteCondition(stepIdex);
  1258. if (!result)
  1259. {
  1260. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1261. {
  1262. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.PickUpMoveTo,
  1263. _pickUpMoveToRoutine.ErrorMsg, _pickUpMoveToRoutine.ErrorStep, (int)AlarmType.Error);
  1264. AlarmListManager.Instance.AddAlarm(alarmList);
  1265. }
  1266. PostMsg(TransporterMSG.Error);
  1267. }
  1268. else
  1269. {
  1270. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1271. {
  1272. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.PickUpMoveToing.ToString());
  1273. }
  1274. }
  1275. return result;
  1276. }
  1277. #endregion
  1278. #region PickUpValidate
  1279. /// <summary>
  1280. /// PickUpValidate
  1281. /// </summary>
  1282. /// <param name="param"></param>
  1283. /// <returns></returns>
  1284. private bool PickUpValidate(object[] param)
  1285. {
  1286. if (!CheckOtherEntityStatus(param[0].ToString()))
  1287. {
  1288. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {param[0]}");
  1289. return false;
  1290. }
  1291. bool result = _pickUpValidateRoutine.Start(param) == RState.Running;
  1292. if (result)
  1293. {
  1294. _sourceCell = param[0].ToString();
  1295. _currentRoutine = _pickUpValidateRoutine;
  1296. }
  1297. return result;
  1298. }
  1299. /// <summary>
  1300. /// Retry PickUpValidate
  1301. /// </summary>
  1302. /// <param name="param"></param>
  1303. /// <returns></returns>
  1304. private bool RetryPickUpValidate(object[] param)
  1305. {
  1306. if (!CheckOtherEntityStatus(_sourceCell))
  1307. {
  1308. LOG.WriteLog(eEvent.WARN_TRANSPORTER, Module.ToString(), $"Module Axis meets conflict of other Axis from {_sourceCell}");
  1309. return false;
  1310. }
  1311. int stepIndex = (int)param[0];
  1312. bool result = _pickUpValidateRoutine.Retry(stepIndex) == RState.Running;
  1313. if (result)
  1314. {
  1315. _currentRoutine = _pickUpValidateRoutine;
  1316. }
  1317. return result;
  1318. }
  1319. /// <summary>
  1320. /// PickUpValidate超时
  1321. /// </summary>
  1322. /// <param name="param"></param>
  1323. /// <returns></returns>
  1324. private bool PickUpValidateTimeout(object[] param)
  1325. {
  1326. RState ret = _pickUpValidateRoutine.Monitor();
  1327. if (ret == RState.Failed || ret == RState.Timeout)
  1328. {
  1329. _sourceCell = "";
  1330. _currentRoutine = null;
  1331. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1332. {
  1333. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.PickUpValidate,
  1334. _pickUpValidateRoutine.ErrorMsg, _pickUpValidateRoutine.ErrorStep, (int)AlarmType.Error);
  1335. AlarmListManager.Instance.AddAlarm(alarmList);
  1336. }
  1337. PostMsg(TransporterMSG.Error);
  1338. return false;
  1339. }
  1340. bool result = ret == RState.End;
  1341. if (result)
  1342. {
  1343. _currentRoutine = null;
  1344. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.PickUpValidating.ToString());
  1345. //Routine完成,但transporter却没有WaferHolder,则表示此次取WH失败,transporter返回Idle,便于调度重新选择下一个WaferHolder
  1346. if (WaferHolderInfo == null)
  1347. {
  1348. PostMsg(TransporterMSG.ReturnIdle);
  1349. return false;
  1350. }
  1351. }
  1352. return result;
  1353. }
  1354. /// <summary>
  1355. /// 确认PickupValidate是否完成
  1356. /// </summary>
  1357. /// <param name="param"></param>
  1358. /// <returns></returns>
  1359. private bool ConfirmPickupValidate(object[] param)
  1360. {
  1361. int stepIdex = (int)param[0];
  1362. bool result = _pickUpValidateRoutine.CheckCompleteCondition(stepIdex);
