SchedulerProcessTransporter.cs 29 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.SCCore;
  5. using Aitex.Core.Util;
  6. using CyberX8_Core;
  7. using CyberX8_RT.Devices.AXIS;
  8. using CyberX8_RT.Modules;
  9. using CyberX8_RT.Modules.Dryer;
  10. using CyberX8_RT.Modules.Loader;
  11. using CyberX8_RT.Modules.Metal;
  12. using CyberX8_RT.Modules.Prewet;
  13. using CyberX8_RT.Modules.Rinse;
  14. using CyberX8_RT.Modules.Transporter;
  15. using CyberX8_RT.Schedulers.EfemRobot;
  16. using MECF.Framework.Common.CommonData;
  17. using MECF.Framework.Common.Equipment;
  18. using MECF.Framework.Common.RecipeCenter;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.WaferHolder;
  21. using MECF.Framework.RT.Core.Equipments;
  22. using System;
  23. using System.Collections.Generic;
  24. using System.Linq;
  25. using System.Text;
  26. using System.Threading.Tasks;
  27. using System.Windows.Markup;
  28. namespace CyberX8_RT.Schedulers.Transporter
  29. {
  30. public class SchedulerProcessTransporter : SchedulerModule
  31. {
  32. #region 内部变量
  33. /// <summary>
  34. /// Process Transporter
  35. /// </summary>
  36. private TransporterEntity _processTransporterEntity;
  37. /// <summary>
  38. /// Loader transporterEntity
  39. /// </summary>
  40. private TransporterEntity _loaderTransporterEntity;
  41. /// <summary>
  42. /// 调度发送消息
  43. /// </summary>
  44. private SchedulerPostMsg _schedulerPostMsg=new SchedulerPostMsg();
  45. /// <summary>
  46. /// 推送消息结果
  47. /// </summary>
  48. private bool _postMsgResult = false;
  49. #endregion
  50. #region 属性
  51. /// <summary>
  52. /// 是否空闲
  53. /// </summary>
  54. public override bool IsIdle
  55. {
  56. get { return _state == RState.End; }
  57. }
  58. /// <summary>
  59. /// 是否错误
  60. /// </summary>
  61. public override bool IsError
  62. {
  63. get { return _state == RState.Failed || _state == RState.Timeout; }
  64. }
  65. public bool IsBusy
  66. {
  67. get { return _state == RState.Running; }
  68. }
  69. #endregion
  70. /// <summary>
  71. /// 构造函数
  72. /// </summary>
  73. /// <param name="module"></param>
  74. public SchedulerProcessTransporter(ModuleName module) : base(module.ToString())
  75. {
  76. _processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(module.ToString());
  77. _loaderTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
  78. }
  79. /// <summary>
  80. /// 执行
  81. /// </summary>
  82. /// <param name="parameter"></param>
  83. /// <returns></returns>
  84. public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)
  85. {
  86. if (parameter == null || !(parameter is TransporterAction))
  87. {
  88. return false;
  89. }
  90. TransporterAction action = (TransporterAction)parameter;
  91. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)action.Parameter;
  92. if (waferHolderMoveItem.SourceModule != ModuleName.Unknown && waferHolderMoveItem.DestModule != ModuleName.Unknown)
  93. {
  94. SchedulerLoaderTransporter schedulerLoaderTransporter = (SchedulerLoaderTransporter)SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);
  95. if (schedulerLoaderTransporter.IsBusy && _loaderTransporterEntity.IsIdle)
  96. {
  97. return false;
  98. }
  99. if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.SourceModule.ToString()))
  100. {
  101. return false;
  102. }
  103. if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.DestModule.ToString()))
  104. {
  105. return false;
  106. }
  107. if (!WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.SourceModule.ToString()))
  108. {
  109. return false;
  110. }
  111. if (WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.DestModule.ToString()))
