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PUFEntity.cs
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be3b324847
update EFEM UI;
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2 ヶ月 前 |
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PufBackToParkRoutine.cs
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e61eba41b9
update puf/loader scheduler
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4 ヶ月 前 |
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PufCalibrateRoutine.cs
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0f6f0fbadc
update efem pick and place wafer size
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4 ヶ月 前 |
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PufChuckRoutine.cs
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0aabb32d23
update galil axis
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4 ヶ月 前 |
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PufGotoRobotForPickRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufGotoRobotForPlaceRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufHomeAllRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufOnlyPlaceToLoaderRoutine.cs
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2bf0be7542
update loader waferSize
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3 ヶ月 前 |
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PufPickFromLoaderRoutine.cs
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6458e62756
update transporter block
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1 ヶ月 前 |
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PufPlaceToLoaderRoutine.cs
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0f6f0fbadc
update efem pick and place wafer size
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4 ヶ月 前 |
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PufPlaceVacuumCheckRoutine.cs
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0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
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2 ヶ月 前 |
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PufReadyForRobotPickRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufReadyForRobotPlaceRoutine.cs
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e2d5bb5c5d
update galil controller inputs
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4 ヶ月 前 |
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PufReadyForSwapRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufSwapRoutine.cs
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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2 ヶ月 前 |
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PufSwitchOffRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufSwitchOnRoutine.cs
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0b293c8ffb
update puf axis
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4 ヶ月 前 |
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PufWaferPickSubRoutine.cs
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478aa5ec7f
update puf view
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4 ヶ月 前 |
chenkui
6458e62756
update transporter block