RinseSecondStepRoutine.cs 22 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.RecipeCenter;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using MECF.Framework.Common.DataCenter;
  7. using MECF.Framework.Common.RecipeCenter;
  8. using MECF.Framework.Common.Routine;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Utilities;
  11. using CyberX8_Core;
  12. using CyberX8_RT.Devices.Resistivity;
  13. using CyberX8_RT.Devices.Rinse;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Linq;
  17. using System.Text;
  18. using System.Threading.Tasks;
  19. using System.Windows.Documents;
  20. namespace CyberX8_RT.Modules.Rinse
  21. {
  22. public class RinseSecondStepRoutine : RoutineBase, IRoutine
  23. {
  24. private enum RinseSecondStep
  25. {
  26. PrepareStart,
  27. Recipe_StartSecondRinseCycle,
  28. Recipe_PerformSecondRinseCycle,
  29. Recipe_SecondRinseCycleStartFilling,
  30. Recipe_SecondRinseCycleRecordStartWaterLevel,
  31. Recipe_SecondRinseCycleStartFillingWait,
  32. Recipe_SecondRinseCycleWaitFillingDetected,
  33. Recipe_SecondRinseCycleWaitFull,
  34. Recipe_SecondRinseCycleWaitEndFillTime,
  35. Recipe_SecondRinseCycleWaitDwell,
  36. Recipe_SecondRinseCycleWaitDrain,
  37. Recipe_SecondRinseCycleCheckDrain,
  38. Recipe_SecondRinseCycleWaitDrainExtraTime,
  39. Recipe_SecondRinseCycleWaitResistivityStart,
  40. Recipe_SecondRinseCycleResistivityAveraging,
  41. Recipe_SecondRinseCycleCheckResistivity,
  42. Recipe_SecondRinseCycleWaitDrain2,
  43. Recipe_SecondRinseCycleCheckDrain2,
  44. Recipe_SecondRinseCycleWaitDrain2ExtraTime,
  45. Recipe_SecondRinseCycleEnd,
  46. Recipe_SecondRinseCycleComplete
  47. }
  48. #region 内部变量
  49. /// <summary>
  50. /// 设备对象
  51. /// </summary>
  52. private RinseDevice _device;
  53. /// <summary>
  54. /// Recipe
  55. /// </summary>
  56. private QdrRecipe _recipe;
  57. /// <summary>
  58. /// Fill打开注水记录Water Level
  59. /// </summary>
  60. private double _fillingDetectStartWaterLevel;
  61. /// <summary>
  62. /// Concurrent Fill Time Seconds
  63. /// </summary>
  64. private int _concurrentFillTimeSeconds;
  65. /// <summary>
  66. /// 开始注水的偏差
  67. /// </summary>
  68. private double _fillingStartedDelta;
  69. /// <summary>
  70. /// 注满数值
  71. /// </summary>
  72. private int _sensorReadingFull;
  73. /// <summary>
  74. /// 液位为空数值
  75. /// </summary>
  76. private int _sensorReadingEmpty;
  77. /// <summary>
  78. /// 开始流水时间
  79. /// </summary>
  80. private DateTime _startFillTime;
  81. /// <summary>
  82. /// 从开始排水到检测是否排空的间隔时间
  83. /// </summary>
  84. private int _normalDrainTimeSeconds;
  85. /// <summary>
  86. /// 表示当前正在执行第几次rinse
  87. /// </summary>
  88. private int _rinseCycleTwo_RinsesCompleted = 0;
  89. /// <summary>
  90. /// Resistivity取值样本列表
  91. /// </summary>
  92. private List<double> _resistivitySample = new List<double>();
  93. /// <summary>
  94. /// 开始注水后检测是否正常注水间隔
  95. /// </summary>
  96. private int _checkIsFillingTimeSeconds;
  97. /// <summary>
  98. /// 开始注水后检测是否注满间隔
  99. /// </summary>
  100. private int _checkIsFullTimeSeconds;
  101. /// <summary>
  102. /// 采样水阻值次数
  103. /// </summary>
  104. private int _readResistivityCount = 0;
  105. /// <summary>
  106. /// 当前执行到哪一步的显示
  107. /// </summary>
  108. private string _currentStateMachine;
  109. /// <summary>
  110. /// 开始采样时间
  111. /// </summary>
  112. private DateTime _startSampleTime = DateTime.Now;
  113. /// <summary>
  114. /// 采样时间
  115. /// </summary>
  116. private DateTime _sampeIntervalTime = DateTime.Now;
  117. /// <summary>
