| .. |
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AXIS
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e246616627
Revise FwdLimit;
|
7 months ago |
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BarcodeReader
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f7533a737b
Initialize
|
9 months ago |
|
Dose
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31c26804e6
add Festo Communication Protocol
|
8 months ago |
|
Dryer
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31c26804e6
add Festo Communication Protocol
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8 months ago |
|
EFEM
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4648c5a74f
update efem crossed/double wafer
|
7 months ago |
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Facilities
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dce33ff7d5
revise reservoir/metal
|
7 months ago |
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LinMot
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f7533a737b
Initialize
|
9 months ago |
|
Loader
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57ec4c0d76
update transporter scheduler
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7 months ago |
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Metal
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dce33ff7d5
revise reservoir/metal
|
7 months ago |
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PUF
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0f6f0fbadc
update efem pick and place wafer size
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7 months ago |
|
PowerSupplier
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f7533a737b
Initialize
|
9 months ago |
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Prewet
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31c26804e6
add Festo Communication Protocol
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8 months ago |
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Reservoir
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8714d1f457
revise reservoir config
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7 months ago |
|
Resistivity
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f7533a737b
Initialize
|
9 months ago |
|
Rinse
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31c26804e6
add Festo Communication Protocol
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8 months ago |
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SRD
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69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
7 months ago |
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Safety
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0f6f0fbadc
update efem pick and place wafer size
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7 months ago |
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SignalLight
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e2d5bb5c5d
update galil controller inputs
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7 months ago |
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Temperature
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dce33ff7d5
revise reservoir/metal
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7 months ago |
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TransPorter
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2192df7ad3
Modify Transporter related routine and UI;
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7 months ago |
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DataDefine.cs
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f7533a737b
Initialize
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9 months ago |
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DeviceManager.cs
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00c6fabca5
update transporter
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7 months ago |
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FinsPlc.cs
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f7533a737b
Initialize
|
9 months ago |
chenzk
8714d1f457
revise reservoir config