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CyberX8
/
CyberX8_RT
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Config
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Devices
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WagoControllerCfg.xml

WagoControllerCfg.xml 27 KB
Историја Датотека

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <WagoControllerConfig>
    3. 

  3.   <WagoDeviceConfig Module="Loader" IpAddress="10.0.0.12" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1"> 
    4. 

  4. 	<Dig_In>
    5. 

  5. 		<DIGroup Name="N5">
    6. 

  6. 			<DI Name="r_Cassette_1_150" Address="0" Invert="false"/>
    7. 

  7. 			<DI Name="r_Cassette_1_100"  Address="1" Invert="false"/>
    8. 

  8. 			<DI Name="r_Cassette_1_200"  Address="2" Invert="false"/>
    9. 

  9. 			<DI Name="r_Cassette_2_150"  Address="3" Invert="false"/>
    10. 

  10. 			<DI Name="r_Cassette_2_100"  Address="4" Invert="false"/>
    11. 

  11. 			<DI Name="r_Cassette_2_200"  Address="5" Invert="false"/>
    12. 

  12. 			<DI Name="r_Cassette_3_150"  Address="6" Invert="false"/>
    13. 

  13. 			<DI Name="r_Cassette_3_100"  Address="7" Invert="false"/>
    14. 

  14. 			<DI Name="r_Cassette_3_200"  Address="8" Invert="false"/>
    15. 

  15. 			<DI Name="r_Dummy_1_150"  Address="9" Invert="false"/>
    16. 

  16. 			<DI Name="r_Dummy_1_100"  Address="10" Invert="false"/>
    17. 

  17. 			<DI Name="r_Dummy_1_200"  Address="11" Invert="false"/>
    18. 

  18. 			<DI Name="r_Dummy_2_150"  Address="12" Invert="false"/>
    19. 

  19. 			<DI Name="r_Dummy_2_100"  Address="13" Invert="false"/>
    20. 

  20. 			<DI Name="r_Dummy_2_200"  Address="14" Invert="false"/>
    21. 

  21. 			<DI Name="DI15"  Address="15" Invert="false"/>
    22. 

  22. 		</DIGroup>
    23. 

  23. 		<DIGroup Name="N6">
    24. 

  24. 			<DI Name="r_LoaderA_Wafer_Present"  Address="16" Invert="false"/>
    25. 

  25. 			<DI Name="r_LoaderB_Wafer_Present"  Address="17" Invert="false"/>
    26. 

  26. 			<DI Name="r_Cathode_Present"  Address="18" Invert="false"/>
    27. 

  27. 			<DI Name="DI19"  Address="19" Invert="false"/>
    28. 

  28. 			<DI Name="DI20"  Address="20" Invert="false"/>
    29. 

  29. 			<DI Name="DI21"  Address="21" Invert="false"/>
    30. 

  30. 			<DI Name="DI22"  Address="22" Invert="false"/>
    31. 

  31. 			<DI Name="DI23"  Address="23" Invert="false"/>
    32. 

  32. 			<DI Name="DI24"  Address="24" Invert="false"/>
    33. 

  33. 			<DI Name="DI25"  Address="25" Invert="false"/>
    34. 

  34. 			<DI Name="r_LOADERA_CRS_CURTAIN_1"  Address="26" Invert="false"/>
    35. 

  35. 			<DI Name="r_LOADERA_CRS_CURTAIN_2"  Address="27" Invert="false"/>
    36. 

  36. 			<DI Name="r_LOADERA_CRS_CURTAIN_3"  Address="28" Invert="false"/>
    37. 

  37. 			<DI Name="r_LOADERA_CRS_CURTAIN_4"  Address="29" Invert="false"/>
    38. 

  38. 			<DI Name="r_LOADERA_CRS_CURTAIN_5"  Address="30" Invert="false"/>
    39. 

  39. 			<DI Name="r_LOADERA_CRS_CURTAIN_6"  Address="31" Invert="false"/>
    40. 

  40. 		</DIGroup>
    41. 

  41. 	</Dig_In>
    42. 

  42. 	<Dig_Out>
    43. 

  43. 		<DOGroup Name="N7">
    44. 

  44. 			<DO Name="c_System_Alarm"  Address="512" Invert="false"/>
    45. 

  45. 			<DO Name="c_Pole_Red"  Address="513" Invert="false"/>
    46. 

  46. 			<DO Name="c_Pole_Amber"  Address="514" Invert="false"/>
    47. 

  47. 			<DO Name="c_Pole_Green"  Address="515" Invert="false"/>
    48. 

  48. 			<DO Name="c_Pole_Blue"  Address="516" Invert="false"/>
    49. 

  49. 			<DO Name="c_System_Alarm2"  Address="517" Invert="false"/>
    50. 

  50. 			<DO Name="c_VACUUM_TEST"  Address="518" Invert="false"/>
    51. 

  51. 			<DO Name="DO7"  Address="519" Invert="false"/>
    52. 

  52. 			<DO Name="DO8"  Address="520" Invert="false"/>
    53. 

  53. 			<DO Name="DO9"  Address="521" Invert="false"/>
    54. 

  54. 			<DO Name="DO10"  Address="522" Invert="false"/>
    55. 

  55. 			<DO Name="DO11"  Address="523" Invert="false"/>
    56. 

  56. 			<DO Name="DO12"  Address="524" Invert="false"/>
    57. 

  57. 			<DO Name="DO13"  Address="525" Invert="false"/>
    58. 

  58. 			<DO Name="DO14"  Address="526" Invert="false"/>
    59. 

  59. 			<DO Name="DO15"  Address="527" Invert="false"/>
    60. 

  60. 		</DOGroup>
    61. 

  61. 		<DOGroup Name="N9">
    62. 