  118. /// 启动采样
  119. /// </summary>
  120. private bool _startSample = false;
  121. #endregion
  122. /// <summary>
  123. /// 构造函数
  124. /// </summary>
  125. /// <param name="module"></param>
  126. public RinseSecondStepRoutine(string module) : base(module)
  127. {
  128. }
  129. /// <summary>
  130. /// 启动
  131. /// </summary>
  132. /// <param name="objects"></param>
  133. /// <returns></returns>
  134. public RState Start(params object[] objects)
  135. {
  136. _startSample = false;
  137. _device = DEVICE.GetDevice<RinseDevice>(Module);
  138. _resistivitySample.Clear();
  139. _readResistivityCount = 0;
  140. _recipe = objects[0] as QdrRecipe;
  141. _fillingDetectStartWaterLevel = 0;
  142. _rinseCycleTwo_RinsesCompleted = 0;
  143. _concurrentFillTimeSeconds = SC.GetValue<int>("QDR.ConcurrentFillTimeSeconds");
  144. _fillingStartedDelta = SC.GetValue<double>("QDR.FillingStartedDelta");
  145. _sensorReadingFull = SC.GetValue<int>("QDR.SensorReadingFull");
  146. _sensorReadingEmpty = SC.GetValue<int>("QDR.SensorReadingEmpty");
  147. _normalDrainTimeSeconds = SC.GetValue<int>("QDR.NominalDrainTimeSeconds");
  148. _checkIsFillingTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillWaterTimeSeconds");
  149. _checkIsFullTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillFullTimeSeconds");
  150. //配置项规范性验证
  151. if (_checkIsFillingTimeSeconds + _checkIsFullTimeSeconds > _concurrentFillTimeSeconds)
  152. {
  153. NotifyError(eEvent.ERR_RINSE, $"configuration item 'QDR.NominalCheckFillWaterTimeSeconds' plus 'QDR.NominalCheckFillFullTimeSeconds' is large than QDR.ConcurrentFillTimeSeconds", 0);
  154. return RState.Failed;
  155. }
  156. if (_normalDrainTimeSeconds > _recipe.DumpTimeSeconds)
  157. {
  158. NotifyError(eEvent.ERR_RINSE, $"configuration item 'QDR.NominalDrainTimeSeconds' is large than 'recipe.DumpTimeSeconds", 0);
  159. return RState.Failed;
  160. }
  161. return Runner.Start(Module, "Start Rinse Second Step");
  162. }
  163. /// <summary>
  164. /// 监控
  165. /// </summary>
  166. /// <returns></returns>
  167. public RState Monitor()
  168. {
  169. _currentStateMachine = Runner.CurrentStep.ToString();
  170. _device.UpdateStateMachine(_currentStateMachine);
  171. Runner.RunIf(RinseSecondStep.PrepareStart, _recipe.Step2N2BubbleOn, N2ValveOff, _delay_1ms)
  172. //2.6-StartSecondRinseCycle
  173. .LoopStart(RinseSecondStep.Recipe_StartSecondRinseCycle, "Rinse Second step", _recipe.Step2NumberOfRinse, NullFun, _delay_1ms)
  174. //2.7-PerformSecondRinseCycle
  175. .LoopRun(RinseSecondStep.Recipe_PerformSecondRinseCycle, OpenN2ValveAndCloseDumpValve, _delay_1ms)
  176. //2.8-SecondRinseCycleStartFilling
  177. .LoopRun(RinseSecondStep.Recipe_SecondRinseCycleStartFilling, () => _device.FillValveOn(), _delay_1ms)
  178. .LoopRun(RinseSecondStep.Recipe_SecondRinseCycleRecordStartWaterLevel, CheckFillValveOn, _delay_1ms)
  179. .LoopRunOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleStartFillingWait, CheckFillNormalStatus, _checkIsFillingTimeSeconds * 1000)
  180. //2.9-SecondRinseCycleWaitFillingDetected //3.0-SecondRinseCycleWaitFull
  181. .LoopRunOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleWaitFillingDetected, CheckFillFullStatus, _checkIsFullTimeSeconds * 1000)
  182. //.LoopRun(RinseSecondStep.Recipe_SecondRinseCycleWaitFull, CheckFillFullStatus, _delay_1s)
  183. //3.1-SecondRinseCycleWaitEndFillTime
  184. .LoopDelay(RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime, (_concurrentFillTimeSeconds - _checkIsFillingTimeSeconds - _checkIsFullTimeSeconds) * 1000)
