| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402 | using Aitex.Core.RT.Event;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Aitex.Sorter.Common;using MECF.Framework.Common.Equipment;using CyberX8_Core;using CyberX8_RT.Devices.YASKAWA;using SecsGem.Core.Variables;using System;using System.Collections.Generic;using System.Linq;using System.Runtime.Remoting.Contexts;using System.Text;using System.Text.RegularExpressions;using System.Threading.Tasks;namespace CyberX8_RT.Devices.EFEM{    public class SunWayMessageHandler : Singleton<SunWayMessageHandler>, IEfemMessageHander    {        private const string ERROR_MSG = "hardware message invalid";        /// <summary>        /// TagId数据前缀        /// </summary>        private const string TAG_DATA_PRE = "INF:CSTID/LP1/";        public EfemMessage ToMessage(string context)        {            if (string.IsNullOrEmpty(context) || context.Length < 3)                throw new ArgumentNullException(ERROR_MSG);            EfemMessage msg = new EfemMessage { RawString = context, Direct = MsgDirection.From, Data = new List<string>() };            // remove EOT            string messageBody = context.Substring(0, context.IndexOf(EfemMessage.EOF) + 1);            try            {                // split up the string                string[] sBodies = messageBody.Split(Constant.delimiters);                                string sHead = sBodies[0];                string sBasic = sBodies[1];                // Head                if (Enum.TryParse(sHead, true, out EfemMessage.MsgHead msgHead))                {                    msg.Head = msgHead;                }                switch (msg.Head)                {                    case EfemMessage.MsgHead.ACK:                    case EfemMessage.MsgHead.MOV:                    case EfemMessage.MsgHead.INF:                    case EfemMessage.MsgHead.EVT:                        // Basic                        msg.Operation = EfemConstant.ToOperation(sBasic);                        string sPort = sBodies[2];                                                // Port                        msg.Module = GetModule(sPort);                        // Data                        switch (msg.Operation)                        {                            case EfemOperation.StateTrack:                                for (int i = 2; i < sBodies.Length; i++)                                {                                    msg.Data.Add(sBodies[i]);                                }                                break;                            case EfemOperation.GetWaferInfo:                                for(int i=3;i<sBodies.Length;i++)                                {                                    msg.Data.Add(sBodies[i]);                                }                                break;                            case EfemOperation.CarrierId:                                if (msg.Head == EfemMessage.MsgHead.INF)                                {                                    string carrierId = msg.RawString.Substring(TAG_DATA_PRE.Length);                                    carrierId = carrierId.Remove(carrierId.Length - 1);                                    msg.Data.Add(carrierId);                                }                                break;                            case EfemOperation.SigStatus:                                for(int i=2;i<sBodies.Length; i++)                                {                                    msg.Data.Add(sBodies[i]);                                }                                break;                            case EfemOperation.Ready:                                msg.Data.Add(sBodies[2]);                                break;                            case EfemOperation.Size:                                for (int i = 3; i < sBodies.Length; i++)                                {                                    msg.Data.Add(sBodies[i]);                                }                                break;                            case EfemOperation.Align:                                msg.Data.Add(sBodies[3]);                                break;                            default:                                break;                        }                        //EVT:ERROR/Param1/Param2                        if(msg.Head == EfemMessage.MsgHead.EVT&&sBasic.ToLower()=="error")                        {                            msg.Operation = EfemOperation.Error;                            msg.Data.Add(sBodies[3]);                        }                        break;                    case EfemMessage.MsgHead.NAK:                        //NAK:Factor|Message*                        if (sBodies.Length > 1)                        {                            msg.Factor = sBodies[1];                        }                        