  112. {
  113. return false;
  114. }
  115. return TransferWaferHolderNonLoader(waferHolderMoveItem);
  116. }
  117. return true;
  118. }
  119. /// <summary>
  120. /// 传输WaferHolder(无WaferHolder)
  121. /// </summary>
  122. /// <param name="waferHolderMoveItem"></param>
  123. private bool TransferWaferHolderNonLoader(WaferHolderMoveItem waferHolderMoveItem)
  124. {
  125. IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(waferHolderMoveItem.DestModule.ToString());
  126. if (moduleEntity != null)
  127. {
  128. if (waferHolderMoveItem.SourceModule == ModuleName.Unknown || waferHolderMoveItem.DestModule == ModuleName.Unknown)
  129. {
  130. return false;
  131. }
  132. bool result = false;
  133. if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
  134. {
  135. result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.INFO_TRANSPORTER,
  136. Module.ToString(), (int)TransporterMSG.Transfer, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  137. }
  138. else
  139. {
  140. result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.INFO_TRANSPORTER,
  141. Module.ToString(), (int)TransporterMSG.PickUpMoveTo, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  142. }
  143. if (result)
  144. {
  145. _state = RState.Running;
  146. _postMsgResult = false;
  147. _schedulerPostMsg.Reset();
  148. }
  149. return result;
  150. }
  151. return false;
  152. }
  153. /// <summary>
  154. /// 监控执行
  155. /// </summary>
  156. /// <returns></returns>
  157. public override bool MonitorProcess(SchedulerSequence schedulerSequence,bool hasMatchWafer)
  158. {
  159. TransporterAction transporterAction = (TransporterAction)schedulerSequence.Parameters;
  160. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)transporterAction.Parameter;
  161. //检验PostMsg的结果
  162. if (!_postMsgResult)
  163. {
  164. if (_processTransporterEntity.IsError)
  165. {
  166. return false;
  167. }
  168. _postMsgResult = CheckPostMsg(waferHolderMoveItem);
  169. if (!_postMsgResult)
  170. {
  171. return false;
  172. }
  173. }
  174. if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
  175. {
  176. if (_processTransporterEntity.IsIdle)
  177. {
  178. if (_processTransporterEntity.WaferHolderInfo != null)
  179. {
  180. return false;
  181. }
  182. if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
  183. {
  184. PrewetPickComplete();
  185. }
  186. _state = RState.End;
  187. }
  188. }
  189. else
  190. {
  191. if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
  192. {
  193. if (_processTransporterEntity.WaferHolderInfo != null)
  194. {
  195. PrewetPickComplete();
  196. }
  197. }
  198. //ProcessTransporter完成PickUp和MoveTo
  199. if (_processTransporterEntity.State == (int)TransporterState.PickUpMoveToComplete)
  200. {
  201. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
  202. if (metalEntity != null)
  203. {
  204. //关闭FlowValve
  205. if (metalEntity.State == (int)MetalState.WaitCloseFlow)
  206. {
  207. metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.INFO_METAL, waferHolderMoveItem.DestModule.ToString(),
  208. (int)MetalMsg.CloseFlowValve);
  209. }
  210. //完成FlowValve关闭后状态变更为等待打开FlowValve,执行Place
  211. else if (metalEntity.State == (int)MetalState.WaitOpenFlow)
  212. {
  213. _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.INFO_TRANSPORTER, Module.ToString(),
  214. (int)TransporterMSG.Place, waferHolderMoveItem.DestModule.ToString());
  215. }
  216. }
  217. }
  218. //Transporter完成Place后
  219. else if (_processTransporterEntity.IsIdle)
  220. {
  221. if(_processTransporterEntity.WaferHolderInfo!=null)
  222. {
  223. return false;
  224. }