  185. //3.2-SecondRinseCycleWaitDwell
  186. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDwell, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
  187. || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
  188. StartDwell, _recipe.Step2DwellTimeSeconds * 1000)
  189. //3.3-SecondRinseCycleWaitDrain
  190. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
  191. || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
  192. StartOpenDumpValve, _delay_1ms)
  193. .LoopRunIfOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleCheckDrain, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
  194. || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
  195. CheckWaterLevelEmpty, _normalDrainTimeSeconds * 1000)
  196. //3.4-SecondRinseCycleWaitDrainExtraTime
  197. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0)
  198. || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0),
  199. NullFun, (_recipe.DumpTimeSeconds - _normalDrainTimeSeconds) * 1000)
  200. //3.7-SecondRinseCycleWaitResistivityStart 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
  201. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitResistivityStart, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
  202. ResistivityStart, _recipe.ResistivityStartTimeSeconds * 1000)
  203. //3.8-SecondRinseCycleResistivityAveraging 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
  204. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleResistivityAveraging, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
  205. ResistivityAveraging, _delay_1ms)
  206. //3.9-SecondRinseCycleCheckResistivity 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
  207. .LoopWaitIf(RinseSecondStep.Recipe_SecondRinseCycleCheckResistivity, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
  208. ResitivitySampleResitivity, _recipe.ResistivityDurationSeconds * 1000)
  209. //4.0-SecondRinseCycleWaitDrain 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
  210. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain2, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
  211. StartOpenDumpValve, _delay_1ms)
  212. .LoopRunIfOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleCheckDrain2, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
  213. CheckWaterLevelEmpty, _normalDrainTimeSeconds * 1000)
  214. //4.1-Recipe_SecondRinseCycleWaitDrain2ExtraTime 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
  215. .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain2ExtraTime, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0,
  216. NullFun, (_recipe.DumpTimeSeconds - _normalDrainTimeSeconds) * 1000)
  217. .LoopEnd(RinseSecondStep.Recipe_SecondRinseCycleEnd, CountNumberofRinsesComplete, _delay_1ms)
  218. .End(RinseSecondStep.Recipe_SecondRinseCycleComplete, ResetRinseComplete, _delay_1ms);
  219. return Runner.Status;
  220. }
  221. /// <summary>
  222. /// N2 Valve Off
  223. /// </summary>
  224. /// <returns></returns>
  225. private bool N2ValveOff()
  226. {
  227. if (_recipe.Step1N2BubbleOn)
  228. {
  229. return _device.N2ValveOff();
  230. }
  231. else
  232. {
  233. return true;
  234. }
  235. }
  236. /// <summary>
  237. /// 检验N2Valve off
  238. /// </summary>
  239. /// <returns></returns>
  240. private bool CheckN2ValveOff()
  241. {
  242. if (_recipe.Step1N2BubbleOn)
  243. {
  244. return !_device.RinseData.N2Valve;
  245. }
  246. else
  247. {
  248. return true;
  249. }
  250. }
  251. /// <summary>
  252. /// 启动N2和关闭Dump Valve
  253. /// </summary>