  62. 			<DO Name="c_HVD_1_HIGH"  Address="528" Invert="false"/>
    63. 

  63. 			<DO Name="c_HVD_1_ENABLE"  Address="529" Invert="false"/>			
    64. 

  64. 		</DOGroup>
    65. 

  65. 		<DOGroup Name="N10">
    66. 

  66. 			<DO Name="c_HVD_2_HIGH"  Address="530" Invert="false"/>
    67. 

  67. 			<DO Name="c_HVD_2_ENABLE"  Address="531" Invert="false"/>			
    68. 

  68. 		</DOGroup>
    69. 

  69. 		<DOGroup Name="N11">
    70. 

  70. 			<DO Name="\c_Door_Unlock"  Address="532" Invert="false"/>
    71. 

  71. 			<DO Name="DO21"  Address="533" Invert="false"/>			
    72. 

  72. 		</DOGroup>
    73. 

  73. 		<DOGroup Name="N12">
    74. 

  74. 			<DO Name="c_CAMERA_1_TRIGGER"  Address="534" Invert="false"/>
    75. 

  75. 			<DO Name="c_CAMERA_2_TRIGGER"  Address="535" Invert="false"/>			
    76. 

  76. 		</DOGroup>	
    77. 

  77. 	</Dig_Out>
    78. 

  78. 	<Ano_In>
    79. 

  79. 		<AIGroup Name="N1">
    80. 

  80. 			<AI Name="AI1"  Address="0" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    81. 

  81. 			<AI Name="AI2"  Address="1" DataType="short"/>
    82. 

  82. 			<AI Name="r_HVD_1_ANALOG"  Address="2" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    83. 

  83. 			<AI Name="r_HVD_2_ANALOG"  Address="3" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    84. 

  84. 			<AI Name="r_LoaderA_LS_Vacuum_anlg"  Address="4" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    85. 

  85. 			<AI Name="r_LoaderB_LS_Vacuum_anlg"  Address="5" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    86. 

  86. 			<AI Name="AI6"  Address="6" DataType="short"/>
    87. 

  87. 			<AI Name="r_LOADER_GasFlowSensor_FLOW"  Address="7" Scaling="0=3370, 500=17000" DataType="short"/>
    88. 

  88. 		</AIGroup>
    89. 

  89. 		<AIGroup Name="N2">
    90. 

  90. 			<AI Name="r_LOADERA_BERNOULLI_PRESSURE"  Address="8" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    91. 

  91. 			<AI Name="r_LOADERB_BERNOULLI_PRESSURE"  Address="9" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    92. 

  92. 			<AI Name="r_LOADERA_CHUCK_BLADDER"  Address="10" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    93. 

  93. 			<AI Name="r_LOADERB_CHUCK_BLADDER"  Address="11" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    94. 

  94. 			<AI Name="r_LOADERA_WS_BLADDER_PRESSURE"  Address="12" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    95. 

  95. 			<AI Name="r_LOADERB_WS_BLADDER_PRESSURE"  Address="13" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    96. 

  96. 			<AI Name="r_SPUF_VAC"  Address="14" Scaling="1=0,5=-757.5" DataType="short"/>
    97. 

  97. 			<AI Name="r_LOADER_GasFlowSensor_VACUUM"  Address="15" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    98. 

  98. 		</AIGroup>
    99. 

  99. 	</Ano_In>
    100. 

  100. 	<Ano_Out>
    101. 

  101. 		<AOGroup Name="N3">
    102. 

  102. 			<AO Name="AO1"  Address="512" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    103. 

  103. 			<AO Name="AO2"  Address="513" DataType="short"/>
    104. 

  104. 			<AO Name="AO3"  Address="514" DataType="short"/>
    105. 

  105. 			<AO Name="AO4"  Address="515" DataType="short"/>
    106. 

  106. 			<AO Name="AO5"  Address="516" DataType="short"/>
    107. 

  107. 			<AO Name="AO6"  Address="517" DataType="short"/>
    108. 

  108. 			<AO Name="AO7"  Address="518" DataType="short"/>
    109. 

  109. 			<AO Name="AO8"  Address="519" DataType="short"/>
    110. 

  110. 		</AOGroup>
    111. 

  111. 		<AOGroup Name="N4">
    112. 

  112. 			<AO Name="AO9"  Address="520" DataType="short"/>
    113. 

  113. 			<AO Name="AO10"  Address="521" DataType="short"/>
    114. 

  114. 			<AO Name="AO11"  Address="522" DataType="short"/>
    115. 

  115. 			<AO Name="AO12"  Address="523" DataType="short"/>
    116. 

  116. 			<AO Name="AO13"  Address="524" DataType="short"/>
    117. 

  117. 			<AO Name="AO14"  Address="525" DataType="short"/>
    118. 

  118. 			<AO Name="AO15"  Address="526" DataType="short"/>
    119. 

  119. 			<AO Name="AO16"  Address="527" DataType="ushort"/>
    120. 

  120. 		</AOGroup>		
    121. 

  121. 	</Ano_Out>
    122. 

  122.   </WagoDeviceConfig>
    123. 

  123.    <WagoDeviceConfig Module="PUF" IpAddress="10.0.0.13" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1"> 
    124. 

  124. 	<Dig_In>
    125. 

  125. 		<DIGroup Name="N61">
    126. 

  126. 			<DI Name="r_PUF_A_CHUCK_OUT"  Address="0" Invert="false"/>
    127. 

  127. 			<DI Name="r_PUF_A_CHUCK_IN"  Address="1" Invert="false"/>
    128. 

  128. 			<DI Name="r_PUF_B_CHUCK_OUT"  Address="2" Invert="false"/>
    129. 