  225. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
  226. if (metalEntity != null)
  227. {
  228. //打开FlowValve,完成传输任务
  229. if (metalEntity.State == (int)MetalState.WaitOpenFlow)
  230. {
  231. bool result= metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.INFO_METAL, waferHolderMoveItem.DestModule.ToString(),
  232. (int)MetalMsg.OpenFlowValve);
  233. if(result)
  234. {
  235. _state = RState.End;
  236. }
  237. }
  238. }
  239. }
  240. }
  241. return true;
  242. }
  243. /// <summary>
  244. /// 检验PostMsg的结果
  245. /// </summary>
  246. /// <param name="waferHolderMoveItem"></param>
  247. /// <returns></returns>
  248. private bool CheckPostMsg(WaferHolderMoveItem waferHolderMoveItem)
  249. {
  250. if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
  251. {
  252. return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
  253. eEvent.INFO_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpMoveTo,
  254. (int)TransporterState.PickUpMoveToing, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  255. }
  256. else
  257. {
  258. return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
  259. eEvent.INFO_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer,
  260. (int)TransporterState.Transfering, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  261. }
  262. }
  263. /// <summary>
  264. /// PrewetPick完成事件
  265. /// </summary>
  266. private void PrewetPickComplete()
  267. {
  268. PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
  269. if (prewetEntity.State == (int)PrewetState.WaitForPick)
  270. {
  271. prewetEntity.CheckToPostMessage<PrewetState, PrewetMsg>(eEvent.INFO_PREWET, ModuleName.Prewet1.ToString(),
  272. (int)PrewetMsg.PickComplete);
  273. }
  274. }
  275. /// <summary>
  276. /// 检验前置条件
  277. /// </summary>
  278. /// <param name="sequenceIndex"></param>
  279. /// <param name="parameter"></param>
  280. /// <returns></returns>
  281. public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter, string materialId,ref string reason)
  282. {
  283. if (!(parameter is TransporterAction))
  284. {
  285. reason = "parameter is not TransporterAction";
  286. return false;
  287. }
  288. TransporterAction transporterAction= (TransporterAction)parameter;
  289. if (_state == RState.Running)
  290. {
  291. reason = "scheduler module is already running";
  292. return false;
  293. }
  294. if (_processTransporterEntity.WaferHolderInfo != null)
  295. {
  296. reason = "process transporter has wafer shuttle";
  297. return false;
  298. }
  299. //电机是否还在执行动作
  300. JetAxisBase gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Gantry");
  301. if(gantryAxis==null)
  302. {
  303. reason = "process transporter gantry is null";
  304. return false;
  305. }
  306. if (gantryAxis.Status == RState.Running)
  307. {
  308. reason = "process transporter gantry is running";
  309. return false;
  310. }
  311. JetAxisBase elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Elevator");
  312. if (elevatorAxis == null)
  313. {
  314. reason = "process transporter elevator is null";
  315. return false;
  316. }
  317. if (elevatorAxis.Status == RState.Running)
  318. {
  319. reason = "process transporter elevator is running";
  320. return false;
  321. }
  322. if (_processTransporterEntity.IsBusy)
  323. {
  324. reason = "process transporter entity is busy";
  325. return false;
  326. }
  327. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)transporterAction.Parameter;
  328. bool result = false;
  329. //更新未知源模块
  330. UpdateUnkownSourceModule(schedulerSequences, waferHolderMoveItem, sequenceIndex);
  331. //源为Prewet