  254. /// <returns></returns>
  255. private bool OpenN2ValveAndCloseDumpValve()
  256. {
  257. bool result = true;
  258. if (_recipe.Step2N2BubbleOn)
  259. {
  260. result = _device.N2ValveOn();
  261. if (!result)
  262. {
  263. NotifyError(eEvent.ERR_RINSE, "Open N2 Valve error", 0);
  264. return false;
  265. }
  266. }
  267. result = _device.DrainValveOff();
  268. if (!result)
  269. {
  270. NotifyError(eEvent.ERR_RINSE, "Close Dump Valve error", 0);
  271. }
  272. return result;
  273. }
  274. /// <summary>
  275. /// 检验Fill Valve打开状态
  276. /// </summary>
  277. /// <returns></returns>
  278. private bool CheckFillValveOn()
  279. {
  280. _startFillTime = DateTime.Now;
  281. _fillingDetectStartWaterLevel = _device.RinseData.WaterLevel;
  282. LOG.WriteLog(eEvent.INFO_RINSE, Module, $"Start Fill Valve WaterLevel {_fillingDetectStartWaterLevel}");
  283. return true;
  284. }
  285. /// <summary>
  286. /// 检验是否正常注水
  287. /// </summary>
  288. /// <returns></returns>
  289. private bool CheckFillNormalStatus()
  290. {
  291. double currentWaterLevel = _device.RinseData.WaterLevel;
  292. return (currentWaterLevel - _fillingDetectStartWaterLevel) > _fillingStartedDelta;
  293. }
  294. /// <summary>
  295. /// 检验是否注满
  296. /// </summary>
  297. /// <returns></returns>
  298. private bool CheckFillFullStatus()
  299. {
  300. double currentWaterLevel = _device.RinseData.WaterLevel;
  301. bool result = currentWaterLevel > _sensorReadingFull;
  302. return result;
  303. }
  304. /// <summary>
  305. /// 增加已完成Rinses的次数
  306. /// </summary>
  307. /// <returns></returns>
  308. private bool CountNumberofRinsesComplete()
  309. {
  310. _rinseCycleTwo_RinsesCompleted++;
  311. return true;
  312. }
  313. /// <summary>
  314. /// 开始Dwell
  315. /// </summary>
  316. /// <returns></returns>
  317. private bool StartDwell()
  318. {
  319. bool result = _device.FillValveOff();
  320. if (!result)
  321. {
  322. NotifyError(eEvent.ERR_RINSE, "Fill Valve off error", 0);
  323. return false;
  324. }
  325. if (_recipe.Step2N2BubbleOn)
  326. {
  327. result = _device.N2ValveOff();
  328. if (!result)
  329. {
  330. NotifyError(eEvent.ERR_RINSE, "N2 Valve off error", 0);
  331. return false;
  332. }
  333. }
  334. return true;
  335. }
  336. /// <summary>
  337. /// 打开Dump Valve
  338. /// </summary>
  339. /// <returns></returns>
  340. private bool StartOpenDumpValve()
  341. {
  342. CheckNeedCloseMetalDrain();
  343. bool result = _device.DrainValveOn();
  344. if (!result)
  345. {
  346. NotifyError(eEvent.ERR_RINSE, "Open Dump valve error", 0);
  347. return false;
  348. }
  349. return result;
  350. }
  351. /// <summary>
  352. /// 检验快排是否排空
  353. /// </summary>
  354. /// <returns></returns>
  355. private bool CheckWaterLevelEmpty()
  356. {
  357. double currentWaterLevel = _device.RinseData.WaterLevel;
  358. bool reseult = currentWaterLevel < _sensorReadingEmpty;
  359. if (!reseult)
  360. {
  361. NotifyError(eEvent.ERR_RINSE, $"current water level: {currentWaterLevel} is large than sensorReadingEmpty: {_sensorReadingEmpty}", 0);
  362. }
  363. return reseult;
  364. }
  365. /// <summary>
  366. /// 检验是否需要关闭Metal Valve 加上第一步的number of rinse
  367. /// </summary>
  368. /// <returns></returns>
  369. private void CheckNeedCloseMetalDrain()
  370. {
  371. if (_recipe.Step1NumberOfRinse + _rinseCycleTwo_RinsesCompleted + 1 > _recipe.Step1NumberOfDumpToMetalDrain)
  372. {
  373. bool result = _device.WasteValveOn();
  374. if (!result)
  375. {
