MetalEntity.cs 74 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. using CyberX8_RT.Modules.EFEM;
  27. using static Mono.Security.X509.X520;
  28. namespace CyberX8_RT.Modules.Metal
  29. {
  30. public class MetalEntity : Entity, IEntity, IModuleEntity
  31. {
  32. #region 常量
  33. private const string STRATUS = "Stratus";
  34. private const string AUTO = "Auto";
  35. private const string MANUAL = "Manual";
  36. private const string DISABLED = "Disabled";
  37. private const string ENGINEERING = "Engineering";
  38. private const string PRODUCTION = "Production";
  39. #endregion
  40. #region 内部变量
  41. /// <summary>
  42. /// 已经完成的Cycle次数
  43. /// </summary>
  44. private int _achievedCycle = 0;
  45. /// <summary>
  46. /// Metal项
  47. /// </summary>
  48. private MetalItem _metalItem;
  49. /// <summary>
  50. /// 持久化对象
  51. /// </summary>
  52. private MetalPersistentValue _persistentValue;
  53. /// <summary>
  54. /// c&m Initialize routine
  55. /// </summary>
  56. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  57. /// <summary>
  58. /// C&M Runrecipe routine
  59. /// </summary>
  60. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  61. /// <summary>
  62. /// S&H Initialize Routine
  63. /// </summary>
  64. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  65. /// <summary>
  66. /// S&H RunRecipe Routine
  67. /// </summary>
  68. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  69. /// <summary>
  70. /// Current short test routine
  71. /// </summary>
  72. private CurrentShortTestRoutine _currentShortTestRoutine;
  73. /// <summary>
  74. /// 当前Recipe
  75. /// </summary>
  76. private DepRecipe _currentRecipe = null;
  77. /// <summary>
  78. /// recipe时间
  79. /// </summary>
  80. private int _recipeTime;
  81. /// <summary>
  82. /// 循环次数
  83. /// </summary>
  84. private int _cycle = 0;
  85. /// <summary>
  86. /// 运行Recipe面
  87. /// </summary>
  88. private string _recipeSide = "";
  89. /// <summary>
  90. /// 当前RunRecipe Routine
  91. /// </summary>
  92. private RoutineBase _currentRunRecipeRoutine;
  93. /// <summary>
  94. /// Runrecipe已经运行的时间
  95. /// </summary>
  96. private int _runrecipeElapsedTime = 0;
  97. /// <summary>
  98. /// run recipe start time
  99. /// </summary>
  100. private DateTime _runRecipeStartTime;
  101. /// <summary>
  102. /// run recipe complete time
  103. /// </summary>
  104. private DateTime _runRecipeCompleteTime;
  105. /// <summary>
  106. /// 所在reservoir
  107. /// </summary>
  108. private StandardHotReservoirDevice _reservoirDevice;
  109. /// <summary>
  110. /// 所在reservoir名字
  111. /// </summary>
  112. private string _reservoirName;
  113. /// <summary>
  114. /// 当前完成recipe次数
  115. /// </summary>
  116. private int _currentCycleTimes;
  117. /// <summary>
  118. /// 当前recipe是否完成
  119. /// </summary>
  120. private bool _isCurrentReceipeComplete;
  121. /// <summary>
  122. /// 当前wafershuttle开始浸泡时间
  123. /// </summary>
  124. private DateTime _currentWaferShuttleStartSoakTime;
  125. /// <summary>
  126. /// Wafershuttle最大浸泡时间
  127. /// </summary>
  128. private int _waferShuttleSoakMaxTime;
  129. #endregion
  130. #region 属性
  131. /// <summary>
  132. /// 模块名称
  133. /// </summary>
  134. public ModuleName Module { get; private set; }
  135. /// <summary>
  136. /// 初始化状态
  137. /// </summary>
  138. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  139. /// <summary>
  140. /// 空闲状态
  141. /// </summary>
  142. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  143. /// <summary>
  144. /// 是否发生错误
  145. /// </summary>
  146. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  147. /// <summary>
  148. /// 是否正在作业
  149. /// </summary>
  150. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  151. /// <summary>
  152. /// 是否初始化完成
  153. /// </summary>
  154. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  155. /// <summary>
  156. /// 是否禁用
  157. /// </summary>
  158. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  159. /// <summary>
  160. /// 自动模式
  161. /// </summary>
  162. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  163. /// <summary>
  164. /// 自动模式
  165. /// </summary>
  166. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  167. /// <summary>
  168. /// 是否为工程模式
  169. /// </summary>
  170. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  171. /// <summary>
  172. /// 是否为产品模式
  173. /// </summary>
  174. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  175. /// <summary>
  176. /// WaferHolder信息
  177. /// </summary>
  178. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  179. /// <summary>
  180. /// 已完成的RunRecipeCycle次数
  181. /// </summary>
  182. public int AchievedCycle { get { return _achievedCycle; } }
  183. /// <summary>
  184. /// 当前状态机状态
  185. /// </summary>
  186. public int State { get { return fsm.State; } }
  187. /// <summary>
  188. /// 当前Metal设置的WaferSize
  189. /// </summary>
  190. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  191. /// <summary>
  192. /// recipe时长
  193. /// </summary>
  194. public int RecipeTime { get { return _recipeTime; } }
  195. /// <summary>
  196. /// 剩余时间
  197. /// </summary>
  198. public override int TimeToReady
  199. {
  200. get
  201. {
  202. if (IsIdle)
  203. {
  204. return 0;
  205. }
  206. switch (fsm.State)
  207. {
  208. case (int)MetalState.RunReciping:
  209. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  210. default:
  211. return 0;
  212. }
  213. }
  214. }