  332. if (waferHolderMoveItem.SourceModule == ModuleName.Prewet1)
  333. {
  334. result= CheckSourcePrewetCondition();
  335. if(!result)
  336. {
  337. reason = "process transporter sourcemodule prewet condition is not avaible";
  338. return false;
  339. }
  340. }
  341. bool existEnableCell = false;
  342. //更新未知目标模块
  343. result = UpdateUnkownTargetModule(schedulerSequences, waferHolderMoveItem, sequenceIndex,materialId,ref existEnableCell);
  344. if (!result)
  345. {
  346. reason = "process transporter moveitem target module is unknown";
  347. return false;
  348. }
  349. if (waferHolderMoveItem.DestModuleType==ModuleType.Metal)
  350. {
  351. if(!ModuleHelper.IsMetal(waferHolderMoveItem.DestModule))
  352. {
  353. reason = "process transporter target module is not metal";
  354. return false;
  355. }
  356. UpdateNextMetalScheduler(schedulerSequences, sequenceIndex, waferHolderMoveItem.DestModule);
  357. if (WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.DestModule.ToString()))
  358. {
  359. reason = $"process transporter target metal {waferHolderMoveItem.DestModule} has wafer shuttle ";
  360. return false;
  361. }
  362. result = CheckTargetMetalCondition(waferHolderMoveItem.DestModule.ToString(), waferHolderMoveItem, schedulerSequences, sequenceIndex);
  363. if (!result)
  364. {
  365. if (waferHolderMoveItem.DestModule == ModuleName.Unknown)
  366. {
  367. SchedulerMetalTimeManager.Instance.RemoveMetalStartTime(waferHolderMoveItem.DestModule.ToString(), materialId, sequenceIndex + 1);
  368. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  369. if (nextSequence != null)
  370. {
  371. nextSequence.SchedulerModule = null;
  372. nextSequence.ModuleName = ModuleName.Unknown;
  373. }
  374. reason = $"process transporter target metal module changed to unkown ";
  375. }
  376. return false;
  377. }
  378. }
  379. else if (waferHolderMoveItem.DestModuleType == ModuleType.Rinse)
  380. {
  381. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(waferHolderMoveItem.DestModule.ToString());
  382. if (rinseEntity.IsError)
  383. {
  384. SchedulerQdrTimeManager.Instance.RemoveQdrStartTime(waferHolderMoveItem.DestModule.ToString(), materialId, sequenceIndex + 1);
  385. waferHolderMoveItem.DestModule = ModuleName.Unknown;
  386. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  387. if (nextSequence != null)
  388. {
  389. nextSequence.SchedulerModule = null;
  390. nextSequence.ModuleName = ModuleName.Unknown;
  391. }
  392. reason = $"process transporter target rinse module changed to unkown ";
  393. return false;
  394. }
  395. if (rinseEntity.WaferHolderInfo != null)
  396. {
  397. reason = $"process transporter target rinse {rinseEntity.Module} has wafer shuttle ";
  398. return false;
  399. }
  400. }
  401. else if (waferHolderMoveItem.DestModuleType == ModuleType.Dryer)
  402. {
  403. DryerEntity dryerEntity = Singleton<RouteManager>.Instance.GetModule<DryerEntity>(waferHolderMoveItem.DestModule.ToString());
  404. if (dryerEntity.IsError)
  405. {
  406. SchedulerDryerTimeManager.Instance.RemoveDryerStartTime(waferHolderMoveItem.DestModule.ToString(), materialId, sequenceIndex + 1);
  407. waferHolderMoveItem.DestModule = ModuleName.Unknown;
  408. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  409. if (nextSequence != null)
  410. {
  411. nextSequence.SchedulerModule = null;
  412. nextSequence.ModuleName = ModuleName.Unknown;
  413. }
  414. reason = $"process transporter target dryer module changed to unkown ";
  415. return false;
  416. }
  417. if (dryerEntity.WaferHolderInfo != null)
  418. {
  419. reason = $"process transporter target dryer {dryerEntity.Module} has wafer shuttle ";