  129. 			<DI Name="r_PUF_B_CHUCK_IN"  Address="3" Invert="false"/>
    130. 

  130. 			<DI Name="DI4"  Address="4" Invert="false"/>
    131. 

  131. 			<DI Name="DI5"  Address="5" Invert="false"/>
    132. 

  132. 			<DI Name="DI6"  Address="6" Invert="false"/>
    133. 

  133. 			<DI Name="DI7"  Address="7" Invert="false"/>
    134. 

  134. 		</DIGroup>
    135. 

  135. 	</Dig_In>
    136. 

  136. 	<Dig_Out>
    137. 

  137. 		<DOGroup Name="N62">
    138. 

  138. 			<DO Name="c_PUF_CHUCK"  Address="512" Invert="false"/>
    139. 

  139. 			<DO Name="D01"  Address="513" Invert="false"/>
    140. 

  140. 			<DO Name="D02"  Address="514" Invert="false"/>
    141. 

  141. 			<DO Name="D03"  Address="515" Invert="false"/>
    142. 

  142. 			<DO Name="D04"  Address="516" Invert="false"/>
    143. 

  143. 			<DO Name="D05"  Address="517" Invert="false"/>
    144. 

  144. 			<DO Name="D06"  Address="518" Invert="false"/>
    145. 

  145. 			<DO Name="D07"  Address="519" Invert="false"/>
    146. 

  146. 		</DOGroup>
    147. 

  147. 	</Dig_Out>
    148. 

  148. 	<Ano_In>
    149. 

  149. 		<AIGroup Name="N60">
    150. 

  150. 			<AI Name="r_DPUF_A_CHUCK_A_VAC"  Address="0" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    151. 

  151. 			<AI Name="r_DPUF_A_CHUCK_B_VAC"  Address="1" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
    152. 

  152. 			<AI Name="r_DPUF_A_CHUCK_A_WFER_SNS_1"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
    153. 

  153. 			<AI Name="r_DPUF_A_CHUCK_A_WFER_SNS_2"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
    154. 

  154. 		</AIGroup>
    155. 

  155. 	</Ano_In>
    156. 

  156. 	<Ano_Out>
    157. 

  157. 	</Ano_Out>
    158. 

  158. </WagoDeviceConfig>
    159. 

  159. 	<WagoDeviceConfig Module="Wago2" IpAddress="10.0.0.10" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
    160. 

  160. 		<Dig_In>
    161. 

  161. 			<DIGroup Name="20">
    162. 

  162. 				<DI Name="DI0"  Address="0" Invert="false"/>
    163. 

  163. 				<DI Name="DI1"  Address="1" Invert="false"/>
    164. 

  164. 				<DI Name="DI2"  Address="2" Invert="false"/>
    165. 

  165. 				<DI Name="DI3"  Address="3" Invert="false"/>
    166. 

  166. 				<DI Name="DI4"  Address="4" Invert="false"/>
    167. 

  167. 				<DI Name="DI5"  Address="5" Invert="false"/>
    168. 

  168. 				<DI Name="DI6"  Address="6" Invert="false"/>
    169. 

  169. 				<DI Name="DI7"  Address="7" Invert="false"/>
    170. 

  170. 				<DI Name="DI8"  Address="8" Invert="false"/>
    171. 

  171. 				<DI Name="DI9"  Address="9" Invert="false"/>
    172. 

  172. 				<DI Name="DI10"  Address="10" Invert="false"/>
    173. 

  173. 				<DI Name="DI11"  Address="11" Invert="false"/>
    174. 

  174. 				<DI Name="DI12"  Address="12" Invert="false"/>
    175. 

  175. 				<DI Name="DI13"  Address="13" Invert="false"/>
    176. 

  176. 				<DI Name="DI14"  Address="14" Invert="false"/>
    177. 

  177. 				<DI Name="DI15"  Address="15" Invert="false"/>
    178. 

  178. 			</DIGroup>
    179. 

  179. 			<DIGroup Name="21">
    180. 

  180. 				<DI Name="DI16"  Address="16" Invert="false"/>
    181. 

  181. 				<DI Name="DI17"  Address="17" Invert="false"/>
    182. 

  182. 				<DI Name="DI18"  Address="18" Invert="false"/>
    183. 

  183. 				<DI Name="DI19"  Address="19" Invert="false"/>
    184. 

  184. 				<DI Name="DI20"  Address="20" Invert="false"/>
    185. 

  185. 				<DI Name="DI21"  Address="21" Invert="false"/>
    186. 

  186. 				<DI Name="r_CONTAINMENT_FLUID"  Address="22" Invert="true"/>
    187. 

  187. 				<DI Name="r_DOOR_INLK_OK"  Address="23" Invert="false"/>
    188. 

  188. 				<DI Name="DI24"  Address="24" Invert="false"/>
    189. 

  189. 				<DI Name="DI25"  Address="25" Invert="false"/>
    190. 

  190. 				<DI Name="DI26"  Address="26" Invert="false"/>
    191. 

  191. 				<DI Name="DI27"  Address="27" Invert="false"/>
    192. 

  192. 				<DI Name="r_REAR_DOOR_INTLK"  Address="28" Invert="false"/>
    193. 

  193. 				<DI Name="r_SAMPLE_SYS_FLUID_PRESENT"  Address="29" Invert="false"/>
    194. 

  194. 				<DI Name="DI28"  Address="30" Invert="false"/>
    195. 

  195. 				<DI Name="DI29"  Address="31" Invert="false"/>
    196. 

  196. 			</DIGroup>
    197. 

  197. 			<DIGroup Name="22">
    198. 

  198. 				<DI Name="r_RES1_HIGH_LEVEL"  Address="32" Invert="false"/>
    199. 