  1363. if (!result)
  1364. {
  1365. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1366. {
  1367. AlarmList alarmList = new AlarmList(Module.ToString(), ((TransporterState)fsm.State).ToString(), (int)TransporterMSG.PickUpValidate,
  1368. _pickUpValidateRoutine.ErrorMsg, _pickUpValidateRoutine.ErrorStep, (int)AlarmType.Error);
  1369. AlarmListManager.Instance.AddAlarm(alarmList);
  1370. }
  1371. PostMsg(TransporterMSG.Error);
  1372. }
  1373. else
  1374. {
  1375. if (Singleton<RouteManager>.Instance.IsAutoRunning)
  1376. {
  1377. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), TransporterState.PickUpValidating.ToString());
  1378. }
  1379. }
  1380. return result;
  1381. }
  1382. #endregion
  1383. #region TransporterRetry
  1384. /// <summary>
  1385. /// Retry
  1386. /// </summary>
  1387. /// <param name="param"></param>
  1388. /// <returns></returns>
  1389. private bool TransporterRetry(object[] param)
  1390. {
  1391. AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
  1392. if (alarmList != null)
  1393. {
  1394. CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), alarmList.ModuleCmd,
  1395. alarmList.ModuleStep);
  1396. }
  1397. return false;
  1398. }
  1399. #endregion
  1400. #region ConfirmComplete
  1401. /// <summary>
  1402. /// 确认是否完成
  1403. /// </summary>
  1404. /// <param name="param"></param>
  1405. /// <returns></returns>
  1406. private bool ConfirmComplete(object[] param)
  1407. {
  1408. AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
  1409. if (alarmList != null)
  1410. {
  1411. if (alarmList.ModuleState == TransporterState.Transfering.ToString())
  1412. {
  1413. CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer, alarmList.ModuleStep);
  1414. }
  1415. else if (alarmList.ModuleState == TransporterState.PickUpMoveToing.ToString())
  1416. {
  1417. CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpMoveTo, alarmList.ModuleStep);
  1418. }
  1419. else if (alarmList.ModuleState == TransporterState.Placing.ToString())
  1420. {
  1421. CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Place, alarmList.ModuleStep);
  1422. }
  1423. else
  1424. {
  1425. PostMsg(TransporterMSG.Error);
  1426. }
  1427. }
  1428. return false;
  1429. }
  1430. /// <summary>
  1431. /// 清除报警
  1432. /// </summary>
  1433. /// <param name="param"></param>
  1434. /// <returns></returns>
  1435. private bool ClearModuleAlarm(object[] param)
  1436. {
  1437. AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
  1438. if (alarmList != null)
  1439. {
  1440. AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), "");
  1441. }
  1442. return true;
  1443. }
  1444. #endregion
  1445. #region switchWafer
  1446. /// <summary>
  1447. /// 交换Wafer
  1448. /// </summary>
  1449. /// <param name="from"></param>
  1450. /// <param name="to"></param>
  1451. public void SwitchWafer(string from,string to)
  1452. {
  1453. ModuleName fromModuleName = ModuleName.Unknown;
  1454. if (from == "Loader")
  1455. {
  1456. fromModuleName = ModuleName.Loader1;
  1457. }
  1458. else
  1459. {
  1460. fromModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), from);
  1461. }
  1462. ModuleName toModuleName = ModuleName.Unknown;
  1463. if (to == "Loader")
  1464. {
  1465. toModuleName = ModuleName.Loader1;
  1466. }
  1467. else
  1468. {
  1469. toModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), to);
  1470. }
  1471. bool reverse = false;
  1472. JetAxisBase loaderRotation = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