else                        {                            msg.Factor = "NAK 格式错误";                        }                        break;                    case EfemMessage.MsgHead.CAN:                        //CAN:Message*|Factor/Place                        if (sBodies.Length >= 4)                        {                            string[] canFactor = messageBody.Split('|');                            string[] factorandData = canFactor[1].Split(Constant.delimiters);                            string factor = factorandData[0];                            string data = canFactor[1].Replace(factor,"");                                                        msg.Data.Add(data);                            msg.Factor = factor;                            //msg.Factor = sBodies[sBodies.Length - 2];                            //msg.Data.Add(sBodies[sBodies.Length - 1]);                                                   }                        else                        {                            msg.Factor = "CAN 格式错误";                        }                        break;                    case EfemMessage.MsgHead.ABS:                        //ABS:Message*|Error|Parameter1/Parameter2                        if (sBodies.Length >= 5)                        {                            msg.Factor = sBodies[sBodies.Length - 3];                            string errorCode = sBodies[sBodies.Length - 2];                            if (EfemHWErrorCode2Msg.ContainsKey(errorCode))                            {                                msg.Data.Add(EfemHWErrorCode2Msg[errorCode]);                            }                            else                            {                                msg.Data.Add(errorCode);                            }                            msg.Data.Add(sBodies[sBodies.Length - 1]);                        }                        else                        {                            msg.Factor = "ABS 格式错误";                        }                        break;                }            }            catch (Exception ex)            {                EV.PostAlarmLog(ModuleName.EFEM.ToString(), $"收到[{context}],解析出错[{ex.Message}]");            }            return msg;        }        private ModuleName GetModule(string sPort)        {            ModuleName module = ModuleName.EFEM;            if (Regex.IsMatch(sPort, @"LP[123]$"))            {                if (sPort.Length > 3)                {                    sPort = sPort.Remove(sPort.Length - 2);                }                module = StringModule[sPort];            }            else if (Regex.IsMatch(sPort, @"ALN\d?", RegexOptions.IgnoreCase))            {                if (sPort.Length > 4)                {                    sPort = sPort.Remove(sPort.Length - 2);                }                module = StringModule[sPort];            }            else if (Regex.IsMatch(sPort, @"BF\d?", RegexOptions.IgnoreCase))            {                if (sPort.Length > 3)                {                    sPort = sPort.Remove(sPort.Length - 2);                }                module = StringModule[sPort];            }            else            {                module = ModuleName.EFEM;            }            return module;        }        public Dictionary<ModuleName, string> ModuleString = new Dictionary<ModuleName, string>        {            [ModuleName.EFEM] = "ALL",            [ModuleName.EfemRobot] = "ROB",            [ModuleName.LP1] = "LP1",            [ModuleName.LP2] = "LP2",            [ModuleName.LP3] = "LP3",            [ModuleName.Aligner1] = "ALN1",            [ModuleName.PUF1]="PUF1",            [ModuleName.PUF2]="PUF2",            [ModuleName.SRD1]="SRD1",            [ModuleName.SRD2]="SRD2",            [ModuleName.Dummy1]="BF1",            [ModuleName.Dummy2]="BF2"        };        public readonly Dictionary<string, ModuleName> StringModule = new Dictionary<string, ModuleName>        {            ["ALL"] = ModuleName.EFEM,            ["System"] = ModuleName.EFEM,            ["LP1"] = ModuleName.LP1,            ["LP2"] = ModuleName.LP2,            ["LP3"] = ModuleName.LP3,            ["ALN1"] = ModuleName.Aligner1,            ["BF1"]=ModuleName.Dummy1,            ["BF2"]=ModuleName.Dummy2        };        public Dictionary<Hand, string> ArmString = new Dictionary<Hand, string>        {            [Hand.Blade1] = "ARM1"        };        public string ToHWString(Position pos)        {            string res = string.Empty;                          string sMod = ModuleString[pos.Module];            int num = pos.Slot + 1;            string sSlot = num.ToString("D2");            //EFEM中PUF只固定一个slot            if (ModuleHelper.IsPUF(pos.Module))            {                res = $"{sMod}01";            }            else {                res = $"{sMod}{sSlot}";            }            return res;        }        