  199. 				<DI Name="r_RES1_LOW_LEVEL"  Address="33" Invert="true"/>
    200. 

  200. 				<DI Name="r_RES2_HIGH_LEVEL"  Address="34" Invert="false"/>
    201. 

  201. 				<DI Name="r_RES2_LOW_LEVEL"  Address="35" Invert="true"/>
    202. 

  202. 				<DI Name="r_RES3_HIGH_LEVEL"  Address="36" Invert="false"/>
    203. 

  203. 				<DI Name="r_RES3_LOW_LEVEL"  Address="37" Invert="true"/>
    204. 

  204. 				<DI Name="r_RES4_HIGH_LEVEL"  Address="38" Invert="false"/>
    205. 

  205. 				<DI Name="r_RES4_LOW_LEVEL"  Address="39" Invert="true"/>
    206. 

  206. 				<DI Name="DI38"  Address="40" Invert="false"/>
    207. 

  207. 				<DI Name="DI39"  Address="41" Invert="false"/>
    208. 

  208. 				<DI Name="DI40"  Address="42" Invert="false"/>
    209. 

  209. 				<DI Name="DI41"  Address="43" Invert="false"/>
    210. 

  210. 				<DI Name="DI42"  Address="44" Invert="false"/>
    211. 

  211. 				<DI Name="DI43"  Address="45" Invert="false"/>
    212. 

  212. 				<DI Name="DI44"  Address="46" Invert="false"/>
    213. 

  213. 				<DI Name="DI45"  Address="47" Invert="false"/>
    214. 

  214. 			</DIGroup>
    215. 

  215. 			<DIGroup Name="30">
    216. 

  216. 				<DI Name="DI46"  Address="48" Invert="false"/>
    217. 

  217. 				<DI Name="DI47"  Address="49" Invert="false"/>
    218. 

  218. 			</DIGroup>
    219. 

  219. 		</Dig_In>
    220. 

  220. 		<Dig_Out>
    221. 

  221. 			<DOGroup Name="23">
    222. 

  222. 				<DO Name="c_CDA_ENABLE"  Address="512" Invert="false"/>
    223. 

  223. 				<DO Name="c_DI_MAIN_ENABLE"  Address="513" Invert="false"/>
    224. 

  224. 				<DO Name="c_DI_FILL_ENABLE"  Address="514" Invert="false"/>
    225. 

  225. 				<DO Name="c_DI_REPLEN_ENABLE"  Address="515" Invert="false"/>
    226. 

  226. 				<DO Name="c_EXTERNAL_CDA_ENABLE"  Address="516" Invert="false"/>
    227. 

  227. 				<DO Name="c_HCW_ENABLE"  Address="517" Invert="false"/>
    228. 

  228. 				<DO Name="DO6"  Address="518" Invert="false"/>
    229. 

  229. 				<DO Name="c_N2_ENABLE"  Address="519" Invert="false"/>
    230. 

  230. 				<DO Name="c_QDRD1_LO_PRESSURE"  Address="520" Invert="false"/>
    231. 

  231. 				<DO Name="c_QDRD2_LO_PRESSURE"  Address="521" Invert="false"/>
    232. 

  232. 				<DO Name="c_QDRD3_LO_PRESSURE"  Address="522" Invert="false"/>
    233. 

  233. 				<DO Name="c_QDRD4_LO_PRESSURE"  Address="523" Invert="false"/>
    234. 

  234. 				<DO Name="DO12"  Address="524" Invert="false"/>
    235. 

  235. 				<DO Name="DO13"  Address="525" Invert="false"/>
    236. 

  236. 				<DO Name="DO14"  Address="526" Invert="false"/>
    237. 

  237. 				<DO Name="DO15"  Address="527" Invert="false"/>
    238. 

  238. 			</DOGroup>
    239. 

  239. 			<DOGroup Name="24">
    240. 

  240. 				<DO Name="DO16"  Address="528" Invert="false"/>
    241. 

  241. 				<DO Name="DO17"  Address="529" Invert="false"/>
    242. 

  242. 				<DO Name="DO18"  Address="530" Invert="false"/>
    243. 

  243. 				<DO Name="DO19"  Address="531" Invert="false"/>
    244. 

  244. 				<DO Name="DO20"  Address="532" Invert="false"/>
    245. 

  245. 				<DO Name="DO21"  Address="533" Invert="false"/>
    246. 

  246. 				<DO Name="DO22"  Address="534" Invert="false"/>
    247. 

  247. 				<DO Name="DO23"  Address="535" Invert="false"/>
    248. 

  248. 				<DO Name="DO24"  Address="536" Invert="false"/>
    249. 

  249. 				<DO Name="DO25"  Address="537" Invert="false"/>
    250. 

  250. 				<DO Name="DO26"  Address="538" Invert="false"/>
    251. 

  251. 				<DO Name="DO27"  Address="539" Invert="false"/>
    252. 

  252. 				<DO Name="DO28"  Address="540" Invert="false"/>
    253. 

  253. 				<DO Name="DO29"  Address="541" Invert="false"/>
    254. 

  254. 				<DO Name="DO30"  Address="542" Invert="false"/>
    255. 

  255. 				<DO Name="DO31"  Address="543" Invert="false"/>
    256. 

  256. 			</DOGroup>
    257. 

  257. 			<DOGroup Name="25">
    258. 

  258. 				<DO Name="c_METAL2_PUMP_ON"  Address="544" Invert="false"/>
    259. 

  259. 				<DO Name="DO33"  Address="545" Invert="false"/>
    260. 

  260. 			</DOGroup>
    261. 

  261. 			<DOGroup Name="26">
    262. 

  262. 				<DO Name="c_METAL3_PUMP_ON"  Address="546" Invert="false"/>
    263. 