  215. /// <summary>
  216. /// 用量
  217. /// </summary>
  218. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  219. #endregion
  220. /// <summary>
  221. /// 构造函数
  222. /// </summary>
  223. /// <param name="moduleName"></param>
  224. public MetalEntity(ModuleName moduleName)
  225. {
  226. this.Module = moduleName;
  227. WaferManager.Instance.SubscribeLocation(Module, 2);
  228. InitialFsm();
  229. }
  230. /// <summary>
  231. /// 初始化
  232. /// </summary>
  233. /// <returns></returns>
  234. protected override bool Init()
  235. {
  236. InitializeDATA();
  237. InitializeParameter();
  238. InitializeRoutine();
  239. InitializeOperation();
  240. return true;
  241. }
  242. /// <summary>
  243. /// 初始化参数
  244. /// </summary>
  245. private void InitializeParameter()
  246. {
  247. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  248. if (_persistentValue == null)
  249. {
  250. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  251. }
  252. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  253. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  254. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  255. _isCurrentReceipeComplete = false;
  256. _waferShuttleSoakMaxTime = SC.GetValue<int>($"Metal.WaferShuttleSoakMaxTime");
  257. }
  258. /// <summary>
  259. /// 初始化Routine
  260. /// </summary>
  261. private void InitializeRoutine()
  262. {
  263. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  264. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  265. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  266. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  267. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  268. }
  269. /// <summary>
  270. /// 初始化操作
  271. /// </summary>
  272. private void InitializeOperation()
  273. {
  274. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  275. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  276. {
  277. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  278. if (recipe == null)
  279. {
  280. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  281. return false;
  282. }
  283. object[] objects = new object[args.Length];
  284. objects[0] = recipe;
  285. for (int i = 1; i < args.Length; i++)
  286. {
  287. objects[i] = args[i];
  288. }
  289. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  290. });
  291. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  292. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  293. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  294. }
  295. /// <summary>
  296. /// EnterInit
  297. /// </summary>
  298. public void EnterInit()
  299. {
  300. if ((MetalState)fsm.State != MetalState.Idle) return;
  301. else
  302. {
  303. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  304. }
  305. }
  306. /// 初始化状态机
  307. /// </summary>
  308. private void InitialFsm()
  309. {
  310. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  311. fsm.EnableRepeatedMsg(true);
  312. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  313. //Initialize
  314. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  315. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  316. //直接进入Idle
  317. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  318. //RunRecipe
  319. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  320. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  321. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  322. Transition(MetalState.Idle, FSM_MSG.TIMER, MetalCompleteSoakTimeMonitor, MetalState.Idle);
  323. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  324. //Current Short Test
  325. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  326. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  327. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  328. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  329. //Enter Init
  330. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  331. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  332. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  333. }
  334. /// <summary>
  335. /// 初始化DATA
  336. /// </summary>
  337. private void InitializeDATA()
  338. {
  339. InitializeSVID();
  340. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  341. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.SubordinateReservoirName", () => _reservoirName, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. }
  352. /// <summary>
  353. /// 初始化SVID
  354. /// </summary>
  355. private void InitializeSVID()
  356. {
  357. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  363. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  364. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  374. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  375. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  377. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  378. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  379. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  380. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  381. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  382. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  383. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  384. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  385. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  386. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  387. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  388. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  389. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  390. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  391. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  392. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  393. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  394. }
