RtState.cs 5.7 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace CyberX8_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. AutoAborting,
  19. ReturningCassette,
  20. Cycle,
  21. PrepareCycle,
  22. PostCycle,
  23. SetSpeed,
  24. Error,
  25. Reset,
  26. Processing,
  27. PostProcess,
  28. PauseProcess,
  29. //Maintenance,
  30. //WaferMapping,
  31. //Cycling,
  32. TMCycle,
  33. SETMCycle,
  34. SERunning,
  35. ReturnWafer,
  36. SETransfer,
  37. SEReturnWafer
  38. }
  39. public enum EFEMSTATE
  40. {
  41. Unknown, // 0
  42. Homing, // 1
  43. Idle, // 2
  44. Error, // 3
  45. Picking, // 4
  46. Placing, // 5
  47. Aligning, // 6
  48. Mapping, // 7
  49. Init, // 8
  50. Orgshing, // 9
  51. Lifting, // 10
  52. InitingAL, // 11
  53. InitingRB, // 12
  54. Extending, // 13
  55. Retracting, // 14
  56. //SettingLamp, // 15
  57. Swapping,
  58. Gotoing,
  59. Gripping,
  60. Ungripping,
  61. Fliping,
  62. Initializing,
  63. Vacuuming,
  64. Retrying,
  65. ConfirmCompleting,
  66. ErrorPicking,
  67. ErrorPlacing,
  68. RobotCycleing
  69. }
  70. public enum PUFSTATE
  71. {
  72. Unknown, // 0
  73. Homing, // 1
  74. Idle, // 2
  75. Error,
  76. Init,
  77. SwitchOning,
  78. SwitchOffing,
  79. Calibrating,
  80. Picking,
  81. Placing,
  82. Positioning,
  83. GotoRobotPositionForPlace,
  84. GotoRobotPositionForPick,
  85. WaitForRobotPlacing,
  86. WaitForRobotPlace,
  87. WaitForSwaping,
  88. WaitForSwap,
  89. Swaping,
  90. AferSwapParkStation,
  91. WaitForRobotPicking,
  92. WaitForRobotPick,
  93. BackToPackStationing,
  94. Retrying,
  95. ConfirmCompleting,
  96. Fliping
  97. }
  98. public enum LOADERSTATE
  99. {
  100. Unknown, // 0
  101. Homing, // 1
  102. Idle, // 2
  103. Error,
  104. Init,
  105. Positioning,
  106. SwitchOning,
  107. SwitchOffing,
  108. Loading,
  109. Unloading,
  110. InstallCRSing,
  111. PrepreForPlacing,
  112. WaitForUnload,
  113. WaitForLoad,
  114. WaitForPick,
  115. Retrying,
  116. ConfirmCompleting,
  117. WaitForFlip
  118. }
  119. public enum TransporterState
  120. {
  121. Unknown,
  122. Init,
  123. Initialized,
  124. Homing,
  125. Idle,
  126. Error,
  127. ErrorGantryPositioning,
  128. GantryPositioning,
  129. Positioning,
  130. SwitchOning,
  131. SwitchOffing,
  132. PickUping,
  133. MovingTo,
  134. Placing,
  135. Parking,
  136. ElevatorUping,
  137. ElevatorLowing,
  138. Transfering,
  139. PickUpMoveToing,
  140. PickUpMoveToComplete,
  141. PickUpValidating,
  142. PickUpValidateComplete,
  143. ValidateMoveTo,
  144. ValidateMoveToComplete,
  145. GantrySafeMoving,
  146. Retrying,
  147. ConfirmCompleting
  148. }
  149. public enum SRDState
  150. {
  151. Unknown,
  152. Init,
  153. Initialized,
  154. Initializing,
  155. InitializeHoming,
  156. Homing,
  157. Idle,
  158. Error,
  159. SwitchOning,
  160. SwitchOffing,
  161. Positioning,
  162. Aborting,
  163. Abort,
  164. Rotating,
  165. Stopping,
  166. PresenceTesting,
  167. ProcessReciping,
  168. ProcessError,
  169. AWCCycling,
  170. AWCHoming,
  171. Retrying,
  172. ConfirmCompleting,
  173. Loading,
  174. Unloading
  175. }
  176. public enum PrewetState
  177. {
  178. Unknown,
  179. Error,
  180. Abort,
  181. Init,
  182. Initialized,
  183. Idle,
  184. Initializing,
  185. PrepareToTransfering,
  186. ReadyForPick,
  187. KeepWeting,
  188. Linmot_Scanning,
  189. ManualProcessing,
  190. CycleManualProcessing,
  191. RunReciping,
  192. Aborting,
  193. PreparingToPick,
  194. PreparingToPlace,
  195. WaitForPick,
  196. WaitForPlace,
  197. RunRecipeComplete,
  198. DelayKeepweting,
  199. DelayKeepwetComplete
  200. }
  201. public enum DryerState
  202. {
  203. Unknown,
  204. Disable,
  205. Abort,
  206. Error,
  207. Init,
  208. Initialized,
  209. Idle,
  210. Initializing,
  211. RunReciping,
  212. CycleManualProcessing,
  213. Retrying
  214. }
  215. public enum RinseState
  216. {
  217. Unknown,
  218. Disable,
  219. Error,
  220. Init,
  221. Initialized,
  222. Idle,
  223. Initializing,
  224. CycleManualProcessing,
  225. RunReciping,
  226. RunRecipeComplete,
  227. KeepWeting,
  228. KeepWetComplete,
  229. Retrying,
  230. Aborting,
  231. Abort,
  232. }
  233. public enum MetalState
  234. {
  235. Unknown,
  236. Disable,
  237. Error,
  238. Init,
  239. Initialized,
  240. Idle,
  241. Initializing,
  242. ShortTesting,
  243. RunReciping,
  244. CurrentShortTesting,
  245. WaitCloseFlow,
  246. WaitOpenFlow,
  247. WaitForRunRecipe,
  248. Abort
  249. }
  250. public enum DummyState
  251. {
  252. Unknown,
  253. Disable,
  254. Error,
  255. Init,
  256. Initializing,
  257. Initialized,
  258. Idle
  259. }
  260. public enum ReservoirState
  261. {
  262. Unknown,
  263. Disable,
  264. Error,
  265. Init,
  266. Initializing,
  267. Initialized,
  268. Idle,
  269. }
  270. }