  263. 				<DO Name="c_HED2_POWER_ON"  Address="547" Invert="false"/>
    264. 

  264. 			</DOGroup>
    265. 

  265. 			<DOGroup Name="27">
    266. 

  266. 				<DO Name="c_HED4_POWER_ON"  Address="548" Invert="false"/>
    267. 

  267. 				<DO Name="DO37"  Address="549" Invert="false"/>
    268. 

  268. 			</DOGroup>
    269. 

  269. 			<DOGroup Name="28">
    270. 

  270. 				<DO Name="c_METAL4_PUMP_ON"  Address="550" Invert="false"/>
    271. 

  271. 				<DO Name="DO39"  Address="551" Invert="false"/>
    272. 

  272. 			</DOGroup>
    273. 

  273. 			<DOGroup Name="29">
    274. 

  274. 				<DO Name="c_RES1_POWER_ON"  Address="552" Invert="false"/>
    275. 

  275. 				<DO Name="DO41"  Address="553" Invert="false"/>
    276. 

  276. 			</DOGroup>
    277. 

  277. 		</Dig_Out>
    278. 

  278. 		<Ano_In>
    279. 

  279. 			<AIGroup Name="1">
    280. 

  280. 				<AI Name="r_pH3"  Address="0" Scaling="0=0,14=32767" DataType="short"/>
    281. 

  281. 				<AI Name="AI1"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    282. 

  282. 				<AI Name="AI2"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
    283. 

  283. 				<AI Name="AI3"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
    284. 

  284. 			</AIGroup>
    285. 

  285. 			<AIGroup Name="2">
    286. 

  286. 				<AI Name="AI4"  Address="4" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    287. 

  287. 				<AI Name="AI5"  Address="5" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    288. 

  288. 				<AI Name="r_PREWET_DI_PRESS"  Address="6" Scaling="0=3276.7,100=32767" DataType="short"/>
    289. 

  289. 				<AI Name="AI7"  Address="7" Scaling="13=0,150=32767" DataType="short"/>
    290. 

  290. 			</AIGroup>
    291. 

  291. 			<AIGroup Name="3">
    292. 

  292. 				<AI Name="AI8"  Address="8" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    293. 

  293. 				<AI Name="r_SYSTEM_EXHAUST"  Address="9" Scaling="0=0, 2=32767" DataType="short"/>
    294. 

  294. 				<AI Name="r_PREWET_FLOW"  Address="10" Scaling="0=3276.7,40=32767" DataType="short"/>
    295. 

  295. 				<AI Name="r_DI_WATER_PRESSURE"  Address="11" Scaling="0=0, 100=32767" DataType="short"/>
    296. 

  296. 			</AIGroup>
    297. 

  297. 			<AIGroup Name="4">
    298. 

  298. 				<AI Name="r_PUMP1_FLOW"  Address="12" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    299. 

  299. 				<AI Name="AI13"  Address="13" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    300. 

  300. 				<AI Name="r_PUMP2_FLOW"  Address="14" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    301. 

  301. 				<AI Name="AI15"  Address="15" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    302. 

  302. 			</AIGroup>
    303. 

  303. 			<AIGroup Name="5">
    304. 

  304. 				<AI Name="r_PUMP3_FLOW"  Address="16" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    305. 

  305. 				<AI Name="AI17"  Address="17" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    306. 

  306. 				<AI Name="r_PUMP4_FLOW"  Address="18" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    307. 

  307. 				<AI Name="AI19"  Address="19" Scaling="0=3276.7,40=16383.5" DataType="short"/>
    308. 

  308. 			</AIGroup>
    309. 

  309. 			<AIGroup Name="6">
    310. 

  310. 				<AI Name="AI20"  Address="20" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    311. 

  311. 				<AI Name="AI21"  Address="21" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    312. 

  312. 				<AI Name="AI22"  Address="22" Scaling="13=0,150=32767" DataType="short"/>
    313. 

  313. 				<AI Name="AI23"  Address="23" Scaling="13=0,150=32767" DataType="short"/>
    314. 

  314. 			</AIGroup>
    315. 

  315. 			<AIGroup Name="7">
    316. 

  316. 				<AI Name="AI24"  Address="24" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    317. 

  317. 				<AI Name="AI25"  Address="25" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    318. 

  318. 				<AI Name="AI26"  Address="26" Scaling="13=0,150=32767" DataType="short"/>
    319. 

  319. 				<AI Name="r_MBS3_FLOW"  Address="27" Scaling="0=0,20=32767" DataType="short"/>
    320. 

  320. 			</AIGroup>
    321. 

  321. 			<AIGroup Name="8">
    322. 

  322. 				<AI Name="r_QDRD1_WATER_LEVEL"  Address="28" Scaling="0=0,100=32767" DataType="short"/>
    323. 

  323. 				<AI Name="r_QDRD2_WATER_LEVEL"  Address="29" Scaling="0=0,100=32767" DataType="short"/>
    324. 

  324. 				<AI Name="r_QDRD3_WATER_LEVEL"  Address="30" Scaling="0=0,100=32767" DataType="short"/>
    325. 

  325. 				<AI Name="r_QDRD4_WATER_LEVEL"  Address="31" Scaling="0=0,100=32767" DataType="short"/>
    326. 

  326. 			</AIGroup>
    327. 

  327. 			<AIGroup Name="9">
    328. 

  328. 				<AI Name="AI32"  Address="32" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    329. 

  329. 				<AI Name="AI33"  Address="33" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    330. 

  330. 				<AI Name="AI34"  Address="34" Scaling="13=0,150=32767" DataType="short"/>
    331. 

  331. 				<AI Name="AI35"  Address="35" Scaling="13=0,150=32767" DataType="short"/>
    332. 

  332. 			</AIGroup>
    333. 