  395. /// Metal完成recipe后监控wafershuttle浸泡时间
  396. /// </summary>
  397. /// <param name="param"></param>
  398. /// <returns></returns>
  399. private bool MetalCompleteSoakTimeMonitor(object[] param)
  400. {
  401. if (WaferHolderInfo != null)
  402. {
  403. double sockSeconds = (DateTime.Now - _currentWaferShuttleStartSoakTime).TotalSeconds;
  404. if (_isCurrentReceipeComplete && sockSeconds > _waferShuttleSoakMaxTime * 60)
  405. {
  406. if (!AlarmListManager.Instance.IsContainDataWarn(Module.ToString(), "MetalSockTime"))
  407. {
  408. AlarmListManager.Instance.AddWarn(Module.ToString(),
  409. $"MetalSockTime", $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  410. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  411. }
  412. }
  413. }
  414. else
  415. {
  416. _isCurrentReceipeComplete = false; //wafershuttle拿走后重置当前recipe是否完成变量
  417. }
  418. return true;
  419. }
  420. /// <summary>
  421. /// 进入错误状态
  422. /// </summary>
  423. /// <param name="args"></param>
  424. /// <returns></returns>
  425. private bool EnterError(object[] args)
  426. {
  427. if (State == (int)MetalState.RunReciping)
  428. {
  429. if (_metalItem.SubType == STRATUS)
  430. {
  431. _standardHotRunRecipeRoutine.Abort();
  432. }
  433. else
  434. {
  435. _compactEmbranceRunRecipeRoutine.Abort();
  436. }
  437. }
  438. return true;
  439. }
  440. /// <summary>
  441. /// UpdateMetalUsageAction
  442. /// </summary>
  443. /// <param name="cmd"></param>
  444. /// <param name="param"></param>
  445. /// <returns></returns>
  446. private bool UpdateMetalUsageAction(string cmd, object[] args)
  447. {
  448. if (args.Length > 2)
  449. {
  450. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  451. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  452. }
  453. return true;
  454. }
  455. #region Initialize All
  456. /// <summary>
  457. /// 初始化
  458. /// </summary>
  459. /// <param name="param"></param>
  460. /// <returns></returns>
  461. private bool InitializeAll(object[] param)
  462. {
  463. if (fsm.State == (int)MetalState.Initializing)
  464. {
  465. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  466. return false;
  467. }
  468. if (!CheckReservoirInitialized())
  469. {
  470. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  471. return false;
  472. }
  473. if (!MetalUsageMointor(Module.ToString()))
  474. {
  475. return false;
  476. }
  477. if ("Auto".Equals(_persistentValue.OperatingMode))
  478. {
  479. if (!CheckReservoirIsAuto())
  480. {
  481. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  482. return false;
  483. }
  484. }
  485. if (_metalItem.SubType == STRATUS)
  486. {
  487. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  488. }
  489. else
  490. {
  491. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  492. }
  493. }
  494. /// <summary>
  495. /// 检验Reservoir是否Initialized
  496. /// </summary>
  497. /// <returns></returns>
  498. private bool CheckReservoirInitialized()
  499. {
  500. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  501. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  502. if (reservoirEntity != null)
  503. {
  504. return reservoirEntity.IsInitialized;
  505. }
  506. return false;
  507. }
  508. /// <summary>
  509. /// 检验Reservoir是否Auto
  510. /// </summary>
  511. /// <returns></returns>
  512. private bool CheckReservoirIsAuto()
  513. {
  514. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  515. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  516. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  517. {
  518. return true;
  519. }
  520. return false;
  521. }
  522. /// <summary>
  523. /// 初始化监控
  524. /// </summary>
  525. /// <param name="param"></param>
  526. /// <returns></returns>
  527. private bool InitializeAllMonitor(object[] param)
  528. {
  529. RState rsstate = RState.Running;
  530. if (_metalItem.SubType == STRATUS)
  531. {
  532. rsstate = _standardHotInitializeRoutine.Monitor();
  533. }
  534. else
  535. {
  536. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  537. }
  538. if (rsstate == RState.End)
  539. {
  540. return true;
  541. }
  542. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  543. {
  544. PostMsg(MetalMsg.Error);
  545. return false;
  546. }
  547. return false;
  548. }
  549. #endregion
  550. #region RunRecipe
  551. /// <summary>
  552. /// Run Recipe
  553. /// </summary>
  554. /// <param name="param"></param>
  555. /// <returns></returns>
  556. private bool RunRecipe(object[] param)
  557. {
  558. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  559. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  560. if (_metalItem.SubType == STRATUS)
  561. {
  562. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  563. resDevice.ReservoirUsageMonitor();
  564. }
  565. DepRecipe recipe = param[0] as DepRecipe;
  566. _recipeSide = param[1].ToString();
  567. _cycle = (int)param[2];
  568. _runrecipeElapsedTime = 0;
  569. bool result = false;
  570. if (_metalItem.SubType == STRATUS)
  571. {
  572. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  573. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