  1473. if (fromModuleName == ModuleName.Loader1)
  1474. {
  1475. if (loaderRotation.CheckPositionInStationIgnoreWaferSize(loaderRotation.MotionData.MotorPosition, TRNPB))
  1476. {
  1477. reverse = true;
  1478. }
  1479. }
  1480. if (toModuleName == ModuleName.Loader1)
  1481. {
  1482. if (loaderRotation.CheckPositionInStationIgnoreWaferSize(loaderRotation.MotionData.MotorPosition, TRNPB))
  1483. {
  1484. reverse = true;
  1485. }
  1486. }
  1487. if (WaferManager.Instance.CheckHasWafer(fromModuleName, 0))
  1488. {
  1489. if (!reverse)
  1490. {
  1491. WaferManager.Instance.WaferMoved(fromModuleName, 0, toModuleName, 0);
  1492. }
  1493. else
  1494. {
  1495. WaferInfo waferInfo = WaferManager.Instance.GetWafer(fromModuleName, 0);
  1496. WaferHolderInfo info = WaferHolderManager.Instance.GetWaferHolder(to);
  1497. info.WaferBId = waferInfo.WaferID;
  1498. info.WaferBType =(int)waferInfo.WaferType;
  1499. WaferManager.Instance.WaferMoved(fromModuleName, 0, toModuleName, 1);
  1500. }
  1501. }
  1502. if (WaferManager.Instance.CheckHasWafer(fromModuleName, 1))
  1503. {
  1504. if (!reverse)
  1505. {
  1506. WaferManager.Instance.WaferMoved(fromModuleName, 1, toModuleName, 1);
  1507. }
  1508. else
  1509. {
  1510. WaferInfo waferInfo = WaferManager.Instance.GetWafer(fromModuleName, 1);
  1511. WaferHolderInfo info = WaferHolderManager.Instance.GetWaferHolder(to);
  1512. info.WaferAId = waferInfo.WaferID;
  1513. info.WaferAType = (int)waferInfo.WaferType;
  1514. WaferManager.Instance.WaferMoved(fromModuleName, 1, toModuleName, 0);
  1515. }
  1516. }
  1517. MaterialTrackerManager.Instance.UpdateModuleMaterial(to);
  1518. }
  1519. #endregion
  1520. public bool Check(int msg, out string reason, params object[] args)
  1521. {
  1522. reason = "";
  1523. return false;
  1524. }
  1525. public bool CheckAcked(int msg)
  1526. {
  1527. return false;
  1528. }
  1529. public int Invoke(string function, params object[] args)
  1530. {
  1531. switch (function)
  1532. {
  1533. case "HomeAll":
  1534. if(IsIdle)
  1535. {
  1536. return (int)FSM_MSG.NONE;
  1537. }
  1538. if (CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.HomeAll))
  1539. {
  1540. return (int)FSM_MSG.NONE;
  1541. }
  1542. else
  1543. {
  1544. return (int)FSM_MSG.ALARM;
  1545. }
  1546. case "Abort":
  1547. CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Abort);
  1548. return (int)FSM_MSG.NONE;
  1549. case "Retry":
  1550. if (CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Retry, args))
  1551. {
  1552. return (int)TransporterMSG.Retry;
  1553. }
  1554. else
  1555. {
  1556. return (int)FSM_MSG.NONE;
  1557. }
  1558. case "ConfirmComplete":
  1559. if (CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.ERR_TRANSPORTER, Module.ToString(), (int)TransporterMSG.ConfirmComplete, args))
  1560. {
  1561. return (int)TransporterMSG.ConfirmComplete;
  1562. }
  1563. else
  1564. {
  1565. return (int)FSM_MSG.NONE;
  1566. }
  1567. }
  1568. return (int)FSM_MSG.NONE;
  1569. }
  1570. }
  1571. public enum TransporterMSG
  1572. {
  1573. HomeAll, // 0
  1574. SwitchOn,
  1575. SwitchOff,
  1576. Error,
  1577. ResumeError,
  1578. ReturnIdle,
  1579. Abort,
  1580. GantryGoToSavedPosition,
  1581. GoToSavedPosition,
  1582. PickUpFrom,
  1583. MoveTo,
  1584. Place,
  1585. Park,
  1586. ElevatorUp,
  1587. ElevatorLow,
  1588. Transfer,
  1589. PickUpMoveTo,
  1590. PickUpValidate,
  1591. GantrySafeMove,
  1592. Retry,
  1593. ConfirmComplete,
  1594. Flip
  1595. }
  1596. }