  376. NotifyError(eEvent.ERR_RINSE, "Close Metal Drain Valve error", 0);
  377. }
  378. }
  379. }
  380. /// <summary>
  381. /// ResistivityStart
  382. /// </summary>
  383. /// <returns></returns>
  384. private bool ResistivityStart()
  385. {
  386. bool result = true;
  387. result = _device.FillValveOff();
  388. if (!result)
  389. {
  390. NotifyError(eEvent.ERR_RINSE, "Fill Valve Off error", 0);
  391. return false;
  392. }
  393. if (_recipe.Step2N2BubbleOn)
  394. {
  395. result = _device.N2ValveOff();
  396. if (!result)
  397. {
  398. NotifyError(eEvent.ERR_RINSE, "N2 Valve Off error", 0);
  399. return false;
  400. }
  401. }
  402. return result;
  403. }
  404. /// <summary>
  405. /// ResistivityAveraging
  406. /// </summary>
  407. /// <returns></returns>
  408. private bool ResistivityAveraging()
  409. {
  410. if (_recipe.ResistivityDurationSeconds == 0)
  411. {
  412. _resistivitySample.Add(GetResitivity());
  413. }
  414. else
  415. {
  416. _startSampleTime = DateTime.Now;
  417. _sampeIntervalTime = DateTime.Now;
  418. _startSample = true;
  419. }
  420. return true;
  421. }
  422. /// <summary>
  423. /// 采样Resitivity
  424. /// </summary>
  425. /// <returns></returns>
  426. private bool ResitivitySampleResitivity()
  427. {
  428. if (!_startSample)
  429. {
  430. return true;
  431. }
  432. int sampleTotalCount = (int)Math.Ceiling(_recipe.ResistivityDurationSeconds / 0.1);
  433. //每隔100毫秒采样
  434. if (DateTime.Now.Subtract(_sampeIntervalTime).TotalMilliseconds >= 100)
  435. {
  436. _sampeIntervalTime = DateTime.Now;
  437. _readResistivityCount++;
  438. _resistivitySample.Add(GetResitivity());
  439. }
  440. //ResistivityDurationSeconds时长减去0.1s,避免超时
  441. if (DateTime.Now.Subtract(_startSampleTime).TotalMilliseconds >= _recipe.ResistivityDurationSeconds * 1000 - 100)
  442. {
  443. bool result = CheckResistivity();
  444. //if (!result)
  445. //{
  446. // Runner.Stop("Sample Resitiviy abormal", true);
  447. //}
  448. return result;
  449. }
  450. return false;
  451. }
  452. //读取Resitivity的值
  453. private double GetResitivity()
  454. {
  455. double resistivity = 0;
  456. ResistivityController resistivityController = DEVICE.GetDevice<ResistivityController>(_device.RinseItem.ResistivityID);
  457. if (resistivityController != null)
  458. {
  459. try
  460. {
  461. resistivity = double.Parse(resistivityController.ResisitivityValue.Trim());
  462. }
  463. catch
  464. {
  465. resistivity = 0;
  466. //LOG.WriteLog(eEvent.ERR_RINSE, Module, "Resitivity value abnormal");
  467. }
  468. }
  469. return resistivity;
  470. }
  471. /// <summary>
  472. /// CheckResistivity
  473. /// </summary>
  474. /// <returns></returns>
  475. private bool CheckResistivity()
  476. {
  477. if (_recipe.ResistivityMegaOhms == 0)
  478. {
  479. _resistivitySample.Clear();
  480. return true;
  481. }
  482. double resistivityAverageValue = _resistivitySample.Average();
  483. if ((_resistivitySample.Count == 1 && _resistivitySample[0] < _recipe.ResistivityMegaOhms) || resistivityAverageValue < _recipe.ResistivityMegaOhms)
  484. {
  485. NotifyError(eEvent.ERR_RINSE, $"The detected resistivity value is abnormal,:{resistivityAverageValue}", 0);
  486. }
  487. _resistivitySample.Clear();
  488. return true;
  489. }
  490. private bool ResetRinseComplete()
  491. {
  492. _rinseCycleTwo_RinsesCompleted = 0;
  493. return true;
  494. }
  495. /// <summary>
  496. /// Abort
  497. /// </summary>
  498. public void Abort()
  499. {
  500. Runner.Stop("Manual abort");
  501. }
  502. }
  503. }