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AXIS
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2ead753b04
update loader WaferGroup
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7 ヶ月 前 |
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BarcodeReader
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f7533a737b
Initialize
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9 ヶ月 前 |
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Dose
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31c26804e6
add Festo Communication Protocol
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9 ヶ月 前 |
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Dryer
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6497945cbe
Revise jobcreate and lottrack bugs;
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7 ヶ月 前 |
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EFEM
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2bf0be7542
update loader waferSize
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7 ヶ月 前 |
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Facilities
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dce33ff7d5
revise reservoir/metal
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8 ヶ月 前 |
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LinMot
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76a2644a3d
update scheduler issue
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7 ヶ月 前 |
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Loader
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2bf0be7542
update loader waferSize
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7 ヶ月 前 |
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Metal
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75e260a8c2
revise metal pump on bug,revise reservoir ui
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7 ヶ月 前 |
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PUF
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0f6f0fbadc
update efem pick and place wafer size
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8 ヶ月 前 |
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PowerSupplier
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f7533a737b
Initialize
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9 ヶ月 前 |
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Prewet
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6497945cbe
Revise jobcreate and lottrack bugs;
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7 ヶ月 前 |
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Reservoir
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ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
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7 ヶ月 前 |
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Resistivity
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f7533a737b
Initialize
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9 ヶ月 前 |
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Rinse
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6497945cbe
Revise jobcreate and lottrack bugs;
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7 ヶ月 前 |
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SRD
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8982c26465
update logManager and remove GalilControllerCfgManager simulator log
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7 ヶ月 前 |
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Safety
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0f6f0fbadc
update efem pick and place wafer size
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8 ヶ月 前 |
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SignalLight
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e2d5bb5c5d
update galil controller inputs
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8 ヶ月 前 |
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Temperature
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dce33ff7d5
revise reservoir/metal
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8 ヶ月 前 |
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TransPorter
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4e761b030f
update async scheduler
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7 ヶ月 前 |
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DataDefine.cs
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f7533a737b
Initialize
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9 ヶ月 前 |
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DeviceManager.cs
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ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
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7 ヶ月 前 |
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FinsPlc.cs
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f7533a737b
Initialize
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9 ヶ月 前 |
chenkui
8982c26465
update logManager and remove GalilControllerCfgManager simulator log