  333. 			<AIGroup Name="10">
    334. 

  334. 				<AI Name="r_RES1_LEVEL_raw"  Address="36" Scaling="0=0,100=32767" DataType="short"/>
    335. 

  335. 				<AI Name="r_RES2_LEVEL_raw"  Address="37" Scaling="0=0,100=32767" DataType="short"/>
    336. 

  336. 				<AI Name="r_RES3_LEVEL_raw"  Address="38" Scaling="0=0,100=32767" DataType="short"/>
    337. 

  337. 				<AI Name="r_RES4_LEVEL_raw"  Address="39" Scaling="0=0,100=32767" DataType="short"/>
    338. 

  338. 			</AIGroup>
    339. 

  339. 			<AIGroup Name="11">
    340. 

  340. 				<AI Name="AI40"  Address="40" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    341. 

  341. 				<AI Name="AI41"  Address="41" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
    342. 

  342. 				<AI Name="AI42"  Address="42" Scaling="13=0,150=32767" DataType="short"/>
    343. 

  343. 				<AI Name="r_HCW_FLOW"  Address="43" Scaling="0=0, 40=32767" DataType="short"/>
    344. 

  344. 			</AIGroup>
    345. 

  345. 			<AIGroup Name="12">
    346. 

  346. 				<AI Name="r_CDA_EXTERNAL_PRESSURE"  Address="44" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    347. 

  347. 				<AI Name="r_CDA_HIGH_PRESSURE"  Address="45" Scaling="0=3276.7, 145=16383.5" DataType="short"/>
    348. 

  348. 				<AI Name="r_CDA_LOW_PRESSURE"  Address="46" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    349. 

  349. 				<AI Name="AI47"  Address="47" Scaling="13=0,150=32767" DataType="short"/>
    350. 

  350. 			</AIGroup>
    351. 

  351. 			<AIGroup Name="13">
    352. 

  352. 				<AI Name="AI48"  Address="48" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    353. 

  353. 				<AI Name="r_N2_1B_PRESSURE"  Address="49" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    354. 

  354. 				<AI Name="r_N2_1A_PRESSURE"  Address="50" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    355. 

  355. 				<AI Name="r_N2_2B_PRESSURE"  Address="51" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    356. 

  356. 			</AIGroup>
    357. 

  357. 			<AIGroup Name="14">
    358. 

  358. 				<AI Name="r_N2_2A_PRESSURE"  Address="52" Scaling="0=3276.7,145=16383.5" DataType="short"/>
    359. 

  359. 				<AI Name="r_N2_BLANKET_PRESSURE"  Address="53" Scaling="-14.5=3276.7, 14.5=16383.5" DataType="short"/>
    360. 

  360. 				<AI Name="r_SYSTEM_VACUUM"  Address="54" Scaling="-750=3276.7, 750=16383.5" DataType="short"/>
    361. 

  361. 				<AI Name="AI55"  Address="55" Scaling="13=0,150=32767" DataType="short"/>
    362. 

  362. 			</AIGroup>
    363. 

  363. 		</Ano_In>
    364. 

  364. 		<Ano_Out>
    365. 

  365. 			<AOGroup Name="15">
    366. 

  366. 				<AO Name="AO1"  Address="512" DataType="short"/>
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  367. 				<AO Name="AO2"  Address="513" DataType="short"/>
    368. 

  368. 				<AO Name="AO3"  Address="514" DataType="short"/>
    369. 

  369. 				<AO Name="AO4"  Address="515" DataType="short"/>
    370. 

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    371. 

  371. 			<AOGroup Name="16">
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  373. 				<AO Name="AO6"  Address="517" DataType="short"/>
    374. 

  374. 				<AO Name="AO7"  Address="518" DataType="short"/>
    375. 

  375. 				<AO Name="AO8"  Address="519" DataType="short"/>
    376. 

  376. 			</AOGroup>
    377. 

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  379. 				<AO Name="AO10"  Address="517" DataType="short"/>
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  380. 				<AO Name="AO11"  Address="518" DataType="short"/>
    381. 

  381. 				<AO Name="AO8"  Address="519" DataType="short"/>
    382. 

  382. 			</AOGroup>
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  384. 				<AO Name="AO12"  Address="516" DataType="short"/>
    385. 

  385. 				<AO Name="AO13"  Address="517" DataType="short"/>
    386. 

  386. 				<AO Name="AO14"  Address="518" DataType="short"/>
    387. 

  387. 				<AO Name="AO15"  Address="519" DataType="short"/>
    388. 

  388. 			</AOGroup>
    389. 

  389. 			<AOGroup Name="19">
    390. 

  390. 				<AO Name="AO16"  Address="516" DataType="short"/>
    391. 

  391. 				<AO Name="AO17"  Address="517" DataType="short"/>
    392. 

  392. 				<AO Name="AO18"  Address="518" DataType="short"/>
    393. 

  393. 				<AO Name="AO19"  Address="519" DataType="short"/>
    394. 

  394. 			</AOGroup>
    395. 

  395. 		</Ano_Out>
    396. 

  396. 	</WagoDeviceConfig>
    397. 

  397. 	<WagoDeviceConfig Module="Wago3" IpAddress="10.0.0.15" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
    398. 

  398. 		<Dig_In>
    399. 

  399. 			<DIGroup Name="3">
    400. 

  400. 				<DI Name="r_SRD_FLUID_LEVEL"  Address="0" Invert="true"/>
    401. 

  401. 				<DI Name="r_SRD1_CHUCK_VAC_OK"  Address="1" Invert="false"/>
    402. 

  402. 				<DI Name="r_SRD1_WAFER_PRESENT"  Address="2" Invert="false"/>
    403. 