  420. return false;
  421. }
  422. }
  423. return true;
  424. }
  425. /// <summary>
  426. /// 更新下一块Metal
  427. /// </summary>
  428. /// <param name="schedulerSequences"></param>
  429. /// <param name="sequenceIndex"></param>
  430. private void UpdateNextMetalScheduler(List<SchedulerSequence> schedulerSequences,int sequenceIndex,ModuleName metalName)
  431. {
  432. if(sequenceIndex+1<schedulerSequences.Count)
  433. {
  434. SchedulerSequence nextSchedulerSequence=schedulerSequences[sequenceIndex+1];
  435. if(nextSchedulerSequence.SchedulerModule==null)
  436. {
  437. nextSchedulerSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(metalName);
  438. nextSchedulerSequence.ModuleName = metalName;
  439. }
  440. }
  441. }
  442. /// <summary>
  443. /// 更新未知目标模块
  444. /// </summary>
  445. private bool UpdateUnkownTargetModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex,string materialId,ref bool existEnableCell)
  446. {
  447. if (waferHolderMoveItem.DestModule == ModuleName.Unknown)
  448. {
  449. if (sequenceIndex + 1 >= schedulerSequences.Count)
  450. {
  451. return false;
  452. }
  453. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  454. ModuleName moduleName = ModuleName.Unknown;
  455. if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
  456. {
  457. if (nextSequence.Recipe == null || !(nextSequence.Recipe is DepRecipe))
  458. {
  459. return false;
  460. }
  461. bool isQdrCheckConflict = SC.GetValue<bool>("Scheduler.IsQdrCheckConflict");
  462. DepRecipe depRecipe = (DepRecipe)nextSequence.Recipe;
  463. if (!isQdrCheckConflict || nextSequence.NextRecipe == null || nextSequence.NextModuleType != ModuleType.Rinse)
  464. {
  465. //获取可用的Metal以及Rinse
  466. ModuleName tmpName = SchedulerSequenceManager.Instance.CalculateAvaibleMetalCellByChemistry(depRecipe.Chemistry,
  467. waferHolderMoveItem.SourceModule.ToString(), nextSequence.SequenceType,nextSequence.WaferSize, ref existEnableCell);
  468. if (tmpName != ModuleName.Unknown)
  469. {
  470. IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(tmpName.ToString());
  471. if (SchedulerSequenceManager.Instance.CheckMetalCellRecipeTimeAvaible(moduleEntity, depRecipe))
  472. {
  473. moduleName = tmpName;
  474. }
  475. }
  476. }
  477. else
  478. {
  479. return SchedulerModuleTimeManager.Instance.ConfirmAllMetalQdrAndDryer(schedulerSequences, materialId, sequenceIndex, true, DateTime.Now);
  480. }
  481. }
  482. else if (waferHolderMoveItem.DestModuleType == ModuleType.Rinse)
  483. {
  484. bool isQdrCheckConflict = SchedulerManager.Instance.IsQdrCheckConflict;
  485. if (waferHolderMoveItem.SourceModuleType == ModuleType.Metal)
  486. {
  487. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType, nextSequence.SequenceType, waferHolderMoveItem.SourceModule);
  488. if (isQdrCheckConflict)
  489. {
  490. QdrRecipe qdrRecipe = (QdrRecipe)nextSequence.Recipe;
  491. SchedulerQdrTimeManager.Instance.AddQdrScheduler(moduleName.ToString(), materialId, sequenceIndex + 1, DateTime.Now, qdrRecipe.CalculateRunRecipeTime());
  492. }
  493. }
  494. else
  495. {
  496. for (int i = sequenceIndex - 1; i >= 0; i--)
  497. {
  498. SchedulerSequence tmp = schedulerSequences[i];
  499. if (tmp.ModuleType == ModuleType.Metal && ModuleHelper.IsMetal(tmp.ModuleName))
  500. {
  501. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType, tmp.SequenceType, tmp.ModuleName);
  502. if (isQdrCheckConflict)
  503. {
  504. QdrRecipe qdrRecipe = (QdrRecipe)nextSequence.Recipe;
  505. SchedulerQdrTimeManager.Instance.AddQdrScheduler(moduleName.ToString(), materialId, sequenceIndex + 1, DateTime.Now, qdrRecipe.CalculateRunRecipeTime());