  574. }
  575. else
  576. {
  577. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  578. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
  579. }
  580. if (result)
  581. {
  582. if (WaferHolderInfo != null)
  583. {
  584. WaferHolderInfo.MetalModuleName = Module;
  585. }
  586. _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
  587. _currentRecipe = recipe;
  588. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  589. {
  590. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  591. }
  592. _runRecipeStartTime = DateTime.Now;
  593. if (WaferHolderInfo != null && _currentRecipe != null)
  594. {
  595. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  596. }
  597. }
  598. return result;
  599. }
  600. /// <summary>
  601. /// RunRecipe监控
  602. /// </summary>
  603. /// <param name="param"></param>
  604. /// <returns></returns>
  605. private bool RunRecipeMonitor(object[] param)
  606. {
  607. RState rsstate = RState.Running;
  608. if (_metalItem.SubType == STRATUS)
  609. {
  610. rsstate = _standardHotRunRecipeRoutine.Monitor();
  611. if (rsstate == RState.Running)
  612. {
  613. StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  614. if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
  615. {
  616. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  617. rsstate = RState.Failed;
  618. }
  619. }
  620. _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
  621. }
  622. else
  623. {
  624. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  625. if (rsstate == RState.Running)
  626. {
  627. CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  628. if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
  629. {
  630. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  631. rsstate = RState.Failed;
  632. }
  633. if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
  634. {
  635. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
  636. rsstate = RState.Failed;
  637. }
  638. if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
  639. {
  640. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
  641. rsstate = RState.Failed;
  642. }
  643. }
  644. }
  645. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  646. {
  647. _runrecipeElapsedTime = TimeToReady;
  648. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  649. }
  650. if (rsstate == RState.End)
  651. {
  652. _recipeTime = 0;
  653. if (WaferHolderInfo != null)
  654. {
  655. double anodeAUsage = GetAnodeAUsage();
  656. double anodeBUsage = GetAnodeBUsage();
  657. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  658. MetalUsageMointor(); //检查PMCounter消耗
  659. //CMM Usage
  660. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  661. if (_metalItem.SubType == STRATUS)
  662. {
  663. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  664. resDevice.ReservoirUsageMonitor();
  665. resDevice.SetExportCMMUsage();
  666. }
  667. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  668. _isCurrentReceipeComplete = true;
  669. _currentWaferShuttleStartSoakTime = DateTime.Now;
  670. }
  671. _runrecipeElapsedTime = 0;
  672. //记录LotTrack
  673. _runRecipeCompleteTime = DateTime.Now;
  674. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  675. if (_metalItem.SubType == STRATUS)
  676. {
  677. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  678. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  679. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  680. }
  681. else
  682. {
  683. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  684. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  685. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  686. }
  687. if (WaferHolderInfo != null && _currentRecipe != null)
  688. {
  689. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  690. }
  691. return true;
  692. }
  693. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  694. {
  695. _recipeTime = 0;
  696. if (WaferHolderInfo != null)
  697. {
  698. double anodeAUsage = GetAnodeAUsage();
  699. double anodeBUsage = GetAnodeBUsage();
  700. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  701. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  702. //CMMUsage
  703. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  704. if (_metalItem.SubType == STRATUS)
  705. {
  706. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  707. resDevice.ReservoirUsageMonitor();
  708. resDevice.SetExportCMMUsage();
  709. }
  710. }
  711. _runrecipeElapsedTime = 0;
  712. if (WaferHolderInfo != null && _currentRecipe != null)
  713. {
  714. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  715. }
  716. PostMsg(MetalMsg.Error);
  717. //记录LotTrack
  718. _runRecipeCompleteTime = DateTime.Now;
  719. if (_metalItem.SubType == STRATUS)
  720. {
  721. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  722. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  723. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  724. }
  725. else
  726. {
  727. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  728. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  729. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  730. }
  731. if (WaferHolderInfo != null && _currentRecipe != null)
  732. {
  733. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  734. }
  735. return false;
  736. }
  737. return false;
  738. }
  739. /// <summary>
  740. /// 监控 PM Counter Metal用量
  741. /// </summary>