public readonly Dictionary<string, string> EfemHWErrorCode2Msg = new Dictionary<string, string>()        {            {"NOREADY","通信握手未完成" },            {"SORC_NOWAF","Robot 手指无片无法执行取片" },            {"SORC_WAFER","Robot 手指有片,无法执行取片" },            {"DEST_WAFER","目标位有片,无法执行取片" },            {"VAC","真空不足" },            {"AIR","大气不足" },            {"MAPPARAM_NG","执行扫片失败" },            {"WAFERUPDATEFAIL","晶圆状态异常" },            {"NOLOCATION","未找到工位配置信息" },            {"NOARM","未找到 ARM 配置信息" },            {"REMOVE","未找到设备或设备已断开链接" },            {"NOMAPPINGDATA","没有找到相对应的 Mapping 结果" },            {"ALARM","触发 Alarm 报警" },            {"NOCST","OC 上未发现 Cassette" },            {"NOCLAMP","OC 未执行 Clamp" },            {"NOPOD","OC 上未发现 POD" },            {"PODNOTCLOSED","POD 门未关" },            {"AREASENSOR","触发安全光栅" },            {"EMS","触发 EMS 急停" },            {"WAFERPROTRUSION","晶圆突出检测触发" },            {"DOOR","安全门开启" },            {"COMM","设备通信异常" },            {"EXCEPTION","系统抛出异常" },            {"BUSY","系统繁忙" },            {"CKSUM","校验和验证失败" },            {"MAINTENANCE","当前系统为维护模式" },            {"MSG_NG","指令错误" },            {"PARAM_NG","参数错误" },            {"NODEVICEMODEL","未找到该设备型号" },            {"SLOT_NG","SLOT 超出范围" },            {"UNDEFINITION","未知错误" },            {"NOIOSET","未找到 IO 设置信息" },            {"SETFAIL","设置失败" },            {"TIMEOUT","设备通信超时" },            {"DEST_NOWAF","目标位无片无法执行取片" },            {"CSTSIZEMISMATCH","Cassette 尺寸不匹配" },            {"ROBEXEND","机械手伸手报警" },            {"FUNC_ERROR","函数错误" },            {"233","伸缩信号未使能" },            {"304","未识别的错误码" },            {"305","未识别的指令" },            {"309","不支持的指令" },            {"401","ZWAFER 参数错误" },            {"402","非法的 slot 参数" },            {"403","运动指令 RX 参数错误" },            {"404","晶圆夹取失败" },            {"405","晶圆释放失败" },            {"406","气缸压力表检测错误" },            {"407","Mapping 传感器伸出失败" },            {"408","Mapping 传感器缩回失败" },            {"409","Mapping 传感器位置数据不正确" },            {"411","Mapping 传感器高度不一致" },            {"412","工位 VIA 参数未使能" },            {"413","不是有效的 Mapping 工位" },            {"414","手指有晶圆无法 mapping" },            {"415","采集的数据个数错误" },            {"416","采集的晶圆厚度过小" },            {"417","晶圆位置超出有效范围" },            {"418","晶圆上下沿槽数错误" },            {"550","工位号超范围" },            {"552","VIA 参数错误" },            {"553","MAPVIA 参数错误" },            {"600","系统未上电" },            {"602","指令正在执行中" },            {"603","系统上电失败" },            {"604","示教器控制中" },            {"605","机械手运动中停止" },            {"609","系统存在错误" },            {"610","示教盒急停启动" },            {"611","驱动器报警" },            {"629","驱动器存在报警" },            {"705","LOAD 状态未知" },            {"712","真空吸附动作失败" },            {"730","PLACE 前 LOAD 状态错误" },            {"731","PLACE 后 LOAD 状态错误" },            {"734","PLACE 执行 Extend 过程中未检测到晶圆" },            {"736","PLACE 执行 Retract 过程中检测到晶圆" },            {"740","PICK 前 LOAD 状态错误" },            {"741","PICK 后 LOAD 状态错误" },            {"744","PICK 执行 Extend 过程中检测到晶圆" },            {"745","PICK 执行 Retract 过程中未检测到晶圆" },            {"800","当前有动作暂停中" },            {"801","改变运动状态发生错误" },            {"802","无法获取下一个状态" },            {"803","没有正在运行的指令" },            {"804","没有暂停的动作" },            {"805","没有可跳过的动作" },            {"1006","非法的 IO 端口号" },            {"1314","PITCH 轴超界" },            {"1315","关节位置超界" },            {"1316","关节位置超硬限" },            {"1320","机械手跟踪差超限错误" },            {"1321","机械手发生碰撞" },            {"1322","机械手超出工作区" },            {"1323","关节速度超限" },            {"1400","打开 pod 失败" },            {"1401","当前位置不正确" },            {"1402","关闭 pod 失败" },            {"1403","pod 上锁失败" },            {"1404","pod 解锁失败" },            {"1407","气压错误" },            {"1408","pod 盒状态错误" },            {"1409","当前位置不在旋转轴动作位置" },            {"1410","晶圆尺寸设置错误" },            {"1411","旋转轴状态错误不能伸出" },            {"1412","晶圆已滑出" },            {"1413","与 R3 extend 互锁" },            {"1414","光栅被触发" },            {"1415","Cassette 状态错误" },            {"1500","打开门失败" },            {"1501","关闭门失败" },            {"1502","门开关状态不对" },            {"1503","门松开失败" },            {"1504","门夹紧失败" },            {"1505","门夹紧松开状态错误" },            {"1510","安全检测触发" },            {"1511","R 轴未运动到位" },            {"1512","使能开关未使能" },            {"1514","气缸 1 状态错误" },            {"1515","LATCH 失败" },            {"1516","UNLATCH 失败" },            {"1517","LATCH 状态错误" },            {"1518","DOCK 状态错误" },            {"1519","气缸 2 状态错误" },            {"1520","DOCK 到位传感器状态错误" },            {"1521","吸附状态错误" },            {"1522","MAP 轴状态错误" },            {"1523","PLACE 状态错误" },            {"1524","气缸 1 伸出错误" },            {"1525","气缸 1 缩回错误" },            {"1527","关门时 LATCH 状态错误" },            {"1528","真空吸附失败" },            {"1529","真空吸附关闭失败" },            {"13033","伺服驱动器初始化失败" },        };    }}
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