  506. }
  507. break;
  508. }
  509. }
  510. }
  511. }
  512. else
  513. {
  514. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType, nextSequence.SequenceType, waferHolderMoveItem.SourceModule);
  515. }
  516. if (moduleName == ModuleName.Unknown)
  517. {
  518. return false;
  519. }
  520. else
  521. {
  522. LOG.WriteLog(eEvent.EV_SCHEDULER, Module.ToString(), $"{materialId} ProcessTransporter Confirm Next Cell {moduleName}");
  523. waferHolderMoveItem.DestModule = moduleName;
  524. if (nextSequence.SchedulerModule == null)
  525. {
  526. nextSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(moduleName);
  527. nextSequence.ModuleName = moduleName;
  528. }
  529. }
  530. }
  531. return true;
  532. }
  533. /// <summary>
  534. /// 更新未知源模块
  535. /// </summary>
  536. private void UpdateUnkownSourceModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex)
  537. {
  538. if (waferHolderMoveItem.SourceModule != ModuleName.Unknown)
  539. {
  540. return;
  541. }
  542. for (int i = sequenceIndex - 1; i >= 0; i--)
  543. {
  544. SchedulerSequence preSchedulerSequence = schedulerSequences[i];
  545. if (preSchedulerSequence.State != RState.End)
  546. {
  547. continue;
  548. }
  549. if (i == sequenceIndex - 1)
  550. {
  551. if (preSchedulerSequence != null && preSchedulerSequence.SchedulerModule != null)
  552. {
  553. waferHolderMoveItem.SourceModule = preSchedulerSequence.SchedulerModule.Module;
  554. break;
  555. }
  556. }
  557. else
  558. {
  559. //用于Metal出错后跳过了几个步骤,transporter源模块取至前面跳过的transporter1的目标模块
  560. if(preSchedulerSequence.ModuleName==ModuleName.Transporter1)
  561. {
  562. TransporterAction transporterAction = preSchedulerSequence.Parameters as TransporterAction;
  563. if (transporterAction.ActionMsg != TransporterMSG.Transfer)
  564. {
  565. continue;
  566. }
  567. WaferHolderMoveItem preWaferHolderMoveItem = transporterAction.Parameter as WaferHolderMoveItem;
  568. if (preSchedulerSequence != null && preWaferHolderMoveItem.DestModule != ModuleName.Unknown)
  569. {
  570. waferHolderMoveItem.SourceModule = preWaferHolderMoveItem.DestModule;
  571. break;
  572. }
  573. }
  574. }
  575. }
  576. }
  577. /// <summary>
  578. /// 检验源Prewet前置条件
  579. /// </summary>
  580. /// <returns></returns>
  581. private bool CheckSourcePrewetCondition()
  582. {
  583. PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
  584. if (prewetEntity.State == (int)PrewetState.WaitForPick)
  585. {
  586. return true;
  587. }
  588. return false;
  589. }
  590. /// <summary>
  591. /// 检验目标Metal前置条件
  592. /// </summary>
  593. /// <returns></returns>
  594. private bool CheckTargetMetalCondition(string metalName,WaferHolderMoveItem waferHolderMoveItem,List<SchedulerSequence> schedulerSequences,int sequenceIndex)
  595. {
  596. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metalName);
  597. if (metalEntity.IsIdle)
  598. {
  599. metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.INFO_METAL, metalName,
  600. (int)MetalMsg.CurrentShortTest);
  601. }
  602. else if (metalEntity.State == (int)MetalState.WaitCloseFlow)
  603. {
  604. return true;
  605. }
  606. else if (metalEntity.IsError)
  607. {
  608. waferHolderMoveItem.DestModule = ModuleName.Unknown;
  609. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  610. if (nextSequence != null)
  611. {
  612. nextSequence.SchedulerModule = null;
  613. nextSequence.ModuleName = ModuleName.Unknown;
  614. }
  615. }
  616. return false;
  617. }
  618. public override void ResetTask()
  619. {
  620. base.ResetTask();
  621. _schedulerPostMsg.Reset();
  622. _postMsgResult = false;
  623. }
  624. }
  625. }