  742. private void MetalUsageMointor()
  743. {
  744. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  745. if (metalUsage != null)
  746. {
  747. //TotalAUsage
  748. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  749. {
  750. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  751. {
  752. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  753. PostMsg(MetalMsg.Error);
  754. AlarmListManager.Instance.AddDataError(Module.ToString(),
  755. $"{Module.ToString()}.metalUsage.TotalUsage",
  756. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  757. }
  758. else
  759. {
  760. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  761. AlarmListManager.Instance.AddWarn(Module.ToString(),
  762. $"{Module.ToString()}.metalUsage.TotalUsage",
  763. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  764. }
  765. }
  766. //AnodeAUsage
  767. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  768. {
  769. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  770. {
  771. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  772. PostMsg(MetalMsg.Error);
  773. AlarmListManager.Instance.AddDataError(Module.ToString(),
  774. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  775. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  776. }
  777. else
  778. {
  779. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  780. AlarmListManager.Instance.AddWarn(Module.ToString(),
  781. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  782. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  783. }
  784. }
  785. //AnodeBUsage
  786. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  787. {
  788. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  789. {
  790. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  791. PostMsg(MetalMsg.Error);
  792. AlarmListManager.Instance.AddDataError(Module.ToString(),
  793. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  794. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  795. }
  796. else
  797. {
  798. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  799. AlarmListManager.Instance.AddWarn(Module.ToString(),
  800. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  801. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  802. }
  803. }
  804. //MembraneAUsage
  805. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  806. {
  807. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  808. {
  809. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  810. PostMsg(MetalMsg.Error);
  811. AlarmListManager.Instance.AddDataError(Module.ToString(),
  812. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  813. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  814. }
  815. else
  816. {
  817. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  818. AlarmListManager.Instance.AddWarn(Module.ToString(),
  819. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  820. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  821. }
  822. }
  823. //MembraneBUsage
  824. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  825. {
  826. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  827. {
  828. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  829. PostMsg(MetalMsg.Error);
  830. AlarmListManager.Instance.AddDataError(Module.ToString(),
  831. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  832. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  833. }
  834. else
  835. {
  836. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  837. AlarmListManager.Instance.AddWarn(Module.ToString(),
  838. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  839. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  840. }
  841. }
  842. //TotalWafer
  843. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  844. {
  845. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  846. {
  847. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  848. PostMsg(MetalMsg.Error);
  849. AlarmListManager.Instance.AddDataError(Module.ToString(),
  850. $"{Module.ToString()}.metalUsage.TotalWafers",
  851. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  852. }
  853. else
  854. {
  855. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  856. AlarmListManager.Instance.AddWarn(Module.ToString(),
  857. $"{Module.ToString()}.metalUsage.TotalWafers",
  858. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  859. }
  860. }
  861. //AnodeAWafer
  862. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  863. {
  864. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  865. {
  866. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  867. PostMsg(MetalMsg.Error);
  868. AlarmListManager.Instance.AddDataError(Module.ToString(),
  869. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  870. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  871. }
  872. else
  873. {
  874. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  875. AlarmListManager.Instance.AddWarn(Module.ToString(),
  876. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  877. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  878. }
  879. }
  880. //AnodeBWafer
  881. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  882. {
  883. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  884. {
  885. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  886. PostMsg(MetalMsg.Error);
  887. AlarmListManager.Instance.AddDataError(Module.ToString(),
  888. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  889. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  890. }