  403. 				<DI Name="r_SRD1_LIFT_UP"  Address="3" Invert="true"/>
    404. 

  404. 				<DI Name="DI4"  Address="4" Invert="false"/>
    405. 

  405. 				<DI Name="r_SRD1_SHUTTER_OPEN"  Address="5" Invert="false"/>
    406. 

  406. 				<DI Name="r_SRD1_SHUTTER_CLOSED"  Address="6" Invert="false"/>
    407. 

  407. 				<DI Name="r_SRD1_150_FLIPPER1_OUT"  Address="7" Invert="false"/>
    408. 

  408. 			</DIGroup>
    409. 

  409. 			<DIGroup Name="4">
    410. 

  410. 				<DI Name="r_SRD1_150_FLIPPER2_OUT"  Address="8" Invert="false"/>
    411. 

  411. 				<DI Name="r_SRD1_150_FLIPPER3_OUT" Address="9" Invert="false"/>
    412. 

  412. 				<DI Name="r_SRD1_200_FLIPPER1_OUT"  Address="10" Invert="false"/>
    413. 

  413. 				<DI Name="r_SRD1_200_FLIPPER2_OUT"  Address="11" Invert="false"/>
    414. 

  414. 				<DI Name="r_SRD1_200_FLIPPER3_OUT"  Address="12" Invert="false"/>
    415. 

  415. 				<DI Name="DI13"  Address="13" Invert="false"/>
    416. 

  416. 				<DI Name="r_CONTAINMENT_FLUID"  Address="14" Invert="true"/>
    417. 

  417. 				<DI Name="r_DOOR_INLK_OK"  Address="15" Invert="false"/>
    418. 

  418. 			</DIGroup>
    419. 

  419. 			<DIGroup Name="5">
    420. 

  420. 				<DI Name="r_SRD2_CHUCK_VAC_OK"  Address="16" Invert="false"/>
    421. 

  421. 				<DI Name="r_SRD2_WAFER_PRESENT"  Address="17" Invert="false"/>
    422. 

  422. 				<DI Name="r_SRD2_LIFT_UP"  Address="18" Invert="true"/>
    423. 

  423. 				<DI Name="DI19"  Address="19" Invert="true"/>
    424. 

  424. 				<DI Name="r_SRD2_SHUTTER_OPEN"  Address="20" Invert="false"/>
    425. 

  425. 				<DI Name="r_SRD2_SHUTTER_CLOSED"  Address="21" Invert="false"/>
    426. 

  426. 				<DI Name="r_SRD2_150_FLIPPER1_OUT"  Address="22" Invert="false"/>
    427. 

  427. 				<DI Name="r_SRD2_150_FLIPPER2_OUT"  Address="23" Invert="false"/>
    428. 

  428. 			</DIGroup>
    429. 

  429. 			<DIGroup Name="6">
    430. 

  430. 				<DI Name="r_SRD2_150_FLIPPER3_OUT"  Address="24" Invert="false"/>
    431. 

  431. 				<DI Name="r_SRD2_200_FLIPPER1_OUT"  Address="25" Invert="false"/>
    432. 

  432. 				<DI Name="r_SRD2_200_FLIPPER2_OUT"  Address="26" Invert="false"/>
    433. 

  433. 				<DI Name="r_SRD2_200_FLIPPER3_OUT"  Address="27" Invert="false"/>
    434. 

  434. 				<DI Name="DI28"  Address="28" Invert="false"/>
    435. 

  435. 				<DI Name="DI29"  Address="29" Invert="false"/>
    436. 

  436. 				<DI Name="DI30"  Address="30" Invert="false"/>
    437. 

  437. 				<DI Name="DI31"  Address="31" Invert="false"/>
    438. 

  438. 			</DIGroup>
    439. 

  439. 		</Dig_In>
    440. 

  440. 		<Dig_Out>
    441. 

  441. 			<DOGroup Name="7">
    442. 

  442. 				<DO Name="c_SRD1_LIFT_UP"  Address="512" Invert="false"/>
    443. 

  443. 				<DO Name="c_SRD1_150_FLIPPERS_IN"  Address="513" Invert="false"/>
    444. 

  444. 				<DO Name="c_SRD1_200_FLIPPERS_IN"  Address="514" Invert="false"/>
    445. 

  445. 				<DO Name="c_SRD1_Shutter_Close"  Address="515" Invert="false"/>
    446. 

  446. 				<DO Name="c_SRD1_WATER_ON"  Address="516" Invert="false"/>
    447. 

  447. 				<DO Name="c_SRD1_CHUCK_VACUUM"  Address="517" Invert="true"/>
    448. 

  448. 				<DO Name="c_SRD1_N2_FLOW_ON" Address="518" Invert="false"/>
    449. 

  449. 				<DO Name="c_SRD1_CHUCK_ATM_ON"  Address="519" Invert="false"/>
    450. 

  450. 			</DOGroup>
    451. 

  451. 			<DOGroup Name="8">
    452. 

  452. 				<DO Name="c_SRD2_LIFT_UP"  Address="520" Invert="false"/>
    453. 

  453. 				<DO Name="c_SRD2_150_FLIPPERS_IN"  Address="521" Invert="false"/>
    454. 

  454. 				<DO Name="c_SRD2_200_FLIPPERS_IN"  Address="522" Invert="false"/>
    455. 

  455. 				<DO Name="c_SRD2_Shutter_Close"  Address="523" Invert="false"/>
    456. 

  456. 				<DO Name="c_SRD2_WATER_ON"  Address="524" Invert="false"/>
    457. 

  457. 				<DO Name="c_SRD2_CHUCK_VACUUM"  Address="525" Invert="true"/>
    458. 

  458. 				<DO Name="c_SRD2_N2_FLOW_ON"  Address="526" Invert="false"/>
    459. 