  891. else
  892. {
  893. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  894. AlarmListManager.Instance.AddWarn(Module.ToString(),
  895. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  896. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  897. }
  898. }
  899. //AnodeAbathUsage
  900. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  901. {
  902. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  903. {
  904. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  905. PostMsg(MetalMsg.Error);
  906. AlarmListManager.Instance.AddDataError(Module.ToString(),
  907. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  908. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  909. }
  910. else
  911. {
  912. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  913. AlarmListManager.Instance.AddWarn(Module.ToString(),
  914. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  915. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  916. }
  917. }
  918. //AnodeBbathUsage
  919. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  920. {
  921. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  922. {
  923. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  924. PostMsg(MetalMsg.Error);
  925. AlarmListManager.Instance.AddDataError(Module.ToString(),
  926. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  927. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  928. }
  929. else
  930. {
  931. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  932. AlarmListManager.Instance.AddWarn(Module.ToString(),
  933. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  934. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  935. }
  936. }
  937. }
  938. }
  939. /// <summary>
  940. /// 获取A面使用的电量
  941. /// </summary>
  942. /// <returns></returns>
  943. private double GetAnodeAUsage()
  944. {
  945. if (_metalItem.SubType == STRATUS)
  946. {
  947. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  948. }
  949. else
  950. {
  951. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  952. }
  953. }
  954. /// <summary>
  955. /// 获取B面使用的电量
  956. /// </summary>
  957. /// <returns></returns>
  958. private double GetAnodeBUsage()
  959. {
  960. if (_metalItem.SubType == STRATUS)
  961. {
  962. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  963. }
  964. else
  965. {
  966. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  967. }
  968. }
  969. /// <summary>
  970. /// Abort Recipe
  971. /// </summary>
  972. /// <param name="param"></param>
  973. /// <returns></returns>
  974. public bool AbortRecipe(object[] param)
  975. {
  976. _runRecipeCompleteTime = DateTime.Now;
  977. if (_metalItem.SubType == STRATUS)
  978. {
  979. _standardHotRunRecipeRoutine.Abort();
  980. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  981. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  982. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  983. }
  984. else
  985. {
  986. _compactEmbranceRunRecipeRoutine.Abort();
  987. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  988. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  989. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  990. }
  991. return true;
  992. }
  993. #endregion
  994. #region Current Short Test
  995. /// <summary>
  996. /// Current Short Test
  997. /// </summary>
  998. /// <param name="param"></param>
  999. /// <returns></returns>
  1000. private bool CurrentShortTest(object[] param)
  1001. {
  1002. return _currentShortTestRoutine.Start() == RState.Running;
  1003. }
  1004. /// <summary>
  1005. /// Current Short test监控
  1006. /// </summary>
  1007. /// <param name="param"></param>
  1008. /// <returns></returns>
  1009. private bool CurrentShortTestMonitor(object[] param)
  1010. {
  1011. RState rsstate = _currentShortTestRoutine.Monitor();
  1012. if (rsstate == RState.End)
  1013. {
  1014. return true;
  1015. }
  1016. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  1017. {
  1018. PostMsg(MetalMsg.Error);
  1019. return false;
  1020. }
  1021. return false;
  1022. }
  1023. #endregion
  1024. #region Close Flow Valve
  1025. /// <summary>
  1026. /// 关闭Flow Valve
  1027. /// </summary>
  1028. /// <param name="param"></param>
  1029. /// <returns></returns>
  1030. private bool CloseFlowValve(object[] param)
  1031. {
  1032. if (_metalItem.SubType == STRATUS)
  1033. {
  1034. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1035. if (device != null)
  1036. {
  1037. return device.SwitchToBypass("", null);
  1038. }
  1039. return false;
  1040. }
  1041. else
  1042. {
  1043. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1044. if (device != null)
  1045. {
  1046. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1047. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1048. if (reservoirDevice != null)
  1049. {
  1050. bool result = reservoirDevice.CAByPassOn("", null);
  1051. if (result)
  1052. {
  1053. return device.CellFlowValveOff("", null);
  1054. }
  1055. }
  1056. }
  1057. return false;
  1058. }
  1059. }
  1060. #endregion
  1061. #region Open Flow Valve
  1062. /// <summary>
  1063. /// 打开Flow Valve
  1064. /// </summary>
  1065. /// <param name="param"></param>
  1066. /// <returns></returns>
  1067. private bool OpenFlowValve(object[] param)
  1068. {
  1069. if (_metalItem.SubType == STRATUS)
  1070. {
  1071. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1072. if (device != null)
  1073. {
  1074. bool result = device.SwitchToFlow("", null);
  1075. if (result)
  1076. {
  1077. return device.OpenPump("", null);
  1078. }
  1079. }
  1080. return false;
  1081. }
  1082. else
  1083. {
  1084. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1085. if (device != null)
  1086. {
  1087. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1088. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1089. if (reservoirDevice != null)
  1090. {
  1091. bool result = reservoirDevice.CAByPassOff("", null);
  1092. if (result)
  1093. {
  1094. return device.CellFlowValveOn("", null);
  1095. }
  1096. }
  1097. }
  1098. return false;
  1099. }
  1100. }
  1101. #endregion
  1102. public bool Check(int msg, out string reason, params object[] args)
  1103. {
  1104. reason = "";
  1105. return true;
  1106. }
  1107. public bool CheckAcked(int msg)
  1108. {
  1109. return true;
  1110. }
  1111. public int Invoke(string function, params object[] args)
  1112. {
  1113. switch (function)
  1114. {
  1115. case "HomeAll":
  1116. if (IsIdle)
  1117. {
  1118. return (int)FSM_MSG.NONE;
  1119. }
  1120. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1121. {
  1122. return (int)MetalMsg.Initialize;
  1123. }
  1124. else
  1125. {
  1126. return (int)FSM_MSG.NONE;
  1127. }
  1128. }
  1129. return (int)FSM_MSG.NONE;
  1130. }
  1131. /// <summary>
  1132. /// 监控 PM Counter Metal用量
  1133. /// </summary>
  1134. private bool MetalUsageMointor(string Module)
  1135. {
  1136. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module);
  1137. if (metalUsage != null)
  1138. {
  1139. //TotalAUsage
  1140. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  1141. {
  1142. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  1143. {
  1144. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  1145. return false;
  1146. }
  1147. else
  1148. {
  1149. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  1150. }
  1151. }
  1152. //AnodeAUsage
  1153. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  1154. {
  1155. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  1156. {
  1157. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  1158. return false;
  1159. }
  1160. else
  1161. {
  1162. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  1163. }
  1164. }
  1165. //AnodeBUsage
  1166. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  1167. {
  1168. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  1169. {
  1170. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  1171. return false;
  1172. }
  1173. else
  1174. {
  1175. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  1176. }
  1177. }
  1178. //MembraneAUsage
  1179. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  1180. {
  1181. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  1182. {
  1183. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  1184. return false;
  1185. }
  1186. else
  1187. {
  1188. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  1189. }
  1190. }
  1191. //MembraneBUsage
  1192. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  1193. {
  1194. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  1195. {
  1196. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  1197. }
  1198. else
  1199. {
  1200. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  1201. }
  1202. }
  1203. //TotalWafer
  1204. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  1205. {
  1206. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  1207. {
  1208. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  1209. return false;
  1210. }
  1211. else
  1212. {
  1213. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  1214. }
  1215. }
  1216. //AnodeAWafer
  1217. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  1218. {
  1219. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  1220. {
  1221. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  1222. return false;
  1223. }
  1224. else
  1225. {
  1226. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  1227. }
  1228. }
  1229. //AnodeBWafer
  1230. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  1231. {
  1232. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  1233. {
  1234. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  1235. return false;
  1236. }
  1237. else
  1238. {
  1239. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  1240. }
  1241. }
  1242. //AnodeAbathUsage
  1243. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  1244. {
  1245. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  1246. {
  1247. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  1248. return false;
  1249. }
  1250. else
  1251. {
  1252. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  1253. }
  1254. }
  1255. //AnodeBbathUsage
  1256. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  1257. {
  1258. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  1259. {
  1260. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  1261. return false;
  1262. }
  1263. else
  1264. {
  1265. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  1266. }
  1267. }
  1268. }
  1269. return true;
  1270. }
  1271. }
  1272. public enum MetalMsg
  1273. {
  1274. NONE,
  1275. Error,
  1276. ResumeError,
  1277. Initialize,
  1278. Manual,
  1279. Auto,
  1280. CurrentShortTest,
  1281. CloseFlowValve,
  1282. OpenFlowValve,
  1283. RunRecipe,
  1284. Abort,
  1285. Init
  1286. }
  1287. }