  459. 				<DO Name="c_SRD2_CHUCK_ATM_ON"  Address="527" Invert="false"/>
    460. 

  460. 			</DOGroup>
    461. 

  461. 			<DOGroup Name="9">
    462. 

  462. 				<DO Name="DO16"  Address="528" Invert="false"/>
    463. 

  463. 				<DO Name="DO17"  Address="529" Invert="false"/>
    464. 

  464. 				<DO Name="DO18"  Address="530" Invert="false"/>
    465. 

  465. 				<DO Name="DO19"  Address="531" Invert="false"/>
    466. 

  466. 				<DO Name="DO20"  Address="532" Invert="false"/>
    467. 

  467. 				<DO Name="DO21"  Address="533" Invert="false"/>
    468. 

  468. 				<DO Name="DO22"  Address="534" Invert="false"/>
    469. 

  469. 				<DO Name="DO23"  Address="535" Invert="false"/>
    470. 

  470. 			</DOGroup>
    471. 

  471. 			<DOGroup Name="10">
    472. 

  472. 				<DO Name="DO25"  Address="537" Invert="false"/>
    473. 

  473. 				<DO Name="DO25"  Address="537" Invert="false"/>
    474. 

  474. 			</DOGroup>
    475. 

  475. 		</Dig_Out>
    476. 

  476. 		<Ano_In>
    477. 

  477. 			<AIGroup Name="1">
    478. 

  478. 				<AI Name="r_SRD1_CHUCK_VACUUM_anlg"  Address="0" Scaling="-757.5=3276.7,757.5=16383.5" DataType="short"/>
    479. 

  479. 				<AI Name="r_SRD2_CHUCK_VACUUM_anlg"  Address="1" Scaling="-757.5=3276.7,757.5=16383.5" DataType="short"/>
    480. 

  480. 				<AI Name="AI2"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
    481. 

  481. 				<AI Name="AI3"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
    482. 

  482. 			</AIGroup>
    483. 

  483. 			<AIGroup Name="2">
    484. 

  484. 				<AI Name="r_SRD1_WATER_FLOW"  Address="4" Scaling="0=3276.7,2.5=32767" DataType="short"/>
    485. 

  485. 				<AI Name="r_SRD2_WATER_FLOW"  Address="5" Scaling="0=3276.7,2.5=32767" DataType="short"/>
    486. 

  486. 				<AI Name="r_SRD_SUPPLY_WATER_PRESS"  Address="6" Scaling="0=3276.7,50=32767" DataType="short"/>
    487. 

  487. 				<AI Name="AI7"  Address="7" Scaling="13=0,150=32767" DataType="short"/>
    488. 

  488. 			</AIGroup>
    489. 

  489. 		</Ano_In>
    490. 

  490. 

  491. 		<Ano_Out>
    492. 

  492. 		</Ano_Out>
    493. 

  493. 	</WagoDeviceConfig>
    494. 

  494. 	<WagoDeviceConfig Module="Wago4" IpAddress="10.0.0.31" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
    495. 

  495. 		<Dig_In>
    496. 

  496. 			<DIGroup Name="3">
    497. 

  497. 				<DI Name="r_RESERVOIR1_PUMP_ON"  Address="0" Invert="false"/>
    498. 

  498. 				<DI Name="DI1"  Address="1" Invert="false"/>
    499. 

  499. 				<DI Name="DI2"  Address="2" Invert="false"/>
    500. 

  500. 				<DI Name="DI3"  Address="3" Invert="false"/>
    501. 

  501. 				<DI Name="DI4"  Address="4" Invert="false"/>
    502. 

  502. 				<DI Name="DI5"  Address="5" Invert="false"/>
    503. 

  503. 				<DI Name="DI6"  Address="6" Invert="false"/>
    504. 

  504. 				<DI Name="DI7"  Address="7" Invert="false"/>
    505. 

  505. 			</DIGroup>
    506. 

  506. 		</Dig_In>
    507. 

  507. 		<Dig_Out>
    508. 

  508. 			<DOGroup Name="7">
    509. 

  509. 				<DO Name="c_RESERVOIR1_PUMP_ON"  Address="512" Invert="false"/>
    510. 

  510. 				<DO Name="DO2"  Address="513" Invert="false"/>
    511. 

  511. 				<DO Name="DO3"  Address="514" Invert="false"/>
    512. 

  512. 				<DO Name="DO4"  Address="515" Invert="false"/>
    513. 

  513. 				<DO Name="DO5"  Address="516" Invert="false"/>
    514. 

  514. 				<DO Name="DO6"  Address="517" Invert="false"/>
    515. 

  515. 				<DO Name="DO7" Address="518" Invert="false"/>
    516. 

  516. 				<DO Name="DO8"  Address="519" Invert="false"/>
    517. 

  517. 			</DOGroup>
    518. 

  518. 		</Dig_Out>
    519. 

  519. 		<Ano_Out>
    520. 

  520. 			<AOGroup Name="1">
    521. 

  521. 				<AO Name="c_RESERVOIR1_PUMP_ON_SPEED"  Address="512" Scaling="0=0,10000=32767" DataType="short"/>
    522. 

  522. 				<AO Name="AO2"  Address="513" DataType="short"/>
    523. 

  523. 				<AO Name="AO3"  Address="514" DataType="short"/>
    524. 

  524. 				<AO Name="AO4"  Address="515" DataType="short"/>
    525. 

  525. 			</AOGroup>
    526. 

  526. 		</Ano_Out>
    527. 

  527. 	<Ano_In>
    528. 

  528. 	</Ano_In>
    529. 

  529. 	</WagoDeviceConfig>
    530. 

  530. </WagoControllerConfig>
    531.